Celerity UNIT 8160 User Manual
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Celerity UNIT 8160 User Manual

Analog and digital mass flow controllers and meters
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Unit Instruments UFC-8100
High Flow Mass Flow Controller
A l l t r a d e m a r k s , b r a n d n a m e s , a n d b r a n d s a p p e a r i n g h e r e i n a r e t h e p r o p e r t y o f t h e i r r e s p e c t i v e o w n e r s .
• C r i t i c a l a n d e x p e d i t e d s e r v i c e s
• I n s t o c k / R e a d y - t o - s h i p
Artisan Scientific Corporation dba Artisan Technology Group is not an affiliate, representative, or authorized distributor for any manufacturer listed herein.
$
350
.00
In Stock
Qty Available: 1
Used and in Excellent Condition
Buy Today!
https://www.artisantg.com/98414-2
• We b u y y o u r e x c e s s , u n d e r u t i l i z e d , a n d i d l e e q u i p me n t
• F u l l - s e r v i c e , i n d e p e n d e n t r e p a i r c e n t e r

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  • Page 1 Unit Instruments UFC-8100 High Flow Mass Flow Controller In Stock Qty Available: 1 Used and in Excellent Condition Buy Today! https://www.artisantg.com/98414-2 A l l t r a d e m a r k s , b r a n d n a m e s , a n d b r a n d s a p p e a r i n g h e r e i n a r e t h e p r o p e r t y o f t h e i r r e s p e c t i v e o w n e r s . •...
  • Page 2 Analog and Digital Mass Flow Controllers and Meters User’s Manual ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 3: Table Of Contents

    7.5 Connecting to gas supply line ............6 ©2005 Celerity, Inc.
  • Page 4 13.5 Technical Support ............14 ©2005 Celerity, Inc.
  • Page 5 16.7 Auto-Zero Feature (for Analog Mass Flow Controllers)........28 ©2005 Celerity, Inc.

  • Page 6: Overview

    1. OVERVIEW Celerity Mass Flow Controllers precisely monitor and control the mass flow of gases in processes such as Plasma Etching, CVD, Diffusion, EPI, and Sputtering where superior accuracy is required. Mass Flow Meters are identical to mass flow controllers, except that they do not have a controlling valve.

  • Page 7: Standard Features

    Users of digital MFCs can select the Response Time to be 0-20 seconds using the MultiFlo Virtual Interface. (Refer to the Details section of the MultiFlo Virtual Interface User’s Manual.) ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 8: Connector Options

    Connections”. This includes detailed information and pinouts. Special Adapters Retrofitting of the models of most competitors is accomplished using special electronic and mechanical adapters. Contact Celerity’s Applications Engineering department for help with your particular requirement. Valve Options The valve is configured at the time of manufacture to be Normally Closed or Normally Open, and is not user modifiable.

  • Page 9: Fittings Options

    Not all fittings are available for all gases and ranges. Fitting options will vary according to the MFC model. 4. POWER SUPPLIES Celerity manufactures a series of analog and digital power supplies. These are capable of monitoring and/or controlling from 1 to 5 mass flow controllers or meters simultaneously. Call Celerity Customer Service for further information.

  • Page 10: Traceability

    Traceability If you wish to replace an MFC, call Celerity with the serial number of the MFC you wish to replace. Celerity will determine the part number for the equivalent MFC with the same options. 7. INSTALLATION Unpacking Verify that the controller was not damaged in shipment. Notify the shipper immediately if you find a problem.

  • Page 11: Mounting The Controller

    Horizontal-On-Side Horizontal-Or-Vertical Figure 1. Mounting Attitudes. Two Configurations: HOS and HOV In order to provide optimum performance, Celerity calibrates all Mass Flow Controllers and Mass Flow Meters to the position specified at the time of the order. Mounting the Controller Use two #8-32 screws to mount the controller.

  • Page 12: Connections To A Power Supply

    Appendice 16.1, depending on connector type. Celerity power supplies use a cable that has a 20 pin female header type connector at one end and a 20 pin card edge (MFC) type at the other.

  • Page 13: Operation And Performance Checks

    10.4 Purge There are two recommended purging processes, one for non-reactive gases and one for reactive gases. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 14: Non-Reactive Gases

    Note: For remote readouts, including analog-to-digital converters, ensure that the readouts match the inputs to the controller. Adjust their zero and full-scale to match. For more information on setting the MFC/MFM Zero, please refer to Appendice 16.2. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05...

  • Page 15: Full Flow Check

    - 4-6 seconds, 6-10 seconds, 10-15 seconds, 20-30 seconds or 40-60 seconds 4.If the unit does not meet the response specifications contact Celerity for assistance. 10.8 Calibration Check Calibration is checked by flowing gas through a calibration reference upstream from the mass flow controller or meter.

  • Page 16: Troubleshooting

    - Compare recent valve voltage to past valve voltage. If it has changed and the other parameters have not then a failure is likely. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 17: Removal

    This documentation can facilitate future contamination analysis. If a product is being returned to Celerity it must include your company name, contact, Contaminination Disclosure Form, and RMA #. Call Unit for an RMA # prior to shipping.

  • Page 18: Shipping Costs

    13. MAINTENANCE 13.1 Emergency Service In addition to a fast turnaround time for regular service and repairs, Celerity can, in most cases, provide an advance replacement unit for EMERGENCY PRODUCTION DOWN situations. In this way, your production can get back on-line while your original unit is repaired.

  • Page 19: Technical Support

    Two years Table 3. Warranties If units are judged to be out of warranty, Celerity will notify the owner of replacement or repair costs before proceeding. Factory service and repairs include a ninety-day warranty on all parts and labor. Normal turnaround time is five working days, or less, on any standard range item returned for warranty service.

  • Page 20: Appendices

    Signal Common Signal Common Setpoint (0-5 VDC) Signal Common Signal Common -15 VDC 15 PIN D CONNECTOR 9 PIN D CONNECTOR ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 21 Output (0-5 VDC) +15 VDC Power Common -15 VDC Setpoint (0-5 VDC) Signal Common Signal Common VTP -15 – 0 VDC ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 22 9 PIN "D" PROFIBUS CONNECTOR (UDP9) Protective Ground Reserved for Power Recv/Transmit-Data-P Control-P Data Gnd. Voltage Plus Reserved for Power Recv/Transmit-Data-N Control-N ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 23: Setting The Mfc/Mfm Zero

    5 to 10 minutes. Alternatively, evacuate the MFC using a vacuum pump then run process gas long enough to full the MFC and gas line. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05...
  • Page 24 Following the above zeroing procedure should eliminate the most often overlooked sources of zero adjustment error. If you have any questions regarding the adjustment of MFC zero or any technical questions, please call the Celerity Applications Engineering Department at (714) 921-2640 or visit our website at www.celerity.net.

  • Page 25: 9000 Series Supplement

    1. Install new gaskets compatible with the gas to be used. 2. Tighten nut finger tight. 3. Tighten in accordance with the fitting manufacturers specifications. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 26 NOTE: The Model 9865 DeviceNet versions use a mini 5 pin connector that is compliant with DeviceNet specifications (see Pinouts below). Figure 3. 9000 Series DeviceNet Connector Pinout (Male) ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 27 Calibration must be checked by flowing gas through a calibration reference and then through the mass flow controller to verify correct readout. Celerity recommends that all High Temperature metal seal controllers be returned to Celerity for re-calibration. ©2005 Celerity, Inc.
  • Page 28 If reactive gases are used, the flow controller should be serviced every six months. Due to the high service temperature, low particle count, and high leak integrity all High Temperature metal seal flow controllers must be returned to Celerity for service. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ...

  • Page 29: Troubleshooting Guide

    16.4 Troubleshooting Guide 16.4.1 Determining Whether or Not to Remove the MFC, Always contact Celerity Technical Support before removing the MFC. - Prior to replacing an MFC thoroughly purge the system or replace/re-clean contaminated components. NO GAS FLOW WHAT TO DO? Check the shut-off valve and the pressure readout.
  • Page 30 Also, for best results, calibrate the MFC in the same attitude in which it will or HOS (Horizontal). • be operating. Check the part number or “MFC Description”. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 31: Devicenet Operations Leds

    Unplug and plug the MFC cable (performing a hard reset), or send the tool command to soft reset the MFC. Verify that the LED is flashing red/green. If not, contact Celerity Technical Support. Not lit A single MFC is the only Having the NET Status LED not lit is normal operating mode for a single connection to the bus.

  • Page 32: Manufacturing, Sales, And Service Locations

    Europe Head Office SCH Electronic Co., Ltd. Ireland & UK (Sales & Service) 7th Fl., No. 128, Sec. 3 ASIA Celerity Fluid Systems Ireland Ltd. Ming Shen E. Rd. Ballycoolin Business Park Taipei, Taiwan 10445 Blanchardstown, Dublin 15, Ireland China, Shanghai (Sales and Service) Tel: +886 22.713.6090...

  • Page 33: Auto-Zero Feature (For Analog Mass Flow Controllers)

    16.7 AUTO-ZERO FEATURE (FOR ANALOG MASS FLOW CONTROLLERS) 16.7.1 Introduction Celerity MFCs guarantee a zero drift of less than .6% per year, essentially eliminating the need for the Auto Zero feature. However it is still offered as an option. The Auto-Zero feature eliminates zero drift as a contributor to long-term process non-repeatability.
  • Page 34 Automatic Zero Alarm The alarm indicates that zero has drifted beyond the operating limits of the Auto-Zero. The Auto-Zero alarm will indicate to the system that there is a need to check the calibration. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05...
  • Page 35 16.7.3 Theory of Auto-Zero Operation The Auto-Zero feature in CELERITY Mass Flow Controllers overcomes zero drift by automatically adjusting the MFC meter to electrical zero during off-cycles between process runs. A stable zero enables operators to achieve repeatability of ±1% even in very low flow operations (±0.2% of full scale).
  • Page 36 MFC during standby. Thermal siphon produces internal recirculating flow within mass flow controllers due to heating of the gas. This effect will cause the Auto-Zero to offset in error. Current Celerity MFCs with the new sensor will not exhibit this offset 5.
  • Page 37 The true zero should now appear on the flow readout. If the true zero is beyond the operating limits (±4-5%), then the following re-zero procedure can be used. (Re-zeroing is advised if true zero is more than ±1% out.) ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05...
  • Page 38 When the true zero is outside of the range of the Auto-Zero (±4-5% F.S.) the Auto-Zero alarm should be activated. The true zero may be adjusted outside of this range to test the alarm on/off. ©2005 Celerity, Inc. #199-001-0006 REV.F 4/05...

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