BUSCH GABA ATW 100 A Instruction Manual

High performance heat & wet type gas abatement system

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GABA

High Performance Heat & Wet Type

Gas Abatement System

ATW 100 A

Instruction Manual

0870732292 | A0000_en-US | Original instructions

6/4/2024

Table of Contents

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Summary of Contents for BUSCH GABA ATW 100 A

Page 1 GABA High Performance Heat & Wet Type Gas Abatement System ATW 100 A Instruction Manual 0870732292 | A0000_en-US | Original instructions 6/4/2024...
Page 2: Table Of Contents
Table of Contents Table of Contents About this manual..............................Before Use ................................Product ................................. User Manual................................. Copyright................................Authentication ..............................Terms ..................................Product Description ............................Related to Safety ..............................Safety Equipment ..............................Risk Factors ................................Safety Label................................Precautions ................................Interlock ................................Emergency Stop ..............................
Page 3: About This Manual
About this manual This document contains the company’s technology and intellectual data. unauthorized use such as copying and transfer without permission from the company is strictly prohibited. GABA ATW 100 A User Manual Amendment Date March 10, 2023 Standard Model Item Name...
Page 4: Before Use
Before Use Product ● The product GABA ATW 100 A is an abatement technology by MAT PLUS Co., Ltd. The original designation of this product is MAT1208BWA. ● The product is applied with the latest technology to achieve users’ safety, high process efficiency, and energy efficiency.
Page 5: Authentication
Before Use | 2 Authentication ● This product is a product that corresponds to the following standards, guidelines, and regula- tions. Items Report NO. Issued Date Authentication Test Institution 50090544 001 2017. 7. 20 TÜV Rheinland 50090015 001 Table 1.1 Authentication Status Terms The terms used in this user manual include “Warning”, “Caution”, and “Notice”.
Page 6: Product Description
2 | Before Use Product Description Product Front Description Cabinet Exhaust Tower Lamp Touch Screen Utility Inlets Gas Outlets Label Right Emergency Switch Cabinet Door Handle Flowmeter Fig 1.1 Name of Product Front 6 | 60 Instruction Manual GABA ATW 100 A_EN_en...
Page 7 Before Use | 2 Internal Product Description Main Power Breaker Emergency Machine Off Heat Chamber Circulation Tank Fig 1.2 Name of the Internal Product Instruction Manual GABA ATW 100 A_EN_en 7 | 60...
Page 8: Related To Safety
3 | Related to Safety Related to Safety Safety Equipment WARNING Wearing inappropriate safety equipment or not wearing any may cause fatal damages to the body. Symbol Meaning of the Symbol You must wear safety gloves in areas indicated with this symbol. Wear safety gloves appropriate to the work.
Page 9: Risk Factors
Related to Safety | 3 Risk Factors WARNING Be sure to work after wearing appropriate protective equipment when implementing any work attached with a hazard label. If it is not observed, it may cause fatal damages to the body. Risk Label Meaning of the Symbol - You may get burned when contacted.
Page 10 3 | Related to Safety Risk Label Meaning of the Symbol - There is danger of corrosion due to corrosive substances. - Even a low level of corrosive substance may irritate the eyes and the re- spiratory system. - In case of high level of concentration, there is risk of injury or death. Protective Equip- Warning Corrosive ment...
Page 11: Safety Label
Related to Safety | 3 Safety Label ● Safety labels are attached as follows. ● Additional labels or other labels may be attached according to the area. Internal Cabinet Heating Chamber Surface Fig 2.1 Safety Label Location Precautions Temperature - during Normal Operation WARNING This product retains high temperature during normal operation.
Page 12 3 | Related to Safety ● Heating Chamber Module which is the heated part is located inside the cabinet and the cabinet is made to be opened only by the personnel possessing the cabinet key. ● This product retains high temperature for a certain period of time even after the operation is stopped.
Page 13 Related to Safety | 3 Electricity – during Normal Operation WARNING This product uses 200-240VAC power according to the facility equipment. It may cause electric shock and burn to the user’s body. ● Do not touch the power part when the product is in normal operation. ●...
Page 14: Interlock
3 | Related to Safety ● This product is designed so that the internal product is operated under negative pressure as it is connected together to a vacuum system. ● It is not exposed to harmful gases during normal operation. ●...
Page 15 Related to Safety | 3 ● Water leak If a leak is detected, an alarm will set off. ● If the product detects abnormal status during normal operation, the following interlocks are op- erated. Fig 2.2 Interlock Operation Method Interlock no: 1 Interlock Name / Alarm [Alarm] Heater temp low Alarm...
Page 16 3 | Related to Safety Interlock no: 3 PNID Tag Number Heater Supply Water Burning air Sleeve air Cleaning air Circulation pump Drain pump Signal tower Interlock no: 6 Interlock Name / Alarm [Alarm] Exhaust Temp High Alarm 50°C ↑ Delay time None Alarm point...
Page 17 Related to Safety | 3 Interlock no: 8 PNID Tag Number Heater Supply Water Burning air Sleeve air Cleaning air Circulation pump Drain pump Signal tower Interlock no: 9 Interlock Name / Alarm [Alarm] Circulation Water Flow Error Alarm 20 KpA Delay time 20 s Alarm point...
Page 18 3 | Related to Safety Interlock no: 11 PNID Tag Number Heater Supply Water CLOSE Burning air CLOSE Sleeve air CLOSE Cleaning air CLOSE Circulation pump Drain pump Signal tower Interlock no: 12 Interlock Name / Alarm [Alarm] Wet Chamber Level H-high Error Alarm Water level variation Delay time...
Page 19 Related to Safety | 3 Interlock no: 23 PNID Tag Number Heater Supply Water CLOSE Burning air CLOSE Sleeve air CLOSE Cleaning air CLOSE Circulation pump Drain pump Signal tower Interlock no: 24 Interlock Name / Alarm [Alarm] Inlet#2 Pressure Error Alarm 1 mm H2O ↑...
Page 20 3 | Related to Safety Interlock no: 26 PNID Tag Number Heater Supply Water CLOSE Burning air CLOSE Sleeve air CLOSE Cleaning air CLOSE Circulation pump Drain pump Signal tower Interlock no: 27 Interlock Name / Alarm [Alarm] Exhaust Pressure Error Alarm 1 mm H2O ↑...
Page 21 Related to Safety | 3 Interlock no: 42 PNID Tag Number Heater Supply Water Burning air Sleeve air Cleaning air Circulation pump Drain pump Signal tower WARNING Interlock no: 43 Interlock Name / Alarm [Warning] Wet Chamber Sensor Error Alarm Delay time Alarm point High...
Page 22 3 | Related to Safety Interlock no: 45 PNID Tag Number Heater Supply Water Burning air Sleeve air Cleaning air Circulation pump Drain pump Signal tower WARNING Interlock no: 46 Interlock Name / Alarm [Warning] Select the By-pass Switch Alarm Delay time 10 m Alarm point...
Page 23: Emergency Stop
Related to Safety | 3 Emergency Stop ● This product includes an emergency stop mode. ● When abnormal operation status is detected when all the parts are normal, interlock and alarm are generated. ● Although it is in abnormal operation status, if interlock and alarm are not generated, activate the emergency stop mode.
Page 24: Facility Requirements
4 | Facility Requirements Facility Requirements Installation Environment CAUTION This product is designed to be installed indoors where there is no risk of explosion. Install at an appropriate installation environment for normal operation and maintenance. Table 3.1 Required Environment for Installation Classification Required Environment Temperature...
Page 25: Utility
Facility Requirements | 4 Fig 3.1 Required Spaces for Installation Description 1,850 mm 900 mm 1,100 mm Utility Table 3.3 Utility Classification Specifications Power Main Pow- 3Ph. 208VAC 60A Power Consumption 18KW MAX @PF 0.95 SCCR: 2.5KA Cir. Pump 370W Drain 260W Pump...
Page 26: Loto Location And Measures Time
4 | Facility Requirements Classification Specifications Drain 20A PVC Union, Acid drain LOTO Location and Measures Time Fig 3.2 LOTO Location Description N2 IN Air IN Water IN ● LOTO is applied to this facility so that it can be used in the following cases. ●...
Page 27: Installation
Installation | 5 Installation Product Transport Description Facility Wheel ● For facility transport, turn the wheels attached to the facility to float it from the ground and move it to the right position. ● When transporting, it should be floated less than 1cm to prevent damage of the top part of the facility.
Page 28: Product Fixation
5 | Installation Product Fixation ● Fix the product at the installation place of the product. ● Brackets with M8 bolt size are installed at the four corner points of the lower part of the cabi- net. ● This product is fixed with brackets. ●...
Page 29: Utility Installation
Installation | 5 Utility Installation Fig 4.2 Connection Parts of the Product Utility Description Gas Exhaust: Final Gas Exhaust Cabinet Exhaust: Prevent Cabinet tem- perature Increase Air Supply Pipe: Supply Air within the Water Supply Pipe: Supply Water within Product the Product N2 Supply Pipe: Supply N2 within the Drain Pipe: Waste Water Exhaust within...
Page 30: Installation Inspection
5 | Installation Gas inlet pipe connection ● Connect the bypass pipe to the product. ● Connect using a NW50 Size pipe. ● Connect using an appropriate gasket and clamp. WARNING When inappropriate Union, Gasket and Clamp are used, it may be the cause of gas and liquid leak.
Page 31 Installation | 5 Power Line Inspection WARNING Be sure to work after turning OFF the main power. There may be risk of electric shock. ● The main power of this product is 200⁓240VAC, and it is based on three-phase, interrupting ca- pacity of 60A.
Page 32: Operation
6 | Operation Operation Start WARNING Inappropriate system operation during normal operation my cause fatal damages not only to this product but also to other connected products. If it is not appropriate to normal operation, do not operate until it becomes an appropriate environment. Make sure to work after check- ing the manual when operating.
Page 33: Set Up Mode
Operation | 6 Set Up Mode ● If you intend to change the parameter inside the control program, press the SETUP MODE switch on the initial screen or operation screen. ● Password screen will appear. If you enter the password on this screen, it will convert to the Set- up Menu.
Page 34 6 | Operation ● If you press the PARAMETER switch on the Set-up Menu screen, System Parameter screen will ap- pear. ● After pressing the button of the parameter intended to change, enter the set values. Fig 5.4 System Parameter ●...
Page 35: Manual Mode
Operation | 6 ERROR HISTORY ● Errors that occurred during operation of this facility are saved on the touch screen. If you select the Error History screen, you can confirm the types and time of the generated errors. ● Error History will all be deleted if you press the Clear switch. Fig 5.6 Error History Screen Manual Mode MANUAL MODE...
Page 36: Auto Mode
6 | Operation Auto Mode AUTO MODE ● Automatic operation starts when AUTO MODE is selected from the menu on the main screen. ● If Supply Water, Circulation Pump, Heater Power, and Burning Air are supplied in sequence and it becomes normal operation, it is finally operated in Auto Mode screen.
Page 37 Operation | 6 AUTO MODE Step 3 ● Burning air supply start ● If the heater temperature is above Low alarm value, Burning air is supplied. Fig 5.10 Step by Step Screen 3 AUTO MODR Step 4 ● If you press the START button after the heater temperature rises above the low value, it will convert to Auto mode screen.
Page 38: Other Modes
6 | Operation Other Modes COOLING MODE ● If you select ‘COOLING MODE’ from the meu, cooling is initiated. ● If the Cooling mode is initiated, cleaning air is blocked and only Burning air is supplied. ● After cooling for 60 minutes, it is automatically converted to Main mode and all operations stop in Main mode.
Page 39: Setting Mode (Other Than Plc)
Operation | 6 Setting mode (other than PLC) Heater Temperature Controller Fig 5.14 Temp Controller WARNING Operation temperature (SP) must be set to the temperature discussed with MAR PLUS Co., Ltd. Operation on arbitrary temperature may lead to non-processing of discharge gas, reduction in parts life, and safety accidents.
Page 40 6 | Operation Setting Output Values ● It calibrates the output value (%) delivered to the heater. ● At the initial screen, press the SET key 1 time and OUtL will be displayed. From the output maximum limit setting screen after entering the digit with ◀ Key and the set values using the ▲,▼...
Page 41 Operation | 6 3. [M] Key: Parameter group entry, item selection and operation automatic return. 4. [▼], [▲] Key: Preset setting of output operation mode, mode execution and parameter change. Fig 5.15 Pressure Controller Description PV Indicator (Green, Red, Orange Color) 2 SV Indicator (Green) [M] Key [▼], [▲] Key...
Page 42: Trouble Shooting
7 | Trouble Shooting Trouble Shooting Tower Lamp ● It flashes in different colors so that it is easy for users to understand according to the operation state of the product. Lamp System Condition Green Steady When the system is normal in the automatic & manual mode. Yellow Steady When the system is in the initial screen.
Page 43: Trouble Solving Method
Trouble Shooting | 7 Trouble Solving Method ● If normal operation is not possible even after implementing all the steps presented in each prob- lem-solving method, contact the manufacturer or the seller. ● Reset work is a work that presses the START button for more than 1 second. Heater Temp Error (High, Low) Alarm occurrence...
Page 44 7 | Trouble Shooting Chamber Temp High Error Alarm occurrence Step 1 Abnormal Check alarm Resume Reset default value process Normal Step 2 Check Abnormal Normal Replace and heater Reset operation repair temperature Normal Step 3 Abnormal Check Replace and Next repair step...
Page 45 Trouble Shooting | 7 Air Flow Error Alarm occurrence Step 1 Abnormal Check the Replace and Resume flowmeter repair process Normal Step 2 Check Abnormal Normal Replace and Reset the pressure operation repair gauge Normal Step 3 Check Abnormal Replace and Next normal repair...
Page 46 7 | Trouble Shooting Circulation Water Flow Error (High, Low) Alarm occurrence Step 1 Check Abnormal Replace and Resume normal operation repair process of valve Normal Step 2 Check Abnormal Normal Replace and Reset the pressure operation repair gauge Normal Step 3 Check the Abnormal...
Page 47 Trouble Shooting | 7 Water Leak Error Alarm occurrence Step 1 Confirm Abnormal Leakage part Resume the leakage assembly process replacement & repair part Normal Step 2 Check Abnormal Normal Replacement and Reset the leakage repair operation sensor Next step Inlet Pressure High Error Alarm occurrence...
Page 48 7 | Trouble Shooting Exhaust Pressure High Error Alarm occurrence Step 1 Abnormal Check Resume Reset alarm default process Normal Step 2 Pressure Abnormal Normal Zero Reset sensor zero operation adjustment check Normal Step 3 Abnormal Exhaust Next Pipe sampling pipe cleaning step check...
Page 49: Maintenance
Maintenance | 8 Maintenance Preparation Materials Protective Equipment ● Refer to Chapter 2.1 Protective Equipment Working Tools Name Role ● Tighten and loosen bolt. ● Required Size: 1/4″, 17 mm. ● Required Quantity: each more than 2. Spanner ● Check electric current and resistance. Digital Multi-meter ●...
Page 50: Equipement Stop
8 | Maintenance Equipement Stop WARNING Before stopping the equipment, shut off the flow of process gases. If not shutoff, process gases may be leaked and they may cause fatal injuries to the users. Module Cleaning Burn Chamber ● To clean the Burn Chamber, more than 2 workers are required. ●...
Page 51: Preventive Maintenance
Maintenance | 8 ● After disconnecting the Absorber Kit installed inside the Wet Chamber, remove the powders ac- cumulated in the Chamber and implement cleaning. ● After assembling the Absorber Kit, supplement and replace the corroded Absorber. ● After replacing the O-ring in the Wet Chamber, re-assemble in the reverse order of the disassem- ble procedure.
Page 52: Optional Specifications
9 | Optional Specifications Optional Specifications By-pass System ● This is a system to minimize the outage time of the process equipment connected to the front part of this product. ● There are 2 types of valves according to the flow direction of the fluid: C.W., C.C.W. ●...
Page 53: 3-Way Valve
Optional Specifications | 9 3-way Valve 3-way Valve Composition ● Cylinder Unit ● Receive the signal of the system and determines the valve location. ● It is operated through air and the required air pressure is over 4 kg/cm2. ● It is operated with DC 24V power. (Additional power installation not required) Sensor Unit ●...
Page 54 9 | Optional Specifications Utility Requirements Power: DC 24V Air Pressure: 4 ~ 7kg/cm2 Installation WARNING After installation, implement visual inspection. If you install the valve in the opposite direc- tion, it may cause severe damage to the process and the product. ●...
Page 55 Optional Specifications | 9 Fig 8.4 By-pass System Electric Part Schematic Diagram Instruction Manual GABA ATW 100 A_EN_en 55 | 60...
Page 56 9 | Optional Specifications Operation ● Activate the by-pass option in the option selection from the setting method. ● Although the by-pass location is fixed during normal operation status, if the by-pass system is ac- tivated, it controls the flow direction of gases according to the program signal. ●...
Page 57 Optional Specifications | 9 Pneumatic Pressure Torque Values Angle According to the pressure TORQUE(N-m) 4 kg/cm 5 kg/cm 6 kg/cm 7 kg/cm 0°C CLOSE 108.3 138.7 169.1 199.5 OPEN 69.4 84.6 99.8 115.0 45°C CLOSE 45.6 57.0 68.4 80.8 OPEN 43.7 55.1 65.6...
Page 58: Eu Declaration Of Conformity
EU Declaration of Conformity This Declaration of Conformity and the CE-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Decla- ration of Conformity is issued under the sole responsibility of the manufacturer.
Page 59 N otes Notes Instruction Manual GABA ATW 100 A_EN_en 59 | 60...
Page 60 With a network of over 60 companies in more than 40 countries and agencies worldwide, Busch has a global presence. In every country, highly competent local personnel delivers custom-tailored support backed by a global network of expertise. Wherever you are.