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®
ERS
Manual
– AirCool
SP72 – TA1C8
- 55°C + 200°C
Stettiner Str. 3
D-82110 Germering
Phone:
Service Hotline: +49-89-894132-500
Telefax:
E-mail:
WWW:
All rights reserved. Copyright by ERS
®
plus – System
electronic GmbH
+49-89-894132-0
+49-89-8418766
info@ers-gmbh.de
http://www.ers-gmbh.de/
®
electronic GmbH.
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Summary of Contents for ERS AirCool plus
- Page 1 ® plus – System – AirCool SP72 – TA1C8 - 55°C + 200°C electronic GmbH Stettiner Str. 3 D-82110 Germering Phone: +49-89-894132-0 Service Hotline: +49-89-894132-500 Telefax: +49-89-8418766 E-mail: info@ers-gmbh.de WWW: http://www.ers-gmbh.de/ ® All rights reserved. Copyright by ERS electronic GmbH.
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Page 2: Table Of Contents
Contents Contents ................I Safety symbols..............4 ® The AirCool plus -System SP72-TA1C8 ......6 System summary ..............7 Description of the system ............8 System specifications ............9 3.3.1 Operating conditions ..........9 ® plus -System SP72-TA1C8 ..... 10 3.3.2 The AirCool 3.3.3 The Controller SP72 ..........11 3.3.4 The Chuck TA1C8.......... - Page 3 Setting up the system............17 Interconnections Overview ..........17 Voltage selection ..............18 Voltage selection Chiller 03 ..........20 Connections at the Chuck TA1C8........21 Connections at the Chiller 03..........22 Assembly of the tubes between Chiller 03 and Probe Station ..............23 5.6.1 Installation of tubes at Chiller 03 .......
- Page 4 RS232C interface .............34 Interface settings ..............34 Changing the RS 232 Settings ........... 34 Transmission protocol ............35 Interface commands ............36 Set commands ..............36 Request commands............37 10 IEEE-488 Interface (Optional)..........39 10.1 Setting the IEEE-Address........... 39 10.2 IEEE 488 Communication Capabilities ......39 10.3 Remote Control via IEEE Interface ........
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Page 5: Safety Symbols
In addition it violates safety standards of ® design, manufacture and intended use of the instrument. ERS electronic GmbH assumes no liability for customers failure to comply with these requirements. - Page 6 Indicates dangerous voltage. Protective conductor terminal. For protection against electrical shock in case of fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment. General warnings Work on electrical, electronical, pneumatical and refrigerating components! Hot chuck can cause burn.
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Page 7: Plus -System Sp72-Ta1C8
® plus -System SP72-TA1C8 The AirCool Fig. 3a Controller SP72 Vacuum Air connections Cable to Controller SP72 ˜ ˜ Fig. 3b Chuck TA1C8 ® ® Manual / AirCool plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02... -
Page 8: System Summary
Air input Interface Interface RS232C IEEE-488 ® ® Fig. 3.1a Functional block diagram of an ERS AirCool plus -Systems 1 = actual temperature message 2 = electrical power control 3 = air control 4 = dew point control 5/ 6 = communication with the prober or an external computer via interface RS232C respectively IEEE-488 ®... -
Page 9: Description Of The System
Description of the system ® plus System provides rapid temperature adjustment and a precise The AirCool environment for probing semiconductor wafers. ® The system operation temperature ranges from -55°C to + 200°C. The AirCool plus System, as the name implies, uses exclusively air for cooling down to lowest temperatures. -
Page 10: System Specifications
System specifications 3.3.1 Operating conditions To meet the specifications the following operating conditions must be followed. If specifications for compressed air purity are not met, serious damage may occur to the chuck. caution Operating conditions Ambient temperature +18°C to +28°C Relative humidity 20% to Mains supply... -
Page 11: The Aircool ® Plus -System Sp72-Ta1C8
® 3.3.2 The AirCool plus -System SP72-TA1C8 Temperature range -55°C to +200°C Temperature sensor PT100, 4-line wired ±0,08°C Temperatur stability Thermo device Air / Heater ±0.2°C Temperature repeatability Transient temperature rise time after 18sec placing the wafer at +85°C Heating and cooling rate *) (measured at +25°C ambient temperature) heating rate... -
Page 12: The Controller Sp72
3.3.3 The Controller SP72 Smallest temperature preselection step ± 0,1°C Chuck temperature display resolution 0,01°C Control method DC / PID Interface to prober or PC RS232C or IEEE-488 Power consumption 450VA Weight 24 kg Dimension 19" rack 3HE 483mm x 144mm x 326mm 3.3.4 The Chuck TA1C8 Chuck surface Diameter... -
Page 13: System Restrictions
System restrictions ÿ At intial operation of the whole system (chucksystem and probe station) this whole system has to be purged with dry air for a minimum time period of 24 hours. ® Therefor please close all covers of the probeshield and let the AirCool plus Chuck System operate at +25°C set temperature. -
Page 14: Transport / Storage / Unpacking
Transport / storage / unpacking Transport ÿ Mind the equipment weight! ÿ Shocks should be avoided! ÿ Always transport the the system upright! Danger Storage conditions Ambient temperature 0°C to +70°C Relative humidity 20% to 60% Use the original package for storage! Required space approx. -
Page 15: Unpacking
Unpacking While unpacking please check the delivered components according to the list below: 4.3.1 Delivered components Component Chuck TA1C8 Controller SP72 Chiller 03 Dew point sensor plastic bag Planarity protocol Accessories Temperature Gradient protocol PT100 Protocol Manual ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool... -
Page 16: Dimensions
Dimensions 4.4.1 Chuck dimensions ∅206 Fig. 4.4.1a Chuck TA1C8 4.4.2 Controller dimensions Fig. 4.4.2a Controller SP72 ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool... -
Page 17: Chiller 03 Dimensions
4.4.3 Chiller 03 dimensions Fig. 4.4.3a Chiller 03 ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool... -
Page 18: Setting Up The System
Setting up the system Interconnections Overview AirCool 8" Chuck System -55°C +200°C Available Chucksize: 6" or 8" Prober TA1C8 AirCool Chuck Dew point sensor ACM218 Flushing chamber ACK001 ACM325 air exhaust Controller SP72 AC054 Chiller 03 F2 F1 XC32 XC12 IEEE-488 ACK004 AC02... -
Page 19: Voltage Selection
Voltage selection ® ® plus system is prepared for operation at input voltage: The ERS AirCool 100V, 115V, 200V and 230V. Voltage slelction at SP72 Disconnect from mains before opening cover! Danger 2. Open the cover! SP72 rear panel Voltage... - Page 20 4. Adjust F1 according to mains voltage! Fuses F2 F1 F2 F1 IEEE-488 Fig. 5.2c Fuses at the rear panel of controller SP72 F1 230V 200V 115V 100V F2 for all voltage settings 0,315 AT F6 for all voltage settings 6,3 AT F8 for all voltage settings 6,3 AT...
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Page 21: Voltage Selection Chiller 03
Voltage selection Chiller 03 ÿ Remove the front cover of Chilller 06. ÿ The connection terminal is located under the transparent cover. Remove this cover. ÿ Use the connector to select the mains voltage according to the table below: Operation 230V 200V 115V/120V 108V/110V... -
Page 22: Connections At The Chuck Ta1C8
Connections at the Chuck TA1C8 Electric Connector Sense Ground to tester Vacuum Air supply Cable XC1 ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool... -
Page 23: Connections At The Chiller 03
Connections at the Chiller 03 DEWPOINT DISPLAYCHILLER AIR SUPPLY to Prober 6bar P1 P2 to controller to dew point sensor XC32 XC12 Circiut Breaker SC03 Leakage FA Z- 6 Breaker power supply SC01 230V ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool... -
Page 24: Assembly Of The Tubes Between Chiller 03 And Probe Station
Assembly of the tubes between Chiller 03 and Probe Station 5.6.1 Installation of tubes at Chiller 03 STEP1 STEP1: make sure that part C ACM325 is mounted Part C ACM325 Part B STEP2: connect the tubes P1 -P3 with Part A plugs P2 - P4 at Chiller03 STEP3 Cover the connector parts with... -
Page 25: Installation Tube At Prober
5.6.2 Installation tube at Prober STEP1 STEP 1: make sure that part C ACM325 is mounted Part C ACM325 Part B STEP2: connect the tubes P5 -P7 with plugs P1 - P3 at Chiller03 Part A STEP3 Cover the connector parts with isolation parts ACM210 Tube STEP4... -
Page 26: Initial Operation
Initial operation ÿ Make sure that all requestet operating conditions are ensured! ÿ Check all power and air connections! ÿ Make sure that no air tube is bent or squeezed. ÿ Make sure that the right voltage is selected before switching on! The following problems could occur at initial operation: The system is switched on and shows absolutely no reaction. - Page 27 Error messages as described in chapter 11 may appear: ÿ "Er02" Overflow of the actual value A/D converter. The cable connections from controller to the chuck might be interrupted (the plug-type connections XC1 or XR1 are not connected / fig. 8.4a). The controller will shut off the chuck power supply.
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Page 28: Operating Instructions
Operating instructions Front panel Fig. 7.1a Front panel ON/OFF Power switch Remote LED Keypad Talk LED Enter key Listen LED Memory key T1 Special condition LED Memory key T2 Actual temperature display Preselection +25°C Control Status Step up key (heating/in range/cooling) Step down key Dew point display Local key... -
Page 29: Key Functions
Key functions ON/OFF Power switch After switching on all LED's of the operation panel are turned on for a short time. Then the temperature is set to +25°C and the unit is ready to use. Key pad - to enter set temperature values - sign for negative values - to cancel inputs in enter mode Enter... - Page 30 Step up key The active set temperature T1 or T2 is incremented by one step (0.1 °C), the stored value is also changed by this operation. There is no influence on the preset +25°C key. Local key When set into remote mode via RS232 or IEEE interface, all keys except the Local key are locked.
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Page 31: Display Elements
Display Elements (10) Remote LED Shows that the device was set into remote mode via the RS232 or IEEE interface. (11) Talk LED Shows that information is sent by the device via the RS232 or IEEE interface. (12) Listen LED Shows that information is received by the device via the RS232 or IEEE interface. -
Page 32: Operating Modes
Operating modes Hold mode To eliminate the influence on „low noise measurements“ due to changing current through the chuck's heating system, the SP72 controller is equipped with a feature called Hold mode. Select this operation mode after the chuck has reached and stabilized at the set temperature and before testing starts. -
Page 33: Standby Mode
Standby mode When the system is set to standby mode the heater and the cooling air is switched off, only a minimum amount of air is supplied to the chuck. If the actual chuck temperature is below +15°C or above +40°C the system will set +25°C for safety reasons at first, before setting standby mode. -
Page 34: Dew Point Control
Dew point control ® plus -System SP72-TA1C8 provides a dew point close loop system to The AirCool avoid any ice-formation on the wafer. Moisture or ice-formation will occur if the chucktemperature is below the dew point of the ambient air. To prevent this situation the chucktemperature is controlled by the dew point monitoring in such a way, that the chucktemperature never goes below the dew point of the ambient air. -
Page 35: Rs232C Interface
ÿ to set the protocol mode use the up "ÿ" /down " " keys again, until ”Proto” is shown on the left display ÿ press enter and the left display starts to flash ÿ with the numeric keys 1 and 2 you can choose ”ErS” or ”no” Protocol on the display ÿ press enter to confirm ÿ... -
Page 36: Transmission Protocol
Transmission protocol As described in the settings above, the serial interface may operate with or without a special transmission protocol. If no protocol is selected, command strings are transmitted as ASCII characters, the SP72 will send "ok" if the command is accepted or "?" if not accepted. For a more safe communication the SP72 uses a transmission protocol with start- and stop-flags and a checksum byte. -
Page 37: Interface Commands
Interface commands Abbreviations: v = Sign of value, x = Value in 1/10°C (Number of decimals is given by the number of x'es) Note: All commands must be written in capital letters or the SP72 will not recognize the command and will therefore answer with a "CAN" when protocol mode is on, or with "?"... -
Page 38: Request Commands
Request commands Request actual chuck temperature [1/10 °C resolution] Response: Cvxxxx i.e. C+1234 says: Chuck temperature is +123.4°C Request actual chuck temperature [1/100 °C resolution] Response: Cvxxxxx i.e. C+12345 says: Chuck temperature is +123.45°C Request error status Response: E0yy i.e. E003 says: Error 03 has occurred the error status numbers are the same as displayed at the set temperature display of the front panel (see chapter 7.1 for more information) - Page 39 Request set temperature [1/100 °C resolution] Response: Tvxxxxx i.e. T-01052 says: Set temperature is -10,52°C Request Status of Hold Mode Response: Hy y = 0 Hold-Mode not active y = 1 Hold-Mode active See chapter 8.1 for details about Hold-Mode. Request status of dew point control y = 0 dew point control is off y = 1 dew point control is on...
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Page 40: Ieee-488 Interface (Optional)
10 IEEE-488 Interface (Optional) 10.1 Setting the IEEE-Address After switching on the SP72 controller shows the IEEE-Address on the display panel. The temperature display shows "IEEE" and the set temperature display shows the actual IEEE-Address. To change the address follow the oncoming procedure. ÿ... -
Page 41: Remote Control Via Ieee Interface
10.3 Remote Control via IEEE Interface Address the controller in listener mode and send a ASCII-String following one of the templates below. Note: The SP72 controller will ignore new commands or request while a set command is executed. Wait 100ms after a set command before adressing the SP72 controller again. -
Page 42: Set Response String
10.5 Set response string To retrieve the information requested by the one of the commands below, set the SP72 into talker mode (i.e. address it as talker). The type of answer string is set by the "R..." command that has been sent to the SP72. - Page 43 RH<CR><LF> Request Status of Hold Mode Response: Hy y = 0: Hold-Mode not active y = 1: Hold-Mode active See chapter for details about Hold-Mode. RE<CR><LF> Request error status Response: E0yy i.e. E003 says: Error 03 has occurred The error status numbers are the same as displayed at the set temperature display of the front panel (see chapter 7.1 for more information).
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Page 44: 11 Error Messages
To reset the error condition cycle power switch of SP72 controller. If you cannot solve the problem by the description of the error messages, ® contact ERS electronic GmbH to get further assistance. Service hotline – Phone: +49-89-894132-500 Error message... - Page 45 Check Fuse F6 supply. (Dead end error) ® System setup error caused by If this error occurs call ERS "Er99" micro controller malfunction. electronic GmbH for support. ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02...
- Page 46 Fig. 11a Function block diagram ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool...
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Page 47: Error Handling
11.1 Error handling 11.1.1 Changing the power transistor Fig. 11.1.1a Fan Fig. 11.1.1b Detail A/ Power transistors Explanation: 1 = Screws M3 x 12 2 = Power transistor MJ 11033 3 = Heat sink compound 4 = Power transistor MJ 11033 Procedure: Switch off and disconnect from mains before servicing! Danger... -
Page 48: Changing The Power Amplifier Nb1
11.1.2 Changing the power amplifier NB1 Bracket Control input KB1(4) GND/ WH KB1(6) Fig. 11.1.2a Fan Fig. 11.1.2b Detail B/ Power amplifier NB1 Procedure: Switch off and disconnect from mains before servicing! Danger 2. Disconnect the cables (+/ red) and (-/ blue) from the power amplifier at the relay KB1, plug 6 and plug 4! 3. -
Page 49: Chuck Cable Check
11.1.3 Chuck cable check Electrical connection between chuck TA1C8 and connector XR1 at the backpanel of the controller SP72. (see also fig. 5.1a) Connector Chuck TA1C8 SP72 Extension cable Power chuckcable 9pol.AMP bushing housing yellow brown blue pink gray green blue Pin load XR1 Pin load XC1... - Page 50 Typical resistance values Resistance check Resistance value from Pin to Pin (target value) Remarks [Ω Ω Ω Ω ] 23°C - 28°C 109-112 Corresponds to the resistance 109-112 value of the PT100 at ambient temperature (see the resistance value for other temperatures in the conversion table in chapter 12.2.2)
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Page 51: Fuse F10 At Chiller 03
11.1.4 Fuse F10 at Chiller 03 Fuse F10 Spare fuse Fuse F10 located in Chiller 03 mains socket: Fuse base This fuse does not need to be changed. (It operates permanetely at 230VAC.) advice Don´t forget to set in the correct operating voltage at the Controller SP72 too! Warning ®... -
Page 52: Appendix
Appendix 12.1 Plug XR2 for serial interface Fig. 12.1a Plug XR2 (at the backside of controller SP72) Explanation: Pin 2 sent data Pin 3 received data Pin 5 grounding ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool... -
Page 53: Conversion Tables
12.2 Conversion tables 12.2.1 Conversion tables international Table 12.2.1a ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool... -
Page 54: Conversion Tables Pt100 Resistance
12.2.2 Conversion tables PT100 resistance Table 12.2.2a ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool... -
Page 55: Spare Parts
12.3 Spare parts Description Spare part number ® ® plus -System / SP72_TA1C8 / -55°C +200°C / Ver. 02.02 Manual / AirCool...
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