Summary of Contents for Siargo FS1100
- Page 1 FS1100 User Manual VA.0 MEMS mass flow sensors Sold in North America by: Servoflo Corporation 75 Allen Street Lexington, MA 02472 www.servoflo.com/info@servoflo.com 781-862-9572 ©2022 Siargo Ltd.
- Page 2 Copyright 2022 and Liability Disclaimer Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this manual. For further information and updates, please visit www.Siargo.com.
- Page 3 • Do not apply for any unknown or non-specified gases that may damage the product. www.Siargo.com FS1100 User Manual...
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Page 4: Table Of Contents
9. Technical notes for the product performance ..........20 9.1 Measurement principles ..................20 9.2 Precautions for the best performance of the product ..........20 9.2.1 Altitude changes ......................20 9.2.2 Excessive humidity or condensation ................20 www.Siargo.com FS1100 User Manual... - Page 5 9.2.3 Metrology verification ....................21 9.2.4 Cleaning and sterilization .................... 21 10. Warranty and Liability ................22 11. Service/order contact and other information ..........24 Appendix I: Sensor evaluation kit ..............25 Appendix II: Document history ............... 25 www.Siargo.com FS1100 User Manual...
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Page 6: Overview
The FS1100 sensors measures primarily the mass flow rate measurements of a full scale up to 250 SLPM with a dynamic range of 100:1, and the temperature measurement of -20 to 85 °C. It has a maximum pressure rating of 2 bar (30 psi). -
Page 7: Receipt / Unpack Of The Products
If the packing box is intact, proceed to open the packing box, and you shall find the product (either the sensor formality per the actual order) as shown below. Figure 2.1: FS1100 Please check immediately for the integrity of the product. If any abnormality is identified, please notify the distributor/sales representative or manufacturer as soon as you can. -
Page 8: Knowing The Products
Cable socket Stand Flow direction O-ring Φ16 X 1.8 (Nitrile rubber) Inlet and outlet Figure 3.1: FS1100 product description 3.2 Power and data pinout description Table 3.1: FS1100 pin assignment. DEFINITION Fout, analog output, flow data 2, 4, 9 GND, ground... -
Page 9: Mechanical Dimensions
3.3 Mechanical dimensions Figure 3.3: FS1100 mechanical dimensions. www.Siargo.com FS1100 User Manual... -
Page 10: Wetted Materials And Compatibility
The sensor chip surfaces are passivated with silicon nitride and silicon dioxide. The electronic sealing is provided by LOCTITE Ablestik 84-3J. Another wetted material that may be exposed is FR-4. www.Siargo.com FS1100 User Manual... -
Page 11: Operation
Before starting to use this product, check the product specifications that can be found in this manual or the basic information from the datasheet at the company’s website www.Siargo.com. The detailed product technical specifications can be found in Section 8. For a specific application, the pressure rating must not be higher than the system pressure to be measured, and the flow range should also be within the specified ones. -
Page 12: I 2 C Communication Protocol
5.4 I C communication protocol 5.4.1 I C interface connection diagram 5.4.2 I C interface read/write sequences www.Siargo.com FS1100 User Manual... -
Page 13: I 2 C Interface Command Description
Value Name CRC-8 Protected data C read and write Width 8 bits Polynomial 0x07 (x8 + x2 + x + 1) Initialization 0x00 Reflect input False Reflect output False Final XOR 0x00 Example CRC(0x4E20) = 0x6D www.Siargo.com FS1100 User Manual... -
Page 14: Installation
“no flow” in the pipeline. If the value is consistently present, double-check the pipe leakage and then reset the offset if you are sure there is no leakage or flow. h) This will conclude the installation. www.Siargo.com FS1100 User Manual... - Page 15 The strong electromagnetic interference sources close by or any mechanical shocks at the pipeline may also create malfunctioning of the product. e) Slowly open/close valves at the gas supply piping to prevent abrupt pulse flow impact. www.Siargo.com FS1100 User Manual...
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Page 16: Product Selection
Reverse flowrate (0, 50, 100, 150, 200, 250 SLPM). Note: 1. The default unit of the flow rate is SLPM. For other ranges, please contact the manufacturer. 2. Example: FS1100-50F250-A is a sensor that measures mass flow rate from reverse 50 to forward 250SLPM, air. www.Siargo.com... -
Page 17: Product Performance
Maximum flow change SLPM/sec Storage temperature -20 ~ +65 °C Weight Calibration Air @ 20°C, 101.325kPa Compliance RoHS; REACH IEC 61000-4-2; 4; 8 Note: 1. Calibration with real gas is optional. Please contact the manufacturer for further information. www.Siargo.com FS1100 User Manual... -
Page 18: Analog Output Of Flow Rate
-275 -250 0.500 0.700 -200 0.900 -150 1.100 -100 1.300 1.500 1.700 1.900 +100 +150 2.100 +200 2.300 +250 2.500 +275 2.600 +300 2.600 Figure 8.2: Typical analog output of flow rate (-250 ~ +250 SLPM) www.Siargo.com FS1100 User Manual... -
Page 19: Analog Output Of Temperature
Figure 8.3: Typical analog output of the temperature 8.4 Pressure loss Flow rate Pressure loss (SLPM) (Pa/psi) 0 / 0 150 / 0.02 510 / 0.07 1050 / 0.15 1800 / 0.26 2700 / 0.39 Figure 8.4: Typical pressure loss www.Siargo.com FS1100 User Manual... -
Page 20: Technical Notes For The Product Performance
This would result in a very unreliable data output. Please filter or other tools to prevent this situation to occur when using this product. www.Siargo.com FS1100 User Manual... -
Page 21: Metrology Verification
Avoid applying any alcohol that may interact with the polycarbonate as the reaction could damage the sensor. Be careful that this product does not have a liquid-proof design. Avoid the liquid attack on the electronic compartment. www.Siargo.com FS1100 User Manual... -
Page 22: Warranty And Liability
The products returned under warranty to Siargo shall be at the user or purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are deemed to have accepted this limitation of warranty and liability, which contains the complete and exclusive limited warranty of Siargo. - Page 23 (5) Any damages incurred by the incorrect usage of the products; (6) Siargo does not provide any warranty on finished goods manufactured by others. Only the original manufacturer's warranty applies;...
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Page 24: Service/Order Contact And Other Information
11. Service/order contact and other information Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions and or product support, please contact your direct sales, or in case you need additional assistance, please contact customer service at the address listed below. -
Page 25: Appendix I: Sensor Evaluation Kit
Appendix I: Sensor evaluation kit Siargo offers a sensor evaluation kit, including a digital data converter, USB data cable, and User Application software, that allows the user to evaluate the product performance on a Microsoft Windows-based computer. The user can read and visualize the flow rate of the product, obtain the totalized values, and save the data for further analysis. -
Page 26: Appendix Ii: Document History
Appendix II: Document history Revision A.0 (August 2022) ➢ First release. www.Siargo.com FS1100 User Manual...
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