Summary of Contents for Advanced Energy Industries Pinnacle 10x6 kW
Page 1
U S ER MANUAL Pinnacle™ 10x6 kW DeviceNet™, MDXL User 5702063-C May 2000 Advanced Energy Industries, Inc. 1625 Sharp Point Drive Fort Collins, CO 80525 USA 970.221.4670 technical.support@aei.com Page 1 of 160 APPLIED MATERIALS EXHIBIT 1026...
Page 2
® Advanced Energy 5702063-C Page 2 of 160...
Page 3
User Manual Pinnacle™ 10x6 kW 5702063-C Page 3 of 160...
Page 4
All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury. Advanced Energy Industries, Inc., (AE) provides information on its products and associated hazards, but it assumes no responsibility for the after-sale operation of the equipment or the safety practices of the owner or user.
Pinnacle™ 10x6 kW Chapter Chapter Introduction READ THIS SECTION! We know that some of you want to operate your Pinnacle supply now and that you don’t feel you have time to read the entire manual. Below is a list of manual subsections you must read before getting started.
Page 16
® Advanced Energy We include this symbol in Danger, Warning, and Caution boxes to identify specific levels of hazard seriousness. This box identifies hazards that could result in severe personal injury or death. This box identifies hazards or unsafe practices that could result in personal injury. This box identifies hazards or unsafe practices that could result in product or property damage.
Pinnacle™ 10x6 kW • Earth ground • Warning (refer to manual) • CE label • Non-ionizing radiation • Hot surface • NRTL /C label SAFETY Do not attempt to install or operate this equipment if you have not first acquired proper training.
® Advanced Energy • Verify that input line voltage and current capacity are within specifications before turning on the power supply. • Use proper ESD precautions. • BE CAREFUL AROUND THIS EQUIPMENT. RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power before working on this unit or anything connected to it.
Pinnacle™ 10x6 kW • EN 55011 (Class A, Group 2)(CISPR 11) This device must be installed and used only in compliance with the standards listed in addition to VDE 0113, EN 60204 (IEC 204), and applicable requirements. For more information, refer to the letter of conformance (US) or declaration of conformity (EU) accompanying the product.
Page 20
® Advanced Energy Introduction 5702063-C Page 20 of 160...
Pinnacle™ 10x6 kW Chapter Chapter Theory GENERAL DESCRIPTION ™ The Advanced Energy Pinnacle series of dc power supplies provide the ultimate advantages in dc power. They... • Are light and compact • Are highly efficient (low internal heat dissipation) • Provide excellent regulation and stability •...
® Advanced Energy Microprocessor Advantages The internal microprocessor checks for proper circuit operation while supervising all operating parameters. System diagnostics run when the unit is initially powered up. The most recent power settings and conditions (such as output production) are retained in non-volatile memory.
Pinnacle™ 10x6 kW Inverter AC In Input Output Output DC Out Section Section Section Measurement Unit A Unit A Control Panel Logic Housekeeping Remote Display Interfaces Section Control Inverter Output Output DC Out Section Measurement Section Unit B Unit B Figure 2-1.
® Advanced Energy The rectified dc power is then passed through a measurement section to the output connector. OUTPUT MEASUREMENT The output measurement section measures current, voltage, and power. These signals are typically scaled 0 to 10 Vdc and sent to logic control and interfaces. LOGIC CONTROL The microprocessor in the logic control section uses operator-supplied parameters and setpoints to control the output.
Pinnacle™ 10x6 kW Chapter Chapter Specifications FUNCTIONAL SPECIFICATIONS The following table lists the functional specifications. Table 3-1. Functional Specifications Serial communications (Host) port, User port (analog/ Modes of Control digital interface), active front panel, and/or Pinnacle Remote Active Panel Your unit also may feature either a passive front panel Passive Panel Options or a remote passive panel.
Page 26
® Advanced Energy Table 3-1. Functional Specifications (Continued) Using an active front panel, Pinnacle Remote Active Arc Control Panel, or a serial (Host) port, you can enable arc handling functions. Select a voltage arc trip level. Then choose between preprogrammed arc controls or custom arc controls.
Pinnacle™ 10x6 kW PHYSICAL SPECIFICATIONS The following table lists the physical specifications. Table 3-2. Physical Specifications Size Power Supply 133 mm (H) x 483 mm (W) x 639 mm (D), including connectors 5.22" (H) x 19" (W) x 25.18" (D) Pinnacle Remote Active 89 mm (H) x 483 mm (W) x 107 mm (D) Panel...
® Advanced Energy ELECTRICAL SPECIFICATIONS The following table lists the electrical specifications. Table 3-3. Electrical Specifications 180 to 229 Vac, 3-phase, 4-wire; 50 to 60 Hz; no neutral 208 Vac Pinnacle Input required; leakage current less than 3.5 mA Voltage 53 A nominal per phase, at least 90% EFF;...
Page 29
Pinnacle™ 10x6 kW Table 3-3. Electrical Specifications (Continued) Usable Output Range See Figure 3-1 on page 3-6 and Figure 3-2 on page 3-7. See Figure 3-3 on page 3-8 and Figure 3-4 on page 3-8. Impedance Range Accuracy of User-Defined Limits Current 0 to 5% over the limit from 10 to 100% of full rated output...
Pinnacle™ 10x6 kW ENVIRONMENTAL SPECIFICATIONS The following table lists the environmental specifications. Table 3-4. Climatic Specifications Temperature Relative Humidity Air Pressure Class 3K3 Class 3K3 Class 3K3 Operating (Note 1) C to +40 5% to 85% 80 kPa to 106 kPa °...
® Advanced Energy COOLANT SPECIFICATIONS The following table lists the coolant specifications. Table 3-5. Coolant Specifications Coolant Temperature Air (gas) minimum 0 C, maximum 35 ° ° Pollution Degree Install and operate this device only in a pollution degree 1 environment, which means an indoor location such as a computer room, office, or factory floor where either no pollution or only dry, non-conductive pollution occurs.
Pinnacle™ 10x6 kW Chapter Chapter I/O Communication and Control USER PORT The User port allows you to control the Pinnacle unit through a remote controller. The connector is a 15-pin, subminiature-D, female connector (see the following illustration). Figure 4-1. 15-pin User port You may operate the Pinnacle unit solely through the 15-pin User port.
® Advanced Energy Signals The User port is primarily an “analog” interface. Signal descriptions appear in the following table. Note that a “.A” suffix appended to a pin name indicates an analog signal; a “.D” suffix appended to a pin name indicates a digital signal. An overline on a signal name (for example, OUTPUT ENABLE.D ) indicates that the signal is true when low.
Page 37
Pinnacle™ 10x6 kW Table 4-1. User Port Pin Descriptions (Continued) Signal Return Pin Name Signal Description Type POUT.A Output This pin provides a fully buffered 0 to 10 V signal representing output power: 10 V +/- 1% = 20,000 W in a single unit system (that is, without any slaves connected).
® Advanced Energy Table 4-1. User Port Pin Descriptions (Continued) Signal Return Pin Name Signal Description Type OUT ENABLE COM.D This signal is the return reference for SETPOINT.D , OUTPUT ENABLE.D , and OUTPUT.D ( pins 1, 4, and 13 ). MOD GREEN Output This pin is the emitter side...
Pinnacle™ 10x6 kW ™ Figure 4-2. DeviceNet port with pin designations Installation Refer to the following pin descriptions when connection to the DeviceNet port. Use the appropriate female, micro-connection connector and cable. See the DeviceNet Specification (revision 2.0) from the Open DeviceNet Vendor Association, Inc. for specifics on the mating connector and cable.
® Advanced Energy Figure 4-3. DeviceNet rotary switches and LEDs Use the MSD and LSD switches to select the unit’s address (MAC ID). MAC IDs 0 through 63 are valid. Use the MSD switch to select the MAC ID’s most significant digit; use the LSD switch to select the MAC ID’s least significant digit.
Page 41
Pinnacle™ 10x6 kW Table 4-3. Structure of the poll command message (Continued) Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Ramp Rate Setpoint AO (LSB) Ramp Rate Setpoint AO (MSB) Note: In Bit 0 of Byte 4, PO refers to Power On. In this bit, 1 = turns on the unit’s output; 0 = turns off the units output.
® Advanced Energy RESPONSE MESSAGE The following table represents the structure of the response message. Table 4-4. Structure of the poll command message Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Power Output AI (LSB) Power Output AI (MSB) Voltage Output AI (LSB)
Pinnacle™ 10x6 kW EXPLICIT MESSAGING The Pinnacle DeviceNet interface supports explicit messaging so that you can receive information about two power system parameters: maximum power and maximum current. Use the following Class Code 64 (40 ), Instance 1 attributes to retrieve this information: Attribute Access Name...
® Advanced Energy Table 4-5. MOD Status LED (Continued) If the LED is the state indicated is which means that Flashing Green Standby the unit needs maintenance because the configuration is missing, incomplete, or incorrect. Amber Unrecoverable Fault the unit has experienced a fault from which it cannot recover;...
Pinnacle™ 10x6 kW Table 4-6. Network Status LED (Continued) If the LED is the state indicated is which means that Flashing Amber Connection Time-out, one or more I/O connections Critical Link Failure are in the timed-out state. Amber Critical Link Failure communication has failed;...
Page 46
® Advanced Energy Table 4-7. Passive Display Panel Codes (Continued) PFP Display String Personality Card H-04 Host Protocol Translator Card H-05 Single User Card H-18 AE Bus Card H-22 Master/Slave Card H-23 DeviceNet H-30 DeviceNet 4-12 I/O Communication and Control 5702063-C Page 46 of 160...
Pinnacle™ 10x6 kW LEDs Table 4-8. Display Panel LEDs POWER ON Lights green when input power is on OUTPUT Lights green if output power is on SETPOINT Lights green if the Pinnacle supply is operating within setpoint; accuracy is within 0.4% of full scale or 2% of setpoint, whichever is greater INTERLOCK Lights green if all interlock conditions have been met...
® Advanced Energy Connecting to the Remote Active Panel The 9-pin, male, subminiature-D connector labeled REMOTE ACTIVE PANEL on the rear of the Pinnacle power supply lets you connect the supply to the Pinnacle Remote Active Panel. Figure 4-4. Remote active panel connector The pin descriptions for this connector appear in the following list.
Pinnacle™ 10x6 kW To connect your Pinnacle power supply to the Pinnacle Remote Active Panel 1. Turn off ac input power to the Pinnacle unit. 2. Connect the cable between the REMOTE ACTIVE PANEL connector on the Pinnacle supply and the Pinnacle Remote Active Panel. 3.
® Advanced Energy keys by whichever terms are displayed above them. For example, you are instructed to press the ARC soft key when ARC is the menu choice directly above that particular key. See Figure Note: on page 4-11. MODIFY KNOB Use the MODIFY knob to change values and move through the menus.
Pinnacle™ 10x6 kW • ON and OFF switches at the far left of the panel • CONTROL and REGULATION switches at the far right of the panel • A two-line display, five soft keys, and a MODIFY knob Figure 4-5. Control panel Output Power Switches Use the following switches to turn output power on and off.
® Advanced Energy Regulation Switches Use these switches to select the method of output regulation when the control panel has control. Specifies that the method of output regulation is power. POWER Specifies that the method of output regulation is current. CURRENT Specifies that the method of output regulation is voltage.
Pinnacle™ 10x6 kW When the output display is showing, you can press any of the soft keys to display the main menu. The main menu contains three menu selections, which are shown in Figure Note:. Generally, pressing a soft key causes another level of menu choices to display (for example, MONITOR, LIMITS, ARC, and CONTROL display if you press the PROCESS soft key).
® Advanced Energy USING THE SERVICE FUNCTIONS Use this option to view diagnostics and software versions of your supply. The menu options are: • STATS: supply statistics • DEBUG: debug screens • MEMORY: ROM CRC checksums • SW_REV: software revision numbers Checking Service-type Statistics SERVICE →...
Pinnacle™ 10x6 kW 2. Press the FAULTS soft key. 3. MORE, INTRLOCK, IRQS, MONITOR, and DSP options appear. 4. If you press MORE, you can check the following faults: – PROFI displays the number of Profibus faults – POWER displays the number of line power faults. –...
® Advanced Energy CHECKING YOUR COMMUNICATIONS CARD SERVICE → DEBUG → CARD Use this option to find out specific communications debug information: Press SERVICE → DEBUG → CARD. Note: Not all cards support this feature. CHECKING YOUR SOFTWARE LOGIC SERVICE → DEBUG → LOGIC Use this option to find out what software logic options are installed.
Pinnacle™ 10x6 kW USING THE SUPPLY FUNCTIONS This option lets you modify specific components and parameters of your supply. The menu options are: • AEBUS: • DEFAULTS: • PANEL: • PGM_SRC: • ENABLE: Setting the AE Bus Timeout SUPPLY → AE BUS To set your AE Bus timeout time, follow these steps: 1.
® Advanced Energy SELECTING REMOTE OR LOCAL MODE SUPPLY → PANEL → SELECT To switch between the remote active panel and the local active panel, follow these steps: 1. Press SUPPLY → PANEL → SELECT. 2. Rotate the MODIFY knob to display Yes or No, depending on whether or not you want to switch to a remote/local active panel.
Pinnacle™ 10x6 kW The program source (PGM_SRC) feature specifies for each control mode the program source for regulation mode and setpoint information. For each control mode, if the program source is set to internal (INT), the Pinnacle supply uses the information for output regulation mode and setpoint that has been established through either the Pinnacle Remote Active panel or the Standard Serial port.
® Advanced Energy • CONTROL: set process control parameters Monitoring Your Process PROCESS → MONITOR This menu allows you to monitor elements of your process such as the life of your target, how long the process is running out of setpoint, or whether the process voltage drops below its threshold.
Pinnacle™ 10x6 kW Use this option to enable and set an out-of-setpoint timer. This function lets you indicate how long you want the power supply to tolerate an out-of-setpoint condition before it shuts off output. An out-of-setpoint condition occurs whenever output moves out of a range determined by your selected setpoint (see “Setting the Setpoint”...
® Advanced Energy 3. Press ENTER. 4. Rotate the MODIFY knob to select the active target number for side B. 5. Press ENTER to accept and exit. Note: The User port has priority in selecting targets. Thus, if your unit has a user card installed, you must set the target to 1 at the User port if you want to select targets from the serial port, active front panel, or Pinnacle Remote Active Panel (that is, when the Pinnacle unit is in host or local control mode).
Pinnacle™ 10x6 kW SETTING A STRIKE VOLTAGE LIMIT PROCESS → LIMITS → STRIKE This function lets you set the strike voltage limit to high, medium, or low. Refer to Table 1-3 for more information. To set the strike voltage limit, follow these steps: 1.
® Advanced Energy This function lets you set a maximum limit for output current. The default (and maximum allowable value) is the maximum rated output for the supply. Accuracy is +0.3% of the full rated output current for the supply. To set the user current limit, follow these steps: 1.
Pinnacle™ 10x6 kW Enabling the TCC algorithm places setpoint and arc handling under microprocessor control, letting you achieve fast, automated target conditioning. Before enabling the TCC algorithm, ensure that you have first entered a setpoint and set values for the PROCESS menu parameters.
® Advanced Energy The hard arc counter counts one arc every time the output is shut off due to an arc condition. (See “Selecting Custom Arc Shutdown and Detect Times” on page 4-35.) The micro arc counter counts one arc every time an arc is extinguished. Both counters return to 0 when the output is cycled off and then back on.
Pinnacle™ 10x6 kW 1. Press PROCESS → ARC → TIMES → PREDEFINED. 2. Use the MODIFY knob to select “Metal” or “Non-Metal” for Side A. 3. Press ENTER. 4. Use the MODIFY knob to select “Metal” or “Non-Metal” for Side B. 5.
® Advanced Energy This function enables or disables the arc handling functions of the Pinnacle unit. In most configurations, default at power up is arc handling enabled. If you choose to disable arc handling, your Pinnacle unit will not respond to arcs, which could potentially damage your process tool.
Page 71
Pinnacle™ 10x6 kW The following equation is used to determine if the ramp is achievable by the processor: (setpoint - start_setpoint / ramp steps (in 10ms increments)) = delta_setpoint The start_setpoint is equal to (truncation)((setpoint * ramp_start_setpoint_percentage) / 100) Note: Because this calculation does not allow a fractional portion, the ramp will be more accurate with a greater separation between start and end setpoints.
® Advanced Energy Setting Joule Mode PROCESS → CONTROL → JOULES This option lets you use joule mode, a method of automatically delivering a specified number of joules to the target. Choose THRESHOLD to specify a watt level to begin calculation, thereby enhancing the accuracy of the calculation by disabling the calculation during ignition.
Pinnacle™ 10x6 kW 5. Press the soft key for Side B. 6. Rotate the MODIFY knob select a value between 0 and 9,999,999 joules (in 1 joule increments.) for side B. If you are rotating the MODIFY knob slowly, press the appropriate soft key to indicate how quickly you want the display to increment the value (x1000, x100, x10 or x1).
® Advanced Energy When TCC is enabled, the TCC algorithm executes automatically the first time the output is turned on. The TCC timer feature lets you set an acceptable idle time for subsequent runs. If the output is off for less than the idle time, the TCC algorithm does not re-initiate upon the next on command.
Pinnacle™ 10x6 kW – Side: A or B – Setpoint Source: i = internal, e = external – Setpoint – Regulation Mode The following information appears in the bottom line of the display (left to right): – Status Features: a combination of the following letters appears in the status features area of the display, depending on which is enabled.
® Advanced Energy complete list of available functions, see “Host/Pinnacle Software Commands” on page 4-48. To obtain a diskette containing sample software as well as an executable version of the AE Bus Host software, please call AE Customer Support. Note: The flash port is not available for serial communications on Pinnacle supplies with AE Bus, DeviceNet, or master/slave with AE Bus Host cards installed.
Pinnacle™ 10x6 kW Transmission Parameters The communications capability of the Standard Serial port is limited to the following parameters: Note: These transmission parameters do not apply for units with AE Bus, DeviceNet, or master/slave Host cards installed. For more information, see either the DeviceNet or AE Bus section in this chapter.
Pinnacle™ 10x6 kW OPTIONAL This field exists to supplement the Header field. The Optional field contains a value only when the length bits in the Header field contain a value of 7. (A value of 7 indicates that the Data field contains more than 6 bytes of data.) Under those circumstances, the Optional field contains a one-byte value (between 7 and 255) indicating the actual length of the Data field.
® Advanced Energy Creating an Ideal Communications Transaction Figure is a simplified graphic showing the steps in an ideal communications transaction between a host computer and a Pinnacle unit. Host Pinnacle Figure 4-12. Communications transaction First, the host computer sends a message packet to the Pinnacle unit. The packet contains one of the following: •...
Pinnacle™ 10x6 kW acknowledgment (NAK) with a hex code of 15h to the host. If the address is correct and the message is intact, the Pinnacle unit sends an acknowledgment ACK with a hex code of 06h to the host. If the Pinnacle unit receives a request for data or status information, it gathers and sends the requested information.
® Advanced Energy Table 4-13. Command Status Response (CSR) Codes (Continued) Bus is not ready This feature is not available on your unit A front panel is active Regulation mode is invalid Ramp invalid (Reset ramp start setpoint parameter to valid setting.) Target life has been consumed Unit is disabled Joule setpoint has not been reached...
Pinnacle™ 10x6 kW Commands 1 through 127 change the value of a parameter or direct the power supply to perform a specific function. Note: The master/slave functions listed in this section apply only to Pinnacle supplies with a master/slave Host card installed Table 4-14.
Page 84
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Specifies the output setpoint level for CSR only setpoint whichever method of regulation mode has been selected. Send 2 data bytes (16- bit value);...
Page 85
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Specifies the amount of time that CSR only arc shutdown constitutes an arc and the amount of time detect times the power supply shuts down after an arc;...
Page 86
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Sets the number of hard arcs required for CSR only hard arc the power supply to provide an arc count limit indication.
Page 87
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Sets the life (in kilowatt-hours) of the CSR only target life target you specify. Send 1 data byte (8-bit value) plus 4 data bytes (32-bit value), arranged as follows: •...
Page 88
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Tells the Pinnacle supply whether the CSR only program source of information for regulation source mode and setpoints is internal or external (the source can be set independently for each of the three control modes).
Page 89
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Specifies the output power level that joule needs to be met before the Joule output threshold energy calculation begins.
Page 90
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Enables or disables an out-of-setpoint CSR only out-of- timer and specifies how long you want setpoint timer the power supply to tolerate an out-of- setpoint condition before shutting off...
Page 91
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Enables or disables a voltage lower limit CSR only process value for the process (8-bit value): voltage limit 0 = disable on/off...
Page 92
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Sets a maximum limit for output current. CSR only user current Accuracy is +0.3% of the full rated limit output current for the supply.
Page 93
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Enables or disables TCC. Enabling the CSR only TCC enable TCC places setpoint and arc handling under microprocessor control, letting you achieve fast, automated target conditioning.
Page 94
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Sets an acceptable idle time during TCC. CSR only TCC timer When TCC is enabled, the TCC algorithm executes automatically the first time output is turned on.
Page 95
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests the output capacity of the request power supply; the returning packet supply size contains 6 characters indicating capacity in kilowatts.
Page 96
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests the output current limit you set request user with Command 51. Accuracy is +0.3% of current limit the full rated output current for the supply.
Page 97
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests the amount of target life time request target (set by Command 12) remaining for the life target you specify.
Page 98
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests a report on process status; the request returning packet contains 4 data bytes. process status 1st status byte: 0 = unassigned 1 = unassigned...
Page 99
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests the system configuration status; request the returning packet contains 2 data config status bytes. 1st status byte: 0 = host program source (0 = internal, 1 = external)
Page 100
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests the setpoint level (set by request Command 6) by whichever method of setpoint/ output regulation has been selected (set regulation by Command 3);...
Page 101
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests a snapshot of the output power, request voltage, and current at that instant; the actual power, returning packet contains 6 data bytes: voltage,...
Page 102
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests the target type you selected request target with Command 30. The returning packet type contains 1 data byte (8-bit value): 0 = metal target non-zero value = non-metal target...
Page 103
Pinnacle™ 10x6 kW Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests the arc density that occurred in arc density the previous second; returning packet per second contains 4 data bytes.
Page 104
® Advanced Energy Table 4-14. Host Port Commands (not available with DeviceNet) (Continued) Command Description Number of Number of Host Data Response Bytes Data Bytes Requests the revision level of the request s/w mainframe software; the returning packet rev level— contains 12 ASCII characters.
Unpack and inspect your power supply carefully. Check for obvious physical damage. If no damage is apparent, proceed with the unit connections. If you do see signs of shipping damage, contact Advanced Energy Industries, Inc., and the carrier immediately. Save the shipping container for submitting necessary claims to the carrier.
Pinnacle™ 10x6 kW COOLING REQUIREMENTS For the Pinnacle supply to be sufficiently cooled, the cabinet must be set up to: • Bring in coolant air of the correct temperature (40ºC maximum) • Distribute coolant air to the power supplies • Prevent air exhausted from the cabinet from circulating back and becoming input air •...
® Advanced Energy Table 5-2. Approximate Cooling Requirements for Three Supplies Mounted in a Cabinet Type of CFM for 3 Total Power Dif. in Temp. Pinnacle Supplies Dissipation Between Supply Coolant & Exhaust Air 300 CFM 1800 W 20ºC 6 kW (100+100+100=300) (600+600+600=1800) 360 CFM...
® Advanced Energy MAKING REAR PANEL CONNECTIONS RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power before working on this unit or anything connected to it. Operating and maintenance personnel must have the correct training before setting up and maintaining high-energy electrical equipment.
Pinnacle™ 10x6 kW Connecting a Remote Passive Panel Connections for a remote passive front panel are made through the female, 15-pin, subminiature-D connector labeled REMOTE PASSIVE PANEL on the rear panel. The rear of the remote passive panel features a male, 15-pin, subminiature-D connector. Use the cable provided with the remote passive panel to connect the panel to your Pinnacle unit.
® Advanced Energy Pin 3 can sink 60 mA, and the voltage on pin 4 should not exceed 20 V. On the 400 V Pinnacle supply, pins 1 and 2 on this port are feedback connections from a set of (normally open) auxiliary connectors on the main contactor.
Page 119
Pinnacle™ 10x6 kW This device must be used in an overvoltage category II installation only. If your unit does not have a circuit breaker, install and operate it with an AE-approved circuit breaker on the ac input to provide the required over-current protection. To connect your system to the power supply, you need stranded wire of a gauge consistent with your application and applicable requirements.
® Advanced Energy Connecting Output Power RISK OF DEATH OR BODILY INJURY. Disconnect and Lockout/Tagout all sources of input power before disconnecting output cables. Disconnect all sources of input power before working on this unit or anything connected to it. This unit must be installed so that the input and ouput connections are inaccessible to the user.
Pinnacle™ 10x6 kW UHF CONNECTOR RISK OF DEATH OR BODILY INJURY. All units with UHF connectors must be installed so that the output connections are inaccessible to the operator. The output connector for your Pinnacle supply may be a female UHF connector. A strain relief box is provided with the connector, but the mating connector and the output cable are not provided.
® Advanced Energy Military Specification Number The military specification number for the Pinnacle unit’s female, UHF output connector is SO-239. When working with this connector, use tools appropriate for military specification SO-239 and assemble connecting materials according to specifications. UHF Connection With Interlock The UHF connector provides interlock.
Pinnacle™ 10x6 kW NEGATIVE OUTPUT WITH THREE-TERMINAL, MULTI-CONTACT CONNECTOR The most common output configuration for sputtering applications is negative output (negative voltage with respect to ground). To achieve negative output, connect the Pinnacle unit's negative terminal on the output connector to the chamber's cathode. Connect the positive terminal on the unit's output connector to the chamber's common or ground.
Pinnacle™ 10x6 kW Figure 5-11. Optimal output connection for 10 kW using triax cable The most effective output connection has the following qualities: 1. The outer shield should be terminated at one end only. (If the shield is terminated both at the Pinnacle unit and at the load, the outer shield could carry some of the load current, causing the cable to radiate noise.) Terminate the outer shield at the ground connection provided at the Pinnacle output connector only (leaving the shield unterminated at the...
® Advanced Energy Figure 5-12. Two styles of cables for optimal output connection Two styles of output cabling satisfy both of the described conditions: “triax” cabling and “twinax” cabling (see Figure 5-12 on page 5-16). Triax cable is much like coax cable, except that triax contains an additional shield that surrounds an inner shield and center conductor.
Pinnacle™ 10x6 kW Chapter Chapter Operation OPERATING OVERVIEW The following list represents a general description of how to operate a Pinnacle unit. You will want to adapt this list to your Pinnacle configuration and your application, environment, and requirements. Note: If an error code (that is, an “E xx” code) appears on the front panel or on the Pinnacle Remote Active Panel, refer to the “Troubleshooting”...
® Advanced Energy 7. If necessary, enable target life counters and select a target life for each applicable target (available only through the serial port, the active front panel, or the Pinnacle Remote Panel). 8. If necessary, enter appropriate arc-handling parameters for your normal process cycle and, if needed, for your target conditioning cycle (available only through the serial port, active front panel, or the Pinnacle Remote Panel).
Pinnacle™ 10x6 kW In addition to shipping with arc handling enabled, the Pinnacle ships with these arc handling defaults: metal target, 50 V trip level. These settings provide the highest through-put with minimal arc damage to metal targets. You can change these and other arc handling settings through the Pinnacle Remote Active Panel or the serial port.
® Advanced Energy Target Type: Metal Use the metal setting only for metal targets. Indicating a metal target pre-selects an arc detect delay time of 0 µs during a normal process cycle and 20 µs during the TCC. It sets an arc shutdown time of 30 µs during both a normal cycle and the TCC.
Pinnacle™ 10x6 kW Arc Shutdown Time Arc shutdown time is the length of time that the Pinnacle supply interrupts power flow in response to an arc. Selecting a target type of “metal” or “non-metal” will pre-select arc shutdown times for you. However, if you want a custom arc shutdown time, select one based on system conditions.
Page 134
® Advanced Energy Operation 5702063-C Page 134 of 160...
Pinnacle™ 10x6 kW Chapter Chapter Troubleshooting and Customer Support BEFORE CALLING AE GLOBAL SUPPORT RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power before working on this unit or anything connected to it. Operating and maintenance personnel must have the correct training before setting up, maintaining, or troubleshooting high-energy electrical equipment.
® Advanced Energy 6. Ensure that input power meets specifications. (See the “Specifications” chapter for specifics.) 7. Ensure ground connections are adequate and secure. 8. Check the position of the switches on the DIP for the serial (Host) port (if your unit has a Host port) against the addressing information in the “I/O Communication and Control”...
Pinnacle™ 10x6 kW 9. Determine whether the cooling fans are functioning, and ensure your cabinet allows for adequate ventilation for all the units in the cabinet. (To determine the correct volumes, see the “Installation” chapter.) If the fans are not functioning properly, call AE Global Support.
Page 138
® Advanced Energy Table 7-1. Help Code Troubleshooting Table (Continued) Help Code Problem Indicated Suggested Action Number and Message H002 The main contactor has not A fault may exist in your Contactor is Open closed. system. Power off the Pinnacle unit.
Page 139
Pinnacle™ 10x6 kW Table 7-1. Help Code Troubleshooting Table (Continued) Help Code Problem Indicated Suggested Action Number and Message H007 After selecting a target other Use the User port to select the User Port has Priority than 1 from the User port, you target.
Page 140
® Advanced Energy Table 7-1. Help Code Troubleshooting Table (Continued) Help Code Problem Indicated Suggested Action Number and Message H016 The requested action could not TCC, Ramp, and Recipe B: TCC Mode be performed, because the TCC features are mutually exclusive. Enabled feature is enabled on Side B.
Pinnacle™ 10x6 kW Passive Display Panel Codes When only a Passive Front Panel (PFP) is available, the Pinnacle unit will display 4 character strings on start up to identify personality cards installed in the unit. A code will flash once for each card installed.
® Advanced Energy Table 7-3. Troubleshooting LEDs (Continued) Status INTERLOCK Normal INTERLOCK An interlock fault condition exists. Note the error code on the display and see “Error Code Troubleshooting Table” on page 7-9. BUS FAULT A bus fault condition exists. Note the error code on the display and see “Error Code Troubleshooting Table”...
Pinnacle™ 10x6 kW • Through the AE Bus interface, serial port or Profibus interface send the OFF command, then send the ON command to turn on output. • Through the User port interface, release and reestablish closure between pins 4 and 9 to turn off and on the output.
Page 144
® Advanced Energy Table 7-4. Error Code Troubleshooting Table (Continued) Error Code Number Problem Indicated Suggested Action and Message E004 The unit is overheating. Inspect the unit's cooling system Heat Sink Over- and review cooling specifications: Temperature ensure that the input air temperature is correct, that the Pinnacle unit's fans are functioning properly, and that...
Page 145
Pinnacle™ 10x6 kW Table 7-4. Error Code Troubleshooting Table (Continued) Error Code Number Problem Indicated Suggested Action and Message E011 Side A's power inverter cannot Using all applicable safety Side A: Inverter Fault produce power. precautions, inspect your ac input Occurred power source to ensure that it is properly connected and that the...
Page 146
® Advanced Energy Table 7-4. Error Code Troubleshooting Table (Continued) Error Code Number Problem Indicated Suggested Action and Message E021 The cable between the logic Call AE Global Support. Interlock Open: Cable card and the inverter output board has come loose. E022 The unit's Contactor Interlock Power off the Pinnacle unit.
Page 147
Pinnacle™ 10x6 kW Table 7-4. Error Code Troubleshooting Table (Continued) Error Code Number Problem Indicated Suggested Action and Message E028 The end of target life timer has Select the active target and set a Side B: Reset Target expired or was never set for the new target life value.
Page 148
® Advanced Energy Table 7-4. Error Code Troubleshooting Table (Continued) Error Code Number Problem Indicated Suggested Action and Message E055 A Profibus command for Side Slow down the Profibus Profibus A: Mem A arrived before the last sent communication rate or the rate at Buffer Overflow command was executed and which commands are sent.
Page 149
Pinnacle™ 10x6 kW Table 7-4. Error Code Troubleshooting Table (Continued) Error Code Number Problem Indicated Suggested Action and Message Error Codes 70 through 79 are internal errors in the unit’s logic card microprocessor. E070 Internal software error. Call AE Global Support. Processor: Divide by zero E071...
Page 150
® Advanced Energy Table 7-4. Error Code Troubleshooting Table (Continued) Error Code Number Problem Indicated Suggested Action and Message E086 The setpoint you have Re-set the setpoint to a value Side B: Setpoint requested exceeds an output lower than the existing output Exceeds User Limit limit that you previously limit.
Pinnacle™ 10x6 kW Table 7-4. Error Code Troubleshooting Table (Continued) Error Code Number Problem Indicated Suggested Action and Message E520 Single user card on Side B has Power off the Pinnacle unit. User Interlock Open: an open interlock on the Vac Ensure that the User interlock is pin.
Pinnacle™ 10x6 kW In order to claim shipping or handling damage, you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods. Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged.
Page 154
® Advanced Energy the date the goods are shipped from AE. In all cases, the seller has sole responsibility for determining the cause and nature of the failure, and the seller's determination with regard thereto shall be final. 7-20 Troubleshooting and Customer Support 5702063-C Page 154 of 160...
Page 155
Pinnacle™ 10x6 kW Index accuracy back panel illustration 5-17 analog signals 3-4 baud rate output 3-4 setting (DeviceNet) 4-5 readback 3-5 before operation, read this 1-1 user-defined limits 3-5 active front panel cabinet design 5-3 see control panel checksum 4-43 addressing clearance DeviceNet 4-5...
Page 156
® Advanced Energy selecting 6-1 addressing 4-5 switch 4-17 baud rate, setting 4-5 control panel 4-13 communication 4-6 ARC LED 4-16 connecting 5-8 connecting 5-6 explicit messaging 4-9 CONTROL switch 4-15 4-17 installation 4-5 illustration 4-17 LEDs 4-9 interface overview 4-16 operation 4-6 local, host, and user modes 4-15 4-17...
Page 157
Pinnacle™ 10x6 kW installing contactor interlock 5-7 faults DeviceNet 4-5 explicit clear 7-8 grounding the unit 5-6 self-clearing 7-8 in a cabinet 5-3 see also error codes input power 5-8 flash port 4-41 multiple units in a cabinet 5-5 description 4-42 output 5-10 pin descriptions 4-42 Remote Active Panel 4-14...
Page 158
® Advanced Energy local mode 4-15 4-17 impedance range 2-1 locking control panel 4-26 installation safety warning 5-10 interlock with UHF connector 5-12 negative configuration 5-13 memory, checking ROM 4-24 ON/OFF switches 4-16 4-17 menu polarities 3-5 control panel 4-19 power range (graph) 3-7 message packet 4-43 range, standard 3-4...
Page 159
Pinnacle™ 10x6 kW setting joule mode 4-38 scaling setting limits 4-30 analog interface 3-5 setting setpoint 4-40 DeviceNet (poll command) 4-7 target conditioning cycle 4-39 DeviceNet (response message) 4-8 program source, setting 4-26 SELV requirements 5-10 protocol, communications 4-43 serial (Host) port connecting 5-7 service menu 4-19 ramp, setting 4-36...
Page 160
® Advanced Energy setting AE Bus timeout 4-25 error messages 7-9 setting panel mode 4-25 first check 7-1 setting supply parameters 4-25 help codes 7-3 setting the program source 4-26 LEDs 7-2 turning on one inverter 4-27 passive display panel codes 7-7 supply parameters, setting 4-25 twinax cable 5-16 switches, rotary (DeviceNet) 4-5...
Need help?
Do you have a question about the Pinnacle 10x6 kW and is the answer not in the manual?
Questions and answers