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BOC Edwards EXC100L Instruction Manual

Turbomolecular pump controller
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Instruction Manual
EXC100E and EXC100L Turbomolecular Pump
Controllers
Description
EXC100E Turbomolecular Pump Controller
EXC100L Turbomolecular Pump Controller
Edwards High Vacuum International
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453
http://www.bocedwards.com
D396-20-880
Item Number
D396-20-000
D396-22-000
Issue F

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Summary of Contents for BOC Edwards EXC100L

  • Page 1 D396-20-880 Issue F Instruction Manual EXC100E and EXC100L Turbomolecular Pump Controllers Description Item Number EXC100E Turbomolecular Pump Controller D396-20-000 EXC100L Turbomolecular Pump Controller D396-22-000 Edwards High Vacuum International Manor Royal, Crawley, West Sussex, RH10 2LW, UK Telephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453...

  • Page 3: Table Of Contents

    CONTENTS Section Title Page INTRODUCTION Scope and definitions Description Connection of an Active gauge Logic interface 1.4.1 Introduction 1.4.2 Electrical supplies 1.4.3 Control inputs 1.4.4 Status outputs 1.4.5 Analogue outputs Vent-valve control 1.5.1 Introduction 1.5.2 Vent on Stop Controller Fail conditions 1.6.1 General 1.6.2...

  • Page 4: Title

    Disposal SERVICE, SPARES AND ACCESSORIES Introduction Service Accessories 7.3.1 Electrical supply cable 7.3.2 Pump-to-controller cable 7.3.3 BX bakeout band 7.3.4 TAV vent-valve 7.3.5 ACX air-cooler 7.3.6 Active vacuum gauges ENGINEERING DIAGRAMS RETURN OF BOC EDWARDS EQUIPMENT EXC Turbomolecular Pump Controllers...
  • Page 5 Rear panel of the Controller (EXC100E shown) Dimensions (mm): EXC100E shown Reconfigure the Controller (EXC100L shown) Schematic diagram of Controller electrical connections Normal Speed and Internal Timer potentiometers (EXC100L shown) EXC Controller to EXT pump connections Active Gauge connector Tables...
  • Page 6 EXC Turbomolecular Pump Controllers...

  • Page 7: Introduction

    Scope and definitions This manual provides installation, operation and maintenance instructions for the BOC Edwards EXC100E and EXC100L Turbomolecular Pump Controllers. You must use the Controller as specified in this manual. Read this manual before you install and operate the Controller. Important safety information is highlighted as WARNING and CAUTION instructions;...

  • Page 8: Description

    The rear-panel of the Controller has a Normal LED (Figure 1, item 6). The LED is on whenever the TMP Normal status output signal is low: refer to Section 1.4.4. The EXC100L Controller has an integral pump-to-controller cable. The EXC100E Controller has a mating connector suitable for a pump-to-controller cable accessory (not supplied): refer to Section 7.

  • Page 9: Connection Of An Active Gauge

    AIM gauge in the event of a failure of the external electrical supply to the Controller (see Section 1.2). You can connect an BOC Edwards AIM Active Inverted Magnetron Gauge directly to the active gauge connector on the Controller and use the Controller TMP Normal signal to switch the gauge on.

  • Page 10: Electrical Supplies

    1.4.2 Electrical supplies Two nominal 24 V supplies are provided, as described below: Vent-valve supply This electrical supply is provided to operate a vent-valve fitted to your EXT pump or vacuum system. The Controller automatically opens the valve when the speed of the pump falls to below 50% of full rotational speed.

  • Page 11: Analogue Outputs

    TMP Fail TMP Fail is normally low and goes high when the Controller trips into a Fail condition (see Section 1.6). TMP On The TMP On signal mimics the operation of the vent-valve. If you select Vent On Stop (see Section 1.5.2), TMP On is normally high and goes low when the electrical supply to the EXT pump is switched on by the Controller.

  • Page 12: Vent On Stop

    1.5.2 Vent on Stop If Vent on Stop is selected when you switch the Controller on, the vent-valve electrical supply remains off until Start is selected. When Start is selected, the Controller switches the vent-valve electrical supply on. If Stop is then selected, the Controller switches the vent-valve electrical supply off again.

  • Page 13: Internal Timer

    1.6.2 Internal Timer The Internal Timer has two functions: Firstly, when the EXT pump is started by the Controller, the Internal Timer in the Controller also starts. If the EXT pump does not reach 50% of full rotational speed within the preset time measured by the timer, the Controller will trip into Fail condition.
  • Page 14 Electrical supply connector Logic interface connector Earth (ground) stud Active gauge connector EXT pump connector * Normal LED * EXC100E only; the EXC100L has an integral pump-to-controller cable Figure 1 - Rear panel of the Controller (EXC100E shown) EXC Turbomolecular Pump Controllers...

  • Page 15: Technical Data

    3000 m Cooling Natural convection Mechanical data Dimensions See Figure 2 Mass EXC100E 0.8 kg EXC100L 1.0 kg Enclosure protection IP20 (as defined by IEC529) Pollution degree IEC664, category 2 Electrical data Electrical supply Voltage 90 to 264 V a.c., single-phase...

  • Page 16: Logic Interface

    Logic interface Remote control signals Control voltage: low (close) < 0.8 V d.c. Control voltage: high (open) 4 to 24 V d.c. 80 µA Maximum input current (at 24 V) 160 µA Maximum output current (at 0 V d.c.) Air-cooler electrical supply Voltage range +20 to +26 V d.c.
  • Page 17 Rear view Clearance for ventilation Top view Clearance for cables Side view Optional mounting plate Figure 2 - Dimensions (mm): EXC100E shown EXC Turbomolecular Pump Controllers...

  • Page 18: Installation

    INSTALLATION Unpack and inspect Remove all packing materials and check the Controller. If the Controller is damaged, notify your supplier and the carrier in writing within three days; state the Item Number of the Controller together with your order number and your supplier’s invoice number. Retain all packing materials for inspection.
  • Page 19 10. Link LK5 active: Vent On Stop selected Link LK1 in speed configuration 11. Link LK4 not active: Timer disabled Link LK1 in power configuration 12. Link LK4 active: Timer enabled Figure 3 - Reconfigure the Controller (EXC100L shown) EXC Turbomolecular Pump Controllers...

  • Page 20: Enable/Disable The Internal Timer To Monitor Low Pump Speed

    3.2.3 Enable/disable the Internal Timer to monitor low pump speed Notes: If you pump a high gas load when the Internal Timer is enabled (link LK4 in the enabled position: Figure 3, item 12), the EXT pump may stall before the Controller trips into Fail condition. Ensure that oil which backstreams from the backing pipeline will not adversely affect your process.

  • Page 21: Fit The Controller

    Fit the Controller WARNING The Controller contains electrolytic capacitors and, under certain fault conditions, may emit dangerous fumes. Ensure that the Controller is operated in a well-ventilated area. CAUTION You must allow the correct clearances for air circulation and you must fit the Controller onto a thermally conductive surface.
  • Page 22 Pin number Signal Polarity* Signal type TMP On (low when pump is on) TMP Fail (high when fail condition exists) Status outputs Status output common TMP Normal (low when pump is at Normal speed) Control Start/Stop: Close for Start input Control Standby: Close for Standby input...
  • Page 23 Vacuum and control system External electrical supply TMP Normal output (normally open)* EXC Controller Electrical supply connector 10. Remote indicator equipment Earth (ground) 11. Air-cooler Live electrical supply AIM active gauge 12. Vent-valve Neutral electrical supply Active gauge connector 13. External Standby switch Earth (ground) electrical supply Logic interface connector 14.

  • Page 24: Connect The Electrical Supply

    Connect the electrical supply WARNING High voltages exist in the Controller when it is operating. Ensure that the Controller is earthed (grounded) and observe all appropriate safety precautions for the safe installation and handling of electrical equipment. If you do not, there will be a danger of injury or death to people by electric shock.

  • Page 25: Connect The Ext Pump

    Connect the EXT pump If you have an EXC100L Controller, fit the connector on the end of the integral pump-to- controller cable to the connector on the EXT pump. If you have an EXC100E Controller, use a pump-to-controller cable (not supplied) to connect the Controller to the EXT pump.

  • Page 26: Connect A Vacuum Gauge To The Logic Interface

    Connect a vacuum gauge to the logic interface You can connect an BOC Edwards APG Active Pirani Gauge to the Controller so that the setpoint output of the gauge sets the Start/Stop input on the logic interface, to switch on the EXT pump.
  • Page 27 Normal speed potentiometer Timer potentiometer Figure 5 - Normal Speed and Internal Timer potentiometers (EXC100L shown) EXC Turbomolecular Pump Controllers...

  • Page 28: Operation

    OPERATION Start-up Notes: If you wish, you can start the backing pump and the EXT pump at the same time; the EXT pump will not be damaged and can operate as an effective baffle. However, if the system pressure remains too high for the EXT pump to reach 50% of full rotational speed in the preset time (set by the Internal Timer), the Controller will trip into Fail condition: refer to Section 3.11 for adjustment of the Internal Timer.

  • Page 29: Operation With High Pump Temperature

    Operation with high pump temperature Temperature sensors in the Controller and the EXT pump are monitored by the Controller. If the Controller detects that the pump temperature is too high, the power supplied to the pump-motor is reduced; the pump may not therefore be able to maintain full rotational speed if it is too hot.

  • Page 30: Electrical Supply Failure

    Electrical supply failure If the electrical supply to the Controller fails when the EXT pump is rotating: • The motor of the EXT pump is used as a generator and the electrical supplies for the vent-valve, air-cooler and AIM gauge (if connected) and the associated control logic are maintained until the pump speed falls to 50% of full rotational speed, then the electrical supplies are switched off.

  • Page 31: Maintenance

    If necessary, use a soft dry cloth to clean the exterior of the Controller. If you need to clean the interior of the Controller, we recommend that you return the Controller to your supplier or your nearest BOC Edwards Service Centre. Fault finding If the Controller shuts down because of Fail condition, refer to the appropriate sections of this manual to determine the cause of the Fail condition.

  • Page 32: Storage And Disposal

    STORAGE AND DISPOSAL Storage Fit protective covers over the electrical connections and store the Controller in clean dry conditions until required. When required for use, prepare and install the Controller as described in Section 3 of this manual. Disposal WARNING Do not incinerate the Controller.

  • Page 33: Service, Spares And Accessories

    SERVICE, SPARES AND ACCESSORIES Introduction BOC Edwards products, spares and accessories are available from BOC Edwards companies in Belgium, Brazil, Canada, France, Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United Kingdom, U.S.A and a world-wide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive BOC Edwards training courses.

  • Page 34: Pump-To-Controller Cable

    7.3.2 Pump-to-controller cable A pump-to-controller cable must be used with each pump. It is not supplied with the EXT pump or with the EXC100E Controller. The following cables are available: Cable Item Number Pump-to-controller cable, 1 m D396-18-010 Pump-to-controller cable, 3 m D396-18-030 Pump-to-controller cable, 5 m D396-18-050...

  • Page 35: Acx Air-Cooler

    7.3.5 ACX air-cooler An ACX air-cooler can be fitted to the EXT pump and can be operated automatically from the Controller. However, please refer to Section 3 of the instruction manual for the EXT pump to check the suitability of air cooling in a particular application. Air-cooler Item Number ACX70...
  • Page 36 Hall effect device 1 EXC Controller Hall effect device 2 Hall effect device 3 Pump temperature sensor * EXC100E controller only; the EXC100L has an integral cable Figure 6 - EXC Controller to EXT pump connections EXC Turbomolecular Pump Controllers...
  • Page 37 Figure 7 - Active gauge connector pins Signal Power supply +24 V d.c. Power supply 0 V d.c. Not used Gauge identification signal Not used Not used TMP Normal status output Not used Table 6 - Active gauge connector pins EXC Turbomolecular Pump Controllers...
  • Page 38 EXC Turbomolecular Pump Controllers...

This manual is also suitable for:

Exc100eD396-22-000D396-20-000

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