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Summary of Contents for IWAKI WALCHEM FZ-20T
- Page 1 IWAKI WALCHEM AIR DRIVEN BELLOWS PUMP FZ-20T INSTRUCTION MANUAL...
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Page 2: Table Of Contents
INTRODUCTION Thank you for selecting an Iwaki Walchem FZ-20T Air Driven Bellows Pump. These pumps are designed exclusively for pumping semiconductor grade, high purity liquids. To ensure safety and maximum service life of the pump, please read this instruction manual thoroughly prior to installation and operation. -
Page 3: Unpacking And Inspection
B E L L O W S "A " Iwaki Walchem F Series Air Driven Bellows Pumps consist of a high purity virgin fluoroplastic pump head assembly with dual bellows and internal valving. A bellows is affixed on each side of the pump head assembly which houses the suction and discharge valves. - Page 4 4 w a y S o len oid Operation Sequence: R eg ula tor valve A ir sup ply sou rce P ro xim ity P ro xim ity se n so r A se n so r B Iw a k i W alch e m C on troller o r H o s t P L C , C o m p u te r Figure 2 Refer to Figure 2.
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Page 5: Identification Codes
3. Pump connection port (discharge port/suction port): T: 3/4"O.D. PFA tubing 4. Special specifications No symbol: Standard specification S: Special specification Specifications n n n n n FZ-20T Pump Specifications Max. discharge volume Note 1 5.8 GAL/min (22 L/min) Max. stroke speed 120 spm Max. - Page 6 Sensor Specifications (for FZ-20T pumps) Type High frequency oscillation switch Output System NPN DC open/close output Power source voltage +12 VDC/+24 VDC (10 - 30 VDC), less than 10% p-p ripple allowance rate Current consumption...
- Page 7 FZ-20T Pump Dimensions/Mass Mass: 20.9 lbs (9.5kg) 0 .2 " (5 m m ) 11 .3 4" (28 8m m ) 1 2.13 " (3 08 m m ) 1 3.54 " (3 44 m m ) Front View 0 .79 "...
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Page 8: Handling Precautions
The following information deals with measures to ensure safe operation of the pump system. Please read the precautions carefully. To operate this pump, a 4-way solenoid valve and a controller (Iwaki Walchem supplied model or host PLC) are required. In addition, to enhance system safety, a quick exhaust valve is recommended for air exhaust lines. - Page 9 n n n n n Pump Handling Precautions • Do not stop pump without opening discharge first: When stopping pump operation, first release pressure in the discharge line & then shut off supply air pressure. Residual pressure in the liquid discharge piping may result in deformation of the bellows due to the force of hydraulic pressure.
- Page 10 The bellows may be deformed as a result of excessive pneumatic backpressure. Quick exhaust valves are recommended. • Pulse dampeners: To reduce vibration in the liquid piping system or eliminate pulsation in the liquid flow stream, a full series of pulsation dampeners are available from Iwaki Walchem. n 10...
- Page 11 n n n n n Liquid Circulation System Design Recommendations In typical semiconductor wet process liquids, a catalyst such as H O, O or H is added to the process liquid. The subsequent reaction generates heat and produces extreme gassing of the liquid. Measures should be taken to reduce the amount of gas laden liquid which can enter the pump chambers.
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Page 12: Installation, Piping And Wiring
*Note: The self-priming capacity of F series pumps is based on a pump operating at maximum speed using pure water at room temperature. The suction lift capacity differs with liquid characteristics, temperature, suction piping configuration and pump model. For detailed information, contact Iwaki Walchem Corporation. n 12... - Page 13 * The suction height differs with the liquid's characteristics, temperature & suction pipe length. For more detailed information, contact Iwaki Walchem Corporation. 2. Install a filter or strainer with low piping resistance on the suction piping to block the entrance of solid particles or wafer fragments.
- Page 14 CAUTION! Wafer fragments inside the pump may get stuck in the bellows and cause damage. If solid matter clogs the pump's valves, internal suction or discharge volume may be affected with the normal checking function disabled. 3. When installing a valve on suction piping, select a valve with a larger orifice than the inner diameter of the pipe.
- Page 15 Air Piping It is critical that all pneumatic piping and components be sized according to the porting of the pump. Full port components with matching effective cross-sectional area are recommended. 1. Effective cross-sectional area indicates the capacity to allow air to flow freely. When air is sent through a pipe, the air cannot run totally through the actual cross-sectional area of the pipe due to the negative effect of the piping resistance.
- Page 16 3. Install a safety valve: Install a safety valve after the air pressure regulator to prevent the supply air pressure from exceeding recommended maximum ratings. 4. Installation positions of regulating valve and 4-way solenoid valve. Install these valves as close to the pump as possible, in consideration of operating efficiency and pressure loss.
- Page 17 Figure 9 PNEUMATIC PIPING/CONTROL (FZ-20T SHOWN) O U T O U T Q u ick P rim ary e xha u st A ir e xh au st va lve E X H S w itch e d a ir...
- Page 18 Connect the two wires from the 4-way solenoid valve to terminals no. 1 (+) and 2(-) of the controller. Termi- nals no. 1 and 2 of the AC-1 controller have polarity, the standard Iwaki Walchem 4-way solenoid valve also has no polarity. Some types with a built-in surge suppressor have polarity, which requires special attention to the wiring polarity.
- Page 19 • Wiring for proximity sensor CAUTION! The proximity sensors of the F series pump have three leads. Faulty wiring may cause the proximity sensor to short circuit. Carry out the wiring carefully and accurately. • Connect the leads of proximity sensor A with terminals 6, 7, and 8 respectively of the controller. •...
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Page 20: Operation
Operation Carry out the following preparatory steps when starting pump operation for the first time after installation or after a long suspension of the pump operation. 1. Confirm that all liquid connectors along the liquid piping system are fastened tightly. 2. -
Page 21: Troubleshooting Guide
8 Troubleshooting Guide TROUBLE CAUSES COUNTERMEASURES INSPECTION & CHECK POINTS Pump does not Faulty operation of 1 Inspect and repair or a Install quick exhaust valves if operate. 4-way solenoid valve replace. damaged by corrosive gas. Wrong wiring or 1 Inspect and correct a Check if the three wires are disconnection in wiring. - Page 22 Lower supply air pressure or vibration or noise. excessively high. within the reduce air flow. specification. IWAKI WALCHEM CORPORATION 5 BOYNTON ROAD HOPPING BROOK PARK HOLLISTON, MA 01746 USA TEL: 508-429-1440 FAX: 508-429-1386 ON THE INTERNET: WWW.IWAKIWALCHEM.COM P/N II20338.A 9/96...
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