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Summary of Contents for Brooks Instrument PC100 Series
- Page 1 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 PC100 Series Ultra-High Purity Digital Pressure Control Devices PC115 Pressure Controller, Model PC125 Pressure Controller with Flow Meter...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 We appreciate this opportunity to service your pressure control and flow measurement requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of pressure control and flow measurement products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Perform a Leak Test ........................2-6 2-14 Zeroing the PC100 Series - Setup ....................2-6 2-14-1 Zeroing the PC100 Series Pressure Transducer from the LCD Display Panel (PC115 & PC125) ..2-6 2-14-2 Zeroing PC125 Series Flow from LCD Display Panel ..............2-8 2-15 Performance Checks ........................ - Page 6 LCD Display ..........................1-6 Dimensions - PC100 Series ......................1-8 Typical PC100 Series Configurations .................... 2-3 PC100 Series Mounting Attitude Positions for UPSTREAM Applications ........2-5 PC100 Series Mounting Attitude Positions for DOWNSTREAM Applications ....... 2-5 Display with PSI Reading ......................2-7 Display Reading Zero PSI ......................
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Page 7: Section 1 General Information
Built on the proven, advanced technology of the GF100 Series mass flow controllers, process throughput and yield are maximized while process costs are reduced. The PC100 Series is designed for semiconductor, MOCVD, and other pressure control applications that require a high purity all-metal flow path. -
Page 8: Product Support References
PC100 Series May, 2017 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the PC100 Series. Those documents include: Brooks DeviceNet Supplemental manual for PC100 Series: X-DPT-DeviceNet-PC100-PC-eng: Brooks PC100 Series Data Sheet:... - Page 9 All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 1-1 Industry Standard References Reference Number Reference Description MIL-STD-810 Method 514.4, Category 1, Transportation Requirement Method 516.4, Procedure 1, Functional Shock Test Requirement...
- Page 10 All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 1-2 Terms and Acronyms Term or Acronym Definition Customer Special Requirement Chemical Vapor Deposition DeviceNet A 5-wire local network I/O communication device...
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Page 11: Description
• Improved long-term stability High Purity Flow Path The Brooks PC100 Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C-22 valve seat and jet orifice. -
Page 12: Specifications For Pc100 Series Devices
The PC100 Series supports DeviceNet™ communication protocol. DeviceNet is a multi-drop connection that allows a maximum of 64 devices to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association). - Page 13 All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 1-3 Specifications - PC100 Series Performance Performance Performance Performance Performance PC115 PC115 PC115 PC115 PC115 PC125...
- Page 14 All manuals and user guides at all-guides.com Section 1 General Information Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 PC100 Series - VCR ® Configuration Figure 1-3 Dimensions - PC100 Series...
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Page 15: Section 2 Installation
PC100 Series May, 2017 2-1 General This section provides installation instructions for the Brooks PC100 Series Pressure Control Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks. -
Page 16: Transit Precautions
Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-5 Transit Precautions To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit. -
Page 17: Mechanical Installation
ID and baud rate switches (if equipped) at the top of the device. • Install the device in such a manner that permits easy purge and removal if the device requires servicing. 2-10 Flow Controller Installation Arrangement Typical configurations are shown below in Figure 2-1. Figure 2-1 Typical PC100 Series Configurations... -
Page 18: Purge The Gas Supply Line Before Pc100 Series Installation
If check valves are present in the gas line, both pumping down and purging are required. Pumping down without purging is inadequate. If a good vacuum source is not available, the PC100 Series can be de- contaminated by purge only. -
Page 19: Position And Mount The Pc100 Series
May, 2017 2-12 Position and Mount the PC100 Series Position the PC100 Series so that the gas flow is pointed in the direction of the flow arrow on the PC100 Series rear S/N label. The various mounting positions for UPSTREAM applications are described in Figure 2-2, and the mounting positions for DOWNSTREAM applications are described in Figure 2-3. -
Page 20: Perform A Leak Test
0.1%). If the output signal is too high, re-zero the PC100 Series as described below. 2-14-1 Zeroing the PC100 Series Pressure Transducer from the LCD Display Panel (PC115 & PC125) 1. Place the PC100 Series under a strong vacuum with the PC100 Series set to 100% set point. - Page 21 Figure 2-4 Display with PSI Reading Figure 2-5 Display Reading Zero PSI 2. Looking at the top of the PC100 Series, press the "Display" button, starting at the MACID, four times to "PSI", five times to "kPa" or six times to “Torr” until the LCD displays the labels "PSI", "kPa" or "Torr".
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Page 22: Zeroing Pc125 Series Flow From Lcd Display Panel
Section 2 Installation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 2-14-2 Zeroing PC125 Series Flow from LCD Display Panel 1. Place the PC125 Series under normal inlet operating pressure. Close the down stream valve to prevent any flow. -
Page 23: Performance Checks
2-15 Performance Checks This section describes how to zero and sequence the PC100 Series devices for proper operation. • The PC100 Series must be warmed up for at least 30 minutes. • The active gas page must be correct. •... -
Page 24: Electrical Connections
Connector (M) DeviceNet (M-12) Connector Cable Connection Drain 2 V+ (11-25 Vdc) CAN-H CAN-L Figure 2-9 PC100 Series DeviceNet Connection PDC Or PDC Or PDC Or PDC Or PDC Ordering Code D dering Code D dering Code D dering Code D... -
Page 25: Section 3 Operation
3-2 Theory of Operation for Pressure Control The PC100 Series measures pressure via its internal pressure transducer. When the system pressure changes, the PC100 Series will manipulate the flow to achieve and maintain pressure setpoint. Unlike traditional pressure control devices, the PC125 Pressure Controller leverages the mass flow measurement capability and sensor accuracy of the GF1xx Thermal Mass Flow series. - Page 26 All manuals and user guides at all-guides.com Section 3 Operation Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 27: Section 4 Maintenance & Troubleshooting
PC100 Series May, 2017 4-1 Overview No routine maintenance is required on the Brooks PC100 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. Any precision unit such as a flow controller requires occasional servicing, especially if it has been operating for an extended period of time. - Page 28 All manuals and user guides at all-guides.com Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017...
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Page 29: Troubleshooting
4-4 Troubleshooting Checklist 1. Verify all electrical and communication connections are correct. 2. Insure OEM tool setpoint matches the setpoint at the PC100 Series. Observe for consistency. 3. Verify isolations valves are open and the gas supply is turned on. Then verify operating pressures are within operating ranges. - Page 30 Is the MOD LED light on the PC100 Series Observe the LED display panel on top of to lit solid green? verify. If the LED light is not lit, cycle power the to reboot.
- Page 31 Adjust inlet pressure up or down by 2 psig increments until hunting disappears. Verify common gas pressure is within range. 7. PC100 Series does not read zero pressure when gas is shut off. Is the differential pressure across Verify that the pressure is correct for the PC100 Series really zero? the gas and range.
- Page 32 May, 2017 Table 4-2 PC100 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 8. OEM tool does not read correct PC100 Series pressure or flow meter zero reading. Is the differential pressure across the PC100 Series valve leakage.
- Page 33 All manuals and user guides at all-guides.com Section 5 Product Description Code Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Table 5-1 PC100 Series Product Description Code Table Code Description Code Description Code Option Code Option Option Description Option Description...
- Page 34 All manuals and user guides at all-guides.com Section 5 Product Description Code Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 35 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED).
- Page 36 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 37 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
- Page 38 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Page 39 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 40 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Page 41 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Page 42 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
- Page 43 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED).
- Page 44 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Page 45 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Page 46 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Page 47 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Page 48 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Page 49 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Page 50 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Page 51 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Page 52 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Page 53 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 54 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 55 All manuals and user guides at all-guides.com Installation and Operation Manual X-PR-PC100-Series-PC-eng Part Number: 541B207AAG PC100 Series May, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 56 Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks and MultiFlo are trademarks of Brooks Instrument, LLC All other trademarks are the property of their respective owners.
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