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Preiffer TM 700 EC Operating Instructions Manual

Electronic drive unit
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OPERATING INSTRUCTIONS
EN
Translation of the Original
TM 700 EC
Electronic drive unit

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Summary of Contents for Preiffer TM 700 EC

  • Page 1 OPERATING INSTRUCTIONS Translation of the Original TM 700 EC Electronic drive unit...

  • Page 2: Telegram Example

    Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new electronic drive unit is designed to support you in your individual applications with maximum performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.

  • Page 3: Table Of Contents

    Table of contents Table of contents About this manual Validity Applicable documents Target group Conventions 1.4.1 Instructions in the text 1.4.2 Pictographs 1.4.3 Stickers on the product 1.4.4 Abbreviations Trademark proof Safety General safety information Safety instructions Safety precautions Limits of use of the product Proper use Foreseeable misuse Product description...
  • Page 4 Table of contents 7.2.1 Gas type-dependent operation 7.2.2 Set value power consumption 7.2.3 Run-up time 7.2.4 Rotation speed switch points 7.2.5 Rotation speed setting mode 7.2.6 Standby 7.2.7 Confirming the speed specification 7.2.8 Backing pump operating modes 7.2.9 Backing pump standby mode 7.2.10Electric brake 7.2.11Operation with accessories 7.2.12Venting modes...
  • Page 5 Data types of the service data Tbl. 11: Administrative data (information about the device, communication) Tbl. 12: Input data (TM 700 EC --> Control) Tbl. 13: Output data (control -> TM 700 EC) Tbl. 14: Configuration data (control -> TM 700 EC) Tbl.
  • Page 6 List of figures List of figures Fig. 1: TM 700 EtherCAT connection panel Fig. 2: Connection diagram for TM 700 EC Fig. 3: Example for an EtherCAT cable connection Fig. 4: Hexadecimal coding switch Fig. 5: Connection options via interface RS-485 Fig.

  • Page 7: About This Manual

    The document shall remain valid provided that the customer does not make any changes to the product. 1.2 Applicable documents TM 700 EC Operating instructions Declaration of conformity A component of these instructions...

  • Page 8: Stickers On The Product

    1.4.3 Stickers on the product This section describes all the stickers on the product along with their meaning. Rating plate The rating plate is located on the side of the electronic drive unit. TM 700 EC Mod.: PM C01 854 M.-No.: Ser.-No.: 12345678 48 V ±...

  • Page 9: Safety

    Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►...

  • Page 10: Safety Precautions

    Safety DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved will lead to severe injury to death. ► Make sure that the power supply pack meets the requirements for double isolation between mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and IEC 62368-1.

  • Page 11: Limits Of Use Of The Product

    Safety ► Recommendation: Establish a secure connection to the earthed conductor (PE); protection class III. ► Never disconnect plug connections during operation. ► Keep lines and cables away from hot surfaces (> 70 °C). ► Do not carry out your own conversions or modifications on the unit. ►...

  • Page 12: Product Description

    ID no. 000021320. 3.2 Product features The electronic drive unit of type TM 700 EC represents a fixed component of the Turbopump. The pur- pose of the electronic drive unit is to drive, monitor and control the entire pump. Feature...

  • Page 13: Connections

    Product description 3.5 Connections Connection Description DC in Housing connector with bayonet lock for the voltage supply between Pfeiffer Vac- uum power supply packs and the electronic drive unit. EtherCAT IN M12 socket (D coded) with threaded coupling and L/A-LED for connecting an in- coming EtherCAT cable.

  • Page 14: Installation

    Installation 4 Installation 4.1 Connection diagram DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved will lead to severe injury to death. ► Make sure that the power supply pack meets the requirements for double isolation between mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and IEC 62368-1.

  • Page 15: Ethercat Connector

    RS 485 D - n.c. n.c. + U B (+48 VDC ± 10 %) Fig. 2: Connection diagram for TM 700 EC ® 4.2 EtherCAT connector You can use the “EtherCAT” connectors (2x 5-pin sockets, M12, D-coded) to connect the turbopump to an EtherCAT bus system.

  • Page 16: Device Identification

    Installation ► IN ► IN ◄ OUT Fig. 3: Example for an EtherCAT cable connection Assignment Tbl. 5: EtherCAT interface, connection assignment EtherCAT specification The use of Ethernet switches and hubs is not supported. Establish the cable connection 1. Connect the incoming cable from the control to EtherCAT IN. 2.

  • Page 17: Operating Mode Display Via Led

    Behavior and meaning of the LEDS of the EtherCAT interface 4.2.3 Process Data Process output data Process output data are: ● Default RxPDO (Control --> TM 700 EC, "output"), CoE 1600h.1 – 4 (1 Byte) Byte.Bit Meaning 7000.01 Turbo Start Stop Pumping station (0: off, 1: on) 7000.02 Turbo Reset Alarm...

  • Page 18: Service Data

    Installation Byte.Bit Meaning 6000.01 Rotation Pump rotates > 60 min (0: no, 1: yes) 6000.02 Normal Normal operation (0: no, 1: yes) 6000.03 Acceleration Pump accelerates (0: no, 1: yes) 6000.04 Deceleration Pump decelerates (0: no, 1: yes) 6000.05 Remote / Local Control via EtherCAT (0: yes, 1: no) 6000.07 Turbo Low Speed Stand-by (0: off, 1: on)

  • Page 19: Tbl. 10: Data Types Of The Service Data

    Installation Type Description ULINT Positive integer, 64 bit SINT Integer, 8 bit Integer, 16 bit DINT Integer, 32 bit REAL Floating point value, single precision Tbl. 10: Data types of the service data The following CoE objects are available for access to individual data objects (e.g., for configuration): Administrative data (information about the device, communication) sIdx Name...
  • Page 20 Semiconductor SDP Device Name (1) STRING( ) F9F8 – FW Update Funct. Gen. Number (1) UDINT Tbl. 11: Administrative data (information about the device, communication) Input data (TM 700 EC --> Control) sIdx Name Type Description Access 2000 In Identity/Status...
  • Page 21 Installation sIdx Name Type Description Access Prs1.Status USINT RO P 0: valid 1: Not reached 2: Exceed 3: invalid Prs1.Value REAL RW P Actual pressure value (hPa) Calibrate sensor Prs2.Status USINT RO P 0: valid 1: Not reached 2: Exceed 3: invalid Prs2.Value REAL...
  • Page 22 Time since power on UDINT RO P F9F7 – Total Time Powered UDINT RO P Tbl. 12: Input data (TM 700 EC --> Control) Output data (control -> TM 700 EC) sIdx Name Type Description Access 3005 Out Component Oper- ation Htg.

  • Page 23: Tbl. 13: Output Data (Control -> Tm 700 Ec)

    BYTE( ) : 81 00 00 00 : 01 00 00 00 status USINT response BYTE( ) Tbl. 13: Output data (control -> TM 700 EC) Configuration data (control -> TM 700 EC) sIdx Name Type Description Access 4001 Cfg Pump Operation Intf.
  • Page 24 Installation sIdx Name Type Description Access Cfg Ready for Process USINT RW P 0: Switchpoint 1 1: Switchpoint 1 and 2 Speed Switchpoint 1 USINT RW P % of rated speed Speed Switchpoint 2 USINT RW P % of rated speed Enable Run-up Timer BOOL RW P...
  • Page 25 Installation sIdx Name Type Description Access DI1 Configuration USINT 0: Deactivated 1: Enable venting 2: Heating 3: Sealing gas 4: Run-up time monitoring 5: Rotation speed setting mode 7: Enable HV sensor DI2 Configuration USINT See 4009.01 DI3 Configuration USINT See 4009.01 DO1 Configuration USINT...

  • Page 26: Tbl. 14: Configuration Data (Control -> Tm 700 Ec)

    F383.01 if bit 1 is set ac- cordingly here Tbl. 14: Configuration data (control -> TM 700 EC) 10) Idx = Index, sIdx = Sub-index, Hexadecimal 11) RO = read only, RW = read/write, P = suitable for process data...

  • Page 27: Interfaces

    Interfaces 5 Interfaces 5.1 Interface RS-485 The interface designated “RS-485” is intended for connecting a Pfeiffer Vacuum control unit or an exter- nal PC. The connections are galvanically safe and are isolated from the maximum supply voltage for the electronic drive unit. The electrical connections are optically decoupled internally. Designation Value Serial interface...

  • Page 28: Cross-Linked Via The Rs-485 Connection

    Interfaces Connecting Pfeiffer Vacuum control units or a PC One external control unit each can be connected at the RS-485 interface. 1. Use the respective connection cable from the control unit shipment or from the accessories pro- gram. 2. Use the option to connect a PC via the USB/RS-485 converter. 5.1.2 Cross-linked via the RS-485 connection DANGER Danger to life from electric shock...

  • Page 29: Telegram Description

    Interfaces a2 – a0 Unit address for device ● Individual address of the unit ["001";"255"] ● Group address "9xx" for all identical units (no response) ● Global address "000" for all units on the bus (no response) Action according to telegram description n2 –...

  • Page 30: Data Types

    Interfaces --> ASCII 5.2.5 Data types Data type Description Length Example l1 – l0 boolean_old Logical value (false/true) 000000 is equivalent to false 111111 is equivalent to true u_integer Positive whole number 000000 to 999999 u_real Positive fixed point number 001571 corresponds with 15.71 string Any character string with 6 charac-...

  • Page 31: Parameter Set

    Parameter set 6 Parameter set 6.1 General Important settings and function-related characteristics are factory-programmed into the electronic drive unit as parameters. Each parameter has a three-digit number and a description. The parameter can be accessed via Pfeiffer Vacuum control units or externally via RS-485 using Pfeiffer Vacuum protocol. The vacuum pump starts in standard mode with factory default pre-set parameters.
  • Page 32 Parameter set Display Description Functions Data Unit min. max. type cess fault type Cfg DO2 Output DO2 0 = Rotation speed switchpoint configuration reached 1 = No error 2 = Error 3 = Warning 4 = Error and/or warning 5 = Set rotation speed reached 6 = Pump on 7 = Pump accelerating...
  • Page 33 Parameter set Display Description Functions Data Unit min. max. type cess fault type Cfg Acc A1 Configuration 0 = Fan (continuous operation) accessory 1 = Venting valve, closed with- connection out current 2 = Heater 3 = Backing pump 4 = Fan (temperature control- led) 5 = Sealing gas 6 = Always "0"...

  • Page 34: Status Requests

    Parameter set Display Description Functions Data Unit min. max. type cess fault type CtrlViaInt Operation of 1 = remote the interface 2 = RS-485 4 = PV.can 8 = Fieldbus 16 = E74 255 = Unlock interface selec- tion IntSelLckd Interface se- 0 = off lection locked...

  • Page 35: Set Value Settings

    Parameter set Display Description Func- Data Access Unit min. max. tions type type fault DrvPower Drive power 999999 PumpCycles Pump cycles 65535 TempPwrStg Final stage temperature °C 999999 TempElec Electronics temperature °C 999999 BearngWear Safety bearing degree of wear TempPmpBot Pump lower part tempera- °C 999999...

  • Page 36: Additional Parameters For The Control Unit

    Parameter set Display Description Func- Data Access Unit min. max. default tions type type SpdSwPt2 Rotation speed switch point 2 VentSpd Venting rotation speed at de- layed venting VentTime Venting time at delayed venting 3600 3600 PrsSwPt 1 Pressure switch point 1 PrsSwPt 2 Pressure switch point 2 PrsSn1Name...

  • Page 37: Operation

    Operation 7 Operation 7.1 Configuring the connections with the Pfeiffer Vacuum parameter set The electronic drive unit is pre-configured with the factory default basic functions and is ready for opera- tion. For individual requirements, you can configure most connections for the electronic drive unit with the parameter set.

  • Page 38: Operating Modes

    Operation Option Description 0 = off Interface selection can be set via parameter [P:060]. 1 = on Interface selection locked Tbl. 24: Parameter [P:061] 7.2 Operating modes 7.2.1 Gas type-dependent operation NOTICE Turbopump destruction due to gases with too high molecular masses The pumping of gases with impermissible high molecular masses leads to the destruction of the tur- bopump.

  • Page 39: Set Value Power Consumption

    Operation 7.2.2 Set value power consumption Set parameter [P:708] When setting the specified power consumption below 100%, the run-up time is extended. 1. Set the parameter [P:708] to the required value in %. 2. Where necessary, adjust the parameter [P:700] RUTimeSVal to avoid error messages when starting up.

  • Page 40: Rotation Speed Setting Mode

    Operation Rotation speed switch points 1 & 2 [P:017] = 1 f (%) [P:701] [P:719] [P:010] [P:302] Process Fig. 9: Rotation speed switch points 1 & 2 active, [P:701] > [P:719] [P:017] = 1 f (%) [P:719] [P:701] [P:010] [P:302] Process Fig.

  • Page 41: Standby

    Operation Set the rotation speed setting mode 1. Set the parameter [P:707] to the required value in %. 2. Set the parameter [P:026] to "1". 3. Check the set rotation speed (parameter [P:308] or [P:397]). 7.2.6 Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process and production stops. When standby mode is active, the electronic drive unit reduces the rotation speed of the turbo pump.

  • Page 42: Backing Pump Standby Mode

    Operation Setting continuous operation With "pumping station on", the electronic drive unit sends a signal to the configured accessory connec- tion to switch on the backing pump. 1. Set the parameter [P:025] to "0". 2. Use this signal for the control of a fore-vacuum safety valve. Set interval operation and determine the switching threshold Interval operation extends the service life of the diaphragm of a connected diaphragm pump.

  • Page 43: 10Electric Brake

    Operation 7.2.10 Electric brake After switching off the pump, Pfeiffer Vacuum recommends the using the electric brake function. It re- duces the slow-down time and permits the controlled braking of the rotor until the pump comes to a standstill. Using electrical brake ►...

  • Page 44: 13Safety Bearing Wear

    Operation falling below a fixed specified type-specific rotation speed. When power is restored, the venting process is continued. ► Set parameter [P:030] to "2". 7.2.13 Safety bearing wear Safety bearing wear depends on how serious the impact of the interference is on the running rotor. The magnetic bearing sensor system permanently monitors the current wear of the safety bearings.

  • Page 45: Operation Monitoring

    Operation Procedure The electronic drive unit switches off the turbopump and activates pre-set accessory options (e.g. vent- ing ON, backing pump OFF). 1. Set the parameter [P:010] to "0". 2. Wait until the turbopump comes to a complete standstill. 3. Disconnect the power supply according to the operating instructions of the turbopump or the pow- er supply pack.

  • Page 46: Recycling And Disposal

    Recycling and disposal 8 Recycling and disposal WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage.

  • Page 47: Malfunctions

    Malfunctions 9 Malfunctions 9.1 General WARNING Risk of injury from parts moving after a power failure or troubleshooting The "pumping station" function of the electronic drive unit will remain active after a power failure or if errors occur that shut down the vacuum pump or the system. When power is restored or after ac- knowledging a fault, the vacuum pump runs up automatically.
  • Page 48 Malfunctions Error Problem Possible causes Remedy code Err043 Internal configuration er- ● Device defective ● Contact Pfeiffer Vacuum Service Err044 Excess temperature, ● Insufficient cooling ● Improve the cooling electronics ● Check the operating conditions Err045 Excess temperature, ● Insufficient cooling ●...
  • Page 49 Malfunctions Error Problem Possible causes Remedy code Err800 Magnetic bearing over- ● Impacts, vibrations ● Contact Pfeiffer Vacuum Service flow ● Device defective ● Check the operating conditions ● Only acknowledge for rotational speed f = 0 Err802 Magnetic bearing sen- ●...

  • Page 50: Warning And Malfunction Messages When Operating With Control Units

    Malfunctions Error Problem Possible causes Remedy code Wrn106 High rotor temperature ● High gas throughput ● Check the operating conditions ● Impermissible thermal radiation ● Impermissible magnetic field Wrn113 Inaccurate rotor tem- ● Internal communication error ● Contact Pfeiffer Vacuum Service perature Wrn115 Pump lower part tem-...

  • Page 51: Service Solutions By Pfeiffer Vacuum

    Service solutions by Pfeiffer Vacuum 10 Service solutions by Pfeiffer Vacuum We offer first-class service High vacuum component service life, in combination with low downtime, are clear expectations that you place on us. We meet your needs with efficient products and outstanding service. We are always focused on perfecting our core competence –...
  • Page 52 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight. c) Shrink-wrap the product in suitable protective foil.

  • Page 53: Ec Declaration Of Conformity

    This declaration of conformity has been issued under the sole responsibility of the manufac- turer. Declaration for product(s) of the type: Electronic drive unit TM 700 EC We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. Electromagnetic compatibility 2014/30/EU...

  • Page 54: Declaration Of Conformity

    This declaration of conformity has been issued under the sole responsibility of the manufac- turer. Declaration for product(s) of the type: Electronic drive unit TM 700 EC We hereby declare that the listed product satisfies all relevant provisions of the following British Directives. Electrical Equipment (Safety) Regulations 2016...
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