Summary of Contents for FormFactor MS Series
- Page 1 sales@artisantg.com artisantg.com (217) 352-9330 | Visit our website - Click HERE...
- Page 2 User Guide Micropositioners MS Series PN 108-206, Revision F, August 13, 2018...
- Page 4 User Guide Micropositioners MS Series PN 108-206, Revision F, August 13, 2018...
- Page 5 © Copyright 2018 FormFactor, Inc. All rights reserved. No part of this document may be reproduced, transmitted or displayed in any form or by any means except as duly authorized by FormFactor, Inc. FormFactor and the FormFactor logo are trademarks of FormFactor, Inc. All other trademarks are the property of their respective owners.
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Page 6: Table Of Contents
Contents Contents ............................i Before You Begin ........................iii About This Guide ........................... iii Notational Conventions......................... iii For More Information........................iii Chapter 1: Overview ........................1 Micropositioner Overview......................1 Features ..........................1 Requirements ........................1 Safety .............................1 Returning a Micropositioner for Service ..................1 RMA Number .........................1 Repacking ..........................2 Chapter 2: ERJ-02 Joystick ......................3 Controls ............................ - Page 7 Appendix A: Topic A ........................19 Micropositioner Specifications ....................19 Micropositioner Dimensions......................19 Axis Directions..........................20 Connector Pin Assignments ......................20 Right-Hand MS1 and MS2 Pin Assignments ................ 20 Left-Hand MS1 and MS2 Pin Assignments ................21 Index ............................23 ii • MS Series Micropositioners...
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Page 8: Before You Begin
More information may be available from these sources: • Your probe station user guide • Release Notes • FormFactor’s website at www.formfactor.com. • If you purchased your FormFactor product from a third-party vendor, you can contact that vendor for service and support. Before You Begin • iii... - Page 9 • MS Series Micropositioners...
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Page 10: Chapter 1: Overview
Returning a Micropositioner for Service RMA Number Before shipping a probe station to FormFactor, obtain a Return Material Authorization number (RMA #). Contact the nearest FormFactor sales office, or in the U.S. call customer service at (800) 550-3279 or (503) 601-1000. Overview • 1... -
Page 11: Repacking
• Probe station serial number (back left of probe station) • Description of the service required or failure indications Repacking To retain the validity of the warranty, always use the original packing materials. Contact a FormFactor representative for replacement shipping materials or hardware. 2 • MS Series Micropositioners... -
Page 12: Chapter 2: Erj-02 Joystick
Chapter ERJ-02 Joystick Controls The ERJ-02 controls up to four channels in x, y and z (plus theta, if DUT is used). Cycle Z button Knob with theta Be sure this lock slider is Be sure this lock slider in its rightmost position. is in its down position. -
Page 13: Operation
If either the channel select LED or the channel LED is blinking, the knob is in z- or theta-mode. Pressing the channel select button will have no effect. Press the Cycle (z) button until no LED indicators are blinking. Then press the channel select button to change the channel. 4 • MS Series Micropositioners... -
Page 14: Selecting Axis (X, Y, Z, Theta)
Selecting Axis (X, Y, Z, Theta) After a channel has been selected, the Cycle (z) button on top of the knob can be used to select the axis currently controlled by the knob. • When a channel is first selected and no LED indicators are blinking, the knob controls the x/y axis. -
Page 15: Set Increment Distance
Die stepping is used to move the stage one complete row or column. This requires the die size to be loaded first. 1. Press and hold the Set button. 2. Deflect the knob. The amount of deflection does not matter as the stage will move either one row or one column. 6 • MS Series Micropositioners... -
Page 16: Chapter 3: Mac-Series Mounts
Chapter MAC-Series Mounts MAC-02 Magnetic-Mount Magnetic-mount positioners are not recommended for microwave testing. MAC-Series Mounts • 7... -
Page 17: Mac-02 Mount Dimensions
MAC-02 Mount Dimensions 1.40 Diameter Front R.H. 1.19 4.50 2.125 Front L.H. 1.00 2.000 4.00 Contact area 8 • MS Series Micropositioners... -
Page 18: Mac-05 Bolt-Down Mount
MAC-05 Bolt-Down Mount AUTION Make sure that the mounting screws are tight. Three (3) 6-32 x .88-inch mounting screws are used to fasten the MAC-05 mount to the micropositioner. Three (3) adjustment bolts hold the mounting screws and are used for fine planarization adjustments. -
Page 19: Mac-05 Mount Dimensions
Three (3) 6-32 x .50-inch mounting/adjustment screws are used to fasten the MAC-22 mount to the micropositioner. These screws are also used to planarize the positioner. The MAC-22 base is attached to the positioner as shown below. 10 • MS Series Micropositioners... -
Page 20: Mac-22 Vacuum Base Dimensions
MAC-22 Vacuum Base Dimensions 7.524 1.020 2.252 4.500 2.124 4.000 1.19 4.500 Planarizing AUTION The probe station must be planarized before attempting positioner planarization. Take care when loosening the mounting/planarization screws for the x-and y-axis. Do not loosen the screws to the point that the mount is at risk of falling from the micropositioner. Use the highest magnification (up to 500X) when planarizing. -
Page 21: Planarizing The Y-Axis
6. Move the probe back and forth along the y-axis and continue making adjustments until the probe tip is in focus throughout travel to both ends. 7. Make sure that the mounts did not loosen excessively during planarization. 8. The y-axis is now planarized. 12 • MS Series Micropositioners... -
Page 22: Planarizing The X-Axis
Planarizing the X-Axis 1. Move the probe to the negative end of the x-axis. Remove bearing way cover with 1/16 hex wrench X axis mounting/planarization screws 2. Move the microscope to its negative limit on the x-axis. Move the probe tip into the field of view and focus the microscope. - Page 23 14 • MS Series Micropositioners...
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Page 24: Chapter 4: Slide Mount For Summit 12K
Chapter Slide Mount for Summit 12K Installing the Slide Mount The positioner should slide freely between two rails (bolted to the MicroChamber) until the lock knob is tightened. Positioner Configurations Rail and Single Positioner The assembled rail and positioner configuration is shown with a single positioner installed. Rail and Double Positioners Pre-drilled rail locations on the top of the Microchamber are shown with a left and a right positioner installed. -
Page 25: Installing The Rails
6. The positioner plate should slide easily in the grooves formed by the rails and the Microchamber. To lock the positioner, tighten the lock knob in a clockwise direction. Do not overtighten the lock knob. Positioner Lock knob Tall rail Positioner plate Short rail 16 • MS Series Micropositioners... -
Page 26: North-South Positioner
North-South Positioner East-West Positioner Initializing the Positioners ARNING Failure to follow these instructions can result in severe, irreparable damage to positioners. 1. Remove the Microchamber TopHat. 2. If necessary, rotate the platen ring insert so that the screw holes are on the top and bottom rather than on the sides (to avoid the risk of crashing the micropositioners into the screws). - Page 27 18 • MS Series Micropositioners...
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Page 28: Appendix A: Topic A
Appendix Topic A Micropositioner Specifications Specifications X-axis travel 25.4 mm (1mm) 50.8 mm (2-inch) Y-axis travel 25.4 mm (1-inch) 50.8 mm (2-inch) Z-axis travel 15.3 mm (0.6-inch) 15.3 mm (0.6-inch) Speed 1 mm/sec 1 mm/sec Lead screw 0.4 mm 0.4 mm Resolution 0.1 micron 0.1 micron... -
Page 29: Axis Directions
Brown X Phase C Orange X Phase B Yellow X Phase D X AC-CT Black X-BD-CT White Y Phase A Brown Y Phase C Orange Y Phase B Yellow Y Phase D Y AC-CT Black 20 • MS Series Micropositioners... -
Page 30: Left-Hand Ms1 And Ms2 Pin Assignments
Signal name Wire color Y BD-CT White Z Phase A Brown Z Phase C Orange Z Phase B Yellow Z Phase D Z-AC-CT Black Z BD-CT White X + LIMIT Brown X - LIMIT Yellow Y + LIMIT Green Y - LIMIT Z + LIMIT Orange Z - LIMIT... - Page 31 22 • MS Series Micropositioners...
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Page 32: Index
Index Axis directions MAC-02 magnetic-mount MAC-05 bolt-down mount MAC-22 vacuum mount Channels activating intializing Pin assignments Compatibility left-hand MS1 and MS2 Connector pin assignments, see Pin assignments right-hand MS1 and MS2 Planarizing X-Axis Y-Axis Die stepping Positioners Dimensions configurations MAC-02 magnetic mount initializing MAC-05 bolt-down mount MAC-22 vacuum mount... - Page 33 24 • MS Series Micropositioners...
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