DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Contents General Manual Information ....5 Ion Pump Operation ........ 27 Manual Symbol Key Ion Pump Parameters Specifications ..........7 Starting the Ion Pump Accessories ..........8 Start Phase Maintenance ..........8 Normal Operation Introduction ..........
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DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Figures Figure 1. Terranova® 760 series front view and dimensions ....10 Figure 2. Terranova® 760 series back and connector view ....11 Figure 3. Power-up screen ................14 Figure 4. Main Display with Standby message ......... 15 Figure 5.
We advice the customer read the manual in its en rety and to contact Duniway Stockroom with any ques ons before use. The Terranova 760 series of ion pump controller is intended for use with standard high vacuum ion pumps (posi ve or nega ve polarity).
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DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 The electricity hazard symbol is used to warn personnel of a voltage hazard The earth terminal symbol is used to indicate where proper grounding prac ces should be followed to protect personnel against electrical shock and protect equipment against possible damage.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Specifications Universal 100 V to 240 V AC @ 50 Hz to 60 Hz; Operating Voltage 200VA for 762 Operator Set ± 2000 to ± 7500 V DC Open Circuit Voltage...
The Terranova® 760 series Ion Pump Power Supply should not be serviced by the user. Any maintenance must be performed by Duniway Stockroom personnel. If any service is required, please contact your Duniway Stockroom customer service representa ve for a Return Merchandise Authoriza on (RMA) number to return the Terranova®...
751A/752A) discon nued and replaced by the Terranova® 760 series. Although the Terranova® 741, 751/752, and 751A/752A have been discon nued, the units may s ll be sent to Duniway Stockroom for service. Please contact your Duniway Stockroom customer service representa ve for further details.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Figure 1. Terranova® 762 Controller front view and dimensions Front Panel Description 1. Power: Main switch to turn controller ON or OFF. Do not block as this is the main on/off switch for unit.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Figure 2. Terranova® 762 Controller back and connector view Rear Panel Description Ion Pump Connections 1. High Voltage 1: (High) voltage output connec on for Pump # 1 2. Ion Pump Ground Sense 1: Safety interlock connec on for Pump #1 3.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Installation Installing the Terranova® 762 Controller The Terranova® 762 Controller is housed in a standard EIA half-rack box. See Figure 1 for dimensions. The control unit may be used as a table-top device or can be installed in most equipment racks and cabinets.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Safety Interlock A safety interlock or secondary ground sense circuit is incorporated into the Terranova® 762 controller to disable high voltage opera on when open. The safety interlock circuit is completed via external leads available on most Duniway ion pump cables.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Display Information Power-up Display The Terranova® 760 series will output the Power-up screen as shown in Figure 3 when turned ON via the POWER bu on and both self-adjus ng cooling fans will automa cally start. If the power- loss restart func on is disabled, the control unit will output the Main display as shown in Figure 4 and the channel will enter standby mode.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Main Display The Main Display is the star ng point for using the Terranova® 760 series. The Main Display screen provides access to all confi gura on menus as well as ion pump opera on. The Main Display outputs a number of confi...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Status Bar The Status Bar displays informa on about the status and se ng of a number of parameters such as the selected communica on protocol. As shown in Figure 5, the Status Bar is located atop the screen and will appear on all displays except the About screen.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Configuration Display The Confi gura on display provides access to both the controller-specifi c and channel-specifi c menu se ngs. Figure 7 shows all the various op ons available through the Confi gura on screen.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 System Configuration Display The System Confi gura on display provides access to the controller-specifi c se ngs. As shown in Figure 9, all parameters which can be modifi ed are enclosed (for illustra ve purposes) in a red rectangle.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Channel Configuration Display The Channel Confi gura on display provides access to the channel-specifi c parameters that aff ect Terranova® 760 series output and ion pump opera on. As shown in Figure 10, all parameters which can be modifi...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Parameter Entry Screen The parameter entry screen allows the user to enter a new parameter value via the front panel. To open the respec ve parameter entry screen, the user must tap the numerical value of the parameter to be modifi...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Parameter Entry Screen Example To enter a new set point (SP) pressure value, the SP parameter value shown in Figure 12 must be tapped. Once the parameter is tapped, the parameter entry screen shown below will appear.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Controller Configuration Remote HV The Terranova® 760 series has two diff erent modes of opera on available via the RemoteHV se ng: Local and Remote. In both modes, parameter input may be modifi ed either via the front panel or through the selected communica on protocol.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Changing the Mode of Operation To change the mode of opera on, the user must enter the System Confi gura on screen. To enter the System Confi gura on screen: 1.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 PowerUp The PowerUp se ng selects the state in which the Terranova® 760 series starts up at power ON. There are three diff erent op ons available: Normal, Recover, and Default. Default state is Normal.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Changing the Mode of Operation To change the Terranova® 760 series start-up func on, the user must enter the System Confi gura on screen. To enter the System Confi gura on screen: 1.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Sound Configuration The Terranova® 760 series has a speaker that emits a sound profi le with every func on. To view or change the emi ed sound fi le, the user must enter the Sound Confi gura on screen.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Ion Pump Operation The Terranova® 760 series is able to operate ion pumps from a number of manufacturers and at various pressure ranges due to the user-adjustable current and voltage parameters. While small ion pumps can be started at rela ve high vacuum pressures, larger ion pumps with higher current requirements must be started at lower vacuum pressures.
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DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 To view or change the ion pump parameters: 1. Tap to enter the Confi gura on display (see Figure 7) 2. Tap the HVPS green area on the Confi gura on screen to enter the channel confi...
Si n c e 1 9 7 6 StarCell® is a registered trademark of Agilent Technologies; Santa Clara, CA Galaxy™ is a registered trademark of Duniway Stockroom Corpora on; Fremont, CA TELEPHONE: (650) 969•8811 TOLL-FREE [US/CA]: (800) 446•8811...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Start Phase Once high voltage opera on is commenced, user should observe the HIGH VOLTAGE and CURRENT values. Decreasing current and increasing high voltage values are an indica on of a successfully started ion pump.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Figure 17. Terranova® 760 Series power vs. current graph Figure 18. Terranova® 760 Series voltage vs. (low) current graph TELEPHONE: (650) 969•8811 TOLL-FREE [US/CA]: (800) 446•8811 FAX: (650) 965•0764 EMAIL: info@duniway.com Page 31...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Pressure Measurement The Terranova® 760 series outputs pressure measurements based on the ion pump current shown on the Main display. Once an ion pump reaches normal opera on, current becomes nearly propor onal to vacuum pressure over a wide range of pressure values.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Function Output Description Channel #1 SET POINT relay Common See Set Point Opera on Channel #1 SET POINT relay Normally closed (NC) See Set Point Opera on Channel #1 SET POINT relay...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Set Point Operation The Terranova® 760 series can be u lized for process control func ons via the use of a programmable set point and its corresponding relay. The set point func on must be enabled to u lize this feature and can be enabled, disabled, and changed via the serial comm link using the SEx and SPx commands or be enabled through the front panel.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Set Point Function The set point func on (and relay) is by default disabled — the SP indicator in the Status Bar will display . As shown in Figure 21, the set point parameters are enclosed (for illustra ve purposes) in an orange and red rectangle.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 4. Tap the SP func on toggle bu on (red rectangle) to select the desired state DISABLED DISABLED Set point func on disabled ENABLED ENABLED Set point func on enabled 5.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Analog Output The Terranova® 760 series has analog output available for use as a secondary method to read the high voltage or current values shown on the Main display. The unit outputs a voltage signal for each type of analog output.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Logarithmic Output The logarithmic output scale requires the user to convert the voltage output into a current measurement. Current, I, as a func on of the analog output, V, is calculated by where V is in volts and I is in amperes.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Setting the Output Monitor To change or view the selected output monitor, the user must enter the Channel Confi gura on screen. To enter the Channel Confi gura on screen: 1.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Communication Protocols The SERIAL I/O 9-pin D-sub, ethernet, and USB ports are available to remotely query the Terranova® 760 series to both read or set parameter values and operate the high voltage func on.
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DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 4. Tap the Interface toggle bu on (red rectangle) to select the new protocol: RS232 RS232 RS-232 serial RS422 RS422 RS-422 serial RS485 RS485 RS-485 serial (see "RS-485 Address" for more details)
Terranova® 760 series. The control unit accepts single and mul ple input queries or commands via a text fi le. Duniway Stockroom cable RS232-TN751A is available for RS-232 serial communica on. See Table 10 for pin confi gura on. See Table 11 for serial communica on se ngs.
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DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Ethernet and USB The Terranova® 760 series comes with Ethernet and USB ports which can be used to communicate with the 760 series similar to RS232/485 using Telnet. TELEPHONE: (650) 969•8811 TOLL-FREE [US/CA]: (800) 446•8811...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Query Characters The Terranova® 760 series u lizes a three-digit query character to select the parameter to output. See Table 12 for query characters. A two-digit unique address from 00 to 31 must precede the query character to iden fy the device when confi...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Character Description Output Format Model number Firmware version LXX.XX.XX.XX.XX Terranova® 761 state R: Run, S: Stop, G: Ground High voltage state 0: OFF, 1: ON High voltage polarity P: Posi ve, N: Nega ve...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Character Description Input Format High voltage opera on 0: OFF, 1: ON X.XX e±X SET POINT value [in selected pressure unit] MAXIMUM VOLTAGE value XXXX [V] MAXIMUM CURRENT value X.XX e±X [A] PUMP SIZE value XX.X [L/s]...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Description Input Output Serial communica on: RS-232/422 SP1:1.2E-8 CHANNEL 1 SET POINT value: 1.2×10 Serial communica on: RS-485 UN1:P CHANNEL 1 PRESSURE UNIT value: Pascal Serial communica on: RS-232/422 UN2:A...
Unit does not power ON Power cord is defec ve Check power cord for con nuity Unit powers ON, but screen does Screen has failed Return unit to Duniway Stockroom not illuminate Screen is not responsive Screen has failed Return unit to Duniway Stockroom...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Leakage Current If a vacuum system is known to be in the ultra-high vacuum range but current reading is steady or fl uctua ng between a few microamperes, the non-zero current reading may be due to leakage current.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Over Current Protection "HV Shutdown" is displayed when high voltage output is shorted to ground or power output remains rela vely high. Over current can be due to a malfunc on of either the ion pump or ion pump cable.
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Changing the Input Fuse The Terranova® 760 series contains one slow-blow Type T, 2 A fuse used to interrupt AC power in the event of overcurrent from the electrical outlet. The fuse is held in the fuse block located within the AC power module, below the power cord socket.
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48501 Milmont Drive • Fremont, CA 94538 Warranty Duniway Stockroom Corpora on (“DSC”) warrants all Terranova® products to be free of defects in material and workmanship for a period of one year from the date of shipment. At our op on, we will repair or replace products which prove to be defec ve during the warranty period.
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DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Declaration of Conformity Duniway Stockroom Corp. declares under its sole responsibility that the following products which display the CE mark: Terranova® 761 Ion Pump Control Unit Terranova® 762 Dual Ion Pump Control Unit,...
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DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Declaration of Conformity Duniway Stockroom Corp. declares under its sole responsibility that the following products which display the CE mark: Terranova® 761 Ion Pump Control Unit Terranova® 762 Dual Ion Pump Control Unit,...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Appendix: Note on Set Point Relays Figure I. AZ5 relay maximum switching capacity The Heavy Duty Type AZ5 relay is used in the Terranova® 761 to control external func ons. As shown in Figure I, maximum switching capacity for resis ve loads varies from 2 A at 30 V DC (or...
DUNIWAY STOCKROOM CORP. 48501 Milmont Drive • Fremont, CA 94538 Figure II. Example of “snubber” circuit To calculate the appropriate capacitor C in microfarads [μF] and resistor R in ohms [Ω] to use in the “snubber” circuit, Paktron Capacitors’ Quencharc® technical note...
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