PI D-510 User Manual

Piseca single-electrode capacitive sensor probe

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User Manual

D510T0001, valid for D-510

BSc, BRo, 2/26/2020

D-510

PISeca Single-Electrode Capacitive Sensor Probe

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany

Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,

www.pi.ws

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Page 1 User Manual D510T0001, valid for D-510 BSc, BRo, 2/26/2020 D-510 PISeca Single-Electrode Capacitive Sensor Probe Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
Page 2: Table Of Contents
Specifications ..............................10 Dimensions ................................ 11 Customer Service Old Equipment Disposal Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 2 / 12 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
Page 3: Product Description
The D-510 Single-Electrode Capacitive Sensor probes are designed for non-contact measurements of distance, position or motion against any kind of electrically conductive target. D-510 sensor probes can be used with the following electronics provided by PI: E-852 signal conditioner electronics. For details see the E-852 User Manual, PZ180E.
Page 4: General Considerations
5. Measurement against a semi-conductor target connected to ground is also possible. Figure 2: Definitions of "gap'" and "target" Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 4 / 12 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
Page 5: Calibrated System
0.7 mrad Read the user manual of the electronics for details on calibration and measurement ranges. Differing from the standard calibration routine, the D-510.021 sensor probe is calibrated in the 1-fold range for a measurement range from 15 to 30 µm.
Page 6  range Example: A D-510.100 was calibrated for a 200 µm measurement range. It should be mounted with a minimum probe-to-target gap of 100 µm and a maximum gap of 300 µm. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 6 / 12 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
Page 7: Influence Of Parallelism On Linearity
/ 5x" refers to the measurement extension factors (see the user manual of the electronics for more information). Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 7 / 12 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
Page 8 Figure 8: D-510.021: influence of tilt on the output signal Figure 9: D-510.051: influence of tilt on the output signal Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 8 / 12 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
Page 9: Influence Of Temperature And Humidity
Measurements of the increase in sensor probe thickness give 53 nm/K (D-510.051). Condensation must be avoided: the measurement values are otherwise no longer reliable Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 9 / 12 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
Page 10: Technical Data
** Static: Bandwidth 10 Hz, dynamic: Bandwidth 10 kHz, with E-852 evaluation electronics ***Linearity error in the nominal measuring range Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 10 / 12 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
Page 11: Dimensions
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Dimensions of the D-510.021, D-510.051, and D-510.101 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 11 / 12 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
Page 12: Customer Service
D510T0001, valid for D-510 BSc, BRo, 2/26/2020 Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de).  If you have questions concerning your system, have the following information ready: − Product and serial numbers of all products in the system −...