horiba MV-2000 Instruction Manual
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horiba MV-2000 Instruction Manual

horiba MV-2000 Instruction Manual

Mixing vaporizer
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Mixing Vaporizer
MV-2000
 
Instruction Manual
CODE: I031170900

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Summary of Contents for horiba MV-2000

  • Page 1   Mixing Vaporizer MV-2000   Instruction Manual CODE: I031170900...
  • Page 2   ■  Warranty and Responsibility HORIBA STEC warrants that the Product shall be free from defects in material and workmanship and agrees to repair or replace free of charge, at HORIBA STEC’s option, any malfunctioned or damaged Product attributable to HORIBA STEC’s responsibility for a period of one (1) year from the delivery unless otherwise agreed with a written agreement.
  • Page 3 Safety instructions Be sure to read this “Safety instructions” section before using this equipment. Read and understand these messages thoroughly before operating the equipment. Failure to abide by the information in a WARNING WARNING may result in serious injury and can  ...

  • Page 4: Table Of Contents

    Contents Outline ........................1 Specifications ......................1 External Dimensions ....................3 Operating Procedures ....................5 4-1 Piping and electric wiring ..................5 Startup and warm-up ................... 6 Vaporization ......................7 Peripheral Equipment ....................7 Procedures for Disconnecting Valve Cable and Heater Cable Connectors ....8 Troubleshooting ......................

  • Page 5: Outline

    Outline MV Series vaporizers have flow rate adjusting valves and vaporizer functions. When one of them is combined with an appropriate model of LF or XF Series micro liquid mass flow meters for feedback control of the liquid flow rate, the equipment ensures stable generation of material.
  • Page 6 Supplied cables Name Model Specifications Cable length: 100 +/- 2 cm Valve cable SC-MIV-1MF Connector ( MV side): FGJ.00.302.CYMD35 (LEMO) (LF or XF side) :FGG.00.302.CYC.D35 (LEMO) Cable length: 200 +/- 10 cm MAIN T.C. Cable SC-MIT-2MA Connector (MV side):SMP-KM (OMEGA) (Temp.

  • Page 7: External Dimensions

      External Dimensions 3.1 without pnuematic valve (Unit:mm) - 3 -...
  • Page 8 3.2 with pnuematic valve (Unit:mm) - 4 -...

  • Page 9: Operating Procedures

    Operating Procedures Connect and start up the equipment in accordance with the following procedures. Piping and electric wiring 1) Connect the pipes setting the flow direction in the direction of the arrow on the main body so that the Liquid flow meter(LF or XF) is on the upstream side of the liquid supply line of MV.

  • Page 10: Startup And Warm-Up

    5) Fit the supplied thermocouple (MAIN TC) cable for mixing valve to the thermocouple (MAIN TC) connector on the mixing valve, and connect the thermocouple (VAPO TC) cable for vaporizer to the thermocouple (VAPO TC) connector on the vaporizer. Connect the heater cable (MAIN HT) for mixing valve to the heater connector (MAIN HT) on the mixing valve, and connect the heater (VAPO HT) connector for vaporizer to the heater (VAPO HT) connector on the vaporizer.

  • Page 11: Vaporization

    2) After turning on power to the Liquid flow meter(LF or XF), input the forced closing signal to close the control valve. (See Instruction Manual for Liquid flow meter.) 3) Set the primary pressure (material supply pressure). * The material supply pressure varies depending on the material to be produced and product flow rate.

  • Page 12: Procedures For Disconnecting Valve Cable And Heater Cable Connectors

    Procedures for Disconnecting Valve Cable and Heater Cable Connectors When the valve and heater cable connectors are fitted, they are secured inside by the claws at the end of the connectors. Therefore, once they are connected, they cannot be disconnected by pulling. Disconnect the connectors in accordance with the following procedures.
  • Page 13  The temperature of MV does not increase. Cause Countermeasure Power is not supplied to the heaters. Check the wiring to the heaters, and supply power to the heaters. Signals from the temperature regulators Correctly wire the devices. are not input to the SSRs or the power regulators.
  • Page 14  The flow rate of carrier MFC, Liquid flow meter indication does not stabilize. The liquid does not flow in full scale. Cause Countermeasure The primary pressure (supply pressure) Set the primary pressure as specified. is low (high). The secondary pressure is high, and Set the secondary pressure as specified.

  • Page 15: Instructions For Handling

    Instructions for Handling Check that the piping does not leak, and sufficiently purge the inside of the piping. To keep the control valve travel correct, use filters to remove particles in the liquid material, or clean the piping. (When filters are used, 0.01-m-mesh metal filters or 0.05-m-mesh membrane filters are recommended.) The maximum operating temperature of the mixing valve is 140C, and that of the vaporizer is 200C.

  • Page 16: Other Instructions For Use

    Other Instructions for Use This section gives instructions for use and installation. Follow these instructions to fit the pipes correctly and use the equipment safely.An example of piping is shown below. Lay the lines appropriately to the conditions of use.  ...

  • Page 17: Clogging By Vaporization

    Clogging by vaporization Since MV vaporizes a liquid material and supplies the vapor material, the particles in the material and product generated by thermal decomposition of the material may cause clogging in MV. If clogging develops to completely block the passage, the inside of MV cannot be purged.

  • Page 18: Pressure Loss Of Internal Nozzles

    Pressure loss of internal nozzles There are two nozzles in MV. Carrier gas is supplied to the secondary side through these two nozzles. Therefore, the carrier gas flow rate is restricted by the nozzles. nozzles having a diameter of 0.4 mm reduce the flow rate to 1.4 LM at an N supply pressure of 0.1 MPa (G), 2.2 LM at 0.2 MPa (G) and 3 LM at 0.3 MPa (G).

  • Page 19: Moisture Contents (Dew Points) Of Carrier Gas And Purging Gas

    difference in level from the specific gravity of the liquid to be used, and set the tank pressure higher. Moisture contents (dew points) of carrier gas and purging gas When a material that reacts strongly with water and the dew point of the carrier gas is high, the material reacts in the mixing unit (mixing valve) of MV, and the reaction product is generated in the carrier gas passage, thereby clogging the passage.

  • Page 20: 11. Examples Of Temperature Regulator Wiring

    11. Examples of Temperature Regulator Wiring When the temperature of MV is controlled with temperature regulators and SSRs, wire them referring to the following diagrams. When the heaters or connectors fail, overcurrent may be the reason. For safety, it is required to install 5 Amp specification of overcurrent protection, such as circuit breaker or fuse, in the heater power line.

  • Page 21: Chemical Content Information(The Six China Rohs Restricted Materials)Example Of Preparation Of Secondary Heating Piping

    CHEMICAL CONTENT INFORMATION(The Six China RoHS Restricted Materials)Example of Preparation of Secondary Heating Piping 环境保护使用期限标记的意义 Meaning of Environmental Protection Use Period Marking 環境保護使用期限マークの意味    本标记适用在中华人民共和国销售电子信息产品， 标记中央的数字表示环境保护使用期限的年数。 (不 是表示产品质量保证期间。) 只要遵守这个产品有关的安全和使用注意事项，从制造日开始算起在这 个年限内，不会给环境污染、人体和财产带来严重的影响。 This marking is applied to electronic information products sold in the People's Republic of China. The figure at the center of the marking indicates the environmental protection use period in years.

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