Xandex 340-7110 Installation And Operation Manual

Micro-z small dot pneumatic inker

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MICRO-Z SMALL DOT PNEUMATIC INKER

INSTALLATION AND OPERATION MANUAL

Models 340-7110 and 340-7120

820-0332 Revision

September, 2022

340-7110 Manual Micro-Z Inker

340-7120 Motorized Micro-Z Inker

IMPORTANT OPERATION NOTICE!

The Model 350-0027 Micro-Z Small Dot Pneumatic Controller

80 ± 5

has two (2) air inputs. Each is designed to operate at

PSI

FAILURE TO SET BOTH AIR REGULATORS PROVIDING AIR TO

THE CONTROLLER AT 80 PSI WILL RESULT IN INCONSISTENT

820-0332 Micro-Z Small Dot Inking System Installation and Operation Rev A, September, 2022

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Page 1 MICRO-Z SMALL DOT PNEUMATIC INKER INSTALLATION AND OPERATION MANUAL Models 340-7110 and 340-7120 820-0332 Revision September, 2022 340-7110 Manual Micro-Z Inker 340-7120 Motorized Micro-Z Inker IMPORTANT OPERATION NOTICE! The Model 350-0027 Micro-Z Small Dot Pneumatic Controller 80 ± 5 has two (2) air inputs. Each is designed to operate at...
Page 2 Telephone: (707) 763-7799 OR (800) 767-9543 FAX: (707) 763-2631 1360 Redwood Way, Suite A Internet: www.xandexsemi.com Petaluma, CA 94954 USA Email: info@xandex.com International Distributors China PREMTEK TECHNOLOGY INC. (Shanghai) RM 1201, NO.1077 ZuChongZhi Rd Zhang Jiang Hi-Tech Park PuDong New Area...
Page 3 PUSH KNOB DOWN TO LOCK. SET AIR PRESSURE TO 80 PSI For more information contact Xandex Customer Service at (707) 763-7799 or Toll Free in the U.S at (800) 767-9543, FAX (707) 763-2631, or visit us on the Internet at www.xandexsemi.com...
Page 4 SAFETY INFORMATION Safety and Hazard identification symbols used in this document are intended to be compliant with ANSI/NEMA Z 535.6 2006. The table below lists the symbols used in this document along with a description of each type of safety hazard. Failure to observe identified safety risks may result in serious injury or death.
Page 5 Use only the power cord provided with the unit or an authorized replacement WARNING power cord from Xandex Inc. or an approved Xandex distributor. Use of an inadequately rated power cord may result in shock or injury.
Page 6 The Motorized Micro-Z inker provides Z adjustment of 0.00005 inches per actuation in Micro-Z mode. Please contact Xandex Customer Service with any questions regarding this design change or any other feature of your Xandex DieMark Inking System. Intentionally left blank...
Page 7: Table Of Contents
TABLE OF CONTENTS Re-design Overview ......................6 Introduction....................1-1 Theory of Operation ..................... 1-1 System Overview ..................2-1 Manual Micro-Z Component Connection ..............2-1 Motorized Micro-Z Component Connection ............... 2-2 Installation ....................3-1 X7110 and X 7120 MICRO-Z Inker Installation ............3-1 Controller Installation ....................
Page 8 Controller Troubleshooting ..................6-5 Controller Preventive Maintenance ................6-6 System Specifications ................... 7-1 DC Power Supply Requirements ................. 7-1 Pneumatic Controller Specifications ................7-1 Inker Specifications ..................... 7-2 Ink Cartridge Specifications ..................7-3 Cartridge Availability ....................7-3 Dot Size Guidelines in Mils (0.001 inch) ..............7-4 Dot Size Guidelines in Microns ...................
Page 9: Introduction
40% more ink than standard DieMark filament ink cartridges. Thank you for selecting Xandex as your inking choice. Please spend a few minutes familiarizing yourself with the unit. Most questions you may have will be answered in this manual.
Page 10 This page is intentionally left blank. 820-0332...
Page 11: System Overview
 Inker Assembly Part No. 320- 7110 A. Pneumatic Shuttle Part No. 316-0010 B. Inker Mounting Plate Part  No. 120-0019 (340-7110-   02 for KLA only) 5. Cable/Connector Assembly* Type C + none #210-0113 Order Set 340-7110-05 ...
Page 12: Motorized Micro-Z Component Connection
Motorized Micro-Z Component Connection 1. Regulator Assembly (Qty. 2) Objects not to scale. Part No. 220-0076  2. Air Hose Regulator-to-  Controller (Qty. 2) Part No. 210-2001 SUPPLY 3. Micro-Z Pneumatic Controller SUPPLY Part No. 350-0027**  4. Micro-Z Pneumatic Inker Assembly Part No.
Page 13: Installation
Installation X7110 and X 7120 MICRO-Z Inker Installation The X7120 Motorized and X7110 Manual Micro-Z pneumatic inkers are for use with wafer probing and wafer inspection equipment from multiple OEMs. Both Manual and Motorized models are installed using two 4-40 x 1.25" Shoulder Head Cap Screws (SHCS) 1.
Page 14 X7110 and X 7120 MICRO-Z Inker Installation Installation 2X 4-40 x 1.25" MOTOR CABLE INSTALLATION CONNECTOR TO SCREWS CONTROLLER: CONNECT TO “MOTOR” TERMINAL PNEUMATIC CARTRIDGE SHUTTLE FITTING ASSEMBLY (RED HOSE) CONTROLLER-TO- SHUTTLE AIR HOSE: CONNECT TO LARGE “SHUTTLE” PORT X7120 MOTORIZED INKER BASE ASSEMBLY MICRO-Z...
Page 15: Controller Installation
Installation Controller Installation Controller Installation Regulator Assembly and Installation The Micro-Z Small Dot Controller requires two regulated air inputs. The supplied air hoses connecting the regulators to the controller are 6 ft (182 cm) in length. Install the two regulators close enough to the controller location that ensures free air flow. Make sure the air hoses are not overextended, twisted, bent or kinked.
Page 16 Controller Installation Installation 2. Lift the regulator adjustment knob and turn counterclockwise until it stops to shut off the regulator air output. Do this on both regulators. 3. Install 1/4 O.D. x 0.170 I.D. polyethylene tubing (not supplied) to the main air source and then connect to the input fitting on the regulators.
Page 17 Operation” for ink cartridge installation, inker setup, alignment, and controller operation instructions. Note: The standard controller-to-shuttle air hose supplied by Xandex is 3 feet (91.44 cm) long. The length of this air hose is a critical design specification. If a longer air hose is required, consult Xandex Product Support for mitigation information.
Page 18 Controller Installation Installation This page is intentionally left blank 820-0332...
Page 19: System Operation
System Operation Controller Operation ON-OFF Switch: Install the pneumatic controller in a location that is easily accessible to the operator. The ON/OFF switch is the WARNING pneumatic controller’s main power disconnect device and must always be easily accessible. The ON/OFF switch turns power to the controller ON and OFF.
Page 20 Controller Operation System Operation Reset Button: A "RESET" button is located to the right of the thumbwheels for resetting the counters in the microprocessor. When "RESET" button depressed once, the "INK ON" LED will flash for 5 seconds. If it is pressed a second time within 5 seconds, it will "read"...
Page 21 System Operation Controller Operation Dot Size Thumbwheels: The adjustable Dot Size Thumbwheels on the front panel are used to vary the size of the dot produced without affecting set-up or requiring additional operator steps. The microprocessor reads the thumbwheel settings and outputs a signal to enable the cartridge air valve for a predetermined amount of time.
Page 22 Controller Operation System Operation Ink On and Status LEDs INK ON LED During normal inking, the INK ON LED flashes when an ink dot is placed. STATUS LED The STATUS LED flashes or is solid on to indicate different states of the controller.
Page 23 System Operation Controller Operation adjustment of Z height may be necessary after changing an ink cartridge, due to slight manufacturing variations between cartridges. The Z UP and Z DOWN buttons can also be used to move the inker up or down by depressing and holding down either button.
Page 24: Ink Cartridge
Ink Cartridge System Operation Ink Cartridge The ink cartridge used with the Micro-Z Inkers is a DM-2 pneumatic ink cartridge. DM-2 cartridges have a polypropylene reservoir (sealed at the bottom by a thin INTERNAL membrane) and a small Teflon tube encased in a stainless MEMBRANE ...
Page 25: Ink Cartridge Labeling
System Operation Ink Cartridge Labeling Ink Cartridge Labeling DieMark ink cartridges are individually labeled with two distinct labels. One label shows the cartridge type and ID number. The other label indicates the ink batch number, ink type and expiration date of the cartridge. Do not remove the labels from the cartridges as this can cause cartridge type and ink types to be confused at cartridge installation, resulting in improper performance.
Page 26: Cartridge Preparation
Cartridge Preparation System Operation Cartridge Preparation 1. Place the cartridge into the cartridge preparation tool (Xandex Part No. 200-0001) as shown, exercising care to avoid damaging the Teflon tip. The cartridge cap should  be seated in the tool hinge with the needle resting in the slot.
Page 27: Cartridge Installation
System Operation Cartridge Installation 3. Press top of cartridge into shuttle spring clip. 4. Press cartridge body into shuttle forks until the neck fully snaps into place. Cartridge is now ready for priming. (See “Cartridge Priming" later in this Section (4) for instructions) Caution: Ink Cartridge needle can pierce skin when moved manually or when shuttle valve is actuated:...
Page 28: Cartridge Priming
Cartridge Priming System Operation Cartridge Priming Always wear protective eyeglasses when handling an CAUTION active pneumatic inking system! 1. Prepare a cartridge per the “Cartridge Preparation” section of this manual. 2. Install a cartridge to the inker per the “Cartridge Installation” section of this manual.
Page 29 System Operation Manual Micro-Z Inker Assembly Setup If the inker height is adjusted with the prober stage "Z Down" the cartridge will be positioned too low and the cartridge needle may contact the wafer when you begin inking. This will stop the ink flow and possibly ruin the cartridge or damage the wafer! 2.
Page 30: Motorized Micro-Z Inker Assembly Setup
Z height adjustment of the inker may be necessary after changing ink cartridges. 13. If the unit fails to operate as specified, please contact Xandex Customer Service for assistance at (707) 763-7799 or toll free in the United States at (800) 767- 9543 or email insidesales@xandex.com...
Page 31 System Operation Motorized Micro-Z Inker Assembly Setup The Motorized Micro-Z Inker Assembly shown in the diagram above, is adjusted by using the Bottom Mode Switch Positions and the Z UP and Z DOWN Buttons: described on page 4-4. When the Bottom Mode Switch is in the Z-STEP position, the shuttle assembly will move 0.0005 inches (5 ten thousandths of an inch or 0.5 mil) each time the Z-UP or Z-DOWN buttons are pressed once.
Page 32 Motorized Micro-Z Inker Assembly Setup System Operation Fine Adjustments 8. If ink dots are consistent in size and shape, the inker is setup and ready to ink wafers. 9. Test dots that are inconsistent in size and shape (larger dots mixed with smaller dots) indicate a slight downward Z adjustment is required.
Page 33: Cartridge Priming Tips
System Operation Cartridge Priming Tips 13. If the unit fails to operate as specified, please contact Xandex Customer Service for assistance at (707) 763-7799 or toll free in the United States at (800) 767- 9543 or email insidesales@xandex.com Changing the Cartridge 1.
Page 34 Cartridge Priming Tips System Operation This page is intentionally left blank. 4-16 820-0332...
Page 35: Ink
All the inks offered by Xandex are non-magnetic. Safety Data Sheets (SDS) are available for all inks offered by Xandex. To obtain SDS or information about choosing the appropriate ink for your application please contact your local distributor or Xandex Customer Service.
Page 36: Ink Curing
8103 and 8104 Glycol Free inks hard cure under ambient conditions in the least time of any of the inks offered by Xandex. Ink dots of ≤25 mil typically air dry to a hard cure in 45 minutes. Dot sizes >25 mil may require significantly longer to cure. An ambient cure time of up to 6 hours may be needed for larger dot sizes.
Page 37: Ink Curing Guidelines
Ink Curing Guidelines Ink Curing Guidelines The following table provides guidelines for curing each type of ink sold by Xandex: The following table provides guidelines for curing each type of ink sold by Xandex: INK CURING GUIDELINES CURE TEMPERATURE CURE TIME...
Page 38: Ink Removal Information
DieMark Remover 8000 Xandex has developed DieMark Remover 8000 specifically for the semi-conductor industry. DieMark Remover 8000 thoroughly removes all inks supplied by Xandex, including oven baked ink dots. DieMark Remover 8000 has very low levels of organic and inorganic contaminants and is an efficient and thorough ink remover when used in simple bench top cleaning methods.
Page 39 Ink Removal Information * The following ink removers may be substituted for DieMark Remover 8000, however, Xandex does not guarantee that satisfactory results will be obtained. None of the following solvents or ink removers are available from Xandex. ♦ Aptek 6515 Ink Remover ♦...
Page 40 Ink Removal Information This page is intentionally left blank. 820-0332...
Page 41: Maintenance & Troubleshooting
Solution Some ink dots tend to crack This occurrence is related to the ink surface tension, the after baking using Xandex wafer surface conditions and too long a delay time recommended cure cycles. between inking and curing. To remedy this situation, the curing cycle has to be modified (reduce time and temperature).
Page 42: Ink Troubleshooting
Ink Troubleshooting Maintenance & Troubleshooting Problem Solution Small, inconsistent or no 1. Soft Teflon tip of the cartridge tube is clogged or  ink dots. damaged. Change ink cartridge. 2. The dot size setting may be too low. Increase dot size setting.
Page 43: Inker Troubleshooting
Maintenance & Troubleshooting Inker Troubleshooting Inker Troubleshooting Problem Solution Cartridge tip does not reach 1. Check Z height The cartridge tip should be 1-2 mil wafer surface. from the wafer surface. Adjust Z height per "Inker Assembly Setup and Alignment" in Section 4 “System Operation”...
Page 44: Micro-Z Shuttle Maintenance
• In-Line / Post Probe use = Once per year Shuttle preventive maintenance kits are available, which include all parts necessary for one normal shuttle maintenance procedure. These kits may be ordered direct from Xandex or through your local Xandex distributor.
Page 45: Controller Troubleshooting
Maintenance & Troubleshooting Controller Troubleshooting Controller Troubleshooting Problem Solution The Unit is plugged in but the “Power” 1. Make sure that the AC outlet has power. LED is off. Requirement is 100-240 VDC @ 47- 63Hz. 2. Verify that the power supply is connected to the 24V input on the back of the controller and that the ON/OFF switch on the controller is in the ON...
Page 46: Controller Preventive Maintenance
Controller Preventive Maintenance Maintenance & Troubleshooting Problem Solution “STATUS” & “INK ON” LED's 1. Verify that there is air input to the Flashing controller. 2. Unacceptable mode switch combination. Review “Controller Operation” in Section 4. Dot size does not change with 1.
Page 47: System Specifications
The DC power supply received with your DieMark inking system meets these requirements. Use only the DC power supply provided with the unit or an authorized replacement power supply from Xandex Inc. or an approved Xandex distributor. For the exact specification of your power supply, see the “24VDC Power Supply” drawing included in your product manual drawing package.
Page 48: Inker Specifications
(2) This device must accept any interference that may be received or that may cause undesired operation. Xandex Inc. has labeled its branded electronic products with the WEEE Symbol to alert our customers that products bearing this label should not be disposed of in a landfill or with municipal or household waste in the EU.
Page 49: Ink Cartridge Specifications
8103 White 8104 Black + = Available standard cartridge and ink configuration. 0 = Not yet qualified by Xandex. Available as a special order, subject to limited warranty conditions. T = with Tungsten filament F = with Mono-Filament X = Not available in filament cartridge configurations.
Page 50: Dot Size Guidelines In Mils (0.001 Inch)
8103 ink in small dot applications. 0= A4 cartridges are qualified by Xandex for use on Micro-Z inking systems. A4 cartridges can be purchased for use on other DieMark pneumatic inker models, however, performance is not guaranteed, and subject to limited warranty conditions.
Page 51: Dot Size Guidelines In Microns
8103 ink in small dot applications. 0= A4 cartridges are qualified by Xandex for use on Micro-Z inking systems. A4 cartridges can be purchased for use on other DieMark pneumatic inker models, however, performance is not guaranteed, and subject to limited warranty conditions.
Page 52: Inker Warranty
Xandex may, upon request, furnish to buyer such technical advice, as it may be able to supply with reference to the use by buyer of any materials delivered. Xandex assumes no liability for the advice given or results obtained.
Page 53: System Drawings
The Inker Assembly Dimensional Drawings are available via link from www.xandexsemi.com The remaining drawings in the list below are available on request, in Adobe PDF format, from Xandex Customer Service. Description Drawing Number X7111 Micro-Z Manual Pneumatic Inker Set (EG)
Page 54 System Drawings System Specifications Inker Assembly, Micro-Z Manual, Pneumatic 60” Air Hose 320-7110-02 Inker Assembly, Micro-Z Motorized, Pneumatic 36” Air 320-7120-01 Inker Assembly, Micro-Z Motorized, Pneumatic 60” Air 320-7120-02 Pneumatic Shuttle, Precision Direct Mount (36” Air Hose) 316-0010 Pneumatic Shuttle, Precision Direct Mount (60” Air Hose) 316-0012 Precision Shuttle Direct Mount Dimensional Drawing 900-0219...

This manual is also suitable for:

340-7120