CKD RAPIFLOW FSM-H-A Series Instruction Manual

F2-463099-A
INSTRUCTION MANUAL
RAPIFLOW® microflow type
FSM-H-A series
・Analog type
・Separate indicator
Please read this instruction manual carefully before using this product,
particularly the section describing safety.
Retain this instruction manual with the product for further consultation
whenever necessary.
! Precaution
・This product is designed for air and compressed dry air and N
not use it with combustible gases.
・Do not touch electric wiring connections (exposed live parts): this
will cause an electric shock. During wiring, keep the power off. Also,
do not touch these live parts with wet hands.
1.CAUTION
① The product can not be used as a business mater. Not conformed to
the Measurement Law, do not use the product for the commercial
purpose. Use the product as an industrial sensor.
② In installation, please be sure to hold the product's main body to
prevent any impact to body and stress to the flying lead.
③ Do not use the product with other than applicable working fluids, or the
accuracy can not be guaranteed.
④ Install a filter, an air dryer and an oil mist filter (micro alescer) onto the
primary side(upstream) of the sensor since the compressed air from
the compressor contains drain(water, oil oxide and foreign material,
etc.) Mesh(wire net) in a sensor is used to rectify the flow in the pipe.
Always install a filter since this mesh is not a filter to remove foreign
materials, etc.
⑤ Even if twice as much as overflow as each series measuring range is
applied to the sensor, it is no problem, however, if dynamic pressure is
applied near to the maximum working pressure, (when the pressure
applied to the primary side with the secondary side released.), the
sensor may fail. When feeding workpieces during leakage inspection, if
dynamic pressure is applied, always provide a by-pass circuit or a
needle valve to avoid dynamic pressure applying to the sensor.
2. Specifications

Analog output type
Indicator type
Descriptions
FSM-H-A-□ ※１ ML-□ ※２
005 0.25 to 5
Flow rate range 010 0.5 to 10
※１
Note
(m  /min) １ 050 2.5 to 50
100 5 to 100
Body material 6A Stainless steel, Rc1/8
※２
Port size 6G Stainless steel, G1/8
Clean air (JIS B 8392-1.1.1 to5.6.2),
Note
Working fluid ２
compressed air(JIS B 8392-1.1.1 to1.6.2), and nitrogen gas
1.0MPa
Maximum working pressure
Minimum working pressure -0.09MPa
1.5MPa
Withstanding pressure
Ambient temperature/humidity 0 to 50℃, 90%RH or less
Working fluid temperature 0 to 50℃
±3%F.S. or less (0.1Mpa, 25℃, flow rate range 5 to 100%F.S.)
Linearity (display/analog output)
Pressure characteristics ±3%F.S. or less(-0.09 to 1.0 Mpa, 0.1Mpa criteria)
±０．２％F.S.／℃以下(15 to 35℃, 25℃ criteria)
Temperature characteristics
Repeatability (F.S.) ±0.5% F.S. or less
Note
Response time ３ 50mS or less
Display Power display (green）
Analog output 1 to 5V (connected load impedance 50kΩand over)
Power supply voltage DC12/24V(10.8 to 26.4V)
Current consumption 50mA or less
3
Lead wire φ3.7 0.2mm ×3-conductor 1ｍ
Functions Analog output
Installation attitude Both vertical and horizontal
Strait piping section Not required
Protective structure IP40
Note Power supply reverse protections
Protective circuit ４
EMC directive EN55011, EN61000-6-2,EN61000-4-2/3/4/6/8
Mass 140g
Note1: Converted to volumetric flow at 20℃ and 1 atmospheric pressure (101kPa)
Note2: Consult with CKD for usage with a gas other than air and N2.
Note3: The response time may change depended with piping condition.
Note4: The protective circuit of this product is effective for the special incorrect wiring and load short
circuits, but can not protect the product from all wrong connections.
<Separate indicator>
 Bracket/kit (optional) are provided to install a separate indicator.
Bracket model no.：PPD3-KL-D
：single foot bracket (radical installation)
Mounting hole
2-nominal 3
machining dimensions
P tight
2-M3
Bracket model no.：PPD3-KD-D
：both sides foot brackets(parallel)
Mounting hole
machining dimensions
2-nominal 3
P tight
18
Bracket model no.：PPD3-KHS-D
：panel mount bracket set with panel cover
Mounting panel cutout
□33.5±0.3
Bracket model no.：PPD3-KC
：operation protective cover
Protective cover
Protective cover holder
 Separate indicator
Separate indicator
Descriptions
FSM-H-D NP
005
Flow rate range 010
*2
: mL/min
050
100
Flow rate display (7 segments 3 digits, orange),
Display
operation and switch output (orange)
N (NPN open collector output, load current 50mA or less,
Switch output *1
P (PNP open collector output, load current 50mA or less,
Switch output
Appx. 5ms
response time
Output 1 point
Analog output
(1 to 5 V voltage output, and connected load impedance 50 kΩ and over)
Power supply voltage DC12／24V （10.8〜26.4V）
Current consumption 50mA or less (indicator only)
2
Lead wire φ3.7 0.2mm
Functions Flow rate display, flow rate-peak hold, switch output, analog output
. Do
2 Ambient
0 to 50℃, 85%RH or less (to be no dew condition)
temperature/humidity
Protective structure IEC standards IP 40
Mass Approximate 70g (including lead wire 1m)
3. Wiring
 Analog output type (FSM-H-A)
Content
Line color
Power supply DC12 to
Brown
24V
Blue 0V(GND)
Analog output
Black
(1 to 5V)
Ｎ
 Separate indicator (FSM-H-D
/ ）
Ｐ
<Connection of display unit and sensor>
11mm
The length of
stripping-wire
Recommend
How to connect analog output type
to separate indicator
length ：11mm
Electrical connection of sensor controller is made with terminal
stand.
Insert the wire while yellow jaw is pushed.
 Refer to the spec. below if other wires than those for the products
are used.
Single-wire 0.14 to 0.5mm ２
Twisted-wire 0.14 to 0.5mm ２
AWG 26 to 20
7.External dimensions
<Analog output type>
FSM-H-A- ML-6A/6G
55
27
15.5
4-M3
<Separate indicator type>
FSM-H-D０５０
32
□30
2-φ2.7 depth 7
<Separate indicator>
 FSM-H-DN (separate indicator: NPN output）
*1 *2
- R0005 ML
0〜5
0〜10
0〜50
0〜100
2 points
voltage drop 2.4V)
2 points
 FSM-H-DP(separate indicator: PNP output)
voltage drop 2.4V)
×5-conductor (1m)
(Precautions for wiring)
 Wiring
For wiring, turn off the power supply. Discharge static electricity built
in body, tool and equipment before and during work. Use a wire
elasticity as wire for robot connection in the movable part.
 Wiring installation
This product and wiring must be installed as far away as possible
from noise source such as strong electric line, etc. Take other
countermeasures for a surge on the power supply line.
 Power voltage
Do not use the product put of power supply voltage range. If voltage
more than usage range is applied, or if alternating current
power(AC100V) applied, causing damage or burn.
Brown
 Short-circuiting
Do not short-circuit a load, otherwise, or causing damage or burn.
Black
＋
 Incorrect wiring
−
Connect wires to the correct poles or terminals, otherwise, wires may
Load
be damaged or burned.
 Separate indicator ;
Blue
By connecting display unit (FSM-A-D*) and flow sensor (analog output
type: FSM-A), digital display and switch setting of flow rate is possible.
The controller has been designed exclusively for FSM. Be sure to
combine the controller and the sensor for the same flow rate. Never
combine the other flow sensor, FSM for other flow rate or pressure
sensor.
 FG connection
Use DC safety power supply thoroughly insulated from the AC
primary side for a power supply for the metal body type, while
connecting either + or – side on the power supply to F.G. High
potential and insulation resistance tests between the inside power
Brown (power supply+)
Analog circuit of metal body type and the metal body must not be done.
V
output
Black (signal conductor)
S type
4.Analog output voltage – flow rate characteristics
Blue (power supply-)
G
FSM-□-□-□
5
Analog
4
output
(V) 3
2
1
0 F.S.
8. How to order
<Analog output type>
FSM – H – A - 005 ML- 6A - K
Rc1/8 or G1/8
2-φ3.4
2-M3 depth 5
<Separate indicator>
FSM – H –D N - 050 ML
22
Sensor grand
<Bracket for separate indicator>
PPD3 - KL - D
2-250, Ouji，2-Chome，Komaki，Aichi，485-8551, Japan
http://www.ckd.co.jp/
5.Piping
(Precautions for piping)
 This product must be piped, while matching the flow direction and
Brown (power supply +)
direction specified on the body.
Load1 Load2
Black (out1)
 When a valve is used in the primary side of the sensor, an oil-prohibited
←MAX 50mA
+
White (out2)
valve must be used. The sensor may malfunction or be destroyed by
←MAX 50mA -
splash of grease and oil, etc.
Gray (analog output)
DC12 to
24V
 When piping in a resin tube, fix the piping as much as possible. When
Blue (power supply -)
the piping moves during the flow control, abnormality of the flow output
is caused as internal gas moves.
 When piping, apply a spanner on the metal section not to apply forces
Brown (power supply+) onto the resin section.
・ Never hold the plastic case for tightening.
Black (out1) MAX50mA→
・ When piping, care must be taken that
+
White (out2)
MAX50mA→
sealing tape and adhesive must not enter
-
Load1 Load2
Gray (analog output)
DC12 to
into the inside.
24V
Blue (power supply-)
・ During the piping work, be sure that
any excessive screw-in torque and/or
load torque will be applied to the piping port.
Set screw
6.Installation
Horizontal
(through hole)
(Precautions)
Output accuracy is affected by
self exoergics caused by
energizing other than
temperature characteristics.
When using, stand-by time
(5 minutes and over after
energizing) must be provided.
If out of flow rate range, the
Flow rate
output will reach up to max 8V.
(  /min)
Symbol Content
Fl ow r a t e r ang e
005 0.25〜5 mＬ/min
010 0.5〜10 mＬ/min
050 2.5〜50 mＬ/min
100 5〜100 mＬ/min
Port s i ze
6A Rc1/8 (stainless steel)
6G G1/8 (stainless steel)
O pt io n
Blank None
K Company Certification attached
Traceability attestation attached.
3 pieces; traceability
T
company certification and traceability
system configuration are attached.
Symbol
Content
Ou t pu t t yp e
N NPN output
P PNP output
Fl ow r at e rang e
005 0.25 to 5 mL/min
010 0.5 to 10 mL/min
050 2.5 to 50 mL/min
100 5 to 100 mL/min
Symbol
Content
Bra c k et k it
KL-D Single foot bracket (radial)
KD-D Both sides foot brackets (parallel)
KHS-D Panel mount bracket set with cover
KC Operation protective cover
Tightening torque Ｎ・ｍ
Rc1/8 3 to 5
G1/8 3 to 5
Vertical
(female thread on the bottom)
Bracket installation
(* bracket use)
* Bracket(separate sales)
is provided.
(model no.: FSM-LB1)
attestation,
2006.12.13