Summary of Contents for Ideal Vacuum XactGauge XGC-321
- Page 1 XactGauge™ Convection-Enhanced Pirani Gauge Sensor XGC-321 Operating Manual Incl. EU Declaration of Conformity (2019-11) Doc. Ref. XGC-321-100119...
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Page 2: Product Identification
Product Identification In all communications with Ideal Vacuum Products, please spe- cify the information given on the product nameplate. For conven- ient reference copy that information into the space provided below. Validity This document applies to products with part numbers:... -
Page 3: Important User Information
In no event will Ideal Vacuum Products be responsible or liable for indirect or consequential damages that result from the use or application of this equipment. - Page 4 CAUTION Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken, could result in minor or moderate injury, property damage, or economic loss. NOTICE Identifies information that is critical for successful application and understanding of the product.
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Page 5: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty Ideal Vacuum Products assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 6: Table Of Contents
Contents Product Identification Validity Important User Information General Safety Instructions Liability and Warranty Introduction / General Information 1.1 Description 1.2 Specifications 1.3 Dimensions Important Safety Information 2.1 Safety Precautions - General 2.2 Safety Precautions - Service and Operation 2.3 Electrical Conditions 2.3.1 Proper Equipment Grounding 2.3.2 Electrical Interface and Control 2.4 Overpressure and use with hazardous gases... -
Page 7: Introduction / General Information
XGC-321 Convection- Enhanced Pirani Gauge Sensor is a convection-enhanced Pirani vacuum gauge sensor that interfaces with external controllers such as the Ideal Vacuum Products XactGauge XGC-320 controller. The XGC-321 is also a direct drop-in replacement pin- pin compatible gauge for the MKS Instruments / Granville- ®... -
Page 8: Specifications
Specifications Measurement range 1.3×10 … 1333 mbar 1×10 … 1000 Torr 1.3×10 Pa … 133 kPa Accuracy - N (typical) 1.3×10 … 1.3×10 mbar 0.1 ×10 mbar resolution 1.3×10 … 530 mbar ±10% of reading 530 …1333 mbar ±2.5% of reading 0.1 mTorr resolution 1×10 …... -
Page 9: Dimensions
Dimensions Fitting Dimension A (inch) DN 16 ISO-KF (1.3) DN 25 ISO-KF (1.3) DN 40 ISO-KF (1.3) DN 16 CF 1.33 27.4 (1.08) DN 40 CF 2.75” 37.3 (1.47) 4 VCR female 47.2 (1.86) 8 VCR female 44.5 (1.75) 1/8" NPT male 25.4 (2019-11) Doc. -
Page 10: Important Safety Information
Important Safety Information Ideal Vacuum Products has designed and tested this product to provide safe and reliable service, provided it is installed and operated within the strict safety guidelines provided in this man- ual. Please read and follow all warnings and instructions. -
Page 11: Safety Precautions - Service And Operation
Prior to installing the XGC-321, ensure that all safety checks are made by a qualified service person. When a replacement gauge is required, ensure that the gauge is specified by Ideal Vacuum Products Substitutions of non-qualified parts may result in fire, electric shock or other hazards. -
Page 12: Electrical Conditions
Do not use if the equipment grounding or electrical insulation has been compromised. Do not use if the unit has been dropped. Contact Ideal Vacuum Products for further instructions regarding evaluation of the damaged sensor. -
Page 13: Electrical Interface And Control
Ideal Vacuum Products gauges should not be used at pressures exceeding 1000 Torr absolute pressure. In cases where an equipment failure could cause a hazardous condition, always implement fail-safe system operation. -
Page 14: Gases Other Than Nitrogen / Air
The XGC-321 vacuum gauge module is not intended for use at pressures above 20 psia (1000 Torr); DO NOT exceed 35 psig (<2½ bars) pressure inside the sensor. If your chamber goes to higher pressures, you should install an isolation valve or pres- sure relief device to protect the gauge tube from overpressure conditions. -
Page 15: Installation
Ideal Vacuum Products gauges are calibrated for direct readout of nitrogen or air. Do not attempt to use with other gases such as argon (Ar) or carbon dioxide (CO ) unless accurate conversion data for N to other gas is properly used. Refer to the correction factor data listed in the controller Operating Manual operating this device. - Page 16 Mount the XGC-321 with its main (long) axis horizontal (see dia- gram below). Pressure reading errors may occur above 1 Torr if the unit is not mounted horizontally. Below 1 Torr, mounting po- sition has little to no effect. For accurate measurements above 1 Torr, mount the gauge axis horizontally as shown below: Vacuum chamber Incorrect Orientation:...
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Page 17: Electrical Installation
Mount the XGC-321 with port down, if possible, to help minimize the effect of any particles or condensation from collecting in the gauge. Do not mount the XGC-321 where it will be subjected to exces- sive vibration. Vibrations may cause unstable readings, measu- rement errors and possible mechanical stress to components in the XGC-321. - Page 18 Gauge tube Use 12 gauge or larger ground wire Metal clamp or metal hose clamp Vacuum gauge fitting Vacuum chamber Doc. Ref. XGC-321-100119 (2019-11)
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Page 19: Using The Gauge With Different Gases
(N ) and the gas in use. The gas correction data, charts and tables listed in your controller (such as the Ideal Vacuum Products XGC-320 controller) Operating Manual indicates how different gases affect the display and output from an Ideal Vacuum Products convection gauge. - Page 20 Thermal conductivity gauges like the Ideal Vacuum Products convection gauges are not recommended for use with flammable or explosive gases. Moisture / water vapor In some processes (lyophilization, for example) the gas composi- tion may not change significantly, except for moisture content.
- Page 21 The X-axis is the pressure reading indicated by the convection gauge under test. This chart shows readings for an Ideal Vacuum Products ® ®...
- Page 22 Ex B: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will read about 9 Torr. If you are backfilling your vacuum system with Ar, when your system reaches a pressure of 760 Torr true pressure your gauge will be reading about 23 Torr.
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Page 23: Service
Torr. Care should be exercised when using gases other than nitrogen (N ) / air. Maintenance In general, maintenance is not required for your Ideal Vacuum Products gauge. Periodic performance checks may be done by comparing the gauge to a known reference standard. (2019-11) -
Page 24: Troubleshooting
Troubleshooting Doc. Ref. XGC-321-100119 (2019-11) - Page 25 (2019-11) Doc. Ref. XGC-321-100119...
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Page 26: Contamination
The standard gold plated tungsten sensor used in the Ideal Vacuum Products convection gauge is offered for use with air and inert gases such as N , argon, etc. Ideal Vacuum Products also offers modules with platinum sensors for applica- tions not compatible with gold plated tungsten. - Page 27 B) Oil, Condensation, Coatings, and Particles If the failure is due to an accumulation of material in the gauge, we may be able to restore your gauge or module by cleaning. Contamination may be as simple as condensed water, or as difficult as solid particles.
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Page 28: Gauge Replacement
Particles in the process chamber may be swept into the gauge during the vent cycle. The XGC-321 has a screen built into the gauge port to help keep the largest particles out of the gauge. In very dirty applications, or where particles are small enough to get through the screen, an additional filter installed on the inlet may help prolong the gauge life. -
Page 29: Factory Service And Support
Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to Ideal Vacuum Products should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a... -
Page 30: Disposal
Disposal DANGER Contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING Substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimen-... -
Page 31: Eu Declaration Of Conformity
EU Declaration of Conformity We, Ideal Vacuum Products, hereby declare that the equipment mentioned below complies with the provisions of the following Directives: • 2014/30/EU, OJ L 96/79, 29.3.2014 (EMC Directive; Directive relating to electromagnetic compatibility) • 2011/65/EU, OJ L 174/88, 1.7.2011 (RoHS Directive;... - Page 32 Mexico Phone: (505) 872-0037 Fax: (505) 872-9001 info@idealvac.com Original: English 11111111111111111111111111111111111111111111111111111111111111111111111111111111 xas·321-100119 www.ideafvac.com...
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