Summary of Contents for Oerlikon Leybold Vacuum IONIVAC IE 414
- Page 1 IONIVAC Sensors IE 414, IE 514 and Temperature Resistant Gauge Head Cable Operating Instructions 300265097_002_A1 Part Numbers 158 66, 158 67 158 44...
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Page 2: Table Of Contents
Technical Data Installation Conforming Utilization Unpacking and Checking Installation Connecting the Temperature Resistant Gauge Head Cable Operation Maintenance Exchanging the Cathode Oerlikon Leybold Vacuum Service EC Declaration of Conformity Original Operating Instructions 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... - Page 3 We reserve the right to alter the design or any data given in these Operating Instructions. The illustrations are not binding. Retain the Operating Instructions for further use. 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum...
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Page 4: Description
I Gauge head cable with plug fitted on the equipment side and with touch protection I Housing with cover (supplied separately) I Ion collector cable I Mounting bolts (supplied separately) I Operating Instructions 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... -
Page 5: Ordering Information
Replacement cathode for IE 511 / IE 514 158 61 Gauge head cables IE 414 / IE 514 Gauge head cable, 5 m with touch protection 158 68 Extension cable, 20 m with touch protection 158 69 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... -
Page 6: Technical Data
Lower limit of measuring range 2·10 mbar 2·10 mbar heat resistant gauge head cable Max. bake-out temperature 200 °C (250 °C at the gauge head flange) Insulation materials used PTFE, PEEK Length 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... - Page 7 Cathode heater voltage 3 V (typ.) 3.7 V (typ.) Sensitivity for nitrogen 17 mbar (typ.) 6.25 mbar (typ.) Max. power when baking out 90 mA / 480 V 45 mA / 480 V 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum...
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Page 8: Installation
Check for completeness and carry out a careful visual examination. If any damage is discovered, report it immediately to the forwarding agent and insurer. If the damaged part has to be replaced, please get in touch with the orders department. 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... -
Page 9: Installation
(CH 1, CH 2). Affix the touch protection component at the IM 540 (BNC plug). The touch protection component is sup- plied together with the gauge head cable. 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... -
Page 10: Connecting The Temperature Resistant Gauge Head Cable
I Via the high-temperature cable pull the housing (2/13) over the connection plugs so that these may thereafter be screwed back onto the gauge head flange (2/1). 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... - Page 11 Ion collector cable (coax.) Countersunk screws (M 3 x 15) 10 Strain relief 11 Temperature resistant gauge head cable 12 Cable groove 13 Housing 14 Insulators (10 pcs.) Fig. 2 Connection of the gauge head 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum...
- Page 12 (2/10). I Now the ion collector cable (2/7) can be inserted at the centre of the gauge head. I Secure the cover (2/9) with the bolts (2/8). 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum...
- Page 13 (CH 1, CH 2). Affix the touch protection component to the IM 540 (BNC plug). The touch protection component is sup- plied together with the gauge head cable. 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum...
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Page 14: Operation
In the presence of halogen gases like fluorine, chlorine, bromine and iodine and their compounds, the yttrium oxide coating will suffer rapid wear. As a result of this, the cathodes will burn out. 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... - Page 15 Operation Humidity at the insulators (2/14) caused by condensing NOTICE water for example , can give rise to incorrect measure- ments due to leakage currents. 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum...
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Page 16: Maintenance
Anode Anode Anode Katode Anode Cathode Cathode Klemme Katode Terminal Innensechs- Klemme Terminal Hex screw Innensechs- kantschraube Hex screw kantschraube IE 514 IE 414 Fig. 4 View onto the gauge head 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... -
Page 17: Oerlikon Leybold Vacuum Service
This statement detailing the type of contamination is requi- red to satisfy legal requirements and for the protection of our employees. We must return to the sender any equipment which is not accompanied by a contamination statement. 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... -
Page 18: Ec Declaration Of Conformity
300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum... - Page 19 I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level. Name of authorized person (block letters) : Date signature of authorized person firm stamp 17200001_002_A1 © Oerlikon Leybold Vacuum 300265097_002_A1 - 05/2014 - © Oerlikon Leybold Vacuum...
- Page 20 w w w . o e r l i k o n . c o m / l e y b o l d v a c u u m Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 0 Fax: +49-(0)221-347 1250 info.vacuum@oerlikon.com...