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Table of Contents
Summary of Contents for COXEM SPT-20
- Page 1 Ion Coater SPT-20 Operating Manual COXEM Co., Ltd.
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Page 2: Table Of Contents
1. Introduction ........................4 Descriptions on Instrument Parts ..................... 4 1.1.1 Main Unit of SPT-20 ........................... 4 1.1.2 View from Back of SPT-20 ........................5 Cautions before Use ........................6 1.2.1 Precautions on Handling ......................... 6 1.2.2 Permission by Operation .......................... 7 1.2.3... - Page 3 Ion Coater SPT-20 Operating Manual Before using the instrument, please read this manual carefully and understand the ⚫ directions. Keep the manual in a conspicuous place. Some devices or functions in the manual may not be provided and can be different ⚫...
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Page 4: Introduction
Ion Coater SPT-20 Operating Manual Introduction Descriptions on Instrument Parts Names and functions of the parts of SPT-20 are described as follows. 1.1.1 Main Unit of SPT-20 ① ② ③ ④ ⑥ ⑤ Items Descriptions Target inside ① Vacuum Chamber... -
Page 5: View From Back Of Spt-20
Ion Coater SPT-20 Operating Manual 1.1.2 View from Back of SPT-20 ④ ① ⑤ ③ ② Items Descriptions ① Main Power Main system and rotary pump turning ON/OFF ② System Power cable plug Connection for system power cable ③ Fuse Holder Fuse(1.5A) inside... -
Page 6: Cautions Before Use
Ion Coater SPT-20 Operating Manual Cautions before Use 1.2.1 Precautions on Handling If fine dust or debris gets inside the microscope, the instrument may not function properly. Wear gloves and do not touch the parts inside the vacuum area with hands directly. -
Page 7: Permission By Operation
Ion Coater SPT-20 Operating Manual 1.2.2 Permission by Operation Following operations should be entrusted to specific personnel as described below. Division of operations Detailed performances General operation System operator Calibration Certified engineer from maker Hardware replacement Certified engineer. From maker... -
Page 8: Safety Guidelines
Ion Coater SPT-20 Operating Manual 1.2.3 Safety Guidelines Before using SPT-20, review the following instructions carefully Items Descriptions WARNING Instructions which, if not followed, can cause severe injuries to user Instructions which, if not followed, can cause moderate injuries or CAUTIONS damage to the instrument. -
Page 9: Specification
Ion Coater SPT-20 Operating Manual 2. Specification Rotary vacuum pump Descriptions AC 110V or 220V, 50/60 Hz, 0.12 kW Electronic 120(W) X 373.5(D) X 200(H) mm Dimension 1,700 rpm Motor Speed Ultimate Pressure ≤3 X 10 Torr (4.0 X 10 Oil Capacity 0.2L... -
Page 10: Composition
Ion Coater SPT-20 Operating Manual Composition Item Number(ea) Main unit Rotary Pump Au Target Power Cable Vacuum Hose Operation Manual Installation Requirement Clean, Dry, Dust Free surface, Factor Requirement Temperature 15 ~ 30℃ (59 ~ 86℉) Humidity Less than 60% Voltage Single Phase, 220V ±... -
Page 11: Operation
Power On Main Power (SPT-20 w/ Rotary vacuum pump) ① Switch on back side from SPT-20. At this time, Rotary vacuum pump’s power must be plugged in SPT-20 ② After press a power in up-side, Vacuum Begins immediately that reaches to 0.1 torr within 3min ③... -
Page 12: Set-Up
Ion Coater SPT-20 Operating Manual Set-up Display ① After Self-Diagnosis, displayed a coating set-up mode ② Set points are, - Target: Au, Pt, Cu, Pd, Pt-Pd, Ag, Al (STD: Au / Pt) - Current: 1 ~ 9 mA - Time: 10 ~ 300 Sec General: 3mA / 120 sec ➢... -
Page 13: Coating Thickness
Ion Coater SPT-20 Operating Manual Coating Thickness ① Au Target 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Time (sec) ② Pt Target 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300... -
Page 14: Measurement
Ion Coater SPT-20 Operating Manual 4. Measurement Measurement of sample due to target Test condition 4.3mm 10.0kV x200k Instrument FE-SEM by FEI... -
Page 15: Measurement Of Variety Samples Through Au Coating
Ion Coater SPT-20 Operating Manual Measurement of variety samples through Au coating Carbon Powder Membrane Si fiber... -
Page 16: Maintenance
Ion Coater SPT-20 Operating Manual 5. Maintenance Error List ① “V-sensor error”: Normally occur by vacuum → Request SVC ② “Touch SW error”: Normally occur by touch program → Request SVC Replacing Target ① First, Wearing poly gloves then remove insulation support of the electrode ②... -
Page 17: Cleaning Of Chamber
Ion Coater SPT-20 Operating Manual Cleaning of chamber - Required item: wipes for laboratory, methyl-alcohols, blowing air ① Wet wipes by methyl-alcohols ② Cleaning inside of chamber, rubber pad that wrapped around chamber and flange surface inside chamber Request SVC: Migun Techno World #201, Migun Technoworld, 199 Techno2-ro, Yuseong-gu, Daejeon, Korea Tel.
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