SmarAct METIRIO User Manual

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METIRIO

ENCODER

USER MANUAL

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Page 1 METIRIO ENCODER USER MANUAL...
Page 2 Nevertheless, it is not possible to fully exclude the presence of errors. In order to always get the latest information, please contact our technical sales team. SmarAct Metrology GmbH & Co. KG, Rohdenweg 4, D-26135 Oldenburg Phone: +49 (0) 441 - 800879-0, Telefax: +49 (0) 441 - 800879-21 Internet: www.smaract.com, E-Mail: metrology@smaract.com...
Page 3: Table Of Contents
4 Technical Data ..........................22 4.1 Absolute Maximum Ratings ....................22 4.2 Electrical Data ........................... 22 4.2.1 Pin Description METIRIO Readhead ................23 4.2.2 Pin Description METIRIO A1 ..................24 4.2.3 Integrated Circuit Block Diagram................25 4.2.4 Requirements for Subsequent Electronics..............26 4.2.5 Power-up speciﬁcation ....................
Page 4 5.3.1 Alignment to Linear Scales ..................50 5.3.2 Alignment to Rotary Scales..................52 5.3.3 Alignment to Goniometer Scales ................53 5.3.4 Alignment of METIRIO A1 to Scales ................54 6 Appendix: Order Codes........................55 6.1 METIRIO Readheads Order Codes ..................55 6.2 Metrology Scales Order Codes....................
Page 5: Introduction
It is designed to read incremental scales as well as reference marks. The compact METIRIO readhead is a very small ﬂip-chip package similar to the SON standard with soldering pads on the bottom side. The METIRIO encoder combines several advantages.
Page 6 • Alignment Tolerances The METIRIO A1 comprises an aluminum housing with mounting threads, the integraded ME- TIRIO Readhead, a cable with strain-relief and a connection plug. The METIRIO A1 can be further integraded into taylored external housings, to match any mounting requirement.
Page 7: Metirio Accessories
• ENCODER EVALUATION MODULE (EEM): The EEM is a box that can be connected to the stan- dard D-Sub 15 plug of the METIRIO A1 on the one side and via USB to a PC on the other side. It is a tool to quickly interact directly with the I C interface of the readhead in order to set the electrical settings and store them to the readhead’s internal memory.
Page 8: Preface
Figure 1.3: ENCODER EVALUATION KIT 1.3 Preface This manual will help you to install and operate the METIRIO Encoder safely in its intended use scenario. Please read this manual carefully before installing and using any METIRIO product. This user manual supersedes all previous editions, which thereby become invalid.
Page 9: Technical Support
Should you experience any diﬃculties with your product or need further technical information, please visit our web site ( ) or feel free to contact our https://www.smaract.com/metrology technical support: SmarAct Metrology GmbH & Co. KG Rohdenweg 4 26135 Oldenburg Germany +49 (441) 800 879 -0 metrology@smaract.com...
Page 10: Symbols
1.6 Warranty and Liability The general terms and conditions of sale and delivery of SmarAct Metrology GmbH & Co. KG or an equivalent contract negotiated between the contracting parties shall always apply. These are available upon signing the contract, placing an order or at https://www.smaract.com/...
Page 11: Life Support Policy
1.7 Life Support Policy DANGER SmarAct Metrology GmbH & Co. KG does not authorize or warrant any of its prod- ucts for use in life support systems, without the speciﬁc written consent of Smar- Act Metrology GmbH & Co. KG.
Page 12: Product Safety
DIN EN ISO/IEC 17050-1:2010 Manufacturer: SmarAct Metrology GmbH & Co. KG Manufacturer’s Address: Rohdenweg 4 26135 Oldenburg, Germany The manufacturer hereby declares that the METIRIO encoders comply with the following European directives: 2014/35/EU: Low Voltage Directive 2011/65/EU: RoHS Directive, including ammendemends METIRIO encoders fulﬁll the requirements of standards listed below:...
Page 13: Applications And Indended Use
Figure 2.1: Typical measurement setup The METIRIO Readhead is designed to read scales with an incremental pitch of 20 µm and refer- ence marks. The read head is an OEM product that can be integrated into or mounted on any kind of machinery with movable axes to detecte the relative movement to the scale.
Page 14: Personnel Qualification
• Do not interrupt the power supply to the sensor. • Do not utilize the power down capabilities of the METIRIO while the axis is moving, since the position information will be lost for a short period of time, depending on the applied duty cycle.
Page 15: Electrical Safety
ESD. Therefore, proper ESD precaution should be taken to avoid performance or loss of functionality. 2.6 Handling Precautions The METIRIO Readhead ﬂip chip package is a sensitive optoelectronic device that needs to be handeled with care. Please follow the following advices. WARNING Handle with care.
Page 16 CAUTION Do not operate the METIRIO encoder under water. This will lead to short circuit of the device. Operation in distilled water or other non-conductive liquids will also cause the device to be optically inoperable due to the refractive index of the environment.
Page 17 • Operation in liquid or gaseous environments with refractive index other than vacuum or nor- mal air, will not work or lead to reduced signal quality and inaccurate measurement results. Figure 2.3: Gripping and mounting precaution Metirio Encoder User Manual www.smaract.com | Page 17...
Page 18: Notes On Maintenance
Do not reach into the openings. Componentes inside the package can be damaged. 2.7 Notes on Maintenance • The METIRIO encoder devices do not requiere maintenance. However cleaning of the sur- faces in case of contamination could be advised in order to achieve optimal signal quality.
Page 19: Working Principle
Additionally to the periodical incremental track, the scale can comprise a second track with refer- ence marks. These marks will also reﬂect light to another light detecting array within the readhead. The ASIC generates a TTL-shaped reference signal at each detected reference mark. Metirio Encoder User Manual www.smaract.com | Page 19...
Page 20: Typical Output Signals
· π π where P is the pitch of the scale, which is always 20 µm for METIRIO encoders. The position X will vary periodically between 0 and 20 µm. In order to obtain a continuous position, the controller needs to count and increment the integer period count number n each time, the phase crosses zero.
Page 21 OE-UG00004, which is available on request. For additional information please contact SmarAct Metrology sales. Metirio Encoder User Manual www.smaract.com | Page 21...
Page 22: Technical Data
Reference output RS485 Square wave Integrated channel noise 500 kHz bandwidth µV Max. bandwidth 3 dB cutoﬀ Central emission wavelength λ Radiant output power Φ typical < 45 Metirio Encoder User Manual www.smaract.com | Page 22...
Page 23: Pin Description Metirio Readhead
1 mA. After a Low-signal is applied, the METIRIO will wake up in less than 50 µs. If the PD pin is not used, it can be connected to GND or left open.
Page 24: Pin Description Metirio A1
GPI pin is not used, it can be connected to GND or left open. 4.2.2 Pin Description METIRIO A1 The METIRIO A1 variant of the readhead is equipped with an electrical connector. Not all pins of the METIRIO Readhead are connected in the METIRIO A1 variant. The pin assignment of the D-Sub 15 connector is given in ﬁg.
Page 25: Integrated Circuit Block Diagram
4 TECHNICAL DATA 4.2.3 Integrated Circuit Block Diagram Figure 4.4: Block diagram of the mixed signal integrated circuit (ASIC) The METIRIO readhead comprises an integrated mixed signal ASIC with digital and analog blocks Metirio Encoder User Manual www.smaract.com | Page 25...
Page 26: Requirements For Subsequent Electronics
Usually this feature is not needed for optimum operation under normal ambient con- ditions. • A GPIO interface can set and read a speciﬁc ﬂag-bit onto the integrated RAM. 4.2.4 Requirements for Subsequent Electronics Figure 4.5: Example for subsequent electronics Metirio Encoder User Manual www.smaract.com | Page 26...
Page 27: Power-Up Specification
Ground to the potential of the conductive material. • In general, the METIRIO Readhead operates stable without a buﬀer capacitor on VDD. De- pending on the output impedance of the power supply and the connected loads it might be necessary to add a capacitor C near to the V Pin of the readhead to buﬀer fast current...
Page 28: Description Of Adjustable Settings
4 TECHNICAL DATA 4.2.6 Description of adjustable settings The output incremental and reference signals of the METIRIO Encoder can be adjusted by switch- ing the setpoints of the functional blocks. The functional blocks of the integrated circuit are ad- justable via I C interface by writing values into speciﬁc registers.
Page 29 Lissajous graph will be elliptical. But if the amplitude is equal for both channels, the circle will be round. In this case the circle diameter should be set primarily by selecting the LED setpoint as described above. Metirio Encoder User Manual www.smaract.com | Page 29...
Page 30 ﬁgure 4.6 Reference pulse adjustment The reference mark is detected by a diode array in the METIRIO Readhead. For optical reasons the extension of the reference mark in the movement direction equals 25 periods. However, for deﬁnite referencing, it is desirable that the reference mark can be assigned to one single period.
Page 31 The MSB of the threshold setpoint is a sign-bit, therefore the characteristic curves of the Diﬀ1 and Diﬀ2 threshold settings are nonlinear as shown in ﬁgure 4.8. Metirio Encoder User Manual www.smaract.com | Page 31...
Page 32 Step size Diﬀerential nonlinearity -0.1 Integrated nonlinearity -0.25 Hysteresis absolute value unidirectional Window Comparator Setpoint Voltage Resolution 6 bit DAC Steps Step size Diﬀerential nonlinearity -0.1 Integrated nonlinearity -0.25 Hysteresis absolute value, unidirectional Metirio Encoder User Manual www.smaract.com | Page 32...
Page 33: Digital Specification
ENCODER EVALUATION MODULE in combination with the ENCODER EVALUATION PROGRAM. These tools make setting up the METIRIO an easy task. However, the following tables give an overview about the detailed interface speciﬁcation for any user who needs to communicate directly with the readhead with his own controller.
Page 34 70 % to 30 % Rise time Fall time Stop condition Setup time µs SU Stop Valid conditions Data valid time µs VD Data Acknowledge time µs VD Ack Figure 4.9: I C Timing scheme Metirio Encoder User Manual www.smaract.com | Page 34...
Page 35: Environmental Conditions
4 TECHNICAL DATA 4.3 Environmental Conditions The METIRIO is a robust device that can operate under various conditions. Due to the compact and non encapsulated package with venting grooves comprising only low outgassing materials it is UHV compatible. Table 4.10: Operating conditions...
Page 36: Mechanical Data
The METIRIO A1 housing encloses the METIRIO Readhead. The cover glass on the top is ﬂush with the outer aluminum housing. Hence the working distance with respect to the scale has the same value for the METIRIO A1 . The readhead is directly connected to a STC-36T-12 cable with 12 cores. Metirio Encoder User Manual...
Page 37: Metirio Readhead Components
4 TECHNICAL DATA The SmarAct logo on the back side of the external housing is opposite to the logo on the cover glass of the METIRIO Readhead. This logo indicates the orientation of the readhead with respect to the scale.
Page 38: Scale Specifications
Figure 4.14: Types of optical gratings An incremental scale that meets the high precision requirements of the METIRIO encoder is more than just a stripe with measuring lines. It is an optical grating, forming a high-contrast interference Metirio Encoder User Manual www.smaract.com | Page 38...
Page 39 Length The possible scale length is only limited by manufacturing process and the accuracy which is in the order of 5 ppm for most typical scales. Thickness Since encoders of the METIRIO series work with reﬂective scales there is no limitation to the thickness.
Page 40: Linear Scale Specifications
Separation Line (TSL). This line is important because the readhead is aligned centered to this line, while the SmarAct logo faces the incremental track (see further chapter 5). The scale width is unlimited in the Y-direction, i.e. the track widths A and B are allowed to have any value greater than 1.4 mm.
Page 41: Rotary Scale Specifications
1.5 mm in order to avoid overlapping of the detection areas. The METIRIO can be used with scales comprising only one track, for instance only the incremental track or only the reference track. It is not neccessary to utilize both information. In case of incre- mental track, the user will only have incremental position information.
Page 42: Convex Scale Specifications
Figure 4.17: Rotation of a convex goniometer scales are made of ﬂexible material such as scale steel or ﬂexible thin glass. The smallest bending radius, METIRIO has been successfully tested with, is R 60 mm. ≥ Metirio Encoder User Manual...
Page 43: Scales With Reference Marks
The METIRIO Readhead is build to output an index pulse whenever it detects a reference mark on the corresponding track of the scale. Therefore METIRIO encoders do not distinguish between sin- gle reference marks, equidistant reference marks or any kind of distance coded reference marks.
Page 44 The advantage of this code is, that there is no larg gap between two neighbours even for very long scales up to several meters. Figure 4.19: Schematic illustration of alternating distance code Metirio Encoder User Manual www.smaract.com | Page 44...
Page 45 The ﬁgures and tables in this section give the exact deﬁnition for coded scales that can be pur- chased at SmarAct Metrology GmbH & Co. KG. Please notice, that these deﬁnition are not ME- TIRIO speciﬁc. From the encoder’s point of view the readhead detects only a single reference mark at a time.
Page 46: System Integration
Customized soldering ensures precision and reliability for speciﬁc integration requirements. The METIRIO Readhead ﬂip-chip package can be either glued or soldered. For soldering/gluing, it is either directly mounted on a PCB and electrically connected to the substrate’s solder pads, or solder-wired.
Page 47: Metirio Readhead Soldering Precautions
X, Y and Z are passively aligned Figure 5.3: Mounting reference for direct attachement. 5.2 METIRIO Readhead Soldering Precautions The read head and the circuit board form a unit. The designer of the circuit board has to ensure that this unit has proper mechanical interfaces for mounting.
Page 48: Metirio Readhead Alignment To Scales
• Place the encoder centered to the track separation line. • Pin 1 should face the incremental Track A. The SmarAct logo on the cover glass indicates the pin 1 corner. • The readhead’s cover glass should face the top surface of the scale.
Page 49 An optimum signal might only be achieved for proper electronic setting adjustment. The optomechanical alignment is suﬃcient, if you achieve a local maximum in signal quality and a round signal shape. For further instructions refer to our Quick-Start-Guide UG-OE00002, which is available on request. Metirio Encoder User Manual www.smaract.com | Page 49...
Page 50: Alignment To Linear Scales
5 SYSTEM INTEGRATION 5.3.1 Alignment to Linear Scales Figure 5.7: Correct orientation of the METIRIO readhead with respect to the scale tracks. Keep the working distacne within tolerances =1.18 mm 0.15 mm ± working distance Figure 5.8: Working distance The signal quality will be optimal for alignment within the optimum position. The signal quality will gradually be reduced when deviations from this position occur.
Page 51 If you want perfect signals, try not to use the allowed tolerance ranges to their fullest. Figure 5.10: Correct orientation of the METIRIO readhead with respect to the scale tracks. Some scale types comprise two reference tracks with opposite reference marks. In this case, ME- TIRIO will anyway read just one of the reference tracks.
Page 52: Alignment To Rotary Scales
• The optical centerline and the track separation line should have a distance of 0.7 mm. • Place the sensor centered to the TSL and centered to a radial line. • The SmarAct-Logo (Pin 1) should always face the incremental track, which is always the outer track of the circle.
Page 53: Alignment To Goniometer Scales
Always tilt into direction of the reference mark (positive R direction). Imagine the readhead would be a ﬂashlamp to illuminate the scale, then you would tilt the lamp towards the direction of the reference mark. Metirio Encoder User Manual www.smaract.com | Page 53...
Page 54: Alignment Of Metirio A1 To Scales
5.3.4 Alignment of METIRIO A1 to Scales Figure 5.15: METIRIO A1 variant of the readhead The main component of the METIRIO A1 is the basic METIRIO Readhead. For this reason all alignment instructions given in the previous sections hold true also for the METIRIO A1 : •...
Page 55: Appendix: Order Codes
6 APPENDIX: ORDER CODES 6.1 METIRIO Readheads Order Codes Figure 6.1: Order codes for METIRIO readheads Metirio Encoder User Manual www.smaract.com | Page 55...
Page 56 6 APPENDIX: ORDER CODES Figure 6.2: Valid combinatinos for readhead order codes Metirio Encoder User Manual www.smaract.com | Page 56...
Page 57: Metrology Scales Order Codes
• Please note that not every combinaton of scale parameters is valid. Please contact Sales for assistance in selecting an appropriate scale and technical drawings. • The outer diameter is at least 1.4 mm greater than the optical diameter. Metirio Encoder User Manual www.smaract.com | Page 57...
Page 58: Metirio Accessories Order Codes
6 APPENDIX: ORDER CODES 6.3 METIRIO Accessories Order Codes Figure 6.4: Order codes for compatible accessories Metirio Encoder User Manual www.smaract.com | Page 58...
Page 59 6 APPENDIX: ORDER CODES Figure 6.5: Valid combinations and examples of order codes for modules Figure 6.6: Order code for a complete starter-kit. Metirio Encoder User Manual www.smaract.com | Page 59...
Page 60: Appendix: Disposal Of Old Equipment
SmarAct respects the manufacturer’s product responsibility and will take care of environmentally correct disposal of old SmarAct products free of charge. To dispose old SmarAct equipment, you can return them to SmarAct GmbH to the following ad- dress postage-free: SmarAct GmbH...
Page 61 Korea Japan T/F: +81 47 - 370 86 00 T: +82 2 - 868 10 02 T: +972 9 - 950 60 74 Email: info-jp@smaract.com Email: info-kr@smaract.com Email: info-il@smaract.com www.physix-tech.com www.seumtronics.com www.opticsmotion.com Metirio Encoder User Manual www.smaract.com | Page 61...
Page 62 SmarAct Metrology GmbH & Co. KG develops sophisticated equipment to serve high accuracy positioning and metrology applications in research and industry within ﬁelds such as optics, semi- conductors and life sciences. Our broad product portfolio – from miniaturized interferometers and optical encoders for dis- placement measurements to powerful electrical nanoprobers for the characterization of smallest semiconductor technology nodes –...