Summary of Contents for ATTOTECH GR020
- Page 1 Manual GR020 IEZO RIVEN ULSED ALVE Attotech handelsbolag, Gullåkra Byaväg 18, 245 35 Staffanstorp, Sweden...
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Page 4: Table Of Contents
Gas ............................8 Electrical connections ......................8 Connection of the Attotech amplifier (option) ................9 Operation ............................10 Turning on-off procedure .......................10 Turning on-off procedure with the Attotech Driver (Option) ...........10 Settings ..........................11 Target change ........................11 Piezo instructions ........................11 Trouble shooting .........................12 Gas leak diagnosis .........................12 Attending a leak from the body ....................12... -
Page 5: Introduction
Introduction The GR020 pulse valve is designed to precisely inject gas in a vacuum chamber. Both the timing and the amount of gas released can be finely tuned. Applications: - High Order Harmonic generation - Attophysics - Molecular alignment - Cluster science... -
Page 6: Technical Description
Technical description An overview drawing of the GR020 can be found below. In the later sections of the manual references will be given to the numbering and names in this drawing. 1. Body - front piece 10. M2.5 slotted screw 2. -
Page 7: Installation
Installation Mechanical mounting Front Back Four M6-threaded holes in the body-back are intended for mounting the pulsed valve. The mounting holes are placed in the corners of a 25 mm side square to fit most translation stages. The two parts of the body and the position of the cooling hoses can be changed following the procedure given at the end of next section (“cooling”... -
Page 8: Gas
A delay box with microsecond resolution triggered by the laser directly or a photo diode can be used to feed the high voltage amplifier. If you ordered the Attotech amplifier, go directly to section “connection of Attotech amplifier”. Otherwise, we recommend the E470-00 amplifier from PI, though other types might work as well. -
Page 9: Connection Of The Attotech Amplifier (Option)
Connection of the Attotech amplifier (option) Warning Make sure that your wall power socket delivers the voltage that has been pre-set for the driver unit and that is indicated on the back of the rack (see picture below, #11). Description of the driver unit... -
Page 10: Operation
5 bars. Turning on-off procedure The following is a general presentation of the turning on/off procedure. If you ordered the Attotech driver, you may skip to section “Turning on-off with the Attotech Driver”. -
Page 11: Settings
At 5 Bars backing pressure, the negative operating voltage must not exceed -350 V. In the following never turn up the voltage above that limit. It corresponds to an indication of 350 on the Peak voltage indicator (#2). Connect the low voltage signal to the high voltage amplifier by switching (#5) on. ... -
Page 12: Trouble Shooting
Trouble shooting Gas leak diagnosis A leak observed when the valve is under vacuum, can come from the poppet, the body, or from the gas tubes and connections in your vacuum chamber. If you have recently opened the body for service or to adjust the direction of the target the second option is the most likely. - Page 13 Puppet Puppet nut KF 40 tube +O-rings Vaccum chamber Poppet nut* Poppet* * Might be black in some valves 3. Identify the poppet nut. It is the upper most beige or black nut that fits in an 8 mm open-end wrench.
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Page 14: Electrical Problems
Turn on the power supply and increase the voltage. There should be a kHz noise from the poppet vibrating against the body. If no noise, there is an electrical problem. See the corresponding paragraph. If the pressure in the chamber starts rising around -100 V the adjustment of the poppet is correct, go to step 6. -
Page 15: Specifications
Specifications Dimensions Dimensions Valve body (ØxD) 73 mm x 26 mm Target (WxDxL) 6 mm x 10 mm x 36 mm O-rings (inside diameter x width) Body sealing 54 mm x 2 mm Poppet 0.72 mm x 1 mm Target 2 mm x 1 mm or 2 mm x 0.8 mm Connectors Input gas connector... -
Page 16: Limited Warranty
Limited warranty Attotech products are guaranteed against manufacturing defects for one year from the date of shipment. This warranty covers the cost of labor as well as parts, but does not cover the cost of transportation to and from our laboratories. Neither piezo electric transducers, nor seals or other disposable items are included in the warranty.
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