Lintec VU-0430N Series Instruction Manual

Vaporizer Unit Instruction Manual
VU-0430N Series
Safety Precautions
Incorrect handling can cause serious injury or death.
(1) Before connecting the fittings, check that no damage or defects are found
on the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent liquid and gas from leaking
into the atmosphere.
(2) DO NOT apply any corrosive fluid to materials exposed to liquid and gas.
Corrosion may cause liquid or gas to leak into the atmosphere. Please
confirm the physical properties of liquid or gas before using.
(3) This device is not designed as an explosion-proof structure. DO NOT use
this device in a place where explosion-proof structures are required. Doing
so may cause fire or explosion.
(4) Prepare temperature controller unit when operating Vaporizer/Heat Exchanger
and do not set the temperature over than maximum operating temperature.
Wring temperature setting may cause fire or destruction of the device. It is
recommended to add abnormal overheating detector if necessary.
(5) This device must be earthed before use. Otherwise, there is the rink of
electric shock.
(6) Thermal switch is equipped in Vaporizer/Heat Exchanger to prevent
overheating. However, the operating temperature of thermal switch would
vary due to operating conditions and ambient temperature.
(7) Attach/remove connector and terminals, please make sure that power
supply turning off. It may cause fire or shock hazard.
Incorrect handling can cause medium or slight injury or
may cause damage to, or loss of, facilities or equipment.
(1) Observe the precautions listed in the WARNING (above).
(2) Not using the voltage can cause fire, damage to sensors or malfunction or
cause electric shock.
(3) This device is not designed to be waterproof. DO NOT locate this product
outdoors or in a place where it may be splashed with water. Doing so may
cause fire, trouble or malfunction of this product.
(4) DO NOT modify this product. It may cause fire or other problems.
(5) A warm-up period of 60 minutes is recommended after reaching the set
temperature. Otherwise, the output gas temperature will be low.
(6) This device is a precious device, please handle it carefully. Dropping
down or handling it carelessly will cause damage. Please use assist
instrument while moving or setting the device.
(7) Depends on the character of the liquid and process condition, the
temperature of tube, carrier gas, and the VU, also the flow rate of carrier
gas should be set properly.
(8) Please use Helium (He) to pressure liquid. It easily lead to bubbles if use
N2, Ar, O2, etc, that have higher than Helium (He) solubility to pressure.
(9) Regular maintenance is recommended for the steady use of this product.
This product uses a seal material made from the Kalrez®, in order to
reduce leakage, Changing the seals annually is recommended. The
maintenance cycle changes according to precursor type and operating
conditions, so please consult about the maintenance cycle for the steady use
of this device.
1. Introduction
This instruction manual explains the basic operation of Vaporizer unit
VU-0430N Series (Hereafter called "VU"). Please read through this manual
carefully to become familiar with the features of this device.
2. Features
The VU has the following features.
(1) By using the VU in combination with the liquid mass flow meter
(Hereafter called "LM") and the gas mass flow controller (Hereafter
called "MFC"), precise flow control and effective vaporization can be
assured.
(2) Maximum operating temperature of 200℃.
(3) Compact size
LN0405E2107B0 3. Specification/ Dimensions
(1) Specification
Product name
Model name
Rated power
supply voltage
and heater
capacity
Thermal switch (Note1)
Thermal switch connection method
Operating primary pressure
Operating secondary pressure
Pressure Limit (Gauge pressure)
Leak integrity (External Leak)
Fittings
Thermocouple for temperature controller
Recommended temperature controller
Wetted materials
Mounting direction
Standard
accessories
Note1) The temperature of thermal switch may be different from the temperature of a point of
controlling of VU.
(2) Dimensions
Vaporizer model: D01
Vaporizer model: D02
Outer block: 1piece, Inner block: 1piece
Direct connection (125V/15A, 250V/10A)
Less than 5.0×10
Precursor inlet
Carrier gas inlet
6.35mm (1/4") VCR Female
Gas outlet
StainlessSteel316L, Au, Ni-Co,
Power supply connector: vertical and up.
(Please confirm the outline dimension drawing)
Thermocouple
CMP01-K(RKC) × 2pieces
connector
Heater/Thermal switch
SRCN6A16-7S (JAE) × 1piece
connector
LM-VU connect
cable
Fig1. Exte rnal dimensions and com ponents
Vaporizer
VU-0430N
Inner AC 120V 80W
Outer AC 120V 100W
Inner AC 240V 225W
Outer AC 240V 400W
230±10°C OPEN
150 to 300 kPa(G)
Less than 25 kPa(G)
1MPa(G)
Pa∙m
-10 3
/sec (He)
3.2mm (1/8") VCR Male
6.35mm (1/4") VCR Male
K Type × 2pieces
PID control type
Polyimide or PEEK
Piping line: horizontal.
CC-LV-3-3M× 1piece