Page 1 Scanning Electron Microscope EM-30PLUS Operating Manual COXEM Co., Ltd.
Page 2: Table Of Contents
1. Introduction ........................7 Descriptions on Product Parts ....................7 1.1.1 Main Body of EM-30PLUS ........................7 1.1.2 Back and Inside of EM-30PLUS ......................8 Operational Procedure of Equipment ..................9 Cautions before Use ........................10 1.3.1 Handling ................................. 10 1.3.2...
Page 3 3.5.2 Specimen Storage ............................53 Preparation for Taking Photos ................54 Power ON/OFF ..........................54 4.1.1 Turning on the Main Body of EM-30PLUS ..................54 4.1.2 Turning off EM-30PLUS ........................... 55 Setting up of Electron Beam ....................56 4.2.1 Turning on the Electron Beam ......................56 4.2.2...
Page 4 Scanning Electron Microscope EM-30PLUS Operating Manual 5.1.1 RED & Focus Mode ..........................70 5.1.2 Fast Mode ..............................70 5.1.3 Slow Mode ..............................71 5.1.4 Photo Mode ..............................71 Setting Acceleration Voltage ....................72 5.2.1 Summary of Acceleration Voltage ..................... 72 5.2.2...
Page 5 Scanning Electron Microscope EM-30PLUS Operating Manual Alignment Operation ....................121 Summary of E-Gun Alignment ..................... 121 Method for E-Gun Alignment ....................122...
Page 6 Scanning Electron Microscope EM-30PLUS Operating Manual Before using the product, please read this manual carefully and understand the  directions. Be sure to keep the manual in a conspicuous place. Some devices or functions in manual may not be provided and they can be different ...
Page 7: Introduction
Scanning Electron Microscope EM-30PLUS Operating Manual Introduction Descriptions on Product Parts It describes the names and functions of the parts of EM-30PLUS. 1.1.1 Main Body of EM-30PLUS ① ② ③ ④ ⑤ ⑥ Items Descriptions ① E-Gun cover It is a cover for protecting e-gun.
Page 8: Back And Inside Of Em-30Plus
Scanning Electron Microscope EM-30PLUS Operating Manual 1.1.2 Back and Inside of EM-30PLUS ⑫ ① ⑪ ⑩ ② ⑨ ③ ⑧ ④ ⑦ ⑤ ⑥ Items Descriptions Electronic board It is an electronic board and a radiator. ① radiator ② Vacuum gage It measures the vacuum state.
Page 9: Operational Procedure Of Equipment
Scanning Electron Microscope EM-30PLUS Operating Manual Operational Procedure of Equipment Operational procedures of EM-30PLUS electron microscope (EM) are as follows. Stages Detailed performances 3.2.2 Assembling Method for Stub 3.4.2 Preparation of Materials Specimen Preparation 3.4.3 Measurement of Specimen Height 3.5.2 Specimen Mounting on Equipment Power ON 4.1.1 Turning on the Main Body of EM-30PLUS...
Page 10: Cautions Before Use
Scanning Electron Microscope EM-30PLUS Operating Manual Cautions before Use 1.3.1 Handling If fine dust or debris gets into electron microscope (EM), the equipment performance can be degraded. Therefore, be sure to handle the equipment with plastic gloves. Example of Plastic Gloves...
Page 11: Permission By Operation
Scanning Electron Microscope EM-30PLUS Operating Manual 1.3.2 Permission by Operation When operating electron microscope (EM), it should be managed with permission according to the operations. Division of operations Detailed performances General operation and taking System operator photos Calibration Agent or person that completed calibration training.
Page 12: Safety Precautions
Scanning Electron Microscope EM-30PLUS Operating Manual 1.3.3 Safety Precautions The precautions you should know before using EM-30PLUS are as follows. Items Descriptions If the instructions were not followed, it can cause severe injuries or WARNING death of users. If the instructions were not followed, users can be injured or suffer CAUTIONS property damage.
Page 13 Scanning Electron Microscope EM-30PLUS Operating Manual substances near the rotary pump during operation. Be careful when you suddenly stand up or sit down near the projections such as  detector or the aperture of the product. You can get hurt if you hit it or damage the parts.
Page 14: Screen Composition
Scanning Electron Microscope EM-30PLUS Operating Manual Screen Composition Main Screen of NS The composition of main screen of NS is as follows.
Page 15: Explanations On Buttons
When turned OFF: Gray  When turned ON: Purple  Communications between EM-30PLUS and PC are bad. 1) Confirm the connection state of the USB cable. 2) Change the USB cable to the USB connector of PC. Disconnect 3) There are communications-related problems in State various boards.
Page 16: Vacuum State Buttons
Scanning Electron Microscope EM-30PLUS Operating Manual 2.2.2 Vacuum State Buttons It is used when making inside the chamber vacuum state during specimen observation or when converting it to air pressure state in taking the specimen out. You can select the vacuum degree according to observation purpose or specimens.
Page 17: Selection Of Detector Mode
Scanning Electron Microscope EM-30PLUS Operating Manual Example: When observing non-coated FPCB specimen in SE mode. High Vacuum Low Vacuum 2.2.3 Selection of Detector Mode It is a button for selecting the detector mode of electron microscope (EM). SE Mode: Mode: It receives the signal of Secondary Electron (SE) and displays the image, ...
Page 18: Display Mode
Scanning Electron Microscope EM-30PLUS Operating Manual Display Mode The following SCAN RATE display icons appear on the screen. RED Mode & Focus Mode (Resolution 480x320, 160x80) It is the mode whose reaction velocity is the fastest due to low resolution and high scanning speed.
Page 19 Scanning Electron Microscope EM-30PLUS Operating Manual Slow Mode (Resolution 800x600) It scans a specimen slower than Fast Mode, which enables images to be observed more clearly. Photo Mode (Resolution 1280x960) It is a mode for taking photos of quality images, which takes about 1 minute. It is used...
Page 20: Image Mode
Scanning Electron Microscope EM-30PLUS Operating Manual Image Mode Image button is used when saving scanned images. When pressing image button, images are saved temporarily and displayed in small images on the bottom of the screen, and saved automatically in the specified path at the same time.
Page 21: Maximum Tilt Angle
Scanning Electron Microscope EM-30PLUS Operating Manual  Stage information Names Explanations When pressing button, Stage moves to the location of X=0, Y=0 coordinate. Home Move Stage to the center of the chamber. When pressing button, Stage moves to the location of X=17.5, Y=17.5 coordinate.
Page 22: Right Function Tap
Scanning Electron Microscope EM-30PLUS Operating Manual Right Function Tap 2.6.1 Function  Focus Focus the image by adjusting current intensity of objective lens. : After selecting button, you can find coarse focus fast in wide area by adjusting  focus large using mouse.
Page 23: Magnification
Scanning Electron Microscope EM-30PLUS Operating Manual  Gun Align : Align the position of electron beam generated from e-gun. Gun Align must be performed when replacing Filament or changing acceleration  voltage. Find out the position where image gets brightest by dragging X, Y axis or adjusting ...
Page 24: Image Viewer Setting
Scanning Electron Microscope EM-30PLUS Operating Manual For the details on the limits on magnification by WD, See [5.3.1 Methods for magnification selection]. 2.6.3 Image Viewer Setting Users correct the values of Contrast, Brightness, and Gamma in order to acquire more clear images before photo scanning.
Page 25: Top Function Tap
Scanning Electron Microscope EM-30PLUS Operating Manual Top Function Tap Some of the functions can be applied using the top function tap as the NS 3.0 interface is made conveniently.  Setup: It controls Acceleration Voltage, Vacuum Type, Emission Current, Spot Size(SP), and BSE image setting.
Page 26: Setup
Scanning Electron Microscope EM-30PLUS Operating Manual 2.7.1 Setup It controls Acceleration Voltage, Vacuum Type, Emission Current, Spot Size(SP), and BSE image setting. Acceleration Voltage  You can set the necessary acceleration voltage for the purpose when observing  specimens. (basic set values: 20kV) Acceleration voltage must be set properly in accordance with the raw materials of specimens and the shape on the surface of specimens in order to acquire the images you want.
Page 27 Scanning Electron Microscope EM-30PLUS Operating Manual After changing acceleration voltage, carry out alignment of e-gun and aperture Wobble operation. For the details, see [5.2.2 Setting Acceleration Voltage]. Vacuum Type (optional)  : It is a button for converting the vacuum state inside the chamber.
Page 28 Scanning Electron Microscope EM-30PLUS Operating Manual Bias Value  : It controls the voltage that pulls the electron beam generated from Filament towards specimens. After setting Filament Value, adjust the value of Emission Current by adjusting BIAS.  (Recommended Emission Current: 50±5uA) Spot Size(SP, size of electron beam) ...
Page 29 Scanning Electron Microscope EM-30PLUS Operating Manual BSE Setting  Ch1~Ch4: Either choose some of 4Channel BSE sensors, or  You can amplify or decrease image signals in each Channel using Offset and Gain. COMPO: It composes 4 Channel Signals. ...
Page 30 Scanning Electron Microscope EM-30PLUS Operating Manual Height of Sample  To prevent collisions when using Tilt function, it helps limit the maximum angle of tilt automatically by inputting the height of Sample Holder. (The maximum angle of Tilt is as shown in the table below.)
Page 31 Scanning Electron Microscope EM-30PLUS Operating Manual 1. Install the specimen on Stub, and measure the combined height of Sample and Holder. 2. Change EM-30PLUS to the state of air pressure. 3. Install Multi-Holder on Stage in the direction of the arrow.
Page 32 Scanning Electron Microscope EM-30PLUS Operating Manual Low Vacuum Delay  It sets the Delay time required for the vacuum degree to reach up to the stable degree of  torr when operating Low Vacuum Mode (Optional). The value of Low Vacuum Delay may vary for the conditions(water content etc.) of specimens.
Page 33 Scanning Electron Microscope EM-30PLUS Operating Manual 2.7.2 Option It changes Line profile and image save path or controls other functions.
Page 34 Scanning Electron Microscope EM-30PLUS Operating Manual Reload Minimap  Being developed.  Line Profile  Line Profile function is used to measure the distance between two points by placing the  two points based on the brightness distribution map shown when a random line is drawn in the image screen of electron microscope.
Page 35 Scanning Electron Microscope EM-30PLUS Operating Manual Image Folder  You can set the save path when saving photos by clicking Image Mode. For the detailed directions of Image Folder function, see [2.4 Image Mode]. BSE Offset & PreGain  When using BSE Mode, you can change the brightness of images by adjusting the values ...
Page 36: Help
Scanning Electron Microscope EM-30PLUS Operating Manual Selecting Check Releasing Check Center X, Y Ratio  Being developed.  EDS Path  When EDS is installed(EM-30AXPLUS), it can execute EDS program by clicking icon.  It selects the EDS program path by clicking icon.
Page 37: Image Viewing
Scanning Electron Microscope EM-30PLUS Operating Manual Image Viewing 2.8.1 Screen for Image Viewing In this screen, you can observe the specimen mounted at present. 2.8.2 Image Tools With image tools, you can measure length or area on specimen images and then save them.
Page 38: Image Correction
Scanning Electron Microscope EM-30PLUS Operating Manual 2.8.3 Image Correction Users correct the values of Contrast, Brightness, and Gamma in order to acquire more clear images before photo scanning Photo. Contrast: It adjusts the visibility by contrasting images. If you adjust Contrast value ...
Page 39: Other Buttons
Scanning Electron Microscope EM-30PLUS Operating Manual Other Buttons There are 2 function buttons besides image tools. 2.9.1 Delete All Delete all texts and figures recorded using image tools. 2.9.2 Wobble It is a button used during aperture alignment. If aperture alignment is not proper, focusing would not be easy when observing specimens and image quality is deteriorated.
Page 40: Specimen Preparation
Scanning Electron Microscope EM-30PLUS Operating Manual Specimen Preparation Summary When you observe specimens with electron microscope (EM), pretreatment according to specimen feature is necessary in order to acquire exact images. When you use inadequate pretreatment, specimen can be damaged or wrong judgment can be made due to distorted images.
Page 41: Types Of Stub
Types of Stub 3.2.1 Basic Components of Stub The components of Stub provided when purchasing EM-30PLUS are as follows. (When you need other size or shape of Stub besides basically provided Stub, you can order purchase it additionally.) Multi Holder Stub #1 –...
Page 42: Directions For Multi Holder
Scanning Electron Microscope EM-30PLUS Operating Manual 3.2.2 Directions for Multi Holder Explanations for each part ① ② ③ ④ Items Descriptions ① Stub Loading Hole Stub is inserted into the hole for mounting. When adjusting stub horizontally after mounting: WD= 7mm, ②...
Page 43: Stub Cleaning
Scanning Electron Microscope EM-30PLUS Operating Manual 3.2.3 Stub Cleaning When you repeat adhering specimen to Stub and removing it from stub many times, stub gets dirty. If it is dirty, fixing specimen can be difficult or there can be disorder in chamber.
Page 44: Types Of Materials
Scanning Electron Microscope EM-30PLUS Operating Manual Types of Materials In order to mount a specimen on stub for observing, select the adequate size of stub and consider the types or properties of specimens. 3.3.1 Classification by Height Materials of low height Put the carbon tape on the surface of stub plate and then ...
Page 45 Scanning Electron Microscope EM-30PLUS Operating Manual Molding material If it is hard to cut specimen, first mold, cut, polish and  analyze it. For molding specimens, ion coating is necessary. Glass material When you cut it, you can see its cross section and tilt image ...
Page 46: Production Of Specimen
Scanning Electron Microscope EM-30PLUS Operating Manual Production of Specimen Adequate pretreatment is needed according to specimen properties before specimen observation. 3.4.1 Checklist before Specimen Preparation You should check the followings first when preparing specimens. 1) Identify the specimen types and carry out the pretreatment for specimen accordingly.
Page 47 Scanning Electron Microscope EM-30PLUS Operating Manual 2. Specimen Preparation Methods by Material Preparation methods of specimen vary depending on the materials. Identify the specimen properties and prepare the specimens referring to the following pretreatment processes. 1) Conductive Specimens like Metals Cut the specimens with the following various methods.
Page 48: Measurement Of Wd
Scanning Electron Microscope EM-30PLUS Operating Manual ② Cut out the substrate/Wafer on which dispersed specimen is adhered ③ Fix it with conductive adhesive 3.4.3 Measurement of WD Measure its height with adjusting the screw position for WD after putting the specimen on provided stub.
Page 49: Specimen Mounting On Stub
Scanning Electron Microscope EM-30PLUS Operating Manual 3.4.4 Specimen Mounting on Stub The sequences of specimen mounting on stub are as follows. 1) Cut out the carbon tape with scissors. The length of tape should be a little longer than material size.
Page 50 Scanning Electron Microscope EM-30PLUS Operating Manual Marking of Specimen Sequence When you put many specimens of the same type on Stub, marking specimen sequence makes it convenient to observe them. As they will appear in the same order when observed by electron microscope (EM), ...
Page 51: Specimen Mounting
Scanning Electron Microscope EM-30PLUS Operating Manual Specimen Mounting When you finish specimen preparation, insert Multi Holder to equipment or change it. 3.5.1 Preparation and Mounting of Specimen 1) Release the vacuum state by pressing [Vacuum ON] button of NS. Make sure that vacuum state is released when you mount the specimen on equipment.
Page 52 Scanning Electron Microscope EM-30PLUS Operating Manual 3) Tighten the clamping screws of specimen mounting portion at the bottom of Stage so that Multi Holder may not move. At this time, tighten the screw on the right. There are two screws mounted on both sides of Stage.
Page 53: Specimen Storage
Scanning Electron Microscope EM-30PLUS Operating Manual 3.5.2 Specimen Storage Store the Stub where specimen is adhered in desiccator when you have taken photos of it. If there is no storage box, it would be good to store it at the place out of direct sunlight and preventing dirt from going inside.
Page 54: Preparation For Taking Photos
Power ON/OFF 4.1.1 Turning on the Main Body of EM-30PLUS 1) Turn on the main power on the back of EM-30PLUS product. - Keep the power of equipment on. 2) Turn on the power switch on the side of EM- 30PLUS.
Page 55: Turning Off Em-30Plus
Scanning Electron Microscope EM-30PLUS Operating Manual 4.1.2 Turning off EM-30PLUS 1) Turn off the E-Gun in NS. Wait till the value of Emission Current becomes 0 and then turn off the main power 2) Terminate the NS. 3) Turn off the power switch on the side of EM- 30PLUS.
Page 56: Setting Up Of Electron Beam
Scanning Electron Microscope EM-30PLUS Operating Manual Setting up of Electron Beam 4.2.1 Turning on the Electron Beam 1) When specimen is mounted, set vacuum state by pressing [Vacuum OFF] button of NS. 2) Check the vacuum state of equipment. The color of the vacuum bar of Electron-Gun changes as vacuum degree increases.
Page 57: Filament Optimization
Scanning Electron Microscope EM-30PLUS Operating Manual 4.2.2 Filament Optimization Filament Value optimization  : Optimize the voltage value applied to Filament. Adjust the Filament Value to the green bar area(saturation point area). (Red square)  (Standard saturation point: about 75%(3/4) of the Filament bar) * If you set the value over the saturation point(beyond the green bar area) and use the equipment, lifespan of filament can be reduced.
Page 58  BIAS. -> Recommended Emission Current: 50±5uA In EM-30PLUS, brightness of electron beam and filament lifespan are determined according to filament current. Filament saturation point refers to Operating Point on graph above, when filament current is set to this point, equipment can be used most effectively.(the...
Page 59: Location Movement Of Specimen
Scanning Electron Microscope EM-30PLUS Operating Manual Location Movement of Specimen 4.3.1 Use of Multi Holder Navigation Mode is supported when using Multi Holder. It helps synchronize the Stage coordinate by selecting the Stub to be measured among many Stubs, and find out the specimen easily through Mini-map function.
Page 60: Use Of Stub Except Multi Holder
Scanning Electron Microscope EM-30PLUS Operating Manual 4) Once the green process bar is completed, the Mini-map photograph of the sample in the Stub selected is taken and saved automatically on the Stage screen. (Figure 3) 5) If you double click the measurement position in the Mini-map photograph, the image is shown in the center of the screen in the magnification selected currently.
Page 61 Scanning Electron Microscope EM-30PLUS Operating Manual 2) Select Holder Type-None for Type on the Holder screen. 3) If you press [ ] (Center) on the right, Stub moves to the center of Stage. - Center: X=17.500, Y=17.500 (Confirm X/Y on the bottom of screen for coordinate.)
Page 62: Use Of Tilt Function
Scanning Electron Microscope EM-30PLUS Operating Manual 4) Confirm the position of the sample to be measured in low magnification, and move to the position you want using Mouse or Joy Stick and execute measurement in the magnification you want. See [4.3.4 Adjustment of minimum magnification], and [4.3.5 Specimen Selection and Moving using Mouse].
Page 63 Scanning Electron Microscope EM-30PLUS Operating Manual Input the angle in the text box of T  on the bottom of screen. - Setting range of angle: 0~45° 1)To prevent the collision of OL with specimens when rotating T axis, the maximum tilt angle is limited automatically to be below 45°...
Page 64: Adjustment Of Minimum Magnification
Scanning Electron Microscope EM-30PLUS Operating Manual 4.3.4 Adjustment of Minimum Magnification When you observe specimens, set the minimum magnification at first and then increase it. When you set minimum magnification, adjust it with mouse wheel on magnification value window. (e.g.: Minimum magnification is 73 times) The minimum or maximum magnification varies depending on WD The magnification limits by WD are as follows.
Page 65: Specimen Selection And Moving Using Mouse
Scanning Electron Microscope EM-30PLUS Operating Manual 4.3.5 Specimen Selection and Moving using Mouse If your double click the direction you want to go, it moves to the clicked direction. Before moving After moving Or you can move it with keyboard arrow keys or by inputting value in Stage coordinate.
Page 66: Driving Mode
Scanning Electron Microscope EM-30PLUS Operating Manual 4.3.6 Driving Mode Driving Mode can move Stage or change magnification and focus using Joy Stick. 1) Stage moving using Joy stick Press left and right, up and down centering around the Joy stick axis to move Stage on the X, Y axis.
Page 67 Scanning Electron Microscope EM-30PLUS Operating Manual 3) Focus change using Joy stick You can change focus by rotating Joy stick button. If you turn the button clockwise, the value of WD increases. If you turn the button counterclockwise, the value of WD decreases.
Page 68 Scanning Electron Microscope EM-30PLUS Operating Manual 4) Adjustment of Joy stick sensitivity You can adjust the sensitivity of Joy stick. Adjust the sensitivity for user convenience. * Find the SpaceNavigator icon in the collection of small icons on the right of taskbar.
Page 69: Image Acquisition
Scanning Electron Microscope EM-30PLUS Operating Manual Image Acquisition In order to acquire images, please follow the following procedures. Procedures Performances Setting observation Set FAST Mode and move to the part you want to observe. mode Setting acceleration Set the adequate acceleration voltage according to the voltage purpose of specimen observation.
Page 70: Setting Observation Mode
Scanning Electron Microscope EM-30PLUS Operating Manual Setting Observation Mode After finding out specimen location, you should set exact focus for image acquisition. 5.1.1 RED & Focus Mode RED Mode & Focus Mode (Resolution 480x320, 160x80) It is the mode whose reaction velocity is the fastest due to low resolution and high scanning speed.
Page 71: Slow Mode
Scanning Electron Microscope EM-30PLUS Operating Manual 5.1.3 Slow Mode Slow Mode (Resolution 800x600) It scans a specimen slower than Fast Mode, which enables images to be observed more clearly. 5.1.4 Photo Mode Photo Mode (Resolution 1280x960) It is a mode for taking photos of quality images, which takes about 1 minute.
Page 72: Setting Acceleration Voltage
Scanning Electron Microscope EM-30PLUS Operating Manual Setting Acceleration Voltage 5.2.1 Summary of Acceleration Voltage Acceleration voltage refers to energy intensity of Electron Beams, select the proper value depending on the purpose of specimen observation. The advantages and disadvantages according to the intensity of acceleration voltage are as follows.
Page 73 Scanning Electron Microscope EM-30PLUS Operating Manual Resolution Difference according to Acceleration Voltage As acceleration voltage increases, resolution increases as well. As the voltage value increases, it is easier to analyze specimen component rather than surface. On the other hand, as the value of acceleration voltage decreases, it is adequate for surface observation of specimen.
Page 74 Scanning Electron Microscope EM-30PLUS Operating Manual Occurrence of Thermal Damage according to Acceleration Voltage As acceleration voltage gets higher, thermal energy of electron beam increases, which causes thermal damage and specimen images can be distorted. Acceleration voltage 10kV magnification Acceleration voltage 10kV magnification...
Page 75 Scanning Electron Microscope EM-30PLUS Operating Manual Edge Effect according to Acceleration Voltage As the value of acceleration voltage is high, corner of specimen image looks smudged, as it is small, the corner surface of specimen image looks clearer. Because high acceleration voltage makes the consumption of W electron of Filament high,...
Page 76: Setting Acceleration Voltage
Scanning Electron Microscope EM-30PLUS Operating Manual 5.2.2 Setting Acceleration Voltage If you set low acceleration voltage, it is adequate for observing specimen surface at low magnification, and as the value gets higher, it is adequate for acquiring high resolution images. (maximum value 30kV) 1) Select the value of acceleration voltage you want.
Page 77 Scanning Electron Microscope EM-30PLUS Operating Manual Brightness Change according to Acceleration Voltage As acceleration voltage increases, electron reaching specimen increases, which results in increased signal generated and enhanced brightness. On the other hand, as acceleration voltage decreases, electron reaching specimen decreases, which results in decreased signal generated and reduced brightness.
Page 78: Setting Observation Magnification/Spot Size
Scanning Electron Microscope EM-30PLUS Operating Manual Setting Observation Magnification/Spot size Select the acceleration voltage which is fit for the purpose and choose the magnification you want. After setting Spot size adequate for selected magnification, save the images. Recommended Value of Spot Size by Observation Magnification Proper values of Spot size by magnification are as follows.
Page 79: Methods For Magnification Selection
Scanning Electron Microscope EM-30PLUS Operating Manual 5.3.1 Methods for Magnification Selection When you select observation magnification, there are 2 types of input. 1. Free Magnification Select the magnification by putting the mouse cursor on magnification box and scrolling with mouse wheel.
Page 80: Setting Spot Size
Scanning Electron Microscope EM-30PLUS Operating Manual 5.3.2 Setting Spot size Select the magnification you want, set the Spot size accordingly and save the image. The features according to the change of Spot size are as follows. Spot size Advantages Disadvantages good resolution •...
Page 81: Focus Adjustment
Scanning Electron Microscope EM-30PLUS Operating Manual Focus Adjustment In order to observe specimens, set the magnification and adjust the focus exactly for clear images. Aperture size As aperture gets bigger, image depth decreases due to more electrons flowed in. On the other hand, aperture gets smaller, image depth gets deeper while image gets clearer.
Page 82 Scanning Electron Microscope EM-30PLUS Operating Manual AStig Adjustment When you set focus, as the shape of electron beams get rounder, clearer images can be acquired. When you adjust focus by adjusting Stig, find the clearest position while adjusting X and Y axis.
Page 83: Focus Setting
Scanning Electron Microscope EM-30PLUS Operating Manual 5.4.1 Focus Setting : After selecting button, you can find coarse focus fast in wide area by adjusting  focus large using mouse. : After selecting button, you can adjust the image in coarse focus more finely ...
Page 84 Scanning Electron Microscope EM-30PLUS Operating Manual Sequence of focus setting General processes of focus setting are as follows. * When wobbling operation and Gun alignment has completed. Move location specimen observation (Set minimum value). Select Magnification and Spot size. * If images move violently up & down and left &...
Page 85 Scanning Electron Microscope EM-30PLUS Operating Manual  Manual Setting of Focus 1) Move the Stage to the location to observe. - Set the minimum magnification when finding out specimen. For the details of location movement of specimen, see [4.3 location movement of specimen].
Page 86 Scanning Electron Microscope EM-30PLUS Operating Manual 4) Select [RED] mode ( ) when setting focus. - Select the [RED] to adjust focus of small parts exactly. 5) Correct the focus using mouse wheel in Coarse focus box. - WD value can be identified through the WD value at the bottom of the electron microscope (EM) image screen.
Page 87 Scanning Electron Microscope EM-30PLUS Operating Manual 8) Adjust using fine focus and find the optimal image. 9) When correcting focus again, adjust in the order of [Astig - Fine Focus - Astig - Fine Focus]. 10) Set the magnification of images you want.
Page 88 Scanning Electron Microscope EM-30PLUS Operating Manual  Automatic Focus Setting In order to focus automatically, press the [ ] button in [Focus] box. Automatic focusing can find the images at the level of coarse focus automatically.  Automatic focusing is not accurate as manual focusing.
Page 89: Fine Movement Of Images
Scanning Electron Microscope EM-30PLUS Operating Manual Fine Movement of Images If you want to adjust image location after setting focus at high magnification, you can use fine movement function. This function moves images by moving not Stage but the direction of electron beam.
Page 90: Use Of Beam Rotation
Scanning Electron Microscope EM-30PLUS Operating Manual 5.5.2 Use of Beam Rotation When you adjust focus with enlarged at high magnification and want to rotate the image finely, use the Beam Rotation function of Left tap. You can rotate and observe the part of image you want by rotating electron beam during specimen observation.
Page 91: Control Of Contrast And Brightness
Scanning Electron Microscope EM-30PLUS Operating Manual Control of Contrast and Brightness When you finish focus setting and you acquired images you want, ready for image acquisition by controlling contrast and brightness. 5.6.1 Control of Contrast/Brightness When you control the values of Contrast and Brightness, you can get clear images.
Page 92: Bse Mode
BSE images compared to the SE images. SE Image BSE Image Removable BSE of EM-30PLUS equipment can be rotated manually and converted to the bottom of electron beam or Stage entrance. BSE Detector ON BSE Detector OFF When using BSE Mode, be sure to move BSE sensor to the bottom of electron beam.
Page 93: Precautions For Using Bse Sensor
Scanning Electron Microscope EM-30PLUS Operating Manual 5.7.1 Precautions for Using BSE Sensor  Surface contamination and damage of BSE sensor Contamination and damage of sensor and cables can have bad effect on the detection  of Signal. Be sure to have paid A/S service for damage caused by user negligence. Be sure to use BSE Sensor with caution.
Page 94: Bse Setting
Scanning Electron Microscope EM-30PLUS Operating Manual 5.7.2 BSE Setting See [BSE Setting in 2.7.1 Setup]. 5.7.3 Directions for BSE Mode  Preparations before and after selection of BSE Mode 1) The Signal of BSE varies rapidly depending on WD. Be sure to adjust the height of Stub and set it to the optimum height.
Page 95 Image Viewer Setting set are saved automatically. It is automatically set in these values again when NS is executed again.  BSE Compo & Topo BSE sensor of EM-30PLUS equipment consists of 4CHs.  When selecting + for all 4CHs, you can get Compo images.
Page 96 Scanning Electron Microscope EM-30PLUS Operating Manual  SE/BSE Mode - It is used to observe SE Mode and BSE Mode together. It shows images by dividing the screen of electron microscope into SE and BSE. The properties of secondary electron of the specimen observed currently and those of back scattered electron can be observed together.
Page 97 Scanning Electron Microscope EM-30PLUS Operating Manual Reference figure. 4 Types of Images based on BSE Composition BSE Compo BSE Topo SE+BSE Compo SE+BSE Topo...
Page 98: 5.8 Lv Mode (Low Vacuum Mode) - Optional
BSE images. Low Vacuum of EM-30PLUS has the vacuum degree of 10 torr of the chamber. High Vacuum has the vacuum degree of 10 torr of the chamber.
Page 99 Scanning Electron Microscope EM-30PLUS Operating Manual 4) Confirm the value of Low Vacuum Delay. (The default value of Vacuum Delay is 180. Be careful not to manipulate the value randomly. It can change the vacuum degree of Low Vacuum Mode.) 5) Click [Vacuum OFF] button for Pump.
Page 100: Wobble Operation For Aperture
Wobble Operation for Aperture Structure of Aperture EM-30PLUS equipment is equipped with Variable Aperture. Variable Aperture reduces spherical aberration and increases resolution by making electron beam pass through the center of aperture. Moreover, it is possible to control Spot size of electron beam by changing aperture size as there are 4 Stages in Variable Aperture.
Page 101: Wobble (Procedure Of Aperture Alignment)
Scanning Electron Microscope EM-30PLUS Operating Manual Wobble (Procedure of Aperture Alignment) * Wobble is needed in the following cases. 1) when images are not in focus, even after adjusting focus 2) when SPOT SIZE is changed 3) when high acceleration voltage is changed...
Page 102: Wobble Operation 1
Scanning Electron Microscope EM-30PLUS Operating Manual 6.2.1 Wobble Operation 1 Aperture is slightly out of the electron beam path. Images are shown but they are out of focus when the focus is controlled. 1) Select the RED MODE. 2) Set the low magnification about 500 times.
Page 103 Scanning Electron Microscope EM-30PLUS Operating Manual 4) Check in which direction the image wobbles on the screen. X aixs: left and right  Y axis: above and below  According to the direction image wobbles, adjust it so that it may not move by turning ...
Page 104 Scanning Electron Microscope EM-30PLUS Operating Manual 5) When you adjust images so that they might not move as little as possible, the state of being in focus and out of focus repeats in current position. (Image is out of focus) (Image is in focus) 6) Set the magnification to 1000 times to identify more minutely if it is in focus.
Page 105 Scanning Electron Microscope EM-30PLUS Operating Manual 8) When you adjust images so that they might not move as little as possible, the state of being in focus and out of focus repeats in current position. (Image is out of focus) (Image is in focus) 9) Set the magnification to 2000 times to identify more minutely if it is in focus.
Page 106: Wobble Operation 2
Scanning Electron Microscope EM-30PLUS Operating Manual 6.2.2 Wobble Operation 2 : When aperture is completely out of the electron beam path and images are not shown on the screen. When there are no images on the screen while you observe the images, carry out the alignment according to the following procedures.
Page 107 Scanning Electron Microscope EM-30PLUS Operating Manual 1st operation: E-gun alignment 1. Fix the control knob of aperture by pulling it to the end and turning it counterclockwise as shown below. 2. Align the electron gun with control knob of aperture fixed.
Page 108 Scanning Electron Microscope EM-30PLUS Operating Manual 2nd operation: Aperture resetting 1. By turning the X axis knob, make the length of left(A) groove and right(B) groove same. 2. Check if image is on the screen while turning the Y axis knob clockwise completely and releasing it 4~6 rounds counterclockwise.
Page 109 Scanning Electron Microscope EM-30PLUS Operating Manual 3. Have image displayed on the screen by controlling contrast while watching monitor. 3rd operation: Wobble operation 1. Start the operation by pressing [Wobble] button below screen. For wobbling operation, see Wobble Operation [6.2.1 2.
Page 110: Methods For Aperture Setting
Scanning Electron Microscope EM-30PLUS Operating Manual 6.2.3 Methods for Aperture Setting 1. Positioning of Aperture Aperture is inside of knob, having 4 holes in all. Electron beams pass through the hole. 2. Method for Aperture Hole Setting Fix the knob by pulling the knob in the direction of No.1 and turning it counter-clockwise...
Page 111 Scanning Electron Microscope EM-30PLUS Operating Manual 3. Position Changing of Aperture Holes If you want to change aperture holes, select a hole among the lines indicated on knob by pulling the control knob. Stage (D) Stage (C) Stage (B) Stage (A)
Page 112: Aperture Alignment (Resetting)
Scanning Electron Microscope EM-30PLUS Operating Manual 6.2.4 Aperture Alignment (Resetting) If images move up and down or left and right during Coarse Focus and Fine Focus operation, carry out the Wobble operation. If images move too far towards one of X, Y axis during Wobble operation, it gets out of aperture hole.
Page 113: Image Save
Scanning Electron Microscope EM-30PLUS Operating Manual Image Save After you observe the specimen, you can scan the image and save it in quality image file. Management of Image Information Before scanning images, manage the information indicated below image. When you check or uncheck the checkbox of items you want in [Setup] tap on the screen top, you can add or delete the information indicated on images.
Page 114: Use Of Image Tools
Scanning Electron Microscope EM-30PLUS Operating Manual Use of Image Tools Before saving scanned images in image file format, you can use figure tools to measure length or area on scanned images. It can be used on screen in FAST Mode, but it is recommended to use it for photo scanned images.
Page 115 Scanning Electron Microscope EM-30PLUS Operating Manual Types Screens Normal It is a basic cursor when moving images. Drawing Lines It draws lines on image. Drag mouse  point at the starting point you want and put a dot at end point.
Page 116 Scanning Electron Microscope EM-30PLUS Operating Manual Types Screens Double Arrow indicates double sided arrow on image. Drag mouse  point at the starting point you want and put a dot at end point. Distance indicates distance image. Drag mouse ...
Page 117 Scanning Electron Microscope EM-30PLUS Operating Manual Types Screens Angle It indicates angle on image. Set the angle by  clicking point want with mouse right button. Square It indicates square on image. When dragging  mouse point, you can draw a square.
Page 118 Scanning Electron Microscope EM-30PLUS Operating Manual Types Screens Area It indicates area on image. Click mouse left  button every corner figure whose area is to be measured shape want, click mouse right button at the end point and finish Text It indicates text on image.
Page 119 Scanning Electron Microscope EM-30PLUS Operating Manual Types Screens...
Page 120: Image Save Function
Scanning Electron Microscope EM-30PLUS Operating Manual Image Save Function It can save scanned quality images. 7.3.1 Image Save If you want to save scanned images temporarily, use the [Image] function. The images temporarily saved using [Image] function are automatically saved in the ...
Page 121 Scanning Electron Microscope EM-30PLUS Operating Manual Alignment Operation Summary of E-Gun Alignment E-gun is equipped inside of EM-30PLUS equipment. When there is the filament replacement, a change of acceleration voltage, or a sudden change of Spot size, the e-gun alignment is needed.
Page 122 Scanning Electron Microscope EM-30PLUS Operating Manual Method for E-Gun Alignment When images do not appear properly, or after replacing filament or changing variable voltage, e-gun alignment should be done. The process of e-gun alignment is as follows. 1) Set the vacuum state by mounting the specimen in chamber and clicking [Vacuum OFF] button.
Page 123 Scanning Electron Microscope EM-30PLUS Operating Manual 6) Check if image appears in NS. Set the contrast medium so that the change of brightness can be checked when image  appears. If image does not appear, set the contrast for the area where White Spots are ...
Page 124 Scanning Electron Microscope EM-30PLUS Operating Manual 8) Like the alignment method for X axis, find out the brightest position by fastening or loosening Y axis bolt. 9) Check if it is the brightest while watching screen. - If the brightness of screen changes, repeat the 7~8 processes and find out the brightest position.
Page 125 Scanning Electron Microscope EM-30PLUS Operating Manual 11) Find out the position where image gets brightest by dragging X, Y axis in Gun Alignment box of NS or adjusting mouse wheel. Center: If you press [X, Y] button, X, Y axis moves to the right center.
Page 126 Scanning Electron Microscope EM-30PLUS Operating Manual 13) Once e-gun alignment is completed, change Spot size in several stages and confirm if brightness of screen gets brighter in proportion to Spot Size. As Spot size gets bigger, screen gets bright and vice versa. If the brightness of electron...