Lintec CV-3000 Series Instruction Manual

Piezo Control Valve
Instruction Manual
CV-3000 Series
Safety Precautions
Incorrect handling may cause death or injury
(1) Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereafter, the measured fluid is called "gas" or "fluid").
(2) DO NOT apply any corrosive fluid to materials exposed to gas. Corrosion may
cause gas to leak into the atmosphere.
(3) This device is not designed as an explosion proof structure. DO NOT use this
device in a place where explosion-proof structures are required. Doing so may
cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment
(1) Observe the precautions listed in the WARNING (above).
(2) Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may be splashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. It may cause fire or other problems.
(5) While a power supply is applied to the device, +15VDC and -15VDC must be
applied simultaneously. If only +15VDC or -15VDC is applied, electronic
circuits will become unstable and it may cause a malfunction.
(6) This device is not designed to handle hot swap. Please avoid attaching and
removing the power supply connector and interface connector with the power
switched on. Attachment and/or removal with the power on may result in
failure of the device.
(7) This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while
moving or setting the device.
(8) Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the piezo control valve CV-3000 series
(Hereafter, it is called "CV"). Please read through this manual carefully to
familiarize yourself with the features of this device.
2. Summary
The CV is a high-speed response valve for controlling the flow rate or pressure of
gas by the control input from an external device.
3. Features
The CV is the following features.
(1) Equipped with a high-speed, high-performance piezoelectric actuator.
(2) Superior corrosion resistant sealing materials make maintenance easy.
(3) By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field.
(4) RoHS compliant
4. Structure
The CV consists of piezo valve, control circuit, piezo driver.
LN0540E2110B0 5. Specification / Dimensions
(1) Specification
Name
Model
Standard flow rate in
nitrogen
Valve operation mode
Internal surface treatment
Minimum controllable flow rate
Setting input of valve-opening
Response time
Operating differential
pressure
Maximum operating
pressure
Withstanding pressure
Operating / Storage
temperature & Humidity
Leak integrity
Mounting direction
Wetted materials
Seal Materials
Actuator
Fittings
Power supply
Weight
(2) Dimensions
6. Ordering information
[1] Series model: CV: Control Valve
CV-3102, CV-3202
[2] Valve mode
NO: Normally open (No treatment), MO: Normally open (LEP)
NC: Normally close (No treatment), MC: Normally close (LEP)
[3] Fitting
4VR5:6.35mm VCR86
※ Please consult for more information.
[4] Optional
Default setting is labeled "AAA00". Please consult for more information.
[5] Gas type
[6] Full scale flow rate
[7] Flow rate unit
CCM, LM
CV-3102
~5LM
Normally open valve / Normally closed valve
No treatment / Precision polishing (LEP)
50 to 300kPa(D)
0 to 50 ºC·0 to 80%RH (Condensation should be avoided)
Less than 1×10
Stainless steel 316L, PCTFE, Au
+15VDC±3% : 50mA
C V - 3 * 0 2 – M O – 4 V R 5 A A A 0 0 – d d – e e – f f
[1] [2] [3]
Piezo Control Valve
CV-3202
~10LM
2%F.S.
0 to 5VDC
Less than 0.5 second
Normally open 50 to 300kPa(D)
Normally closed 100 to 300kPa(D)
300kPa(G)
1MPa(G)
-11 3
Pa · m /sec (He)
Free
Au
Piezoelectric actuator
6.35VCR
-15VDC±3% : 50mA
Approx. 700g
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