MKS EtherCAT 390 Series User Instruction Manual
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MKS EtherCAT 390 Series User Instruction Manual

MKS EtherCAT 390 Series User Instruction Manual

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EtherCAT
®
Communication
Protocol
User's
Instruction
Manual
MKS p/n 20018109-001
for Series 390 EtherCAT
Transducers
Communication Protocol Manual – p/n 20018109-001 Rev. B
EtherCAT
®

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Summary of Contents for MKS EtherCAT 390 Series

  • Page 1 EtherCAT ® Communication Protocol User’s Instruction Manual MKS p/n 20018109-001 for Series 390 EtherCAT Transducers Communication Protocol Manual – p/n 20018109-001 Rev. B EtherCAT ®...

  • Page 2: Table Of Contents

    Table of Contents Chapter # Page # Introduction ........................5 Definitions .......................... 5 Physical Interface ......................2 Device Profile ........................4 Process Data Objects ......................4 Object Dictionary Overview ....................5 Object Dictionary Terms and Definitions ................ 6 Object Dictionary Data Types ................... 6 Communication Area ......................
  • Page 3 Table 23: 0xF840:03 Supported Values ........................34 Table 24: SDO Abort Codes ............................ 35 Table 25: AL Status Codes ............................36 Customer Service / Technical Support: MKS Global Headquarters MKS Instruments, Inc. 2 Tech Drive, Suite 201 Andover MA, 01810 USA...
  • Page 4 ® ® Granville-Phillips and Micro-Ion , are registered trademarks, and mksinst™ is a trademark of MKS Instruments Inc. EtherCAT ® is a registered trademark and ® patented technology licensed by Beckhoff Automation GmbH, Germany. Windows is a trademark of Microsoft Corporation.

  • Page 5: Introduction

    Introduction This document describes the physical interface, Device Profile, and Object Dictionary used for the ® Series 390 Micro-Ion ATM Vacuum Transducers. It is assumed the reader has a general knowledge of EtherCAT and EtherCAT Masters. Refer to the following EtherCAT specifications in addition to this manual: •...

  • Page 6: Physical Interface

    Physical Interface ® EtherCAT Connectors The EtherCAT transducers are all equipped with a connector for power input, analog output, and other functions. Two 8P8C connectors are used for the EtherCAT digital IN/OUT. Three switches are used to set the Device ID. Two LEDs show the Run/Error condition(s) and one LED shows the Device State.
  • Page 7 Indicators EtherCAT Status A “RUN” indicator and an “ERR” indicator are used to indicate EtherCAT status. See ETG.1300 for more information. Red LED (ERR) Flash Interval EtherCAT Status No error Blinking 200 ms Invalid configuration Flickering 50 ms ON Invalid firmware 50 ms OFF Single Flash 100 ms ON...

  • Page 8: Device Profile

    Device Address Switches The Device ID and the Configured Station Alias can be set by three hexadecimal rotary switches (labeled “ID” in Figure 1) as stated in ETG.5003.1 and ETG.1020. �������������� = ��100 ( 0��100 ) + ��10 ( 0��10 ) + ��1(0��1) For example, if the address switches from MSD to LSD are set to “321”...

  • Page 9: Object Dictionary Overview

    0x1A02 0x01 0x6012 0x01 Reading Valid 0x02 0x6012 0x01 Overrange Exceeded 0x03 0x6012 0x00 Underrange Exceeded 0x04 0x0000 0x00 0x05 0x6010 0x11 Sensor Value Table 7: Device Default PDO PDO Index PDO Entry PDO Sub Name Index Index Index Length 0x1BFF 0x01 0xF380...

  • Page 10: Object Dictionary Terms And Definitions

    0xF7xx SDP and CDP Device Specific Outputs 0xF8xx SDP and CDP Device Specific Configuration Data 0xF9xx SDP and CDP Device Specific Information Data 0xFAxx SDP and CDP Device Specific Diagnosis Data 0xFBxx SDP and CDP Command Objects The indices and sub-indices in the SDP and CDP can be queried, and in the case of the configuration data, are changed by sending the relevant commands shown in this document.

  • Page 11: Communication Area

    0x100B STRING(n) Manufacturer Bootloader x.x.x Version 0x1018 Identity Object 0x01 UDINT Vendor ID MKS Vendor ID = 1291 0x02 UDINT Product Code Unique product code 6010 = GP 390 0x03 UDINT Revision Number Coded as 0xnnnnnn00 I.E. 0x01010100 = 1.1.1 Always 0;...
  • Page 12 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x01 (R if SI <= SI0) thru MAPPING (W PREOP if 0x08 SI = 0) 0x1604 RxPDO Heat Transfer No default outputs. Can only write SI 0 = 0x00 Default 0x1605 RxPDO Heat Transfer User...
  • Page 13 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x03 Underrange Exceeded 0x60120301 MAPPING 0x04 Padding 0x00000005 MAPPING 0x05 Sensor Value 0x60101132 MAPPING 0x1A03 TxPDO Piezo Differential Up to 8 entries can be defined User 0x01 (R if SI <= SI0) thru MAPPING (W PREOP if...
  • Page 14 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x07 Combination Gauge Active 0xF6401120 Value 0x08 Trip Point Output All 0xF6410120 Instance 0x1BFF TxPDO Combo User 0x01 (R if SI <= SI0) thru MAPPING (W PREOP if 0x08 SI = 0) 0x1C00 Sync Manager...

  • Page 15: Manufacturer Specific Data

    10 Manufacturer Specific Data Contains configuration and command status. Table 12: Manufacturer Configuration Objects Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x4035 Manufacturer Configuration Hot Cathode 0x01 ENUM Filament Mode "03 00 00 00" - Manual "02 00 00 00"...

  • Page 16: Output Data Of Modules

    Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x01 BOOL Reading Valid Indicates whether the Sensor Value (6010:11) parameter contains a valid value within the specified accuracy or not 0: invalid 1: valid 0x02 BOOL Overrange Exceeded Set if overrange exceeded 0x03 BOOL...
  • Page 17 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? In either configuration, both filaments may be active at high emission. In either configuration, both filaments will be degassed (only one filament is degassed at a time). If the device is configured for automatic filament selection, the Active Filament parameter has RO access.
  • Page 18 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x14 REAL Low Trip Point Limit Low limit to trigger trip point condition if Input Value is below this limit 0x17 REAL High Trip Hysteresis Hysteresis value for High Trip Point 0x18 REAL Low Trip Hysteresis...
  • Page 19 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x02 UINT Sensor Errors 0x9035 Information Hot Cathode Ion Gauge 0x01 UINT Sensor Warnings See Sensor Warnings and Errors 0x02 UINT Sensor Errors See Sensor Warnings and Errors 0x06 UINT Degas Time on remaining Remaining time for the current degas on cycle in seconds...
  • Page 20 Trip Points The 390 uses relays for process control. Each Trip Point can activate the relay upon increasing or decreasing vacuum or differential pressure. NOTE: Trip points cannot be configured to activate on increasing AND decreasing pressure. Only, increasing OR decreasing pressure. For example, if the High Trip Point is Enabled (0x800E/F:01=1), the Trip Point will activate if the pressure p is greater than the Trip Point Limit P1 (0x800E/F:11).
  • Page 21 Table 15: Sensor Warning and Errors Description 390 Comments Absolute Piezo Warnings Not at temperature Not used Electronics warning Not used 2 - 15 Reserved Not used Absolute Piezo Errors Sensor failure Sensor temperature exceeded, Sensor pressure out of range, Invalid sensor communication Electronics failure Non-volatile memory failure, invalid internal communication...

  • Page 22: Semiconductor Device Profile Area

    Description 390 Comments Sensor filament 3 warning Not used Sensor filament 4 warning Not used Sensor filament 5 warning Not used Sensor filament 6 warning Not used Sensor filament 7 warning Not used Sensor filament 8 warning Not used Exceeded maximum C/E ratio Not used Electronics warning Not used...

  • Page 23: Value Range Setting

    Table 16: Semiconductor Device Profile Area Objects Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0xF000 Semiconductor Device Profile 0x01 UINT Index Distance Index offset between PDO entries of two consecutive modules (for ETG.5003 = 0x10), e.g. 0x7000, 0x7010 0x02 UINT Maximum Number of Modules...
  • Page 24 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x03 UDINT 0x04 UDINT 0xF383 Absolute Piezo Active Device See Sensor Warnings and Errors Error Details 0x01 UDINT 0x02 UDINT 0x03 UDINT 0x04 UDINT 0xF390 USINT Latched Exception Status A condensed summary byte describing the collection of device exceptions after corresponding masks (0xF3Ax) are applied.

  • Page 25: Manufacturer Specific Device Data

    Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x04 UDINT Hot Cathode 0xF3A3 Device Error Mask Bitmask to apply to the corresponding device error exception bits 0x01 UDINT Absolute Piezo 0x02 UDINT Differential Piezo 0x03 UDINT Heat Transfer 0x04 UDINT Hot Cathode...

  • Page 26: Sdp And Cdp Device Specific Outputs

    2: Heat Transfer 3: Hot Cathode 0xFF: Unknown (error) 0xF641 Trip Point Output All Status of Trip Point instances 0x01 UDINT Trip Point Output All Instance Bit 0: Status High Trip (600E:01) Bit 1: Status Low Trip (600E:02) Bit 2: Status High Trip (600F:01) Bit 3: Status Low Trip (600F:02) Bit 4..31 0: Unused 0xF6F0...

  • Page 27: Sdp And Cdp Device Specific Information Data

    0x03 UDINT Heat Transfer 0x04 UDINT Hot Cathode Ion 0xF9F3 STRING(n) Vendor Name MKS Instruments 0xF9F4 Semiconductor SDP Device String identifying the device type of a particular module as Name defined by the SDP 0x01 STRING(n) Absolute Piezo CG (Combo Gauge)

  • Page 28: Sdp And Cdp Device Specific Diagnosis Data

    Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x04 USINT RX/TX Hot Cathode Ion 0xF9F6 UDINT Time since power on Time since device has been powered on in seconds. 0xF9F7 UDINT Total time powered Total time device has received power in seconds. It persists through power cycle.
  • Page 29 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x03 ARRAY Response Byte 0: Same as sub-index 0x02 [0..2] OF BYTE Byte 1: Unused Byte 2: 0: Zeroing successful 1: Zeroing failed; out-of-range 2: Zeroing failed; cumulative out-of-range 3: Zeroing failed: measurement invalid 254: No previous Zero Adjust command issued 0xFB41...
  • Page 30 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0xFB43 Degas On/Off Execution of this command will initiate or cancel a degas operation. 0x01 ARRAY Command Byte 0: [0..1] OF 0: Degas OFF BYTE 1: Degas ON Byte 1: 3: Hot Cathode Other values not supported 0x02...
  • Page 31 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? Byte 1: Index of the Sub Sensor Instance (1-8) 3: Hot Cathode Other values not supported. 0x02 USINT Status 0: Last command completed, no errors, no reply available 1: Last command completed, no errors, reply available 2: Last command completed, errors present, no reply available 3: Last command completed, errors present, reply available...
  • Page 32 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? Byte 2: 0x73 Byte 3: 0x65 Byte 4: 0x72 Byte 5: 0x00: Device Standard Reset 0x66: Factory Reset 0x02 USINT Status 0: Default value if the command has not been initiated. Not a supported value otherwise.
  • Page 33 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x03 ARRAY Response Byte 0: Same as sub-index 0x02 [0..1] OF BYTE Byte 1: Unused – always 0 0xFBF2 Store Parameters Command Execution of this command stores all parameters to non- volatile memory.
  • Page 34 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0xFBF3 Calculate Checksum Command Execution of this command will calculate a checksum for all writable, non-volatile parameters as currently stored in non- volatile memory. If the Checksum cannot be calculated the Abort Code "0x08000021"...
  • Page 35 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 255: command is executing (if the percentage display is not supported) 0x03 ARRAY Response Byte 0: Same as sub-index 0x02 [0..5] OF Byte 1: Unused; always 0 BYTE Byte 2-5: Checksum value 0xFBF4 Load Parameters Command Execution of this command will load all parameters from non-...
  • Page 36 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x03 ARRAY Response Byte 0: Same as sub-index 0x02 [0..5] OF Byte 1: Unused – always 0 BYTE Communication Protocol Manual – p/n 20018109-001 Rev. B EtherCAT ®...

  • Page 37: Firmware Update

    A high-level procedure is: • Go to EtherCAT INIT State • Go to EtherCAT BOOT State • Download Firmware/SII image from MKS using FoE Protocol • Go to EtherCAT INIT State • Go to EtherCAT PREOP State • Verify new firmware version by reading CoE Object 0x0100A Specific procedures for updating firmware is different for each EtherCAT Master.
  • Page 38 Change Pressure Data Units Change pressure units using CoE Objects 0xF840:01 or 0xF840:03 (some Masters will abstract this to an Enumeration with textual descriptions). For example, to set the units to Torr, send an “SDO Write” to 0xF840:01 with a value of 0x00A10000. Table 22: 0xF840:01 Supported Values Data Unit Value...

  • Page 39: Troubleshooting

    Verify PDO Configuration is valid – check if indexes with correct bit-length are mappable. Pressure is NaN or 0xF383:n Reports “Electronics Failure” This is most likely due to an internal issue in the electronics – contact MKS for next steps. Other Troubleshooting Contact MKS for support.

  • Page 40: Al Status Codes

    Error Code (hex) Error code (decimal) Meaning 06010004 100728836 SDO complete access not supported for objects of variable length such as ENUM object types 06010005 100728837 Object size exceeds mailbox size 06010006 100728838 Object mapped to RxPDO, SDO download blocked (only in SafeOp and Op states) 06020000 100794368...
  • Page 41 Error Code (hex) Error code (decimal) Meaning 0x0014 No valid firmware 0x0015 Invalid mailbox configuration going to BOOT 0x0016 Invalid mailbox configuration going to PREOP 0x0017 Invalid sync manager configuration 0x0018 No valid inputs available 0x0019 No valid outputs 0x001A Synchronization error 0x001B Sync manager watchdog...
  • Page 42 EtherCAT Communication Protocol Operation and Installation Manual MKS p/n 20018109-001, Rev. B October 2021 Communication Protocol Manual – p/n 20018109-001 Rev. B EtherCAT ®...

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