entegris IntelliGen LV Installation And Use Manual

Dispense system

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ADVANCED MATERIALS HANDLING

MANUAL

IntelliGen

Dispense System

Installation and use manual

Table of Contents

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Page 1 ADVANCED MATERIALS HANDLING MANUAL IntelliGen ® Dispense System Installation and use manual...
Page 2: Table Of Contents
Tools and Materials ............11 Manufacturing Information ........38 Installing the Pump ............. 12 Product Warranties ............ 38 Storage ................14 Limited Warranty ............39 For More information ..........39 Terms and Conditions of Sale ........39 Installation and Use Manual | Entegris, Inc.
Page 3: Overview
Read the following carefully before continuing: each individual is familiar with the proper handling In no event shall Entegris or its suppliers be liable for of photochemicals and other potentially hazardous any damages whatsoever (including, without limita- materials.
Page 4: Safety
Please register usage with a local Entegris service center. WARNING! PINCH HAZARD! Pump weight in excess of 15.0 kg (33 lbs).
Page 5: Handling
3. Only personnel properly trained to clean spills Do not loosen any screws on the mechanism unless of hazardous materials should conduct cleanup specifically directed to do so by an Entegris service activities. Consult local authorities or identified engineer. Handle the dispense system with care to hazardous materials emergency response agen- prevent damage to any fluid handling point.
Page 6 PPE gloves, then close the facility gas supply to prevent gas release when disconnecting lines. 9. If spilled chemical is within equipment, wipe all surfaces carefully with wipes appropriate for the chemical. Installation and Use Manual | Entegris, Inc.
Page 7: Specifications
* * M aximum pressure is a limit on the Window of Operation. Actual volumes and rates may be restricted to comply with the pressure limits for a given viscosity, tubing diameter, tubing length, and tubing height. Installation and Use Manual | Entegris, Inc.
Page 8: Compatibility
The system is uniquely designed to deliver The following is a partial list of compatible solvents. highly accurate dispenses even at very low volumes Please contact Entegris for compatibility of a specific with high repeatability. solvent that is not included in the list.
Page 9: System Overview
209.2 mm (0.23") 38.0 mm 6.35 mm (1.50") 8.00 mm (0.25") (0.25”") 200.1 mm 200.1 mm (7.88") (7.88") 189.5 mm (7.46") 9.80 mm (0.39") 7.50 mm 2.0 mm (0.08") (0.29") 216.5 mm (0.52") Installation and Use Manual | Entegris, Inc.
Page 10: Two-Stage Technology Operating Principle
– The isolate and barrier valves open and the fill motor pushes fluid through the filter and into the dispense chamber as the dispense motor retracts. – At the programmed filtration rate, the dispense chamber fills with filtered fluid. Installation and Use Manual | Entegris, Inc.
Page 11: Quick Filter Changeout
CAUTION! DRIP HAZARD! If the pump has been installed with minimum changeout space, use appropriate wipes, caps, and/or other materials to prevent spilling of fluid from the filter during changeout. 262.3 mm (10.33”) 109.5 mm (4.31”) 2.10 mm (0.08”) Installation and Use Manual | Entegris, Inc.
Page 12: Installation
5 kg (11 lbs). Use care in lifting and carrying the pump • Mounting hardware to prevent personal injury. • Impact 8G and Impact2 V2 (OF style) (sold separately) • External stop/suckback valve Installation and Use Manual | Entegris, Inc.
Page 13: Installing The Pump
Refer to system specifications. Step 2: Unpack and Position System Allow space to make fluid connections, power, and other cable connections. Please consult Entegris with 3. Raise the lever to open the filter manifold. any installation questions.
Page 14 Tighten the fittings by hand, then use a small adjustable wrench to tighten for the final 1⁄4 turn. CAUTION! Refer to Super 300 Type Pillar Fitting Instruction Manual No. 048L-1 for fitting insertion instructions. Installation and Use Manual | Entegris, Inc.
Page 15: Storage
(accessed from the Confirmation page) for four traces: dispense pressure, dispense motor position, fill pressure, and fill motor position. Installation and Use Manual | Entegris, Inc.
Page 16: Connect Tab
• The exact COM port will depend on the specific computer connec- tion and system setup. 2. Enter the Address, or click “Scan” to search for pump connections. • Each IntelliGen LV system can be assigned a unique address from 1 to 63. 3. Click “Connect” to connect to the pump.
Page 17 4. A Time Synchronization screen may appear. Read the instructions displayed to synchronize the time stamps between the computer and the dispense system. When communications have been established, the MMI display will come alive with real-time dispense. Installation and Use Manual | Entegris, Inc.
Page 18: System Tab
The System tab provides variables relating to the system management of the pump. Variables can be changed from the default values to optimize the dispense system. Use the mouse-over feature to obtain more information on displayed variables. Installation and Use Manual | Entegris, Inc.
Page 19: Priming Tab
1. Click on the Menu logo. 2. Select “File”. 3. Select “Import”. 4. Select “Priming”. 5. Select number to be assigned. 6. Select priming file to be downloaded. 7. Press “Open”. 8. Press “Start” to being priming. Installation and Use Manual | Entegris, Inc.
Page 20 6. Press “Start” to begin priming. 7. Priming sequence can be saved by clicking on the menu logo. • Select “File”. • Select “Save”. • Select “Number”. • Assign name of the priming sequence. • Press “Save”. Installation and Use Manual | Entegris, Inc.
Page 21 • In the middle section, an estimated time of completion and count- down are displayed. • In the priming field, finished steps are highlighted in light blue, the current step is highlighted in dark blue and unfinished steps remain in gray. Installation and Use Manual | Entegris, Inc.
Page 22: Status Tab
When a warning has been triggered, the status will display “Warning”. The dispense pump will still function. When an error has been triggered, the status will display “Error”. The dispense pump will stop dispensing. Installation and Use Manual | Entegris, Inc.
Page 23 ﬁll and dispense side of the ﬁlter. This will close all open valves. This will start and end the recording of realtime data displayed on the realtime graph below. This will execute one dispense of the selected recipe. Installation and Use Manual | Entegris, Inc.
Page 24: Alarms Tab
Each header description on the Alarms page can be sorted by double clicking on it (type, time, code, etc.). Use the “Save Alarms Log” to save the log history to a csv file. Installation and Use Manual | Entegris, Inc.
Page 25: Recipe Tab
“Recharge” portion of the dispense cycle, including vent, purge, fill and filtration, and maximum dispense volume. Use the mouse-over feature to obtain more information on displayed variables. UTILITY TAB The Utility tab includes “Continuous Dispense” and “Reset Cycle Counters” functions. Installation and Use Manual | Entegris, Inc.
Page 26: Info Tab
The Profiling tab allows dispense profiles to be plotted, saved, and imported individually or for comparison. The traces are dispense pressure, motor dispense position, fill pressure, and motor position which can be turned on or off. Installation and Use Manual | Entegris, Inc.
Page 27 This will load a saved csv ﬁle to the graph below. This will save the cycle number displayed in the “Latest” text ﬁeld to a csv ﬁle. Example plots are shown below: Single profile display Comparison profiles displayed Installation and Use Manual | Entegris, Inc.
Page 28: Confirmation Tab
ﬁeld Load Save last dispense to reference Test ﬁeld Select reference reference conditions of this recipe number to compare Control panel Installation and Use Manual | Entegris, Inc.
Page 29 Test results should be monitored using warning limits before using error limits for fine tuning. • Values can be set for “tight” control or “loose” control of the dispenses. • Enable individual tests: set to warning or error. 4. Execute one dispense. Installation and Use Manual | Entegris, Inc.
Page 30 • Since “All Confirmation Alarms” was disabled, the data field shows what the results would have been if the confirmations test was enabled. • The results show one test condition would have triggered an error. • Pump shows “Ready” because alarms are disabled. Installation and Use Manual | Entegris, Inc.
Page 31 Read the results as a sentence. In this example, “Air Detect Volume” would have triggered an alarm, if enabled. Result shown in data field and “Overall Confirmation Status”. To enable tests, enable “All Confirmation Alarms”. Installation and Use Manual | Entegris, Inc.
Page 32 • Standard profiling commands and features apply to the confirma- tion profiles. 2. The reference profile is always “Profile B” 3. Press “Load Latest” to compare each subsequent dispense as “Profile A”. 4. Use the “Trace Display” function to compare specific traces. Installation and Use Manual | Entegris, Inc.
Page 33: Maintenance
3. Raise the lever to open the filter manifold and 8. To prime a new filter, see Priming the Pump remove the old filter. on page 37. Installation and Use Manual | Entegris, Inc.
Page 34: Flushing The System
N-methyl pyrrolidinone pump valves. (NMP) may be required. PAC crystals remaining in the pump may act as nucleation sites and cause particu- lates. Flushing of the pump is accomplished using the Installation and Use Manual | Entegris, Inc.
Page 35: Updating The Firmware
If a pump is changed out, or software has been factory for rebuild. Contact Entegris prior to returning upgraded on the controller, the system may display any device for service and to obtain appropriate forms an MMI firmware warning.
Page 36: Troubleshooting
CDA supply is connected. External stop valve not operating Verify pneumatic connections to the external valve. Pump is in error state Clear alarms. If condition persists, contact Entegris technical support. Improper N or CDA pressure or vacuum Verify N or CDA and vacuum supply pressure.
Page 37 Nozzle not centered above wafer Center nozzle. Dried chemical on nozzle Clean nozzle. Nozzle too high or too low Adjust nozzle height. (Typically 6 to 9 mm above wafer above wafer. Fluid viscosity dependent.) Installation and Use Manual | Entegris, Inc.
Page 38: Appendix: Priming Recipe Information
0.1 – 3.0 mL/sec Filtration Priming filtration rate 0.1 – 3.0 mL/sec rate Filtration Priming filtration pressure maximum pressure Soak pressure Soak time Contact your local Entegris sales representative to create a customized filter priming recipe. Installation and Use Manual | Entegris, Inc.
Page 39: Manufacturing Information
Legal Notices link from the footer. Repair Service Rebuild and warranty service is available through Entegris. Call +1 800 394 4084 or contact your Regional Customer Service Center for more infor- mation. Entegris will expedite processing by provid-...
Page 40: Limited Warranty
LIMITED WARRANTY Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any failure in the case of customers using unapproved foreign components.