Thermionics SEB Instruction Manual

Electron beam control system

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Instruction Manual

SEB Electron Beam Control System

Thermionics Laboratory, Inc.

P.O. Box 3711 Hayward, CA. 94545 Sales: (510) 538-3304 Fax: (510) 538-2889

Website: http://www.thermionics.com E-mail:

sales@thermionics.com

Rev. C, February 2011

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Page 1 Instruction Manual SEB Electron Beam Control System Thermionics Laboratory, Inc. P.O. Box 3711 Hayward, CA. 94545 Sales: (510) 538-3304 Fax: (510) 538-2889 Website: http://www.thermionics.com E-mail: sales@thermionics.com Rev. C, February 2011...
Page 2 Written authorization for the return and instructions as to how these times should be shipped will be provided. If any Thermionics products must be returned to the factory, they must be sent prepaid via the means of transportation indicated as being acceptable in the written authorization. Thermionics reserves the right to reject any warranty claim on any product that has been shipped by a non-acceptable means of transportation.
Page 3 DANGER - HIGH VOLTAGE!!! HIGH VOLTAGE IS PRESENT WITHIN THIS EQUIPMENT. CARE SHOULD BE EXERCISED AT ALL TIMES WHEN OPERATING OR TROUBLESHOOTING. HUMAN CONTACT WITH THE VOLTAGES INSIDE THIS UNIT CAN BE FATAL. Be certain to turn off the input power before opening the doors or panels. Short all capacitors with a grounding hook.
Page 4: Table Of Contents
CONTENTS SECTION 1 SPECIFICATIONS 1.1 INTRODUCTION Pg. 5 1.2 GENERAL DESCRIPTION/SPECIFICATIONS Pg. 5 SECTION 2 INSTALLATION 2.1 ELECTRICAL REQUIREMENTS Pg. 6 2.2 SYSTEM GROUND Pg. 7 2.3 SOURCE CONTROLLERS Pg. 8 2.4 FILAMENT TRANSFORMER ENCLOSURES Pg. 9 2.4 MAIN POWER CONNECTIONS Pg.
Page 5: Introduction
INTRODUCTION The Thermionics Laboratory, Inc. Source 1 Controller provides the interlock system and emission regulation for the models SEB-06 and SEB-15 switching high voltage power supplies. Everything required for the control and monitoring of one electron beam gun is provided. If multiple gun operation is desired, additional source controllers can be added up to a total of 3 each per power supply.
Page 6: Electrical Requirements
As impedance is the important factor, measuring DC resistance from point to point on the system or between the system and earth ground will not represent actual RF ground capability. For this reason Thermionics recommends the physical ground specifications in figure 1 on page 6.
Page 7 If the equipment is installed on upper floors, the system ground may be accomplished by connecting to the steel structure of the building. This should be done only after insuring the steel structure itself has a good earth ground. Do not depend on water pipes for the system ground connection. Because of the many joints and sealing compounds used in water pipe installation, no assumption should be made as to the impedance of the pipe to earth ground.
Page 8: Source Controllers
A 6 foot cable is provided for connecting the Source 1 Controller interlock string to the SEB HV power supply. This cable is connected to the rear panel of the Source 1 Controller connector labeled “ HV Pwr Supply I/O”...
Page 9: Filament Transformer Enclosures
There are three high voltage output connectors on the rear panel of each SEB HV power supply for connecting up to three filament transformer high voltage coaxial cables.
Page 10: Main Power Connections
The SEB high voltage power supply is provided with a 12 foot 4 conductor cable for connecting main three phase power to the unit. One end, stripped and tinned, is connected to the screw terminals in on the rear panel.
Page 11: Interlocks
When all of the interlock conditions are satisfied, a green LED indicator labeled “READY” will light. This will also enable the OFF pushbutton on the front panel of the SEB High Voltage power supply. The system is now ready for operation.
Page 12: Closed Loop Feedback System
sufficient cooling water to the e-Gun in the chamber before High Voltage can be turned on. When all of the interlock conditions are satisfied, a green LED indicator labeled “READY” will light. This will also enable the OFF pushbutton on the front panels of the additional Source Controllers.
Page 13: Filament Check
Figure 2 Simplified diagram of the closed loop feedback system. FILAMENT CHECK The Filament Check circuit is provided to allow the user to check the operation and or the condition of the e-gun filament without high voltage. A momentary rocker switch and indicator LED are located on the Source controller front panels for this purpose.
Page 14: Introduction
SEB instruction manual for additional information about remote operation. Turn on the circuit breaker on the SEB High Voltage power supply front panel. The yellow “Mains” and green “Interlock” LEDs should be on and the “HV Off” pushbutton should be illuminated indicating all safety, process interlocks are satisfied and the high voltage is ready to be turned on.
Page 15: First Time Evaporation
SEB instruction manual for additional information about remote operation. Turn on the circuit breaker on the SEB High Voltage power supply front panel. The yellow “Mains” and green “Interlock” Leds should be on and the “HV Off” pushbutton should be illuminated indicating all safety interlocks are satisfied and the high voltage is ready to be turned on.
Page 16 Electrical connections can be checked with an ohm meter at the high voltage feedthroughs. Check between the two conductors for continuity less than 1 ohm. Check between each conductor and the chamber wall (ground) for an open circuit. Verify the power supply and vacuum chamber are properly grounded in accordance with section 2.2 of this manual.
Page 17: Section 5 Maintenance
result in improved filament life). SECTION 5 MAINTENANCE DANGER - HIGH VOLTAGE!!! HIGH VOLTAGE IS PRESENT WITHIN THIS EQUIPMENT. CARE SHOULD BE EXERCISED AT ALL TIMES WHEN OPERATING OR TROUBLESHOOTING. HUMAN CONTACT WITH THE VOLTAGES INSIDE THIS UNIT CAN BE FATAL.
Page 18 Be certain to turn off the input power before opening the doors or panels. Short all capacitors with a grounding hook. Avoid testing live circuits. If, in the process of troubleshooting, it becomes necessary to energize portions of the circuitry, extreme caution should be observed. All test meter connections should be made with power off.
Page 19: Calibration
With the circuit breaker on the SEB high voltage power supply in the off position and input power removed, DISCONNECT THE COAXIAL CABLE FROM THE REAR OF THE POWER SUPPLY.
Page 20 If there is no increase and or decrease of this AC voltage, this would indicate a problem with filament control amplifier PCB located inside the associated source controller. Contact Thermionics for information regarding replacement parts or additional testing procedures.
Page 21: Schematics/Data Sheets
5.3 SCHEMATICS/DATA SHEETS 1. SEB Power Supply Source 1 Controller/Transformer Connection Pg. 22 2. SEB Power Supply Source 1 Controller/Transformer Connection Pg. 23 3. Wiring Diagram, HV Interlock Source 1 Controller Pg. 24 4. Schematic, Digital Metering Rev 1 Pg. 25 5.
Page 26 Bill Of Materials for filament Control Amplifier Rev: B 10\19\00 ------------------------------------------------------------------------------------------------- Item Qty Reference Part Name Manufacturer Description ------------------------------------------------------------------------------------------------- D5-7 1N4004 1N4004 Diode Axial DO-41 1A 400V D10-12 D1-4 D8-9 1N4148 1N4148 Diode Axial DO-35 150mA 100V 1N758A Diode Axial DO35 10V 500mA Zener 2N4402 2N4402 EBC TO-92 PNP Small signal Transistor...
Page 32 INSTRUCTION MANUAL MODEL 1022 & 1025 Distributed Worldwide By www.mcgoff-bethune.com 1-800-303-4705 +1-770-840-9811...
Page 38 GLC75 Commercial/GLM75 Medical 75 Watt Single Output Global Performance Switchers FEATURES: • Cost-effective single-output power source • 3.4" x 5.75" x 1.56" (meets 1U applications) • Universal input 90-264 Vac • 2-year warranty • Complies with EN61000-3-2 Class A • Also available in multiple output versions •...
Page 39 GLC75 Commercial/GLM75 Medical 75 Watt Single Output l a i l a c l a t e s i i t a l ± ± ± ± ± A. Rating with unrestricted convection cooling. Total power not to exceed 75 W. B.