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Senis MMS-1A-RS Operation Manual

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Operation Manual
MMS-1A-RS / MMS-1X-RS
Operation Manual
Senis AG
Neuhofstrasse 5a
CH-6340 Baar
Phone: +41 (44) 508 7029
Web :
www.senis.ch
Email:
mappers@senis.ch
Revision 4.0, September, 2020
Doc Nr: MP.MMS-1A-RS.OM.400.02_E
Page 1/74

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  • Page 1 Operation Manual MMS-1A-RS / MMS-1X-RS Operation Manual Senis AG Neuhofstrasse 5a CH-6340 Baar Phone: +41 (44) 508 7029 Web : www.senis.ch Email: mappers@senis.ch Revision 4.0, September, 2020 Doc Nr: MP.MMS-1A-RS.OM.400.02_E Page 1/74...

  • Page 2: Table Of Contents

    Mapper Software Installation ........................19 OPERATIONAL CONDITIONS ............................19 General description ........................20 OVERVIEW .................................. 20 SENIS high-resolution magnetic-field-to-voltage transducer (in short: magnetic transducer) ....20 Cartesian Moving Platform (CMP) ....................... 22 Data acquisition and signal processing ......................24 Motion Control ............................. 24 MH8 Rotation Probe Head (only MMS-1X-RS) .....................
  • Page 3 Operation Manual MMS-1A-RS / MMS-1X-RS MEASUREMENT TAB ..............................53 Single slice visualization ..........................54 Polar plot visualization ..........................54 Multi slice visualization ..........................55 Basic analysis ............................... 55 Multipole analysis ............................56 Diameter Analysis ............................58 2D graph visualization ..........................59 3D graph visualization ..........................

  • Page 4: Table Of Revisions

    Operation Manual MMS-1A-RS / MMS-1X-RS 2. Table of Revisions Date Manual release Software version Description 09/2020 New template New: full screen interface description Removed: Mapper software design, project specific information, Detailed software installation instructions, technical data, Key features and applications...

  • Page 5: Safety Precautions

    Operation Manual MMS-1A-RS / MMS-1X-RS 3. Safety Precautions Read the manual before operating the mapper. Do not connect the device to any power source other than the one delivered by manufacturer and specified in this document. Do not use any cables other than the ones delivered by manufacturer and specified in this document.
  • Page 6 Operation Manual MMS-1A-RS / MMS-1X-RS When removing the plug, hold and pull the plug itself. do not remove it by pulling the cable. Do not apply undue force to plugs, cables or the sensor. Do not unplug any cables while measurement is in progress. always stop the software program prior to unplugging the cables.

  • Page 7: Information

    MMS-1A-RS / MMS-1X-RS 4. Information Magnetic Field Mapper MMS-1A-RS / MMS-1X-RS is the high-end version of the SENIS Magnetic Field Mapping Systems. It allows users to perform a fast, high resolution mapping of magnetic flux density around permanent magnets, electromagnets or electronic circuit boards. The map of the magnetic field can be presented as color coded 2D or 3D visual displays on a PC screen and as a table of numerical measured values.

  • Page 8: Preparation For Use

    It is highly recommended that the system unpacking and operation setup procedure is performed by a certified SENIS engineer or by an authorised SENIS partner. If this is not the case, SENIS cannot be held responsible for any system malfunction or damage.
  • Page 9 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 3: Unscrew the top cover of the box Figure 4: Remove the cover Figure 5: Mapper System packed in the wooden box Figure 6: Unscrew the front side of the box Revision 4.0, September, 2020 Doc Nr: MP.MMS-1A-RS.OM.400.02_E...
  • Page 10 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 7: Remove the front side of the box Figure 8: Mapper is fixed on the mapper holder board Figure 9: Unscrew the Mapper holder board from the top and pull-out the bord with the Mapper Revision 4.0, September, 2020...
  • Page 11 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 10: Turn the mapper and lay it on the side. Unscrew the M10 screws. Figure 11: Screw-in the adjustable feets, which are delivered with the machine Figure 12: Place the Mapper on the firm and stable table Revision 4.0, September, 2020...

  • Page 12: Unblocking Procedure

    Operation Manual MMS-1A-RS / MMS-1X-RS Unblocking Procedure The unblocking procedure is described in the following figures. Blockers have to be carefully removed from all three linear modules (X, Y and Z axes). Please pay attention during the unblocking in order not to damage the border switches.
  • Page 13 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 16: Unscrew the hexagonal screws Figure 17: Pull out the blocker Figure 18: Rotate and remove the screwing part Revision 4.0, September, 2020 Doc Nr: MP.MMS-1A-RS.OM.400.02_E Page 13/74...

  • Page 14: Installation And Setup

    Operation Manual MMS-1A-RS / MMS-1X-RS Installation and Setup Standard Package Content • Mechanical Probe Positioning System includes: Cartesian Moving Platform, Touch Sensor with Probe Holder and Hall Probe, Rotation Stage, Zero Gauss Chamber, Magnet Holder and FSV Calibration Tool. Figure 19: Mechanical Probe Positioning System or Cartesian Moving Platform...
  • Page 15 Operation Manual MMS-1A-RS / MMS-1X-RS • Electronic Box (WxDxH: (32x45x14)cm / 5kg), including the power cord Figure 20: Electronic Box (configuration of the electronic box may differ) • Desktop Computer (WxDxH: (15 x 47 x 37) cm / 5 kg) with a Windows 7/10 operating system and mapper software installation on it (CD is included), USB cable, keyboard, mouse and display.

  • Page 16: Connecting The System

    Operation Manual MMS-1A-RS / MMS-1X-RS Connecting the System Since most of the modules are already connected inside the Electronic Box (control units, motor drivers, power supply, motherboard), only a few connections are required to make the system fully operational. A proper way to connect the Electronic Box to the Cartesian Moving System and to the PC is shown in the Figures below (connector positions on the Electronic Box may differ depending on the system configuration).

  • Page 17: Connecting Instruction

    Operation Manual MMS-1A-RS / MMS-1X-RS Connecting Instruction • Connect the Hall probe, the touch sensor, step motors, FSV tool supply, encoders, X/Y/Z linear modules and the rotating stage (from the Cartesian Moving Platform) to the electronic box. • Connect the Emergency Stop Switch to the Electronic Box.

  • Page 18: System Setup

    It is highly recommended that the system setup is performed by a certified SENIS engineer or by an authorised SENIS partner. If this is not the case, SENIS will not be held responsible for any system malfunction or damage. The set files (configuration and calibration) on the installation disk will not match your system if the system was disassembled after shipping.

  • Page 19: Mapper Software Installation

    Operation Manual MMS-1A-RS / MMS-1X-RS Mapper Software Installation The System has been delivered with the pre-installed Mapper software. Use the following procedure ONLY for setting-up a new system (PC). • Insert the installation CD into the CD-ROM drive • Go to Install -> MMSEN_XYZ01 Installer -> Volume •...

  • Page 20: General Description

    6. General description Overview MMS-1A-RS / MMS-1X-RS is fully computer controlled magnetic field scanner. It allows motion in all four axes simultaneously (X-, Y-, Z-direction and rotation). The three-axis Hall probe measures magnetic field flux density of permanent magnets or electromagnets and delivers measured data for visualization and analysis in the Mapper software.
  • Page 21 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 27: SENIS’ integrated Hall Probe; left and right- Photos of the Si-chip The magnetic transducer is enclosed into the electronic box that houses the power supply, step motor drivers, encoder electronics, touch sensor control and current supply for calibration tools.

  • Page 22: Cartesian Moving Platform (Cmp)

    Figure 30: Touch Sensor with Hall probe mounted on it. It has an adapter with connecting pads and with integrated RFID for automatic probe recognition for an easy probe interchangeability The MMS-1A-RS / MMS-1X-RS is also equipped with an Emergency Stop taster (as safety equipment) that, when activated, breaks the power supply for the motor drivers.
  • Page 23 MMS-1A-RS / MMS-1X-RS Figure 32: Mechanical Probe Positioning System or Cartesian Moving Platform a) MMS-1A-RS - standard-size Mapper with the scanning volume (135 x135 x 135) mm; b) MMS-1X-RS large-size Mapper with the scanning volume (500 x 500 x 300) mm Applied encoders help determine the exact position of the probe and help eliminate mechanical transfer elements, such as bearings.

  • Page 24: Data Acquisition And Signal Processing

    MH8 Rotation Probe Head (only MMS-1X-RS) For the large-size mapper MMS-1A-RS there is an additional option - the improved version of touch sensor – MH8. The advantage of this touch sensor is the possibility to turn the probe in different positions, i.e. 0°...
  • Page 25 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 37: MH8 probe head The Hall probe can rotate along two axes: A and B, with resolution of 15 degrees, though only two positions are supported from the software side: 0° and 90 degrees. The operator needs to manually change the probe angle position.

  • Page 26: Folders And Files

    Folders and files The Mapper program files, calibration and measurement data are organized in a directory structure, which helps an intuitive software usage. SENIS provides following folder structure on each delivered PC configuration. Figure 42: Mapper Software Folder Structure – All executables are stored under Application folder, which can be stored everywhere in the customers directory structure Revision 4.0, September, 2020...
  • Page 27 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 43: Customize.txt file (located in the Setup folder) contains data that describe customers mapper configuration. The customizing includes the special rotary stages, protective box, special measurements, etc. Figure 44: App folder and mapper software executable file (example only) Figure 45: Measurements and Calibration data are stored under data folder Revision 4.0, September, 2020...
  • Page 28 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 46: Measurement data in the Measurements folder Figure 47: Example of a measurement file (scanning path and header data, followed by the table with Bx, By and Bz with the correponding X,Y,Z,Theta coordinates, and the analysis data at the end of the file.
  • Page 29 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 48: Actual calibration data in Calibration folder (current configuration, i.e. the working Hall probe data are copied to the Calibration folder whenever the probe was exchanged and recognized by the RFID) Figure 49: Examples of calibration files Revision 4.0, September, 2020...

  • Page 30: Connection Diagrams

    Operation Manual MMS-1A-RS / MMS-1X-RS Figure 50: Scanning paths and measurement profiles are stored under Measurement mode folder Figure 51: Examples of measurement profile files Connection Diagrams Figure 52: Connection Diagram – Overview Revision 4.0, September, 2020 Doc Nr: MP.MMS-1A-RS.OM.400.02_E...

  • Page 31: Functional Verification

    Operation Manual MMS-1A-RS / MMS-1X-RS Figure 53: Connection Diagram – Electronic Box Functional verification After the Mapper software is started, the “Initialization…” message will appear on the Dashboard screen. During the Initialization, the Motion Control and the DAQ will be initialized and made ready for operation.
  • Page 32 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 56: Dashboard Tab after initialization To continue with functional verification of the system, go to “Manual Control” screen by selecting the appropriate tab. The screen shows eight buttons for triggering the probe movement in various directions, as showed below.
  • Page 33 Operation Manual MMS-1A-RS / MMS-1X-RS working properly click and hold each arrow (except for rotation, since the rotation table has no boundary switches). Hold each arrow until the linear module moves to the boundary switch. Upon hitting the switch, the module will automatically stop, the power supply will be disconnected; and any further movement of the system in the previous direction will be disabled.
  • Page 34 Operation Manual MMS-1A-RS / MMS-1X-RS The probe will be positioned in the absolute (mechanical) zero coordinates (with the positioning tolerance of +/-3 um). Also, the rotary stage will be positioned in its 0° position. NOTE: You can optionally use software limit offset (probe will be position at zero coordinate plus software limit offset when you go to mechanical 0 position) The next check is to position the Hall probe in the Zero Gauss Chamber.

  • Page 35: Operation Instructions

    Operation Manual MMS-1A-RS / MMS-1X-RS 7. Operation instructions Dashboard tab Figure 62:Dashboard Screen appears on the software start Top level controls (always visible) Figure 63: Basic controls Coordinate systems: • The Coordinate system selector allows to select preconfigured or custom coordinate systems.

  • Page 36: Manual Control Tab

    (usually X = 10, Y = 10, Z = 10). On “User” button activation, the probe will be position in the user defined scanning position. This position can be set in the Calibration Tab or in the Setup Tab and is stored in a user defined file under C:\Senis\Start position. Revision 4.0, September, 2020 Doc Nr: MP.MMS-1A-RS.OM.400.02_E...

  • Page 37: Manual Positioning Options

    Operation Manual MMS-1A-RS / MMS-1X-RS Manual positioning options • Max speed allows setting the maximally selectable speeds for linear and rotation movements • Acceleration sliders set the linear and rotation acceleration. This can help reduce vibrations by avoiding mechanical resonance frequencies.

  • Page 38: Keyboard Controls

    Operation Manual MMS-1A-RS / MMS-1X-RS Keyboard Controls SHIFT + Red Controls: slow movement of the of the probe (i.e. for touching) Orange Controls allow moving in small steps (5um) when pressing SPACE. Holding SPACE overrides the touch sensor. This allows moving the probe with the Orange Controls when the touch sensor is triggered.

  • Page 39: Coordinate System And Starting Points

    (in the Manual Tab) or as the command for setting the scanning paths in the Setup Tab. The start position will be saved in the customer’s named file under C:\\Senis\Start position. The probe position can be saved using the user or mechanical coordinates. The advantage of using Mechanical coordinate is that users do not have to take into account the current user coordinate system.
  • Page 40 Position the probe on the left of the magnet: Y=0, X on the left of the magnet with an airgap of around 2mm airgap to the magnet. If you’re using the ring magnet delivered by Senis X=-18.8mm is a good value.

  • Page 41: Fsv Calibration

    Operation Manual MMS-1A-RS / MMS-1X-RS Figure 70: Radial field of magnet at good distance from the multipole magnet • Optional: Click on: “Save start position for multipole center or rotation” This will define the current position as the start position and the probe will automatically drive to the position when you start the calibration, without the need to search for the correct position •...
  • Page 42 Operation Manual MMS-1A-RS / MMS-1X-RS • Move the probe in X and Y above the reticule in the top of the FSV tool. Figure 72: Position probe above FSV reticule • Press the Set new FSV Calibration start position button Stylus calibration •...

  • Page 43: Defectoscope Calibration

    Operation Manual MMS-1A-RS / MMS-1X-RS Figure 74: Position probe above FSV reticule Defectoscope calibration Defectoscope calibration allows zeroing the defectoscope. Rotation alignment Allows aligning an object on the rotary stage to satisfy a magnetic field condition: Figure 75: Rotation alignment Touch alignment Allows aligning a flat surface of an object mounted on the rotary stage with the X/Y axis.

  • Page 44: Cube Calibration

    Required components • Calibration Cube • Calibration certificate of calibration cube • Holder for rotary stage (only for MMS-1A-RS) • Right angle corner tool (only for MMS-1X-RS) Preparation MMS-1A-RS • Remove all jaws from the Maprox JF rotary stage •...
  • Page 45 X movement: Leave as is and reduce if cube hits X limit switch during process Figure 77: Calibration cube on rotation table holder (left; MMS-1A-RS) and on Corner Tool (right; MMS-1X-RS) After the calibration you are given the following choices: •...

  • Page 46: Sliding Probe Calibrations (Option Mms-Slide)

    Operation Manual MMS-1A-RS / MMS-1X-RS Sliding probe calibrations (Option MMS-SLIDE) Figure 78: Sliding probe calibrations Sliding probe deflection calibration • Move the probe away from any object • Click on the Sliding probe deflection calibration button • If the calibration was successful, the LVDT signal level should be in the range of +/-2V Sliding probe vertical calibration •...
  • Page 47 Operation Manual MMS-1A-RS / MMS-1X-RS Sliding probe FSV to probe tip calibration • Mount the calibration tool on the table as shown on the photo • Put the probe to the left of the tool, not aligned with the hole in the tool so it can touch the edge of the tool.

  • Page 48: Setup Tab

    Operation Manual MMS-1A-RS / MMS-1X-RS Setup Tab Figure 81: Setup Tab for Measurement Profile definition The Setup Tab allows user to define a measurement profile, which consists of a feasible combination of the scanning path, the data visualization type (measured data display) and the PDF report type.

  • Page 49: Measurement Modes (Legacy)

    Operation Manual MMS-1A-RS / MMS-1X-RS Measurement modes (Legacy) • Diameter mode – In this mode the probe is fixed in a desired distance from the center of a ring magnet or a disc magnet and the rotary stage turns, typically for 360°. The magnetic field is measured and the results (Bx, By, Bz, Bxy, Btot, Inclination, Declination) are presented on 1D plot (Amplitude vs rotation angle).

  • Page 50: Command Editor (List Of Commands)

    Operation Manual MMS-1A-RS / MMS-1X-RS Command Editor (List of Commands) Find the command syntax file for reference included with this manual as a function reference explaining all the commands. If an operator sets the resolution value that is not a divider of the selected scanned area...

  • Page 51: Linear Scan Path Examples

    Operation Manual MMS-1A-RS / MMS-1X-RS Go to scan pos,multipole1 Go to start position stored in file: C:\Senis\MMS-2A-ROT\Start position\multipole1.txt. See Error! Reference source not found.. Sr+360 Scan while rotating +360° My-10 Move away from the probe to allow unmounting and mounting of the next sample.

  • Page 52: Report Types

    Operation Manual MMS-1A-RS / MMS-1X-RS Report types Figure 84: Report types There are following reports available: • Multiple mode report – PDF report for multiple mode (with or without FFT) • Diameter mode report – PDF report for diameter mode (with or without FFT) •...

  • Page 53: Scanning Resolution

    Operation Manual MMS-1A-RS / MMS-1X-RS Scanning Resolution Scanning resolution is user selectable. Keep in mind that better resolution means longer scanning time. It is not recommended to use better scanning resolution than 0.1 mm since it would take too much time to finish the scan (except for the very small scanning area) and will generate a large raw data file.

  • Page 54: Single Slice Visualization

    Operation Manual MMS-1A-RS / MMS-1X-RS o Zero crossing: Signal is shifted so it starts at a zero crossing o Maximum: Signal is shifted so it starts at the maximal positive pole peak. • Select analysis type: o Basic analysis o Multipole analysis...

  • Page 55: Multi Slice Visualization

    Operation Manual MMS-1A-RS / MMS-1X-RS Multi slice visualization Figure 91: Visualization of multiple slices Basic analysis The basic analysis returns typical signal processing results Figure 92: Visualization of multiple slices • Mean: mean value of the signal in mT •...

  • Page 56: Multipole Analysis

    (start and end of the signal are at the same position). It might not work for any specific magnets (magnetizations). If the analysis is unsatisfactory a customer specific analysis might be required to be implemented by SENIS. Figure 93: Multipole analysis Revision 4.0, September, 2020...
  • Page 57 Operation Manual MMS-1A-RS / MMS-1X-RS • The Bmax/Bmin controls allow setting max and min values for the fields. The corresponding values will be displayed on a green/red background. • The B diff control allows setting a required maximal peak to peak value. If the measured peak to peak value is above B diff its background turns red.

  • Page 58: Diameter Analysis

    Operation Manual MMS-1A-RS / MMS-1X-RS Diameter Analysis The diameter analysis provides tools to evaluate diametrically magnetized dipole magnets for angle sensor applications. Figure 96: Diameter Analysis • min/max allows setting the tolerance for the planar field component B • Homogeneity max/min allows setting the tolerance for the Homogeneity.

  • Page 59: Graph Visualization

    Operation Manual MMS-1A-RS / MMS-1X-RS 2D graph visualization For each graph, the magnetic field component can be selected. Figure 97: 2D graph visualization of 4 components 3D graph visualization For each graph, the magnetic field component can be selected. Figure 98: 3D graph visualization of 4 components Revision 4.0, September, 2020...

  • Page 60: Additional Analysis Software (Option Mms-Analysis)

    MMS-1A-RS / MMS-1X-RS Additional Analysis Software (Option MMS-ANALYSIS) MMS-ANALYSIS is an additional software module of the MMS-1A-RS magnetic field mapper software that can be used for the analysis of the measured data. It visualizes the measured data and calculated magnet parameters in various, customized and intuitive color-coded displays and tables.
  • Page 61 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 101: Various 1D data analysis and visualisations Figure 102: 1D and 2D Data comparison with the visualisation of the differences Revision 4.0, September, 2020 Doc Nr: MP.MMS-1A-RS.OM.400.02_E Page 61/74...
  • Page 62 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 103: Various 1D data analysis and visualisations Figure 104: 1D and 2D Data comparison with the visualisation of the differences Revision 4.0, September, 2020 Doc Nr: MP.MMS-1A-RS.OM.400.02_E Page 62/74...

  • Page 63: Dimensional Tab (Option Mms-Cmm)

    Operation Manual MMS-1A-RS / MMS-1X-RS Dimensional Tab (Option MMS-CMM) Figure 105: Dimensional Tab Measurement probes are mounted (mechanically connected) to the touch sensor, which is fixed on the Mapper moving console. During the magnetic field mapping, the touch sensor is used to prevent probe damage.
  • Page 64 C:\Senis\Data\History\Touched.txt. Activating the control, this file will be deleted. 8. Delete last point deletes the last saved coordinate in C:\Senis\Data\History\Touched.txt. 9. Allows setting X, Y and Z values of a new user coordinate system. There are two ways to perform this function –...
  • Page 65 Operation Manual MMS-1A-RS / MMS-1X-RS Figure 107: Setting a coordinate system on the corner of a cube 11. Allows setting offsets for the setting a new coordinate system. 12. Stylus offset describes the distance between the center of the ruby ball and the FSV of the respective Hall probe in X, Y and Z.

  • Page 66: Administration Tab

    Operation Manual MMS-1A-RS / MMS-1X-RS Administration Tab Figure 108: Administration Tab for system settings System Setup • About () shows mapper software information • User mode enables a restricted mode. In standard mode only certain tabs are available. To disable the user mode the password (see Setup.txt file) is necessary.

  • Page 67: Options

    Operation Manual MMS-1A-RS / MMS-1X-RS 8. Options Defectoscope (Option MMS-DEF) An eddy-current probe can be used for detecting cracks and inhomogeneity in conductive materials, i.e. in magnets (NdFeB, SmCo, Alnico, sintered materials) and in magnet blanks (prior to magnetization). Figure 109: Left: Eddy-current Probe, containing one excitation and two pick-up coils; Right: Measurement on a segment magnet using SENIS eddy-current probe A measurement with the defectoscope is performed in the same manner as for the magnetic field mapping.

  • Page 68: Anisotropic Magneto Resistant (Amr) Probe (Option Mms-Amr)

    Presentation in the additional module (switched on in the Setup tab), which compares good/bad materials Anisotropic Magneto Resistant (AMR) probe (Option MMS-AMR) SENIS can provide a customized configuration that is suitable for low magnetic fields, e.g. for the measurement of the demagnetized parts, weakly magnetized parts, environmental magnetic fields, etc.
  • Page 69 Operation Manual MMS-1A-RS / MMS-1X-RS The large-size mapper with the scanning volume (500x500x300) mm is utilized to allow enough distance between the working area and the ferromagnetic parts integrated in the mapper construction; the console that carries the probe is extended to provide enough distance to the ferromagnetic parts of the mapper;...

  • Page 70: Clean Room Compatibility (Option Mms-Cr)

    Clean room Compatibility (Option MMS-CR) SENIS provides a clean room compatible mapper configuration. Following modifications are made to the standard MMS-1A-RS mapper to achieve the clean room compatibility. The following changes can be implemented on a project specific base: •...

  • Page 71: Troubleshooting

    Check if the pogo connection pins in between probe holder and the probe connection PCB are good. (Take a picture). Example picture below. • Send pictures/screenshots and the folder C:\Senis\Calibration\ to SENIS. • Field is higher than the selected range. Change to an appropriate measurement range.

  • Page 72: High Measurement Noise

    Operation Manual MMS-1A-RS / MMS-1X-RS Figure 114: Pogo pin connection of the Senis Hall probe High measurement noise • Check the filter settings (see: 7.1.1 Top level controls (always visible)) • Ensure all connectors are well plugged and the screws tightened.

  • Page 73: Maintenance

    Operation Manual MMS-1A-RS / MMS-1X-RS 10. Maintenance Maintenance intervals Maintenance point Periodicity Reference/Instructions Cleaning and lubrication of Monthly depending on usage Below ball screw linear drives Greasing of ball screw linear Monthly (200…600 hours) Below drives Scroll chuck lubrication 6 months or whenever changing...

  • Page 74: Additional Resources

    Operation Manual MMS-1A-RS / MMS-1X-RS 11. Additional resources Document Content Command syntax A function reference of the possible text commands for automatized measurements. Probe calibration certificate Certificate traceable to international norms Calibration supplement Contains calibration coefficients probe dimensions and FSV position.

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