1. Manuals
  2. Brands
  3. VAT Manuals
  4. Refrigerator
  5. 615 DN Series
  6. Installation, operating, & maintenance instructions

VAT 615 DN Series Installation, Operating, & Maintenance Instructions

Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
Butterfly control & isolation valve
with extended control range
with RS485 interface
This manual is valid for the valve ordering number(s):
61532-KEGJ-0002
configured with firmware 615P.1E.31
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
615 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 615 DN 40 (I.D. 1.5"), RS485
Fabrication number
sample picture
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Wear gloves!
289111EB
2013-02-05
1/96

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 615 DN Series and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for VAT 615 DN Series

Summary of Contents for VAT 615 DN Series

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 1/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    3.12.11 Error messages ..........................69 4 Trouble shooting ..............................70 5 Maintenance & repairs ............................73 Maintenance procedures ..........................73 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 3/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 4 Seal kit ................................93 Accessories ..............................94 7.4.1 Centering ring with Viton o-ring ......................94 8 Warranty ................................. 95 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 4/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 5: Use Of Product

    This product is a Butterfly control valve with isolation functionality for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...

  • Page 6: Technical Data

    Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 6/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 7 Weight about 3.3 kg Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 7/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 8: Installation

    Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 8/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 9 Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 10: Tightening Torque

    The stress has to be relieved by suitable means. The following forces are admissible: Axial tensile or Valve size Bending moment «M» compressive force «F » inch lbf. 1½ VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 10/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 11: Admissible Forces At Controller

    Admissible force «F» a = middle of aluminium part of controller (b / 2) c = pedestal 400 N VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 11/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 12: Requirements To Sensor Connection

    Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 12/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 13: Electrical Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 13/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 14: Sensor Supply Concepts

    615 . . - . . G . - ..and 615 . . - . . H . - ..SPS module not included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 14/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 15: Power And Sensor Connection (+24 Vdc Sensors)

    Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensor, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 15/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 16 Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensor, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 16/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 17: Power And Sensor Connection ( 15 Vdc Sensors) Without Optional Sps Module

    Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensor, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 17/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 18 Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensor, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 18/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 19: Rs485 Interface Connection

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 20: Operation

    This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 20/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 21: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 22: Safety Mode

    Valve remains at current position. All parameters are stored in a power fail save memory. For PFO retrofit and other options refer to chapter «Retrofit». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 22/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 23: Display Information

    1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = Power Failure Option VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 23/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 24 Digit 2 Digit 3 Digit 4 Fatal error occurred Error code. Refer to «Trouble shooting» for details VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 24/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 25: Setup Procedure

    („Control View‟ or „Control Performance Analyzer‟) details) Send INTERFACE CONFIGURATION 1 Do configuration in menu „Setup / Interface‟. Send RANGE CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 25/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 26 Setup example Description: RS485 selected, half duplex operation, device address #015. Command: s:2210151000<CR><LF> Answer: s:22<CR><LF> VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 26/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 27: Logic I/O Configuration

    0 = enabled 1 = disabled 000 (reserved) For LOGIC I/O connector schematics see also chapter «LOGIC I/O». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 27/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 28: Valve And Sensor Configuration

    Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 28/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 29: Pressure Control Configuration

    A = 5.0, B = 5.5, C = 6.0, D = 6.5, E = 7.0, F = 7.5, G = 8.0, H = 8.5, I = 9.0, J =9.5, K = 10.0 e, f, g, h are not used. Set 0000 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 29/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 30 00 = not used Note: To optimize P-Gain, I-Gain and soft pump of the pressure controller refer to chapter «Tuning of control performance». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 30/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 31: Control Algorithms

    To use the P control algorithm the P values must be calculated according to the process condition. Refer to chapter: 3.6.5.3 Soft pump. Prior to pressure control operation the control type must be selcted and the valve must be prepared accordingly. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 31/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 32 Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 32/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 33 [l/s] gasflow for learn [sccm] = 39.4 p max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 33/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 34 The PI parameters can be calculated approximately with the formulas below. On request VAT can provide a parameter calculation tool . Note: In downstream control mode valve will move towards open when current pressure is higher then setpoint.

  • Page 35: Close Valve

    Based on the P controller configuration, the valve is able to run fast and accurate pressure control cycles. The P parameters can be calculated approximately with the formulas below. On request VAT can provide a parameter calculation tool .

  • Page 36: Position Control

    PI control Tuning of pressure control performance with soft pump control, refer to chapter: 3.11.3 Tuning of pressure control (soft pump) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 36/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 37: Tuning Of Pressure Control (Adaptive)

    Pressure Pressure Pressure Pressure control control control control ok ? ok ? ok ? ok ? Contact VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 37/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 38 „Service Box 2„) Send Set gain factor in menu „Setup / Control Parameter‟ PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 38/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 39 „Service Box 2„) Go to „Setup / Controller‟ menu. Send Select sensor delay. PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 39/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 40 „Service Box 2„) Go to „Setup / Control Parameter‟ menu. Send Select setpoint ramp. PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 40/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 41 Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 41/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 42: Tuning Of Pressure Control Performance With Fixed Pi Control

    ? I-Gain to P-Gain to adjustment / adjustment / optimizing optimizing Pressure control ok ? Contact VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 42/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 43 Go to „Tools / Terminal‟ menu and send configuration Send command for adjustment. Refer to « Pressure PID CONTROLLER CONFIGURATION controller configuration» for command details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 43/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 44 Flow range: Pressure set points and gas flow for optimization: 7 Torr 6 Torr Gas flow 4slm VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 44/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 45 The optimal P gain value is found if the transition from SP2 to SP1 results in a slight pressure over shoot. It does not matter if there is still a deviation between SP1 and actual pressure. Example: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 45/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 46 SP2 exactly. Example: Note: Check control performance over the whole control range with parameters above. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 46/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 47: Tuning Of Pressure Control (Soft Pump)

    ? P-Gain to Valve speed adjustment adjustment Pressure Pressure control control ok ? ok ? Contact VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 47/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 48 The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec. with corresponding end pressure.
  • Page 49 If the pressure oscillates around the ideal pump down line or if the valve position oscillates, P gain is too high. P gain is optimized if the pressure follows the ideal pump down line closely and the valve position is not oscillating at all. Example: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 49/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 50: Rs485 Interface

    This interface allows for remote operation by means of a command set based on the RS485 protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 50/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 51 Configuration with switches for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 51/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 52 Configuration with voltage source for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 52/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 53: Rs485 Network Topology

    HOST Valve Full duplex Wiring: 120Ω Twisted pair cable 120 Ω Twisted pair HOST Valve cable VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 53/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 54: Digital Inputs

    Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. These digital inputs have higher priority than all RS485 commands. RS485 commands will not be accepted while digital inputs are active. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 54/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 55: Command Syntax

    Example Description: Send “Close” command to valve with RS485 device address 015 Command: #015C:[CR][LF] Answer: #015C:[CR][LF] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 55/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 56: Rs485 Control Commands

    SETPOINT. Note: Reading returns pressure setpoint only in case pressure control is selected, otherwise position setpoint is returned. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 56/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 57: Rs485 Inquiry Commands

    «RS485 setup commands, RANGE CONFIGURATION» for details This function returns the actual pressure. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 57/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 58 Note: In simulation mode the valve can demonstrate pressure control capability independent of other equipment such as vacuum chamber, flow controller and gauge. Normal operation is not possible when simulation is running. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 58/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 59 2 (-1400000 ... 01400000 = -1.400000V ... +1.400000V) This function returns the sensor 2 offset voltage (adjusted by ZERO). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 59/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 60 STATUS See in chapter «Trouble shooting» for details. This function returns an error code in case of any malfunction of the device. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 60/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 61 (20 hexadecimal) This function returns an identification code. This code is unique for each valve and allows tracing. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 61/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 62: Rs485 Setup Commands

    0 = full duplex, 1 = half duplex 000 (reserved, do not change) This function defines the interface configuration for the valve. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 62/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 63 1 = inverted 0 = enabled 1 = disabled 000 (reserved) This function does the „DIGITAL OUTPUT‟ configuration. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 63/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 64 In case of a 1 sensor valve use any value within the valid range. This function does the sensor configuration for pressure control. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 64/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 65 Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). RANGE CONFIGURATION for PRESSURE resp. SENSOR READING is set to 10‟000. Switchover between sensors is done automatically. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 65/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 66 104 data sets. Each data set consists of 8 data bytes and needs to be uploaded separately. Note: Make sure that all 104 data sets will be uploaded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 66/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 67 This command selects gain factor, sensor response time and setpoint ramp for the PID controller. Note: Refer to «Tuning of control performance» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 67/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 68 00 = reset service request bit from WARNINGS RESET 01 = reset FATAL ERROR (restart control unit) This function resets warnings and errors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 68/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 69: Error Messages

    Command not accepted due to synchronization, CLOSED or OPEN by digital input, [E:][000082][CR][LF] safety mode or fatal error Hardware Command not applicable for hardware configuration [E:][000041][CR][LF] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 69/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 70: Trouble Shooting

    - Provide power to motor to allow for operation. Motor Interlock is open - Refer to «Electrical connection» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 70/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 71 ZERO. - Enable ZERO. Refer to «Valve - ZERO disabled? configuration» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 71/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 72 If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 72/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 73: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...
  • Page 74 In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance with FKM seals under clean and unheated condition: Seals Maintenance recommendation Exchange after 250‟000 isolation cycles or 2‟000‟000 control cycles...

  • Page 75: Replacement Of Plate O-Ring

    6. Remove the plate on the other side of shaft 7. Remove the plate o-ring Soft tool 8. Replace the plate if necessary VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 75/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 76 12. Place the new o-ring at o-ring groove at one side 13. Move the o-ring in the o-ring groove on the other side VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 76/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 77 (close position). 20. Disconnect electrical POWER connection Keep fingers out of the valve opening during plate movement! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 77/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 78: Replacement Of Shaft Feedtrough Seals And Plate O-Ring

    Pay attention: Take care to the sealing surface! Allen Wrench 4. Loosen clamp coupling screw VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 78/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 79 7. Unfasten and remove the 2 fastening Allen Wrench screws VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 79/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 80 13. Lubricate the new o-ring with 0.0125 ml vacuum grease Vacuum grease For new o-ring refer to chapter spare parts. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 80/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 81 17. Push in the o-ring around the plate into o- ring groove equally 18. Plate with equal mounted o-ring 19. Deposit the plate on a clean surface VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 81/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 82 21. Remove mechanical unit from valve body Cleanroom wipes soaked 22. Clean shaft with isopropyl alcohol 23. Remove both o-rings Soft tool VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 82/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 83 28. Lubricate each o-ring with a slight film of 0.0125 ml vacuum grease. Vacuum grease Pay attention: If required use new o-rings VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 83/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 84 Allen torque wrench with 2.5 Nm 34. Place the plate on the shaft in the valve body VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 84/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 85 Cleanroom wipes 41. Assemble valve unit with control and actuating. Push axis (C) into clamp coupling VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 85/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...
  • Page 86 43. Tighten clamp coupling screw with 1.1 Nm 44. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 86/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 87: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 87/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 88: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 88/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 89 Open end wrench 4.5 mm SENSOR and INTERFACE connectors. Lift the panel carefully. Disconnect fan cable from board. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 89/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 90 12. Tighten female screw locks from POWER, SENSOR and INTERFACE connectors with Open end wrench 4.5 mm 1.1 Nm (see step 1). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 90/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 91: Drawing

    Body with mechanism Lever complete Body complete Adapter flange, rod with bearing Plate Rotary feedtrough seals Plate o-ring VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 91/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 92: Spare Parts

    Option board with PFO module 378002 (power failure option) Option board 376837 with SPS and PFO module VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 92/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 93: Valve Unit

    (FKM (e.g. N-5100-204 Viton®)) Plate o-ring (FKM (e.g. Viton®)) 365576 Vacuum grease 206792 (2ml), 206793 (5ml) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 93/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 94: Accessories

    61532 - ..Centering ring Aluminum 31032-KAZV with Viton o-ring (for ISO-KF and ISO-F installation Stainless steel 31032-KEZV only) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 94/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

  • Page 95: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the...
  • Page 96 Installation, Operating & Maintenance Instructions Series 615 DN 40 (I.D. 1.5”), RS485 This Page Intentionally Left Blank VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289111EB 96/96 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-02-05...

Table of Contents