Summary of Contents for Pfeiffer Vacuum Calibration system BASIC
- Page 1 OPERATING INSTRUCTIONS Translation of the original instructions CALIBRATION SYSTEM BASIC for calibration of vacuum gauges...
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Page 2: Table Of Contents
Table of contents Table of contents About this manual ..........3 1.1 Validity. -
Page 3: About This Manual
About this manual Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development. -
Page 4: References For Standards And Guidelines
About this manual NOTICE Command or note Command to perform an action or information about properties, the disregarding of which may result in damage to the product. Pictographs Prohibition of an action to avoid any risk of accidents, the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment... -
Page 5: Liability And Warranty
About this manual Liability and warranty Pfeiffer Vacuum takes no responsibility or warranty if the user or third parties: ● disregard this document, ● use the product improperly, ● does any kind of modifications on the product (conversions, changes, etc.), which are not documented in the corresponding product documentations, ●... -
Page 6: Safety
Operation of acces- sories Installation and Operation of Accessories Pfeiffer Vacuum pumps can be equipped with various adapted accessories. Installation, operation and maintenance of connected devices are described in detail in the operat- ing instructions of the single devices. Refer to chapter "Accessories" (turbo pumping station HiCube 80 Eco) for informa- tion about order numbers of components. - Page 7 Safe operation after installation is the responsibility of the operator. Do not independently modify or change the pump and electrical equipment. Make sure that the system is integrated in an emergency off safety circuit. Consult Pfeiffer Vacuum for special requirements.
- Page 8 > 500 hPa (relative pressure). Install a safety valve to the vacuum chamber. Contact Pfeiffer Vacuum for selecting an appropriate safety valve. NOTICE Damage to vacuum gauges by venting Some vacuum gauges must be switched off before venting them to atmospheric pres- sure to prevent damage.
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Page 9: Protective Equipment
Safety NOTICE Damage by excessive pressure in the vacuum chamber Excessive pressure in the vacuum chamber can cause damage to connected compo- nents and vacuum gauges. Do not vent the vacuum chamber in excess of atmospheric pressure. Connect a safety valve to the vacuum chamber. NOTICE Risk of excessive inlet pressure at the turbo pump The turbo pump can be damaged by a high rate of pressure rise during venting. -
Page 10: Proper Use
Safety DANGER Danger to health by hazardous substances during maintenance or installation Depending on the process vacuum pumps, components or operating fluids can be con- taminated by toxic, reactive or radioactive substances. Wear adequate protective equipment during maintenance and repairs or in case of reinstallation. -
Page 11: Requirements For The Operator
– International, national und local valid standards and directives – Additional regulations related to the unit itself Only use original parts or parts which have been approved by Pfeiffer Vacuum. Keep these operating instructions available at the place of installation. -
Page 12: Transport And Storage
Transport and storage Transport and storage Transport WARNING Danger from falling parts If you transport the unit by hand, parts can fall or slip and can thus cause danger. Always transport the unit with 2 persons two-handed. Wear safety shoes with toe protection according to EN 347. NOTICE Damage due to transport The unit can be damaged during transport in an unsuitable packing. -
Page 13: Product Description
Product description Product description Product identification To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available. D-35614 Asslar HiPace 300 Oil: Mod.: 260 l/s DN 100 ISO-K, 3P 60000 1/min, 1000 Hz... -
Page 14: Structure
Product description Structure Controls and compo- nents 1 - Flange connections for vacuum gauges 8 - Master switch * 2 - GAV (EVN 116) 9 - Display control unit (DCU 002) * 3 - Pirani/Cold cathode transmitter (PKR 361) 10 - Power supply pack (TPS 110) * 4 - Butterfly valve 11 - Backing pump (MVP 015-2) * 5 - Electronic drive unit (TC 110) *... -
Page 15: Range Of Application
Product description The calibration system consists of a turbo pumping station HiCube 80 Eco as main com- Description ponent and a mounted vacuum chamber (14) on top, which is attached by the support (13) on the butterfly valve (4) and the turbo pump (6) respectively on the housing (7). The calibration system can be switched on and off with the master switch (8). -
Page 16: Installation
Installation Installation The instructions of the operating instructions of the turbo pumping station HiCube 80 Eco are applicable. -
Page 17: Operation
You must do a careful consideration of the required accuracy of the UUC in order to choose the appropriate reference gauge. In general, capacitance diaphragm gauges (Pfeiffer Vacuum ActiveLine types CMR, CCR) offer the highest accuracy as long as you use these gauges in the pressure decade below full scale. -
Page 18: Requirements For A Calibration
Operation Requirements for a calibration Before you can start a calibration, you must fulfil the the following 5 requirements: Base pressure < calibration pressure For a calibration according to ISO 3567 the base pressure p of the calibration system must be lower than the lowest calibration pressure p The following applies: p is lower than p divided by 10 (p... -
Page 19: Preparation Of The Calibration System
Operation Preparation of the calibration system Before you can connect vacuum gauges, the calibration system must be switched off, Connection / ex- this means: change of vacuum gauges ● The calibration system is in starting position (see p. 24, chap. 6.7) Proceed as follows to connect vacuum gauges: ... -
Page 20: Starting The Calibration System
Starting the calibration system Parameter set and Pfeiffer Vacuum display control unit Pfeiffer Vacuum display control units DCU show the basic parameter set by default. Fur- thermore the DCU contains parameters, which are not positioned in the electronic drive unit. -
Page 21: Zero Adjustment
Prior to a calibration you must perform a zero adjustment <ZERO> of all UUC and the reference gauge(s). After the zero adjustment of a UUC with analog output (e.g. Pfeiffer Vacuum ActiveLine gauges), you must also adjust the zero of the used display and control unit (offset cor- rection).And Offset Correction -
Page 22: Calibration Of Vacuum Gauges
Pressure range > 0,1 hPa: do the static direct comparison. Pressure range Method Reference gauge (recommended) < 0,1 hPa dynamic CMR 375 direct comparison Capacitance gauge (Pfeiffer Vacuum ActiveLine) (Pressure range from 10 to 10 hPa) > 0,1 hPa static CMR 363... - Page 23 Operation Read the pressure values of the UUC and the reference gauge as soon as the pres- sure has stabilized. – For best results: Read the values of the UUC and the reference gauge simultane- ously. For UUC with logarithmic output characteristics (e.g. Pirani, hot and cold cathode gauges): –...
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Page 24: Switching Off The Calibration System
Contact Pfeiffer Vacuum for selecting an appropriate safety valve. Parameter set and Pfeiffer Vacuum display control unit Pfeiffer Vacuum display control units DCU show the basic parameter set by default. Fur- thermore the DCU contains parameters, which are not positioned in the electronic drive unit. -
Page 25: Interpretation Of The Data
It is helpful to create a spreadsheet to display the measured pressure data and the cal- culated deviations automatically in a diagram. An example for a calibration report: Calibration report Calibration report Calibration System Basic Unit under calibration Test equipment: Ambient temperature (°C): Type: ActiveLine CMR363 Art.No.:... - Page 26 Operation...
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Page 27: Maintenance / Replacement
Maintenance / replacement Maintenance / replacement Replacement of the turbo pump You must remove and reinstall the vacuum chamber in order to replace the turbo pump. Proceed as follows: Loosen the four screws on the collar flange (1) on the inlet flange of the turbo pump (2). -
Page 28: Decommissioning
Decommissioning Decommissioning The instructions of the operating instructions of the turbo pumping station HiCube 80 Eco are applicable. Malfunctions The instructions of the operating instructions of the turbo pumping station HiCube 80 Eco are applicable. -
Page 29: Service
Für eine schnelle und reibungslose Abwicklung sind folgende Schritte notwendig: Download the forms "Service Request" and "Declaration on Contamination". Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum service address. -
Page 30: Technical Data And Dimensions
Technical data and dimensions 11 Technical data and dimensions 11.1 General Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps: ● Recommendations of PNEUROP committee PN5 ● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum- pump performance - General description"... -
Page 31: Dimensions
Technical data and dimensions Parameter Calibration system BASIC Calibration system BASIC Calibration system BASIC Voltage range 115 V, 50/60 Hz / 230 V, 50/60 115 V, 50/60 Hz / 230 V, 50/60 115 V, 50/60 Hz / 230 V, 50/60... -
Page 32: Appendix
Appendix 12 Appendix 12.1 Examples for measurement accuracies Examples for measurement accuracies with three different capacitance gauges CMR 36x respectively CMR 37x as reference gauges (upper range values 1000 hPa, 10 hPa and 0,1 hPa). CMR 361 CMR 362 CMR 363 CMR 364 CMR 365 Combination... -
Page 33: Declaration Of Conformity
● Machinery 2006/42/EC (Annex II, no. 1 A) ● Electromagnetic Compatibility 2014/30/EU The agent responsible for compiling the technical documentation is Mr. Andreas Würz, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. Calibration system BASIC Harmonised standards and national standards and specifications which have been ap-... - Page 34 VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio.
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