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Related Manuals for HST WFS-1545
Summary of Contents for HST WFS-1545
- Page 1 WFS 1545 Operations Manual ORIGINAL INSTRUCTIONS Installation and Operation Water Filtration System WFS – 1545 WFS-1545 6F Serial Number: _________ HST Spindles, LLC. 1357 Route 3A Bow, NH 03304 USA www.highspeedtechnologies.com...
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Page 2: Table Of Contents
WFS 1545 Operations Manual TABLE OF CONTENTS Nomenclature Page 3 Images and Illustrations Page 3 Application Page 3 SECTION I OVERVIEW 1. Overview Page 4 2. Specifications Page 6 3. Setup and Requirements Page 7 4. Components Page 14 a. Pumps Page 14 b. -
Page 3: Nomenclature
WFS 1545 Operations Manual Nomenclature NOTE: This message highlights a feature, function or procedure that may be helpful. CAUTION: This message warns of a condition that may have unintended negative action or consequences. It indicates a need for heightened diligence. WARNING: This message warns of a condition or procedure that has potential for physical injury or death. -
Page 4: Overview
WFS 1545 Operations Manual SECTION I OVERVIEW... - Page 5 WFS 1545 Operations Manual 1. OVERVIEW The WFS 1545 standard filtration system and the WFS 1545 6F variant were specifically engineered to provide clean, temperature-controlled water for wafer dicing and similar processes. The system permits re-use of the process water used for dicing or grinding semiconductor wafers. Although specifically designed for the semiconductor industry the unit can be applied to any process that requires refrigerated, and filtered water.
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Page 6: Specifications
WFS 1545 Operations Manual b. INTERNAL RECIRCULATING LOOP This loop constantly recirculates process water returned from the lift station through filters and cooling c. LIFT STATION The lift station returns contaminated water from the dicing process to the WFS. 2. SPECIFICATIONS a. -
Page 7: Setup And Requirements
WFS 1545 Operations Manual c. LIFT STATION d. RESERVOIR The reservoir is made from polypropylene and divided into two chambers that are referred to as the Dirty Side and the Clean Side. Water continuously circulates from the Dirty Side through a cascade of three filters and a chiller unit and then back to the Clean Side of the reservoir. - Page 8 WFS 1545 Operations Manual FIGURE 2 NOTE: If necessary this side of the WFS can go against a wall and filters accessed from the front. b. UNCRATING NOTE: Inspect “Tip and Tell” and shock indicators mounted on the outside of the crates for indication of mishandling and potential damage during shipment.
- Page 9 WFS 1545 Operations Manual FIGURE 3 c. ELECTRICAL POWER REQUIREMENTS WFS 1545 requires the following: 3 phase 30 amp circuit 230 VAC 50 hz or 220 VAC 60 hz The Lift Station requires the following: 115 VAC 50/60 hz 7.5 Amps See manufactures design data in appendix d.
- Page 10 WFS 1545 Operations Manual Before verifying that the platform is level, insure all four of the leveling legs are firmly on the floor. If any leg is not touching the floor, adjust by loosening the leveler lock nut and winding this ½ - 13 nut in a clockwise direction.
- Page 11 WFS 1545 Operations Manual The installation requires lifting the chiller unit and placing it on the drip pan such that the two (2) unions line up with the mating parts on the base unit. See Figure 5. Check to make sure that the O- ring for each union is in place.
- Page 12 WFS 1545 Operations Manual WARNING: The control panel is heavy and awkward. Use proper equipment and caution when lifting. Remove the bolts from the top two spring nuts. Loosen the bolts on the bottom spring nuts about 5/16”. Do not remove them. The bottom spring nuts should be 14”...
- Page 13 WFS 1545 Operations Manual The power wires attach to the three lugs provided on the top of the distribution bus bar. The ground wire must be attached to the grounding terminal to the left of the bus bar. See Figure 8. NOTE: Leave enough wire in the event that two legs need to be switched.
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Page 14: Components
WFS 1545 Operations Manual The unit has a small integral reservoir with a float switch. The Lift Station pump turns on when the reservoir level triggers the float switch. It is normal for the lift station to cycle on and off during normal operation. -
Page 15: Filtration
WFS 1545 Operations Manual Process Pump Nominal Performance USA ONLY Gould 3HM07N11T6PBQE 1.5hp • 15gpm • 75 psi max.) • EU ONLY Gould 3HM10N151T6PBQE 2.0 HP • 15gpm • 75 psi • NOTE: See link to Manufacturer’s Information in appendix b. -
Page 16: Temperature Controllers
WFS 1545 Operations Manual uses a Tecumseh AWA45203XNXC condensing unit with a custom made evaporator. It requires 208 -220 VAC 50-60 hz electrical power. The evaporator uses custom made titanium coils enclosed in schedule 80 PVC housing. The wetted surfaces are PVC and titanium making the heat exchangers impervious to the effects of DI water. NOTE: The condensing section of unit should be periodically cleaned. - Page 17 WFS 1545 Operations Manual WARNING! Accidental contact with electrically live components can cause serious injury or death. • Always disconnect electrical power from source and lock out/tag out when working inside • the Control Panel Only trained and qualified personnel may open the Control Panel •...
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Page 18: Optional Instrumentation And Alarms
WFS 1545 Operations Manual With the power on and the E-Stop button pulled out the blue Control Power indicating light will illuminate when the Reset push button is depressed. The pumps and chillers can now be started. v. Pump 1 Start / Stop Push Buttons These buttons start and stop the Internal Recirculating Pump vi. - Page 19 WFS 1545 Operations Manual ii. Circulating Pressure This panel meter (PM-2) displays the pressure at the circulating pump. The sensor is mounted in a tee just after the pump output. It measures the accumulative back pressure for all three recirculating filters. It is set to trigger an alarm if the pressure exceeds 70 PSI and may indicate a need to replace filter cartridges.
- Page 20 WFS 1545 Operations Manual This type of alarm indicate that some corrective action may need to be taken. But there is not imminent likelihood of damage. Illuminates the beacon • Illuminates the panel mounted alarm indicating light. • Sounds the audible alarm tone •...
- Page 21 WFS 1545 Operations Manual The Alarm Silence mode will clear after 60 seconds the tone will sound. The Alarm Silence can be selected unlimited number of times. ii. F3 MSG (Message) Pressing F3 will call up the Message Page. This page displays the alarm status and indicates which fault or faults triggered the alarm.
- Page 22 WFS 1545 Operations Manual iii. F5 OVR (Alarm Override) Pressing the F5 Button will call up the Alarm Override screen. Touching the ALARM OVERRIDE button permits the pumps and chiller to operate with a Class 1 alarm condition. It also toggles the image to CANCEL ALARM OVERRIDE. Alarm Override prevents nuisance tripping during start up when the reservoirs may get low prior to completely filling the system and reaching water flow equilibrium.
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Page 23: Section Ii Commisioning
WFS 1545 Operations Manual SECTION II COMMISSIONING COMMISSIONING Commissioning the system after all of the proper connections and set-up have been completed consists primarily of filling the system including all plumbing lines and filter housings with water and bleeding air from the filter housings. -
Page 24: Recirculating Circuit
WFS 1545 Operations Manual 3. RECIRCULATING CIRUIT Filling the Internal Recirculating Circuit involves filling the reservoir to the proper level in both chambers. It also includes filling and bleeding air out of three filter housings. As the filter housings get filled the reservoir level will go down below the safe to run limit (Red Line). Pump # 1 must be stopped while the reservoir refills to the nominal operating level (Blue Line) Close all of the air bleed valves on top of the filter housings. -
Page 25: Process Supply Circuit
WFS 1545 Operations Manual VIII. Repeat process until the water level in the clean side begins to cascade over the internal weir. The make-up valve will be able to compensate for any minor losses due to leakage or evaporation. With Pump one running and water cascading from the Clean Side over the weir to the Dirty Side carefully open up the air-bleed valves one at a time starting at the filter housing closest to the reservoir. -
Page 26: Starting The Chiller
WFS 1545 Operations Manual X. Stop the pump if the water drops to 5 inches (130 mm) from the bottom. Allow reservoir chamber to re- fill. Do not re-start the pump until reservoir reaches the fill line. XI. With pump # 1 running start pump # 2. Stop both pumps if the water drops to 5 inches (130 mm) from the bottom of the reservoir in either chamber. -
Page 27: Pressure Regulating Valve
WFS 1545 Operations Manual 7. PRESSURE REGULATING VALVE This limits the down-stream pressure to the equipment. It is nominally set at 45 PSI. This can be field adjusted if required. Turn knob clockwise to increase pressure and counter-clockwise to decrease pressure. -
Page 28: Shut Down
WFS 1545 Operations Manual Side may overflow into the Clean Side when the system is shut down. Allow Pump 1 to run for 3-5 minutes to assure that the water in the Clean Side is properly filtered. b. Start Pump 2 This will start the Process Cooling loop. - Page 29 WFS 1545 Operations Manual BYPASS VALVE With the Bypass valve fully open the reading on process gauges do not include pressure increases caused by the overall system. This provides a more accurate reading of the increase caused by the filter pressure.
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Page 30: Troubleshooting
WFS 1545 Operations Manual TROUBLESHOOTING PROBLEM POTENTIAL CAUSE Pumps and Chiller will not operate E-Stop Button in depressed detent Reset Push Button not depressed Leak Sensing Strip is wet Facility Power is off Circuit Breaker is off Chiller will not start Chiller Circuit Breaker is off Chiller Freon is low Chiller cycles rapidly... -
Page 31: Design Data Links
WFS 1545 Operations Manual DESIGN DATA PRODUCT LINK https://s3.amazonaws.com/pumpproducts/pdf/547800_5_Goulds+e- Gould HM Pumps HM+Multistage+Pump+Technical+Brochure.pdf http://www.fsifilters.com/assets/files/literature/x100-convertible-filter- FSI X 1000 Filter Housings housing.pdf Tecumseh https://www.tecumseh.com/globalassets/media/north-america/files/marketing- AWA4520EXNXC brochures/tc-013-idcu-catalog-rev-2-030615.pdf Condensing Unit Liberty 405 Sump Pump https://www.libertypumps.com/Portals/0/Files/Install%20Manuals/7212000.pdf Hudson Float Valve http://hudsonvalve.com/products/ http://ashcroft.com/drawingsandmodels_pdf/upload/drawing-industrial-gauge- Ashcroft Pressure Gauge 10-100s-02l.pdf RANCO ETC-111000 http://www.rancoetc.com/ranco-etc-111000-000-digital-temperature-controller 24 VDC power supply...
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