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CRX-EM-HF Probe Station Instructions
Introduction
The Lake Shore Model CRX-EM-HF probe station combines the magnetic field capability of the Model EMPX-HF
probe station with the cryogen free capability of the model CRX-4K. The CRX-EM-HF is for non-destructive testing
of devices on full and partial wafers up to 25mm (1 in) in diameter. Based on a two-stage Gifford McMahon closed
cycle refrigerator (CCR), the CRX-EM-HF provides up to a ±0.6 T magnetic field over a temperature range of <8 K to
400 K standard or <20 K to 500 K with optional PS-HTA-EM high temperature stage.
Figure 1: CRX-EM-HF probe station
Rev 1.1
P/N 119-510
March 24, 2014
Lake Shore Cryotronics, Inc. 575 McCorkle Blvd Westerville, Ohio 43082
Tel: (614) 891-2244 Fax: (614) 818-1600 e-mail: info@lakeshore.com
www.lakeshore.com
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Table of Contents
Summary of Contents for Lakeshore CRX-EM-HF
- Page 1 25mm (1 in) in diameter. Based on a two-stage Gifford McMahon closed cycle refrigerator (CCR), the CRX-EM-HF provides up to a ±0.6 T magnetic field over a temperature range of <8 K to 400 K standard or <20 K to 500 K with optional PS-HTA-EM high temperature stage.
- Page 2 Outline The user’s manual for the new Lake Shore Model CRX-EM-HF probe station is not yet complete; however, the standard CRX-4K and EMPX-HF user manuals have been included with your CRX-EM-HF probe station. This document summarizes operation of the CRX-EM-HF and will be the guide for how to reference the CRX-4K and EMPX-HF manuals.
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Page 3: Specifications
Field capability: ±0.6 T Field orientation: Horizontal (parallel to the sample plane) Load lock: Not an option High Vacuum: Not an option Lake Shore Cryotronics, Inc. 575 McCorkle Blvd Westerville, Ohio 43082 Tel: (614) 891-2244 Fax: (614) 818-1600 e-mail: info@lakeshore.com www.lakeshore.com... -
Page 4: System Overview
2 of the EMPX-HF manual for general information about the electromagnet and for additional sample holders or probe options: the components used in the CRX-EM-HF sample space must be non-magnetic. Figure 2 shows the control elements of the CRX-EM-HF probe station. -
Page 5: Installation And Setup
Re-configuring the Sample Stage: Optional 360° Rotation Stage (PS-360-EMPX) The CRX-EM-HF comes standard with the sample stage fixed adapter, or it can be configured with the sample stage rotation option. The configuration is determined by the type of sample stage adapter that is attached to the sample stage. - Page 6 1. Remove the vacuum chamber lid, radiation shield lid, and any installed probes. Fully retract any probe arms (Figure 3). Figure 3: CRX-EM-HF with rotation stage (vacuum chamber lid and radiation shield lid removed) 2. Using a 3 mm hex driver, loosen the four M4 rotation adapter captive screws.
- Page 7 Refer to section 3.7.2 of the CRX-4K manual for temperature sensor and heater verification testing instructions for the CRX-EM-HF; however, use the information in Table 4 and Table 5 of this document instead of the controller settings listed in the CRX-4K manual. Refer to section 3.8.3 of the EMPX-HF manual for electromagnet verification testing instructions for the CRX-EM-HF.
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Page 8: Basic Operation
Operating the Sample Stage from 350 K to 400 K To operate the CRX-EM-HF from 350 K to 400 K, use Chapter 4 of the EMPX-HF manual as a guide to remove the probe holder thermal anchors from the sample stage. The thermal anchors can be left loose in the probe station or tied to the probe arm using simple string or unwaxed dental floss. - Page 9 To return the probe station to room temperature, follow the procedure in section 4.5.4 of the CRX-4K manual. Temperature Control Summary The temperature controller configuration tables (Table 4 and Table 5) and the CCR and electronic control settings tables (Table 6 and Table 7) summarize the typical settings needed to maintain CRX-EM-HF temperature control. Temperature Temperature...
- Page 10 90% at 400 K Heater Range High Proportional (P) Integral (I) Derivative (D) Table 7: Electronic control settings for the sample stage temperature operation Lake Shore Cryotronics, Inc. 575 McCorkle Blvd Westerville, Ohio 43082 Tel: (614) 891-2244 Fax: (614) 818-1600 e-mail: info@lakeshore.com www.lakeshore.com...
- Page 11 The electromagnet coils in the CRX-EM-HF are identical to the EMPX-HF. A redesigned pole and vacuum chamber configuration allows the CRX-EM-HF to achieve ±0.6 T maximum field compared to the ±0.55 T maximum field of the EMPX-HF probe station. Refer to section 4.6 of the EMPX-HF manual for magnet operating instructions.
- Page 12 1 full revolution. Clockwise rotation of the control knob corresponds to counter-clockwise rotation of the stage. The patterning on the CRX-EM-HF sample holder can be used to index the degree of rotation with the number of control knob turns. The rotation stage has small notches at 90° increments that can be used to gauge the rotation.
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Page 13: Advanced Operation
The HT sample stage has a platinum sensor embedded in the top sample plate that is calibrated from 14 K up to 500 K for rated temperature operation in the CRX-EM-HF. The HT sample stage has two 50 W heaters (100 W total) that are arranged in parallel;... - Page 14 Re-configuring the Sample Stage The CRX-EM-HF optional HT stage uses a fixed stage adapter that is compatible with only the HT stage. The HT stage adapter is required to set the top of the HT sample stage to the correct height for magnetic field operation in the CRX-EM-HF.
- Page 15 3. Remove the HT stage plug from the socket. 4. Using the 2.5 mm hex driver, remove the four M3 screws that attach the HT stage to the CRX-EM-HF sample stage. Be careful not to drop them into the chamber.
- Page 16 Depending on the measurement configuration, when the CCR second stage is not being actively controlled as instructed above, the CRX-EM-HF may cool the top of the sample stage to below 14 K, which is the lowest point on the platinum sensor calibration curve. If this occurs, Input D on the top Model 336 temperature controller will read TUNDR;...
- Page 17 This can result in permanent damage to the CRX-EM-HF probe station. Probe arms that are engaged for probing over the HT sample stage will be subject to radiation and may be warmed to a temperature exceeding their temperature maximum.
- Page 18 HIGH (50 W) Nominal power — — — — 100% Table 9: General CCR and electronic control settings with High Temperature Stage Lake Shore Cryotronics, Inc. 575 McCorkle Blvd Westerville, Ohio 43082 Tel: (614) 891-2244 Fax: (614) 818-1600 e-mail: info@lakeshore.com www.lakeshore.com...
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Page 19: Maintenance And Troubleshooting
Provide a detailed description of the problem and the required contact information. You will receive a response within 24 hours, or the next business day in the event of weekends or holidays.