Brewer Science Cee 200X Operator User Manual

Brewer Science Cee 200X Operator User Manual

Precision spin coater

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®
Brewer Science
®
Cee
200X
Precision Spin Coater
Operator/User Manual
New users: Read this manual in its entirety before operating the equipment.
Version 10-2012-A
© 2012 Brewer Science, Inc.
1

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Table of Contents
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Summary of Contents for Brewer Science Cee 200X

  • Page 1 ® Brewer Science ® 200X Precision Spin Coater Operator/User Manual New users: Read this manual in its entirety before operating the equipment. Version 10-2012-A © 2012 Brewer Science, Inc.
  • Page 2: Table Of Contents

    Contents 1. Products Covered in This Manual ..........2. Confidentiality Statement, Warranty, and Instructions for Returning Materials ................2.1 Confidentiality Statement..................4 2.2 Warranty ......................4 2.3 Instructions for Returning Materials ..............5 ® 3. Introduction to the Cee 200X Precision Spin Coater ..
  • Page 3 5.3 Edit Screen ......................20 5.3.1 Spin Recipe Edit Screen................20 5.3.2 Writing a Spin Recipe ................22 5.3.3 Entering Data.................... 22 5.3.4 Recipe Management................. 24 5.3.5 Recipe Backup ..................25 5.3.6 Desktop Recipe Editing ................25 5.4 Diagnostics Screen....................26 5.4.1 Spin Diagnostics Screen................
  • Page 4: Products Covered In This Manual

    Brewer Science instructions and specifications. Buyer shall promptly notify Brewer Science of any claim against this warranty, and any item to be returned to Brewer Science shall be sent with transportation charges prepaid by Buyer, clearly marked with a Return Material Authorization (RMA) number obtained from Brewer Science Equipment Customer Support.
  • Page 5: Instructions For Returning Materials

    MERCHANTABILITY OF THE EQUIPMENT NOR ITS FITNESS FOR ANY PARTICULAR PURPOSE. In no event shall Brewer Science be liable for consequential loss or damages, however caused. No person or representative of Brewer Science is authorized to assume for Brewer Science any liability in connection with Equipment nor to make any change to this warranty unless such change or modification is put in writing and signed by an authorized representative of Brewer Science.
  • Page 6: Introduction To The Cee ® 200X Precision Spin Coater

    ® ® Fully programmable and user-friendly, the Brewer Science 200X precision spin coater features the accuracy and repeatability needed to eliminate processing variability from critical experiments. With its convenient, compact footprint, wide range of chemical compatibility, and durability, this easy-to-use benchtop system will provide years of ®...
  • Page 7: Reliability

    3.3 Reliability • Indirect drive system protects the spin motor from contact with process chemicals and solvents • Vacuum and lid interlock standard • Industry-leading reliability and uptime • 1-year full warranty on parts and labor • Free remote technical support (phone, email, fax) for the life of the product •...
  • Page 8: Spin Coater Overview

    Spin Coater Overview 4.1 Model and Revisions ® The model and serial number information for the Cee 200X spin coater is located on the rear panel near the power inlet. Software version information can be found on the main software screen. See section 5, Software, for screen shots and a detailed explanation of the system software.
  • Page 9: Mechanical

    4.3.3 Mechanical General Hazard Pinch Point Warning Notes: This machine uses compressed gases that can provide motive force to components and can expand violently upon decompression. Disconnect or clean dry air (CDA) before removing any panels. This machine has components capable of very-high-speed rotation. Ensure all lids and panels are in place before activating the rotational features.
  • Page 10: Lockout/Tagout Procedures And Information

    Flush tubing and valves with an appropriate solvent and drain system before servicing. When draining the waste tank, use appropriate containers and connection methods. Ensure proper ventilation/exhaust is used at all times. Always wear the proper personal protective equipment (PPE) for the job, including safety glasses, gloves, and other equipment as needed to protect from mechanical and chemical hazards.
  • Page 11: Environment

    200X spin coater should be operated in a clean, low-humidity environment. 4.4.3 Unpacking and Inspection Thoroughly check the equipment for shipping damage. If physical damage is seen, DO NOT APPLY POWER! Contact Brewer Science Equipment Customer Support immediately. The following items should be included with the shipment: ®...
  • Page 12: Software

    Software 5.1 Startup and Run Screen 5.1.1 Startup with Passwords Enabled ® If the Cee 200X unit has passwords enabled, the initial screen will be blank with login and logout buttons. To log in, press the Login button, shown in the figure above, to view the touch screen ®...
  • Page 13: Run Screen

    5.1.2 Run Screen If login is successful, or if passwords are not enabled, the following Run screen should appear: From this screen the user can go directly to the Spin Process screen by pressing the large button in the left-center of the screen. Navigating to other windows is also possible by using the navigation bar at the bottom of the screen.
  • Page 14: Spin Process Screen

    5.2 Spin Process Screen The Spin Process screen is used to run and monitor spin-coating processes using the ® 200X tool’s software. The controls and indicators found on the Spin Process screen are listed below: 1. Recipe Name: The name of the currently loaded recipe. 2.
  • Page 15 10. Exhaust indicator: Shows the current setting of the programmable exhaust. (Programmable exhaust is not available on all models.) 11. Dispense indicators: Show which dispenses are currently activated. 12. Iteration setting: Allows the currently selected process to run consecutively for the entered number of times without stopping.
  • Page 16: Running A Spin Process

    5.2.1 Running a Spin Process To run a spin process with a substrate, a recipe must first be loaded. Pressing the Load button will bring up the recipe selection screen (see below). To select a recipe, double- press on the desired recipe or select the desired recipe and press Enter.
  • Page 17: Centering A Substrate

    5.2.2 Centering a Substrate ® The Cee 200X tool has two methods of centering a substrate. The Centering Time parameter set on the User Spinner Configuration screen determines the method used. If the Centering Time (4) parameter is set to 0 seconds, pressing the Start Centering button will start the Spin Chuck spinning.
  • Page 18: Starting A Process

    5.2.3 Starting a Process Start Process Once the substrate is on the spin chuck at a desired position, pressing the Start Process (Process) button will begin the process. For the duration of the process, the lid must remained closed. 5.2.4 Aborting a Process After a process has started, pressing the Abort button will abort the process.
  • Page 19: Process Complete

    5.2.5 Process Complete ® When a process is complete, the Cee 200X tool will sound an alarm. Pressing the OK button will silence the alarm. The tool will then be ready to center another substrate. 5.2.6 Running Multiple Iterations For models capable of iterative processing (iterative processing is not available on all models), it is possible to run a process multiple times consecutively.
  • Page 20: Edit Screen

    5.3 Edit Screen From the Edit screen below, the user can navigate to the Spin Recipe Edit screen by pressing the large button in the left-center of the screen. 5.3.1 Spin Recipe Edit Screen ® The screen shown below allows spin recipes to be edited using the Cee 200X tool’s software.
  • Page 21 1. Recipe Name: The name of the currently loaded recipe. 2. Load button: Opens the dialog to load a recipe into the editor. 3. Save button: Opens the save dialog for saving the current recipe. 4. Delete button: Opens the delete dialog for deleting recipes. 5.
  • Page 22: Writing A Spin Recipe

    5.3.2 Writing a Spin Recipe The Spin Recipe Edit screen, shown below, is where spin-coating recipes are entered. 5.3.3 Entering Data By selecting the Velocity (5), Ramp (6), Time (7), Exhaust (9), or Oscillation (10) boxes, a numeric pad will appear. Using the numeric pad, the user can now enter the parameter for the selected step.
  • Page 23 window. Once the desired value is entered, pressing the ENTER key will close the numeric pad and return to the Spin Recipe Edit screen with the selected value updated. By clicking on the Dispenses box (8, shown above), a Dispense Select screen will appear.
  • Page 24: Recipe Management

    5.3.4 Recipe Management Recipes are managed by the Load (2), Save (3), and Delete (3) buttons. To load a saved recipe, press the Load button, which will bring up the Recipe Select Screen. The recipe can be loaded into the editor by pressing a recipe name and then pressing Enter, or by double-pressing a recipe name.
  • Page 25: Recipe Backup

    5.3.5 Recipe Backup ® Recipes are saved in comma separated value (.csv) format. The Cee 200X tool uses a ® Windows operating system. The thermal recipes are saved in the c:\Cee\Spin folder in ® the Windows file system. To back up recipes, copy recipe files to a storage device via the front USB port.
  • Page 26: Diagnostics Screen

    4. Exit button: Exits the Cee 200X tool software. ® 5. Serial Write section: Allows for hardware writes to the serial ports of the Cee 200X tool control system. This box is intended for use by Brewer Science personnel only.
  • Page 27: Spin Diagnostics Screen

    5.4.1 Spin Diagnostics Screen The Spin Diagnostics screen allows manual operation of most of the hardware on the ® 200X tool. The controls and indicators found on the Spin Diagnostics screen are listed below: 1. Spin speed (velocity) display: Displays the current spin chuck speed (velocity). 2.
  • Page 28 12. Exhaust Position: Pressing in this box brings up a numeric pad for entry of a desired exhaust position. (Exhaust is not available on all models.) 13. Exhaust Set button: Sets exhaust to the entered position. (Exhaust is not available on all models.) 14.
  • Page 29: User Configuration Screen

    5.5 User Configuration Screen ® The User Configuration screen allows the user to set parameters for the Cee 200X tool operation. Not all parameters are available to all user levels. Spin Configuration The controls and indicators found on the User Configuration screen are listed below: 1.
  • Page 30: User Spinner Configuration Screen

    5.5.1 User Spinner Configuration Screen The User Spinner Configuration Screen allows the user to set parameters for the ® 200X tool’s spin module operation. Not all parameters are available to all user levels. The controls and indicators found on the User Spinner Configuration screen are listed below: 1.
  • Page 31: Naming Dispenses On The User Spinner Configuration Screen

    7. Revert button: If changes made to the settings on this screen are not desired, pressing this button will revert back to saved settings. 8. Save button: Pressing this button will save all parameters on the screen. 5.5.2 Naming Dispenses on the User Spinner Configuration Screen The dispenses may be named to reflect the material in each dispense.
  • Page 32: Password Configuration Screen

    5.5.4 Password Configuration Screen The Password Configuration screen allows the user to change passwords. ® The default passwords for the Cee 200X tool are: Super User Level: CEE User Level: 200X Maintenance: DIAG To change a password, press the New Password box for the desired user level, and an on-screen keyboard will appear which allows the user to enter a new password.
  • Page 33: User Level Access

    New Password box. To save, press Update. If the entries in the New Password box and the Confirm New Password box match, the new password will be stored. 5.5.5 User Level Access The level of access given to each different user level is: Super User Level: Everything User Level: Run screen Maintenance: Run screen, Diagnostics screen, Configuration screen...
  • Page 34: Navigation Bar

    5.6 Navigation Bar ® The navigation bar enables quick navigation of the Cee 200X tool’s software. The currently selected page is highlighted in white. The buttons on the navigation bar are listed below: Run button: Navigates to the Run screen, which is where processes are run and ®...
  • Page 35: Live Update Feature

    5.7 LIVE Update Feature The LIVE Update feature of the X model software allows the user to update a recipe while it is running. The LIVE Update feature is not available on all models. The LIVE Update button appears once a process has started. Pressing the button will bring up a special Spin Recipe Editor page.
  • Page 36: Limitations Of Live Update

    Some buttons have different functions in LIVE Update mode: Update button: This button loads the recipe currently in the editor into the spinner module but does not save it to the hard drive. Update and Save button: This button loads the recipe currently in the editor to the spinner module and saves it to the hard drive.
  • Page 37: Service And Maintenance

    Service and Maintenance 6.1 Maintaining the Vacuum Liquid Trap ® The Cee 200X tool is relatively maintenance free. The only component that requires regular attention is the vacuum liquid trap. Its purpose is to trap any liquids that go down the spindle vacuum hole and prevent them from contaminating downstream components.
  • Page 38: Troubleshooting Chart

    appropriate Lockout/Tagout procedures. 4. Shut off the vacuum supply at the facility’s supply port. 5. Hold the existing spin chuck in one hand and remove the #8 FHCS vented spin chuck screw in the center of the spin chuck using a hex wrench.

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