Table of Contents
Advertisement
Quick Links
Iwaki
Pneumatic Drive Bellows Pump
FS series
Instruction manual
Thank you for choosing our product.
Please read through this instruction manual before use.
This instruction manual describes important precautions and instruc-
tions for the product. Always keep it on hand for quick reference.
©2011 IWAKI CO., LTD.
Advertisement
Table of Contents
Subscribe to Our Youtube Channel
Summary of Contents for IWAKI PUMPS FS Series
- Page 1 Iwaki Pneumatic Drive Bellows Pump FS series Instruction manual Thank you for choosing our product. Please read through this instruction manual before use. This instruction manual describes important precautions and instruc- tions for the product. Always keep it on hand for quick reference.
-
Page 2: Order Confirmation
Order confirmation Open the package and check that the product conforms to your order. If any problem or inconsistency is found, immediately contact your distributor. a. Check if the delivery is correct. Check the nameplate to see if the information such as model codes are as ordered. * Electrical wiring changes with the controllers. -
Page 3: Table Of Contents
Contents Order confirmation ............................2 Safety instructions ..............5 Warning ................................6 Caution ................................7 Precautions for use ............................9 Overview ...................10 Introduction ..............................10 Pump structure & Operating principle ...................... 10 Part names ..............................11 Pump ................................ 11 Operating conditions ..........................12 Pump stroke ............................. - Page 4 Air line piping .............................. 21 Supply air port I.D..........................21 Air line piping diagram ..........................22 Composite effective cross-sectional area ....................24 Effective cross-sectional area ......................24 Preventive measures against condensation ..................24 Electric wiring ............................. 25 Installation ..............................25 Lead wires ............................
-
Page 5: Safety Instructions
Safety instructions Read through this section before use. This section describes important information for you to prevent personal injury or property damage. ■ Symbols In this instruction manual, the degree of risk caused by incorrect use is noted with the follow- ing symbols. -
Page 6: Warning
WARNING Turn off power before work Risk of electrical shock. Be sure to turn off power to stop the pump and related devices before service is performed. Let other people know about the situation by displaying a notice such as "POWER OFF (Maintenance)" Requirement near the power switch. -
Page 7: Caution
CAUTION Qualified personnel only The pump should be handled or operated by qualified personnel with a full understanding of the pump. Any person not familiar with the product Requirement should not take part in the operation or maintenance of the pump. Use specified power only Do not apply any power other than that specified on the nameplate. - Page 8 CAUTION Wear part replacement Follow instructions in this manual for wear part replacement. Do not dis- mantle the pump beyond the extent of the instructions. Requirement Before returning product Be sure to drain chemicals and clean the inside of the pump before return so that a harmful chemical does not spill out in transit.
-
Page 9: Precautions For Use
Precautions for use • During transit: –Do not hit/wet the package. –Do not place the package lateral/up side down. – Keep the package dry. Caution – Do not stack the package on top of another. • Electrical work should be performed by a qualified electrician. Otherwise, personal injury or property damage could result. -
Page 10: Overview
Introduction Pump structure & Operating principle An Iwaki FS series pneumatic drive bellows pump has fluoric wet ends and is designed for semiconductor manufacturing processes. Principle of operation The pump unit has two air chambers and a pair of bellows. The reciprocating motion of the bellows in the air chambers introduces/delivers solution. -
Page 11: Part Names
Part names Pump IN label OUT label Outlet Handle Spec label Proximity switch and leak sensor wires. Connect them to the controller. Supply air port Base Base to anchor the pump *Do not clean the pump or spec label with a solvent such as benzine or thinner. *Two or more personnel must be required to lift and move this pump. -
Page 12: Operating Conditions
Operating conditions Pump stroke Observe the maximum stroke rate of each pump, or the pump can take in a large amount of air, resulting dry running. * Use the FDC-1 controller and set the maximum allowable speed. Supply air pressure range Observe the allowable supply air pressure range at each liquid temperature below. -
Page 13: Operation And Stoppage
Operation and Stoppage ■ During operation Make sure a suction and a discharge line are fully opened. ■ When stopping the pump • Before stopping the pump, release discharge line pressure. Otherwise, the bellows may deform. • Do not close a discharge valve as stopping the pump, or an impact pressure may deform the bellows or con- necting plate. -
Page 14: Identification Codes
Identification codes Each code represents the following information. FS - 15 H T 1 - 01 c d e a. Series name FS : Medium & High liquid temperature b. Maximum flow rate 15 : 15L/min 30 : 30L/min 60 : 55L/min c. -
Page 15: Installation
Installation This section describes the installation of the pump, piping and wiring. Read through this section before work. To operate this pump, a 5-port solenoid valve and FDC-1 controller is needed. Always install QEVs (quick exhaust valves) to secure system safety. - Page 16 Select a location Select a level location, free from vibration, that won't hold liquid. Anchor the pump so it doesn't vibrate. See page 9 as well. * Flooded suction application is recommended. * Observe the maximum suction lift (1m for the FS-15, 2m for the FS-30/-60) in suction lift application. Anchor the pump so it doesn't vibrate Position the pump upright with the outlet upward and inlet sideways.
-
Page 17: Liquid Line Piping
Liquid line piping The pump has different sizes of the inlet/outlet PFA tube at each model. See the table below. Use applicable tube fittings for the connection with your piping system. Piping Pump head tube Model PFA tube sizes FS-15 1/2"... -
Page 18: Suction Line
Suction line ■ Flooded suction Have the suction line wide and shortest in flooded suction application. In suction lift application, observe the maximum suction lift. * The suction lift differs with the liquid’s characteristics, temperature and suction line length. For detailed information, con- tact us. -
Page 19: Discharge Line
Discharge line ■ Pulsation reduction The pipe resistance increases as a discharge line becomes longer or the number of bends increases. In order to decrease pipe resistance, install a dampener and minimizes pulsation. * When sending a liquid up via a riser pipe, install a check valve as well as a dampener. ■... -
Page 20: Degassing
Degassing Gas bubbles are generated when a strong acid is fed into the reaction tank or liquid is transferred through a narrow tube. If such bubbles enter the bellows, the pump runs dry, increasing stroke rate or disturbing liquid transfer. Take a proper step for degassing. Plan A (Install a baffle to remove gas bubbles) In flooded suction application Bubbles go up. -
Page 21: Air Line Piping
Air line piping Points to be observed Observe the following points when building up a supply air line. • A fluctuation of supply air pressure affects the stroke rate and the flow rate. Install a regulator to maintain the supply air pressure constant. •... -
Page 22: Air Line Piping Diagram
Air line piping diagram The diagram below is a general layout of an air-line. Air source Pump Supply air valve Supply air port I.D. of the pump FS-15H/-30H Rc1/4" FS-60H Rc3/8" a. Regulator Select one regulator per pump in accordance with the maximum air consumption of the pump. * A supply air pressure should not drop 20kPa lower than the maximum rating of the regulator. - Page 23 d. Muffler Mufflers should be installed on the exhaust ports of the SV or QEV. Observe the effective cross-sectional area of the mufflers at each pump model. Model Effective cross-sectional area FS-15H/-30H 35mm or more FS-60H 60mm or more e. The air line between the SV and QEV The optimal air line I.D.
-
Page 24: Composite Effective Cross-Sectional Area
Composite effective cross-sectional area ■ Effective cross-sectional area 1. Pneumatic devices When air is sent through an air line, air cannot flow fully to the actual cross-sectional area due to piping resistance. In the field of pneumatic devices, the term “Effective cross-sectional area” is used to indicate actual air flow. -
Page 25: Electric Wiring
Electric wiring Two 5-port double solenoid valves and the FDC-1 controller is required. Points to be observed Observe the following points during wiring work. • Electrical work should be performed by a qualified electrician. Always observe applica- ble codes or regulations. •... -
Page 26: Wiring Diagram
Wiring diagram Turn off the FDC-1 controller before wiring is performed. See the instruction manual of the FDC-1 controller as necessary. Electric wiring... -
Page 27: Operation
Operation This section describes pump operation and programming. Run the pump after pipework and wiring are completed. Before operation Always check the following items before the first-time operation or resuming operation after a long period of stoppage. Check if electric wiring is made correctly. Check the wiring of proximity switches, leak sensors, solenoid valves, and electropneumatic regulators. -
Page 28: Pump Operation
Pump operation The start/stop of the pump is controlled by the FDC-1 controller in MANU mode or a user PLC in AUTO mode. The procedure below is the example of starting the pump by keypad operation with the FDC-1. Points to be observed Before operation in your system, conduct a trial run with pure water (or chemical liquid) to flush out particles or to measure metal ion level. -
Page 29: Flow Rate Adjustment
Flow rate adjustment Use the air valve to adjust the supply air pressure/flow rate and determine a liquid flow. Stoppage Points to be observed • Before stopping the pump, release the pressure from the discharge line. Otherwise, the bellows may deform. •... -
Page 30: Maintenance
Maintenance This section describes troubleshooting, inspection, specification and di- mensions. Points to be observed Observe the following points during maintenance work. • Observe instructions in this manual for maintenance, inspection, dismantlement and as- sembly. Do not dismantle the pump beyond the extent of the instructions. •... - Page 31 States Possible causes Points to be checked Solutions Rising discharge pressure ○ Filter for clogging ● Check or replace the filter as necessary. ○ If a filter is wet. ● Wet the filter. ○ Closed discharge line ● Open the discharge line. Supply air pressure or air ○...
- Page 32 States Possible causes Points to be checked Solutions Bellows rupture ○ Supply air pressure ● Check or replace the ○ Stroke rate pump head bellows unit ○ Liquid temperature as necessary* ○ If discharge line pressure Liquid leaks. is released as soon as the pump stops.
-
Page 33: Inspection
Inspection Perform daily and periodic inspection to keep pump performance and safety. Daily inspection Check for a leak or any other abnormality during operation. If you notice any abnormal conditions, stop opera- tion immediately and remove problems according to the "Troubleshooting" section. Replacement of wear parts is necessary at periodic intervals. -
Page 34: Wear Part List
Wear part list To run the pump for a long period, wear parts need to be replaced periodically or when pump performance has reduced. Contact your distributor with the following information for wear part replacement. 1. Part names and part number (See the "Part names" section on page 40 or later.) 2. -
Page 35: Specification/Outer Dimension
Specification/Outer dimension Specification Information in this section is subject to change without notice. ■ FS-15 H T 1 or 2 Items Spec Ambient temp/humidity 0-40°C (non-freezing) / 35-95%RH (non-condensing) Storage temp/humidity -10 - 60°C (non-freezing) / 35-95%RH (non-condensing) Operating Driving method Pneumatic drive conditions Liquid line connection I.D. -
Page 36: H T 1 Or 2
■ FS-30 H T 1 or 2 Items Spec Ambient temp/humidity 0-40°C (non-freezing) / 35-95%RH (non-condensing) Storage temp/humidity -10 - 60°C (non-freezing) / 35-95%RH (non-condensing) Operating Driving method Pneumatic drive conditions Liquid line connection I.D. PFA TUBE (I.D.16mm × O.D.19mm) Supply air line connection I.D. -
Page 37: Outer Dimension
Outer dimension ■ FS-15 H T 1 15.5 [0.61"] 2-Ø12.7×Ø9.52[1/2"] AIR SUP. 2×Rc1/4 213 [8.39"] 10 [0.39"] 10 [0.39"] 315 [12.40"] 96 [3.78"] (100)[3.94"] 120 [4.72"] ■ FF-15 H T 2 15.5 [0.61"] 2-Ø12.7×Ø9.52[1/2"] AIR SUP. 2×Rc1/4 213 [8.39"] 10 [0.39"] 10 [0.39"] 315 [12.40"] 96 [3.78"]... -
Page 38: H T 1
■ FS-30 H T 1 23 [0.91"] 2-Ø19×Ø16[3/4"] AIR SUP. 2×Rc1/4 272 [10.71"] 10 [0.39"] 10 [0.39"] 390 [15.35"] 115 [4.53"] (100)[3.94"] 151 [5.94"] ■ FS-30 H T 2 23 [0.91"] 2-Ø19×Ø16[3/4"] AIR SUP. 2×Rc1/4 272 [10.71"] 10 [0.39"] 10 [0.39"] 390 [15.35"] 115 [4.53"] (100)[3.94"]... -
Page 39: H T 1
■ FS-60 H T 1 27 [1.06"] 2-Ø25×Ø22[1"] AIR SUP. 2×Rc3/8 317 [12.48"] 12 [0.47"] 12 [0.47"] 441 [17.36"] 152 [5.98"] (100)[3.94"] 194 [7.64"] ■ FS-60 H T 2 27 [1.06"] 2-Ø25×Ø22[1"] AIR SUP. 2×Rc3/8 317 [12.48"] 12 [0.47"] 12 [0.47"] 441 [17.36"] 152 [5.98"] (100)[3.94"]... -
Page 40: Part Names
Part names ■ FS-15 H T 1 N: LEAK SENSOR Name Q'ty Material Remarks Name Q'ty Material Remarks 1 Pump head 1 PTFE 30 Proximity detector 2 Tube 2 PFA 31 Screw 4 STNLS STL M3×10 3 Bellows 2 PTFE 32 Installed base 2 SUS304 4 Suction valve case... -
Page 41: H T 2
■ FS-15 H T 2 N: LEAK SENSOR Name Q'ty Material Remarks Name Q'ty Material Remarks 1 Pump head 1 PTFE 30 Proximity detector 2 Tube 2 PFA 31 Screw 4 STNLS STL M3×10 3 Bellows 2 PTFE 32 Installed base 2 SUS304 4 Suction valve case 2 PTFE... -
Page 42: H T 1
■ FS-30 H T 1 40 41 42 20 21 N: LEAK SENSOR 35 36 Name Q'ty Material Remarks Name Q'ty Material Remarks 1 Pump head 1 PTFE 29 O ring 4 FKM AS568-116 2 Tube 2 PFA 30 Proximity detector 3 Bellows 2 PTFE 31 Screw... -
Page 43: H T 2
■ FS-30 H T 2 40 41 42 20 21 N: LEAK SENSOR 35 36 Name Q'ty Material Remarks Name Q'ty Material Remarks 1 Pump head 1 PTFE 29 O ring 4 FKM AS568-116 2 Tube 2 PFA 30 Proximity detector 3 Bellows 2 PTFE 31 Screw... -
Page 44: H T 1
■ FS-60 H T 1 41 42 20 21 N: LEAK SENSOR 35 36 Name Q'ty Material Remarks Name Q'ty Material Remarks 1 Pump head 1 PTFE 28 Screw 8 STNLS STL M3×8 2 Tube 2 PFA 29 O ring 4 FKM AS568-116 3 Bellows... -
Page 45: H T 2
■ FS-60 H T 2 20 21 N: LEAK SENSOR 35 36 Name Q'ty Material Remarks Name Q'ty Material Remarks 1 Pump head 1 PTFE 27 Stop ring 2 STNLS STL Nominal 37 2 Tube 2 PFA 28 Screw 8 STNLS STL M3×8 3 Bellows 2 PTFE 29 O ring... -
Page 46: Ec Declaration Of Conformity
(PRODUCT) DECLARE UNDER OUR SOLE RESPONSIBILITY THAT THE PRODUCTS PNEUMATIC DRIVE BELLOWS PUMP (MODEL NAME) FS SERIES TO WHICH THIS DECLARATION RELATES ARE IN CONFORMITY WITH THE FOLLOWING STANDARDS OR DIRECTIVES AS FAR AS APPLICABLE (DIRECTIVES) MACHINERY DIRECTIVE 2006/42/EC (ANNEX IIA) - Page 47 Specification/Outer dimension...
- Page 48 Germany / IWAKI Europe GmbH Norway / IWAKI Norge AS China (Hong Kong) / IWAKI Pumps Co., Ltd. TEL: +49 2154 9254 50 FAX: +49 2154 9254 55 TEL: +47 23 38 49 00 FAX: +47 23 38 49 01...
Need help?
Do you have a question about the FS Series and is the answer not in the manual?
Questions and answers