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PTI SENTRY 1510 Operation & Installation Manual

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Section 1: Introduction, General Description & Requirements
1.1 Introduction
Theory of Operation
The SENTRY 1510 is a pressure regulation controller designed to be used in a
clean room for vertical furnaces. The SENTRY 1510 is installed between the
output of the furnace and the facilities exhaust line. The 1510 can control the
pressure inside the tube to a set point programmed through the furnace controller
or the SENTRY Supervisor.
The SENTRY 1510 isolates the pressure inside the process tube from house ex-
haust pressure variations. The 1510 provides a stable, repeatable process pres-
sure, allowing process optimization and improving process repeatability:
1. The SENTRY 1510 provides a constant pressure (either positive or negative
with respect to the room) for the process. (This allows the process engineer to
optimize the process with respect to pressure. Once optimized, the process
pressure can be fixed, which will then improve the repeatability of film
qualities.)
2. The SENTRY 1510 prevents backstreaming of house exhaust contaminants
into the tube (these contaminants can reduce oxide or diffusion integrity).
3. In the negative pressure configuration, the SENTRY 1510 can reduce the
possibility of HCl fumes escaping into the fab.
11984 Rev 01
Operation & Installation Manual
SENTRY™ 1510
Page 1 of 8

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Summary of Contents for PTI SENTRY 1510

  • Page 1: Section 1: Introduction, General Description & Requirements

    1.1 Introduction Theory of Operation The SENTRY 1510 is a pressure regulation controller designed to be used in a clean room for vertical furnaces. The SENTRY 1510 is installed between the output of the furnace and the facilities exhaust line. The 1510 can control the pressure inside the tube to a set point programmed through the furnace controller or the SENTRY Supervisor.
  • Page 2 "floating piston" takes over dynamic control. The "Floating Piston" The SENTRY 1510 uses the concept of a "floating piston" for its dynamic control. Figure 2.1 shows a cross section of the SENTRY 1510 controller. There are several forces acting on the piston: 1.
  • Page 3 1.2 General Description Figure 1-1: A) SENTRY 1510 input; B) output (Note: the unit shown has custom fittings and is not shown with the standard female 1" NPT input and output.) 3. An increase in clean room air pressure (from a door closing, for example) will increase the downward force on the piston.
  • Page 4 Nitrogen Bias Flow Figure 1-2: Nitrogen is used in three different places in the SENTRY 1510. 4. A “carrier” supply to ensure there is enough flow to provide control, even in the presence of very low gas flow (for example, during steam processes where much of the process effluent is condensed prior to the controller) Figure 1-2 shows how the nitrogen is distributed to perform these functions.
  • Page 5 : Measured Process Pressure Sense Process pressure or set-point is the operating pressure (negative or positive) within the “sealed” vertical chamber. With the Sentry 1510, this measurement is taken at the furnace exit at the transition block (noted by P on Figure 1-3)
  • Page 6 : Pressure Drop across Controller Controller This is also a simple calculation. As in the case of all piping, the Sentry 1510 will also have a resistance or pressure drop which is dependent upon flow. Located within Zone C on Figure 1-3 is a chart which indicates pressure drop as a function of flow.
  • Page 7 (see Figure 1-4). The pressure information is displayed in real time and in graphical form. A 4-key interface allows the operator to control the SENTRY 1510 in local mode. In local mode, the operator can key in set point changes and modify control parameters.
  • Page 8 Once the SENTRY 1510 has reached the new set point, only small occasional updates are made to the spring, as fluc- tuations are compensated for mechanically by the piston regulator.

  • Page 9: Section 2: Functional Description & Operation

    2.1 Functional Description Functional Components The SENTRY 1510 is an automated pressure controller. It consists of a piston on a spring, differential pressure transducer and a stepper motor. The interface between the operator or the diffusion furnace and the SENTRY 1510 is the Supervisor.
  • Page 10 A voltage (0-5 V) representing the measured pressure is returned to the tube controller. Serial Communications Note: Use of serial communications with the SENTRY 1510 is not CE compliant. Serial communications can be active with both manual and analog operation. In these modes, the serial communications allows system monitoring.

  • Page 11: Section 3: Installation

    “The SENTRY Model 1500 Installation Manual”. General Installation Requirements The direction of flow on the SENTRY 1510 is indicated by an arrow in the white Teflon portion of the controller. The arrow head must be installed pointing toward house exhaust (and away from the process chamber).
  • Page 12 3.1 Installation Figure 3-1 : The SENTRY 1510 in this configuration is designed to directly replace the SENTRY 1500. The electronic Supervisor provides an operator display with a keypad that allows an operator to control the SENTRY 1510 valve. The Supervisor provides real time information on the process pressure level in the form of a numeric display and a graphical display.
  • Page 13 SENTRY from controlling the pressure in the chamber. Note: The inlet and outlet of the SENTRY 1510 are offset by ½” forward from the SENTRY 1500. Connecting the Facility Exhaust to the SENTRY The facility exhaust connection to the SENTRY 1510 is made with a 63 mm threaded flange fitting.
  • Page 14 The SENTRY 1510 provides two gas line fittings, one on either side of the controller body. The Swagelok fitting on the inlet side of the SENTRY 1510 is the nitrogen fitting. The barbed fitting on the outlet side is the process pressure (negative or positive delta pressure relative to the room reference) fitting.
  • Page 15 18 liters/minute at 35 to 100 psi. A ¼ inch Swagelok fitting is provided on the side of the SENTRY 1510 just above the intake. The SENTRY 1510 contains its own internal pressure regulators for the three purposes within the design: 16.3 liters/minute for piston bias flow, 1.6 liters/minute to supply the air...
  • Page 16 1510. The first interface is the 6 wire stepper motor interface. The stepper motor used in the SENTRY 1510 is a 4 phase design. One wire is required for each phase, and two 12 volt DC lines are required. The second interface is the 3 wire shielded process differential pressure transducer interface.
  • Page 17 Based on a change in the set point command signal the Supervisor commands the SENTRY 1510 to the new exhaust set point. On a continuous basis, the actual process static pressure level is transmitted by the Supervisor back to the furnace.
  • Page 18 (see section 3, page 3.) connected to the output of the SENTRY 1510. Verify that the nitrogen supply to the SENTRY 1510 is turned on with 35 to 100 psi of pressure available. Also, verify that all cable connections are secure on the Supervisor and on the SENTRY 1510.
  • Page 19 Correct the Supervisor Parameters Several parameters are different for the SENTRY 1510. When replacing an existing controller, these parameters must be changes for optimum operation. 1. Change the GainFine to 10: Use the up-arrow [ ] and down-arrow [ ] keys to scroll the Supervisor parameters to GainFine.
  • Page 20 3.1 Installation Local, "Single" Mode Installation Testing Local mode testing allows an operator to enter pressure set points by using the Supervisor keypad. The procedure outlined below can be used without the need for detailed reading of the operator's manual. To begin local mode testing, close and seal the furnace end cap.
  • Page 21 1. Repeat step 3 with a pressure set point of 4 mm (400), 10 mm (1000) and 23 mm (2300). These three set points are representative of a low range, mid range and high range value in the region of operation for the SENTRY 1510 (3 mm to 23 mm).
  • Page 22 3.1 Installation "*" indicates the mode can be changed new mode *StptMode Single SUN 00:00:00 Pres S 1700 Pres 1700 5080 PRES Figure 3-8: Changing the Set Point Mode on the SENTRY Supervisor Local, Cycle Mode Installation Testing A local, cycle mode is provided by the Supervisor, which automatically cycles be- tween 2 or 4 set points that are programmable by the user.
  • Page 23 3. From the furnace control panel, manually change the set point to the MFC port that is connected to the SENTRY 1510 system. An entry of 10% of full scale on the control panel should result in a displayed set point on the Supervisor of approximately 254 (2.54 mm water column).
  • Page 24 The serial interface is fully described in the PTI publication titled "SENTRY Supervisor Operation Manual and Serial Communications Programmer’s Guide." The serial interface allows the process tool controller to access parameters in the Supervisor menu.
  • Page 25 6. Remove the SENTRY 1500 by removing the two bolts in the center of the controller body. 7. Locate the bracket on the base of the SENTRY 1510. This bracket has the same hole pattern as the SENTRY 1500 mounting holes.

  • Page 26: Section 4: Operation

    4.1 Operation Introduction In a vertical diffusion furnace or other process chamber, the SENTRY 1510 is used to regulate the pressure inside the process chamber. The SENTRY Supervisor functions as the operator interface, giving the user a "window onto the process."...

  • Page 27: Up-Arrow Key

    4.1 Operation ∗ ↑ ↓ Enter key Star key Up-arrow Down-arrow Figure 4-1 : The four keys on the front of the Supervisor allow acces to all 64 Command Menu Items 1. The Up-Arrow Key [↑]: The up-arrow key [↑] has two functions: the first function is to scroll up the list of menu entries;...
  • Page 28 The full scale range for the process pressure variable should be defined in the "Pressure Full Scale" entry. For the SENTRY 1510, the full scale is 25.4 mm water column. The menu value appears with an implied decimal point, so that full scale shows as 5080.
  • Page 29 The factory values can be found in Section 7. Operating the SENTRY 1510 through the Process Tool Controller The SENTRY 1510 is normally operated through the process tool controller. The set point is typically set up similarly to a mass flow controller or to an LPCVD closed- loop pressure controller.

  • Page 30: Section 5: Maintenance

    NOTE: PM Procedures will disrupt control of the furnace. Do NOT perform PM procedure when running production. 1. Remove the four button-head screws to open the top cover of the SENTRY 1510 2. Inspect the piston area for particles or moisture 3.
  • Page 31 Recalibrate the Pressure Transducer If the installation of the SENTRY 1510 relative to the furnace prohibits the use of the standard length (5-15 feet) of process sense tubing then it will be necessary to recalibrate the transducer to the new required length.
  • Page 32 (accurate to millivolts) and a 1/8" non-conductive screw driver. Note: Electrical power and nitrogen flow must be maintained during this procedure. Open the top cover of the SENTRY 1510 by removing the four button head screws. Lift the cover straight up off the controller body.
  • Page 33 5.1 Maintenance Optimizing Gain Setting Your Sentry 1510 has been shipped with a factory set gain of 4. This gain should provide good pressure control for most installations. However, it may sometimes become necessary to optimize this setting due to installation dependent variables such as exhaust line diameters, distance from the process tube and available house exhaust.

  • Page 34: Section 6: Troubleshooting

    Figure 6-1 : Check for the most common causes first. Troubleshooting Several basic causes are the source of most problems seen with the SENTRY 1510. It will save time if these causes are checked first. Check items 1-7 in Figure 6-1 before continuing with the troubleshooting guide.
  • Page 35 Connect process sense Is process pressure line sense line connected? Seal chamber Is process chamber fully sealed? Check all fittings on process side of the Eliminate leaks Sentry 1510 for leaks. Replace Sentry 1510 11984 Rev 01 Page 2 of 5...
  • Page 36 (See Figure 6-1 for basic wiring) Seal chamber Is process chamber fully sealed? Replace Supervisor Check all fittings on process side of the Eliminate leaks Sentry 1510 for leaks. Replace Sentry 1510 11984 Rev 01 Page 3 of 5...
  • Page 37 (See Figure 6-1 for basic wiring) Seal chamber Is process chamber fully sealed? Replace Supervisor Check all fittings on process side of the Eliminate leaks Sentry 1510 for leaks. Replace Sentry 1510 11984 Rev 01 Page 4 of 5...
  • Page 38 6.1 Troubleshooting The Sentry 1510 is not responding to changes fron the electronics Is the supervisor power Turn on supervisor power Set Supervisor Is the supervisor Parameter StepLim Parameter Step Limit to Off Off? Is the desired set point indicated next to Pres...

  • Page 39: Section 7: Standard Cable Assemblies, Facility Requirements & Menu Parameter Settings

    Operation & Installation Manual SENTRY™ 1510 Section 7: Standard Cable Assemblies, Facility Requirements & Menu Parameter Settings 7.1 Standard Cable Assemblies A.2 0-5 Volt Analog Interface Powered from the Process Tool Controller The following Cables are standard for this interface: SENTRY to Supervisor Interface Cable: W101-35-S Host to Supervisor cable: W202-15-S...

  • Page 40: Facilities Requirements

    The SENTRY Supervisor on/off switch functions as a circuit breaker in the event of overcurrent AC disconnect device: The SENTRY 1510 relies upon the prpocess tool or house facility for AC mains disconnect and start/stop device Operating environment: Ambient temperature: 40-104°...
  • Page 41 7.2 Facilities Requirements Facility Requirements English Metric Nitrogen: Input Tube OD .25” Minimum Pressure (at SENTRY 1510) 40 psig 2.8 Kg/cm Maximum Pressure (at SENTRY 1510) 100 psig 7.0 Kg/cm Minimum Grade House Grade or Better House Exhaust: Minimum (Negative Pressure Config.) 0.4”...
  • Page 42 7.3 Menu Parameter Settings SENTRY Supervisor Preset Factory Parameters (PARAMETERS MAY VARY AND ARE APPLICATION DEPENDENT) Version: G1.9A PRODUCT: INTEL SENTRY 1510 APPLICATION: Negative Process Pressure Control With 2” Transducer Supervisor Default Value Change Comments Supervisor Default Value Change Comments...

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