1. Manuals
  2. Brands
  3. entegris Manuals
  4. Test Equipment
  5. SemiChem APM 2000
  6. Application manual

entegris SemiChem APM 2000 Application Manual

With hf and h2o2 in dsp plus
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
ADVANCED MATERIALS HANDLING
|
APPLICATION GUIDE
SemiChem APM 200 with HF and
H
O
in DSP+
2
2
Application guide

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the SemiChem APM 2000 and is the answer not in the manual?

Questions and answers

Summary of Contents for entegris SemiChem APM 2000

  • Page 1 ADVANCED MATERIALS HANDLING APPLICATION GUIDE SemiChem APM 200 with HF and in DSP+ Application guide...

  • Page 2: Table Of Contents

    A.3.4.2 Adjustments..........8 A.3.5 ORP Sensor Calibration ........12 A.3.6 Fluoride ISE Sensor Calibration ....... 12 A.3.6.1 Auto Cal Adjustments ......13 A.4 Running ................13 A.4.1 First Run ..............13 A.4.2 Process Calibration ..........14 Application Guide | Entegris, Inc.

  • Page 3: Introduction

    If replacing the burette glass, consult with on-site environmental personnel for proper disposal of remaining reagents. If replacing a burette O-ring, keep the burette glass assembly within the enclosure for proper exhaust of fumes. Application Guide | Entegris, Inc.

  • Page 4: Glass Burettes

    8 – 32 × 1/2” SHCS and 9/64” ball driver. 4. Repeat for burettes 2 and 3. 3. The sensor, Electrode, ORP Combination (001836) and the sensor Electrode, F-, ISE Half Cell (001770). Installed burettes. Application Guide | Entegris, Inc.

  • Page 5: Reagents And Tubing

    Secure the cap. Place reagent bottles into the corresponding slots within the reagent storage area. NOTE: To follow the recipe parameters it is important that the reagents are correctly assigned to the proper burettes. Application Guide | Entegris, Inc.

  • Page 6: Preparing To Run

    1. From the MAIN screen, press "Service," then reach the level sensor and stop the spray. press "Settings." Entegris / Service / Recipes Entegris / Service / Settings Recipe Menu: Recipe Name...

  • Page 7: Recipes And Adjustments

    AutoCal channel 2: This recipe sets the calibration parameters to calibrate the fluoride ISE on input 2. HF self test: This recipe allows the user to confirm the operation of the fluoride ISE by creating an internal sample. Application Guide | Entegris, Inc.

  • Page 8: Adjustments

    Hydrogen Peroxide expected concentration is 4%. If the expected concentrations vary the system configuration and reagent concentration may need to be adjusted. Please contact Entegris. for more information. A.3.4.2 Adjustments Once the desired recipe is selected, there are a number of parameters that can be adjusted to optimize the perfor- mance of the SemiChem APM 200.
  • Page 9 ISE cell=1 number=1 channel_id=1 sensor_ch=2 ph_sensor_ch=1 addn_mode=default meas_mode=fixed meas_time=30 cell_volume=200 std_conc=500 units=ppm def_conc=.75 factor=9 sensor=mV cal=no cal_ch=1 call EMPTY_APM200_CELLA time=15 call FLUSH_APM200_CELLA time=25 call EMPTY_APM200_CELLA time=10 call CONTROLIO io=MIXERA value=0 time=0 call FLUSH_APM200_CELLA time=10 call HOMEMOTORS motor1=yes motor2=yes motor3=yes motor4=no Application Guide | Entegris, Inc.
  • Page 10 This value can be adjusted to match the expected – channel_id = 2: Defines which displayed and endpoint value. This feature is only suitable for analog output is used for this measurement. applications in which the process is fairly stable. Application Guide | Entegris, Inc.
  • Page 11 – sensor = mV: This defines the sensor in meas_time. Auto time is defined as self determined sensor’s stability. response graphical display’s y-axis scale. – meas_time = 30: Can be adjusted shorter or longer based on the ISE’s measuring stability. Application Guide | Entegris, Inc.

  • Page 12: Orp Sensor Calibration

    61 ± 3 mVs. If the sensor does not report back an acceptable slope, verify electrode electrical connections, reagent assignments, and the recipe to ensure proper calibration range. Entegris / Service / Calibrate Titration Calibration ISE Calibration Channel: Readings: (ISE) Slope History 1:...

  • Page 13: Auto Cal Adjustments

    The SemiChem will flush and rinse the cell, take another sample and it will begin with the titration of the hydrogen peroxide. Once complete, the cell will again empty and flush, the burettes will reset and the displayed results will update. Application Guide | Entegris, Inc.

  • Page 14: Process Calibration

    At this point, the SemiChem APM 200 is reassembled, Vsamp =0.5 calibrated, and ready for use. LIMITED WARRANTY Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal &...

Table of Contents