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Air Products GASGUARD TE10 Installation, Operation And Maintenance Manual

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Ai r P r o d u c t s
Installation, Operation and
Maintenance Manual for the
®
GASGUARD
TE10
Distribution Systems
Commodity Number: 809-609287
Revision – September 2009
Air Products and Chemicals, Inc.
1919 Vultee Street
Allentown, PA 18103
809-609287 MANUAL DISTRIBUTION TE10

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  • Page 1 Ai r P r o d u c t s Installation, Operation and Maintenance Manual for the ® GASGUARD TE10 Distribution Systems Commodity Number: 809-609287 Revision – September 2009 Air Products and Chemicals, Inc. 1919 Vultee Street Allentown, PA 18103 809-609287 MANUAL DISTRIBUTION TE10...
  • Page 3 Introduction Manual Matrix Sheet for the GASGUARD  TE10 Distribution Systems Commodity Number: 809-609287, Revision – September 2009 Revision Reason for Revision Manual Section Level Cover and Front September 2009 Updated Rev History Introduction November 2004 First Edition Section 1: Safety Warnings November 2004 First Edition Section 2: Dimensions and Mounting November 2004 First Edition...
  • Page 4  GASGUARD TE10 Distribution System Manual Revision Reason for Revision Manual Section Level Appendix B November 2004 First Edition Appendix C November 2004 First Edition Air Products and Chemicals, Inc. Page i - ii...
  • Page 5 The operator MUST read and understand the safety section before operating the system. All operating and maintenance personnel must receive training and instruction by Air Products and Chemicals, Inc. System Hazards: Possible hazards when working with this system are exposure to: ...
  • Page 6 Emergency Response - 24 Hour Service If an emergency occurs that cannot be alleviated by the trained operator or his/her supervisor, call Air Products and Chemicals, Inc. on one of these telephone numbers.  From anywhere in the continental United States, Canada and Puerto Rico - 800-523-9374 (toll free) ...
  • Page 7 Introduction USA (continued) Eastern Region Technical Center (Central East) 128 Wembly Road New Windsor, NY 12553 Phone: 845-562-7044 Fax: 845-562-7047 Eastern Region Technical Center (Southeast) P.O. Box 12837 Research Triangle Park, NC 27709 Phone: 919-361-9206 Fax: 919-572-9586 Mid- America Tech Center 5508 W Highway 290 Suite 150 Austin, TX 78735-8817 Phone: 512-892-7772...
  • Page 8 Shanghai, China. 200131 Phone: 86-21-5048-3905 (WGQ); 86-21-6360-5096 (EAP) Fax: 86-21-5048-0590 (WGQ); 86-21-6360-9090 (EAP) Factory Contact Information: USA: Air Products and Chemicals, Inc. Semiconductor Equipment Manufacturing Center 1919 Vultee Street Allentown, PA 18103 Phone: 866-257-6158 International: Air Products and Chemicals, Inc.

  • Page 9: Table Of Contents

    Introduction Table of Contents Introduction ........................i-xi Section 1: Safety Warnings ....................1-1 1.1 Introduction ....................1-1 1.1.1 Level or Intensity of Hazard ............... 1-1 1.1.2 Hazard Types (Symbols) ................1-2 1.2 Important Safety Warnings ................1-3 1.3 Inert Gas Hazards ................... 1-4 1.4 Pressurized Gases ..................
  • Page 10 7.7 Manual Mode Operation ................7-16 Section 8: Operating Procedures ..................8-1 8.1 Emergency Shutdown Procedure ..............8-2 8.2 Operation of the GASGUARD TE10 Distribution System Controller ..8-4 8.3 New System Startup Procedure ..............8-8 8.4 Line Purge and Process Line Purging Procedures ........
  • Page 11 Introduction 8.7 Password Security ..................8-23 8.8 System Configuration ..................8-23 Section 9: Troubleshooting ....................9-1 9.1 Troubleshooting the Controller ..............9-2 9.1.1 System Off, No Display on Controller ............9-2 9.1.2 Incorrect Analog Value on Display ............9-3 9.1.3 Digital Input Not Working ................9-3 9.1.4 Valve Does Not Open .................
  • Page 12  GASGUARD TE10 Distribution System Manual Air Products and Chemicals, Inc. Page i - x...

  • Page 13: Introduction

    Inc. The information and data contained herein are proprietary to Air Products and Chemicals, Inc. and are not to be copied, reproduced, duplicated or disclosed to others, in whole or in part, without prior written consent of Air Products and Chemicals, Inc. This restriction shall not apply to any safety information contained in the manual.
  • Page 14 • Step-through procedural check list to include specific customer PPE protocol, communications and customer leak test procedures. Consult your local Air Products technical representative if you need assistance in preparation of standard work instruction. Section 1: Safety Warnings This section provides the safety information needed to safely operate the system.
  • Page 15 This section provides system specific information such as system specifications, drawings, recommended spare parts and the program logic chart. Appendix A This Appendix Section contains the Air Products EES document QAF030 “UHP Tubing and Fitting Specification”. Appendix B This Appendix contains the Air Products Material Safety Data Sheet(MSDS) for N2 gas.
  • Page 16 The information and data contained herein are proprietary to Air Products and Chemicals, Inc. and are not to be copied, reproduced, duplicated or disclosed to others, in whole or in part, without prior written consent of Air Products and Chemicals, Inc. This restriction shall not apply to any safety information contained in the manual.

  • Page 17: Section 1: Safety Warnings

    Section 1: Safety Warnings Section 1: Safety Warnings Please read the following safety warnings carefully before installing the equipment. 1.1 Introduction This section is meant to communicate to the user any hazards involved with the equipment. The following paragraphs will define the hazard warnings used and describe the icons found in various sections of the manual and on the equipment.

  • Page 18: Hazard Types (Symbols)

    This symbol represents flammable gases. Gases used with the Gasguard can cause flammable atmospheres. This symbol represents PPE (Personal Protective Equipment). Proper PPE shall be worn when working with this system. Air Products and Chemicals, Inc. Page 1 - 2...

  • Page 19: Important Safety Warnings

    Section 1: Safety Warnings This symbol represents electrical shock hazard. This symbol warns of a pinch hazard. This hazard exists on cabinet doors equipped with automatic closers. This symbol warns of the possibility of the distribution system tipping over if it is not installed properly.

  • Page 20: Inert Gas Hazards

    INJURY or DEATH may result from unauthorized use or modifications. All modifications to equipment MUST be approved in writing by an Air Products and Chemicals' Representative. 1.3 Inert Gas Hazards High concentrations of nitrogen, helium, or other inert gases can cause an oxygen deficient atmosphere in a confined area which can cause DEATH.
  • Page 21 Section 1: Safety Warnings Oxygen concentrations of 19.5% or less can greatly increase the hazard of asphyxiation to personnel. Before working in an area where nitrogen, helium or other inert gases could be present, check the area with an oxygen monitor to be sure the oxygen concentration is between 19.5% and 23%.
  • Page 22 GASGUARD TE10 Distribution System Manual outside the suspect area, but within view of the other person. This method ensures that the other person can respond in the event of an emergency. Air Products and Chemicals, Inc. Page 1 - 6...

  • Page 23: Pressurized Gases

    Section 1: Safety Warnings 1.4 Pressurized Gases Pressurized gas can injure personnel and damage equipment. Never tighten or loosen a fitting when it is under pressure. The house nitrogen supply lines can contain pressures of 100+ psig (6.9+ barg). Exercise care when working around these lines. Ensure that pressure has been vented before breaking any connection.

  • Page 24: Falling Equipment Hazard

    A pinch hazard exists on cabinet doors equipped with automatic closers. 1.8 Personal Protective Equipment Personal protective equipment, as defined in this section, must be worn when working with this system. Air Products and Chemicals, Inc. Page 1 - 8...
  • Page 25 DO NOT continue. Failure to understand the hazards and use the proper personal protective equipment may cause INJURY or DEATH. Contact Air Products and Chemicals, Inc. for the gas category. Revision - November 2004 Page 1 - 9...
  • Page 26 Safety shoes NOTE: Either air quality monitoring or self contained breathing apparatus is required for corrosive gases. Air Products recommends the use of both. It is not required to use both, however at least one MUST be used at all times.
  • Page 27 Section 1: Safety Warnings Personal Protective Equipment for Pyrophorics • Pyrophoric gas leak detection (ex: MDA) • Hard hat (fire hat with brim recommended) • Long sleeved Nomex suit • Face shield • Safety glasses with side shields • Leather gloves •...

  • Page 28: Hazard Warnings

    The Pressurized Gases Hazards and Electrical Hazard warnings apply to all GASGUARD systems. The following is general information on typical gas hazards. It is not a substitute for training and use of Material Safety Data Sheets by all operators. Air Products and Chemicals, Inc. Page 1 - 12...

  • Page 29: Toxic Gas Hazards

    Section 1: Safety Warnings 1.9.1 Toxic Gas Hazards Many of the gases used in the Gasguard system could cause personal INJURY OR DEATH at very low concentrations. Many of these gases provide no physical warning signs (i.e. coughing, throat irritation, burning sensations, shortness of breath) to alert personnel of exposure to toxic levels.

  • Page 30: Corrosive Gas Hazards

    Chlorine trifluoride Phosphorous pentafluoride Dichlorosilane Silicon tetrachloride Fluorine Silicon tetrafluoride Hydrogen bromide Tungsten hexafluoride 1.9.3 Flammable and Pyrophoric Gas Hazards Flammable and pyrophoric gases could cause fire, explosions, personal injury or death. Air Products and Chemicals, Inc. Page 1 - 14...
  • Page 31 Section 1: Safety Warnings Pyrophoric gases will spontaneously ignite in air Pyrophoric gases do not need a source of ignition to burn. However, low concentrations may accumulate without pyrophoric ignition (i.e. silane can accumulate up to a concentration of 2 molar percent [number of moles of silane per fixed volume of air] before spontaneous ignition occurs).
  • Page 32 ® GASGUARD TE10 Distribution System Manual Air Products and Chemicals strongly recommends installation of a hydride detector to detect gas pocketing of pyrophoric gases. Guidelines to avoid forming combustible mixtures Avoid forming combustible mixtures by adhering to the following: •...

  • Page 33: Oxygen And Other Oxidizer Hazards

    Section 1: Safety Warnings 1.9.4 Oxygen and Other Oxidizer Hazards Systems using oxygen or other oxidizers (i.e. nitrous oxide, fluorine) have specific guidelines for specifying equipment, materials of construction and system cleanliness. Failure to comply with materials of construction and system cleanliness could result in injury or death.

  • Page 34: Inert Gas Hazards

    19.5% and 23%. While working in the area, the oxygen concentration needs to be monitored with a continuous oxygen Air Products and Chemicals, Inc. Page 1 - 18...
  • Page 35 Section 1: Safety Warnings monitor. Always provide adequate ventilation in the work area to decrease the risk of an oxygen deficient atmosphere. Read APCI Safetygram 17 "Dangers of Oxygen Deficient Atmospheres" included in the safety literature in Section 1.14 of this manual. Any time an oxygen deficient atmosphere is suspected, the proper personal protective equipment must be used.

  • Page 36: Pressurized Gases

    1.9.6 Pressurized Gases Pressurized gas lines could injure personnel and damage equipment. Never tighten or loosen a fitting when it is under pressure. Air Products and Chemicals, Inc. Page 1 - 20...

  • Page 37: Electrical Hazards

    Section 1: Safety Warnings A leak from a loose mechanical fitting, component or a ruptured/failed component can expose the operator to a high pressure gas stream or projectile. The house nitrogen supply lines can contain pressures of 100+ psig (7+ barg). Exercise care when working around these lines.

  • Page 38: Typical Minimal Lockout Or Tagout System Procedures

    (Occupational Safety and Health Admin., Labor Para. 1910.147) Although OSHA does not have jurisdiction outside the United States of America, it is Air Products recommendation that Lockout, or Tagout procedures be followed, except where local laws are more stringent.
  • Page 39 Section 1: Safety Warnings Responsibility Appropriate employees shall be instructed in the safety significance of the lockout (or tagout) procedure (Name(s)/Job title(s) of employees authorized to lockout or tagout). Each new or transferred affected employee and other employees whose work operations are or may be in the area shall be instructed in the purpose and use of the lockout or tagout procedure (Name(s)/Job title(s) of affected employees and how to notify).
  • Page 40 Do not attempt to operate any switch, valve or other energy isolating device where it is locked or tagged. (See following page.) Air Products and Chemicals, Inc. Page 1 - 24...
  • Page 41 Section 1: Safety Warnings Entry No. Description Name of Company Type(s) and Magnitude(s) of energy and hazards Name(s)/Job title(s) of employees authorized to lockout or tagout Name(s)/Job title(s) of affected employees and how to notify Type(s) and Location of energy isolating means Type(s) of stored energy Method(s) selected, i.e.

  • Page 42: Safety Signs And Labels

    ® GASGUARD TE10 Distribution System Manual 1.11 Safety Signs and Labels The following sign is located on the front of the Gasguard system. Air Products and Chemicals, Inc. Page 1 - 26...
  • Page 43 Section 1: Safety Warnings The following warning label is located on the face of the GASGUARD controller. This label is required for GASGUARD systems located in certain hazardous areas (i.e., Class I, Division II locations in the United States or areas covered by the Explosive Atmospheres Directive (ATEX) in the European community).
  • Page 44 NOTE: The signs shown below are United States DOT classifications. They are not to be used to classify gas hazards. Refer to the appropriate MSDS. (Please contact your gas supplier for this information.) Air Products and Chemicals, Inc. Page 1 - 28...
  • Page 45 Section 1: Safety Warnings The following label would be used with the gases listed below it: Boron trifluoride Phosphorous pentafluoride Chlorine Sulfur dioxide Carbon tetrachloride Sulfur tetrafluoride Nitrogen dioxide Tungsten hexafluoride Nitric oxide The following label would be used with the gases listed below it: Boron trichloride Hydrogen fluoride Hydrogen bromide...
  • Page 46 The following label would be used with the gases listed below it: Acetylene Hydrogen mixtures Butane Isobutane Disilane Isobutylene Deuterium Methane Ethane Methyl chloride Ethand mixtures Methyl silane Ethylene Propane Halocarbon 32 Silane Halocarbon 41 Silane mixtures Hydrogen Air Products and Chemicals, Inc. Page 1 - 30...
  • Page 47 Section 1: Safety Warnings The following label would be used with the gases listed below it: Arsine mixtures Germane Carbon monoxide Hydrogen selenide Diborane mixtures Hydrogen sulfide Dichlorosilane Phosphine mixtures Diethyl telluride The following label would be used with the gases listed below it: Silicon tetrachloride The following label would be used with the gases listed below it: Chlorine trifluoride...
  • Page 48 Halocarbon 23 Teteafluoroethane Halocarbon 113 Xenon Halocarbon 115 Halocarbon 116 The following label would be used with the gases listed below it: Oxygen Nitrogen trifluoride Oxygen mixtures Nitrogen trifluoride mixtures Nitrous oxide Air Products and Chemicals, Inc. Page 1 - 32...

  • Page 49: Equipment Safety Features

    Section 1: Safety Warnings 1.12 Equipment Safety Features Dependent on the design of your specific system, the following safety features may be incorporated into the GASGUARD system: • Warning labels and gas identification labels are placed on the outside door of each cabinet (see Section 1.10).

  • Page 50: Material Safety Data Sheets

    The safety literature listed below must be read and understood. APCI Safetygram 2 Gaseous Nitrogen APCI Safetygram 17 Dangers of Oxygen Deficient Atmospheres Nitrogen Material Safety Data Sheet (Included as Appendix B) Air Products and Chemicals, Inc. Page 1 - 34...

  • Page 51: Section 2: Dimensions And Mounting

    Section 2: Dimensions and Mounting Section 2: Dimensions and Mounting Note: The dimensions included in this section are intended for familiarization purposes. For system specific details, refer to the installation drawings supplied. An installation drawing (INS) will be provided upon request. 2.1 Outline Dimensions For overall dimensions see the following Outline Dimension figures.

  • Page 52: Outline Dimension Figures For 24" Distribution Systems

    2.1.1.1 – 24” Valve Manifold Box MC Rack 2.1.1.2 – 24” Valve Manifold Box MC Wall Mount 2.1.1.3 – 24” Valve Manifold Panel MC Rack 2.1.1.4 – 24” Valve Manifold Panel MC Wall Mount Air Products and Chemicals, Inc. Page 2 - 2...
  • Page 53 Section 2: Dimensions and Mounting Approximate Weight = 275 Pounds (124.74 Kilograms) Figure 2.1.1.1: Outline Dimensions 24” Valve Manifold Box MC Rack (4 stick) Revision - November 2004 Page 2 - 3...
  • Page 54 ® GASGUARD TE10 Distribution System Manual Approximate Weight = 200 pounds (90.72 kilograms) Figure 2.1.1.2: Outline Dimensions 24” Valve Manifold Box MC Wall Mount (4 stick) Air Products and Chemicals, Inc. Page 2 - 4...
  • Page 55 Section 2: Dimensions and Mounting Approximate Weight = 275 pounds (124.74 kilograms) Figure 2.1.1.3: Outline Dimensions 24” Valve Manifold Panel MC Rack (4 stick) Revision - November 2004 Page 2 - 5...
  • Page 56 ® GASGUARD TE10 Distribution System Manual Approximate Weight = 200 pounds (90.72 kilograms) Figure 2.1.1.4: Outline Dimensions 24” Valve Manifold Panel MC Wall Mount (4 stick) Air Products and Chemicals, Inc. Page 2 - 6...

  • Page 57: Outline Dimension Figures For 30" Distribution Systems

    Section 2: Dimensions and Mounting 2.1.2 Outline Dimension Figures for 30” Distribution Systems (6 stick or 8 stick) 2.1.2.1 – 30” Valve Manifold Box MC Rack 2.1.2.2 – 30” Valve Manifold Box MC Wall Mount 2.1.2.3 – 30” Valve Manifold Panel MC Rack 2.1.2.4 –...
  • Page 58 ® GASGUARD TE10 Distribution System Manual Approximate Weight = 300 Pounds (136.08 Kilograms) Figure 2.1.2.1: Outline Dimensions 30” Valve Manifold Box MC Rack (6 stick or 8 stick) Air Products and Chemicals, Inc. Page 2 - 8...
  • Page 59 Section 2: Dimensions and Mounting Approximate Weight = 250 pounds (113.40 kilograms) Figure 2.1.2.2: Outline Dimensions 30” Valve Manifold Box MC Wall Mount (6 stick or 8 stick) Revision - November 2004 Page 2 - 9...
  • Page 60 ® GASGUARD TE10 Distribution System Manual Approximate Weight = 300 pounds (136.08 kilograms) Figure 2.1.2.3: Outline Dimensions 30” Valve Manifold Box MC Rack (6 stick or 8 stick) Air Products and Chemicals, Inc. Page 2 - 10...
  • Page 61 Section 2: Dimensions and Mounting Approximate Weight = 250 pounds (113.40 kilograms) Figure 2.1.2.4: Outline Dimensions 30” Valve Manifold Box MC Wall Mount (6 stick or 8 stick) Revision - November 2004 Page 2 - 11...

  • Page 62: Mounting Hole Locations

    Unistrut® channels mounted on the back of the VMP system assemblies. For 24” VMB or VMP rack anchoring see Section 2.2.1. For 30” VMB or VMP rack anchoring see Section 2.2.2. Air Products and Chemicals, Inc. Page 2 - 12...

  • Page 63: Rack Anchoring For 24" Distribution Systems (4 Stick)

    Section 2: Dimensions and Mounting 2.2.1 Rack Anchoring for 24” Distribution Systems (4 stick) For 24” rack anchoring see the following Mounting Hole Location Figure for proper floor location of four (4) 9/16” (14.3 mm) diameter holes in the frame base. 2.2.1.1 –...
  • Page 64 ® GASGUARD TE10 Distribution System Manual Figure 2.2.1.1: Mounting Hole Locations 24” Valve Manifold Box MC Rack (4 stick) or 24” Valve Manifold Panel MC Rack (4 stick) Air Products and Chemicals, Inc. Page 2 - 14...

  • Page 65: Rack Anchoring For 30" Distribution Systems

    Section 2: Dimensions and Mounting 2.2.2 Rack Anchoring for 30” Distribution Systems (6 stick or 8 stick) For 30” rack anchoring see the following Mounting Hole Location Figure for proper floor location of four (4) 9/16” (14.3 mm) diameter holes in the frame base. 2.2.2.1 –...
  • Page 66 TE10 Distribution System Manual Figure 2.2.2.1: Mounting Hole Locations 30” Valve Manifold Box MC Rack (6 stick or 8 stick) or 30” Valve Manifold Panel MC Rack (6 stick or 8 stick) Air Products and Chemicals, Inc. Page 2 - 16...

  • Page 67: Section 3: Tubing Connections

    Section 3: Tubing Connections Section 3: Tubing Connections All tubing connections to the Gasguard Distribution System should be designed and installed in adherence to all local piping codes and should comply with the intent of ASME B31.3 "Chemical Plant and Petroleum Refinery Piping." Tubing must be sized to flow the maximum amount of gas required by the process system.

  • Page 68: Tubing Interconnections

    0.035" (0.9 mm) wall thickness Specific piping connections for this system can be found on the INS Drawing. An INS drawing is provided only when specifically requested by the customer. Please contact your Air Products representative for assistance. 3.2 Process Line Connection The process line connection can be furnished in one of two configurations: Standard Bulkhead or Coaxial Bulkhead.
  • Page 69 Section 3: Tubing Connections 1/4”or 3/8” TOD Gas Line Continuous (Passes Through Compression Fitting Bulkhead) Grips OD of Tube Cabinet Top Figure 3.1: Standard Bulkhead The coaxial bulkhead permits a single process out line to penetrate the enclosure, while providing an acceptable seal for enclosure ventilation purposes. In addition, the coaxial bulkhead provides a termination point for an outer secondary containment tube.
  • Page 70 ® GASGUARD TE10 Distribution System Manual Air Products and Chemicals, Inc. Page 3 - 4...

  • Page 71: Vent Line

    When multiple gases are to be vented, ensure compatibility before plumbing vents together. Contact your Air Products Representative for this information. A nitrogen trickle purge is constantly bled into the vent line to maintain an inert atmosphere when hazardous gases are being used.

  • Page 72: Venturi Line

    GASGUARD TE10 Distribution System Manual 3.4 Venturi Line Air Products strongly recommends separate venturi supply source rather than a houseline source. Most process cylinder pressures are significantly higher than houseline operating pressures. In the event of multiple failures of certain process panel components, there is a remote possibility of back contamination of the houseline source connected to the vacuum venturi.

  • Page 73: Pneumatic Supply

    Section 3: Tubing Connections The purge gas source for the GASGUARD Distribution System should be used only to purge other gas source systems or VMBs handling the same process gas. It must not be used to purge systems handling incompatible process gases. It is recommended that the purge gas cylinders be placed in an exhausted enclosure.

  • Page 74: Z-Purge Procedure

    (2 CFH). If Type Z purge is required, a flow rate of 3-10 LPM (6-21 CFH) will be needed, depending on the tightness of the individual controller and the installation. Figure 3.5: Rear View of GASGUARD TE10 Controller Air Products and Chemicals, Inc. Page 3 - 8...

  • Page 75: Enclosure Exhaust System Requirements

    Section 3: Tubing Connections 3.7 Enclosure Exhaust System Requirements In order to meet SEMI S2 criteria in HPM (Hazardous Production Material) gas service, the enclosure should control emissions into the room to less than 25% TLV (Threshold Limit Value) of the HPM gas in the event of an internal leak.
  • Page 76 MC source system enclosure. Due to the similar design and smaller access port of the GG500 VMB enclosure, balancing to Tables 2 and 3 will satisfy meet or exceed UFC 80 face velocity requirements. Air Products and Chemicals, Inc. Page 3 - 10...

  • Page 77: Exhaust Flow Clarifications And Definitions

    Section 3: Tubing Connections Table 3 Exhaust Recommendations for Gasguard Equipment Containing Gases with a TLV between 0.050 and 0.20 ppm (25% TLV: 0.0125 - 0.050 ppm) [Includes the following pure (100%) gases: Chlorine Trifluoride, Diborane, Arsine] Access Port Closed Access Port Open Average Minimum...
  • Page 78 Drawing (INS) for specific location and size of exhaust duct on valve manifold enclosure. An INS drawing is provided only if specifically requested by the customer. Figure 3.6: Exhaust Hook-Up Location Air Products and Chemicals, Inc. Page 3 - 12...

  • Page 79: Weld Shield Gas, Purge Gas Connection (Optional)

    Section 3: Tubing Connections 3.8 Weld Shield Gas, Purge Gas Connection (Optional) This VCR connection port provides a convenient point to introduce inert shielding gas for welding, purge gas and certification gas during installation and testing of the distribution system. The connection is teed from the purge gas inlet line and includes a manual shut-off valve, “Weld Gas Inlet”...

  • Page 80: Helium Leak Test Port (Optional)

    A hydride monitor can detect leaking silane and shutdown the system eliminating or reducing the risk and size of explosion. Air Products and Chemicals, Inc. Page 3 - 14...

  • Page 81: Section 4: Electrical Connections

    Section 4: Electrical Connections Section 4: Electrical Connections All electrical connections must comply with Article 300 - Wiring Methods and Article 500 - Hazardous (Classified) Locations of the National Electric Code (NEC) 1993, if installed in the United States. Reference to the use of this equipment in Hazardous Locations only applies to installations located within the United States of America.

  • Page 82: Grounding Method

    For 1X1 and 1X2 cabinet configurations each cabinet requires grounding to earth ground. Air Products and Chemicals, Inc. Page 4 - 2...

  • Page 83: Power Supply Connection

    The power input must be wired to the terminals shown below. For additional detail on the power connection, see Figure 4.3. Terminal Connector Ground Terminal Connector Circuit Neutral Breaker Surge Protection Device Circuit Breaker Line Connection Figure 4.2: Inside View of GASGUARD TE10 Controller Revision – August 2005 Page 4 - 3...
  • Page 84 0.75) NOTE: Power wiring must be sized to deliver the required voltage at the rated current. Voltages should be checked at each cabinet after installation to ensure proper levels. Air Products and Chemicals, Inc. Page 4 - 4...

  • Page 85: Field Connections

    Liquid tight flexible conduit can be installed between the GASGUARD TE10 connectors and the conduit seals to facilitate these connections. A maximum length of 18" (457 mm) is allowed between the last pour fitting and the cabinet connector.
  • Page 86 Two additional holes are supplied for customer I/O. See Figure 4.2 below. Customer I/O Conduit Customer I/O Conduit 120/240 VAC Conduit Figure 4.4: View of Top of GASGUARD TE10 Controller Air Products and Chemicals, Inc. Page 4 - 6...
  • Page 87 Section 4: Electrical Connections Figure 4.5: Conduit and Conduit Seals Revision – August 2005 Page 4 - 7...

  • Page 88: External I/O Communication

    TE10 Distribution System Manual 4.4 External I/O Communication Connections between the GASGUARD TE10 controller and external I/O devices are made at the terminal blocks located inside the controller, on the back wall, left side. See Figure 4.6 for details on the location of the connections.

  • Page 89: Supervised Inputs

    Section 4: Electrical Connections 4.4.1 Supervised Inputs The system supports 2 supervised inputs from the customer interface. Supervised inputs are analog inputs, which are monitored via a window comparator. These inputs are monitored for normal operation, alarm type, and fault conditions. A normally open switch is to be used as an input device.

  • Page 90: Available External I/O Communications

    Failure to utilize this feature may result in the discharge of process gas to a non- functioning vent system. Air Products and Chemicals, Inc. Page 4 - 10...
  • Page 91 Section 4: Electrical Connections Digital Outputs Dry BC1 24 VDC @ 1 Amp maximum Common Relay Output # 33 – UVIR / Gas Available - 1 34 – TEMP / Gas Available-2 35 – Gas Available-3 36 – Gas Available-4 37 –...
  • Page 92 ® GASGUARD TE10 Distribution System Manual Air Products and Chemicals, Inc. Page 4 - 12...
  • Page 93 Section 4: Electrical Connections Supervised Inputs Source Signal Analog Input # Supervisory L Supervisory R Revision – August 2005 Page 4 - 13...

  • Page 95: Section 5: Helium Leak Testing

    System in "Manual Mode". Operations training is an additional service provided for a cost. The cost of this service may have been pre-arranged during the sale and scope review of the project. Contact your Air Products representative to discuss this.
  • Page 96 No process gas cylinders should be connected at this time. If one is or was connected, do not continue, as personal injury or death can result. Contact an Air Products and Chemicals representative for system verification. NOTE: Due to the potential hazards listed above, Manual Mode operation requires a second or higher level security code.
  • Page 97 Manual mode availability is shown in the mode menu. If a shutdown alarm is present, contact an Air Products representative for system verification prior to leak testing. 1. Enter second level (or higher) security code (check with appropriate Air...
  • Page 98 Distribution System must not be left unattended in Manual Mode, as access to the system in Manual Mode is open to anyone. See section 8.5 on information on securing manual mode before leaving your gas cabinet. Air Products and Chemicals, Inc. Page 5 - 4...

  • Page 99: Section 6: Distribution System Functional Checklist

    The functional check is an additional service provided for a cost. The cost of this service may have been pre-arranged during the sale and scope review of the project. Contact your Air Products Representative to discuss this. ®...
  • Page 100 (5.9-6.6 barg) of nitrogen available (see Section 3.6). 12. Distribution system internal piping helium leak tested (see Section 5). 13. Purge cylinder available, if required. 14. Hazardous gas monitor installed and operating. Air Products and Chemicals, Inc. Page 6 - 2...
  • Page 101 Section 6: Distribution System Functional Checklist Inspection Sign-Offs Electrical Mechanical Quality Safety APCI (Field Start-Up Checklist Complete) Revision – November 2004 Page 6 - 3...
  • Page 102 ® GASGUARD TE10 Distribution System Manual AIR PRODUCTS APx DISTRIBUTION SYSTEM FIELD START-UP CHECKLIST page 1 of 8 CUSTOMER __________________System # _____________ SERIAL #___________ DEVICE DESCRIPTION __________________________________MODEL# _____________ GAS TYPE ___________________START DATE ___________ FINISH DATE ________ TOOL NAME ____________________ TECH REP _________________________________...
  • Page 103 Section 6: Distribution System Functional Checklist AIR PRODUCTS APx DISTRIBUTION SYSTEM FIELD START-UP CHECKLIST page 2 of 8 ELECTRICAL Check off line item when completed Sign and date when section is completed Branch 1-4 (A-D) Branch 5-8 (E-H) Earth ground installed...
  • Page 104 ® GASGUARD TE10 Distribution System Manual AIR PRODUCTS APx DISTRIBUTION SYSTEM FIELD START-UP CHECKLIST page 3 of 8 CALIBRATION Verify analog scaling (psig) with program documentation Transducers must be powered up a minimum of 15 minutes. Zero and span should be checked a minimum of...
  • Page 105 Section 6: Distribution System Functional Checklist AIR PRODUCTS APx DISTRIBUTION SYSTEM FIELD START-UP CHECKLIST page 4 of 8 FUNCTIONAL TEST - DIGITAL ALARMS Record label from software documentation. Record, verify and test the digital alarms and the hardwire shutdowns. Digital In...
  • Page 106 Sign and date when section is completed Branch 1-4 (A-D) Branch 5-8 (E-H) User Alarm set points listed and verified List changes in this Alarm # Label Setpoint column SECTION COMPLETED SIGNATURE____________________ DATE ________ Air Products and Chemicals, Inc. Page 6 - 8...
  • Page 107 Section 6: Distribution System Functional Checklist AIR PRODUCTS TE10 DISTRIBUTION SYSTEM FIELD START-UP CHECKLIST page 7 of FUNCTIONAL TEST- PROGRAM MODES Check off line item when completed Sign and date when section is completed Distribution System Programs Branch 1-4 (A-D)
  • Page 108 ® GASGUARD TE10 Distribution System Manual AIR PRODUCTS APx DISTRIBUTION SYSTEM FIELD START-UP CHECKLIST page 8 of 8 __________________________________________________ Comments _________________________________________________________ _________________________________________________________ _________________________________________________________ _________________________________________________________ _________________________________________________________ ___________________________________________________ I have received and understood training on the operation of this Distribution System on the date given below.

  • Page 109: Section 7: System Description

    Section 7: System Description Section 7: System Description The GASGUARD MC (Mass Customized) Distribution System may consist of a valve manifold enclosure, a process gas manifold panel and a controller. The systems may also be supplied with a free standing rack or a wall mounting frame. GASGUARD Distribution Systems are designed and built for the safe handling of high purity toxic, flammable, pyrophoric, corrosive, oxidizing, reactive, and non- reactive gases.
  • Page 110 ® GASGUARD TE10 Distribution System Manual Figure 7.1: Typical GASGUARD MC (Mass Customized) Distribution System Air Products and Chemicals, Inc. 7 - 2...

  • Page 111: Hazardous Gas Manifold Panel

    Section 7: System Description 7.2 Hazardous Gas Manifold Panel The Gas Panel may consist of pneumatic control valves, manual valves, pressure monitors, pressure regulators, check valves and various safety/purity components that are capable of performing the following functions: • Distributes gas supplied by an upstream source to one to eight process tool use points.

  • Page 112: Panel Schematic And Component Descriptions

    Process In Emergency Shutoff Valve Optional pneumatic control valve isolates process gas supply from cabinet to the Distribution System. High Pressure Process Valve [branch 1-4 (A-D)] Pneumatic control valve permits flow from Branch 1 through 4 piping. Air Products and Chemicals, Inc. 7 - 4...
  • Page 113 Section 7: System Description Purge In Gas Valve [branch 1-4 (A-D)] Pneumatic control valve isolates each individual process gas branch from purge gas on the upstream side of pressure control valve. Low Pressure Vent Valve [branch 1-4 (A-D)] This pneumatic control valve isolates process gas flow stream of each branch from waste gas vent system.
  • Page 114 This transducer measures purge gas pressure at the inlet to the Distribution System panel. Pressure Transducer for Waste Gas Vent System This transducer measures vent gas pressure upstream of the vacuum venturi. Air Products and Chemicals, Inc. 7 - 6...
  • Page 115 Section 7: System Description Flow Switch (Optional) This device senses an excess flow of process gas caused by downstream system failure (tubing or component leak, valve or regulator failure, etc.) and sends a switch signal to the controller to shutdown the system. Filter (Optional) This device removes particles from the gas stream Check Valve...

  • Page 116: Gasguard Te10 Distribution System Controller

    TE10 Distribution System Manual 7.4 GASGUARD TE10 Distribution System Controller The GASGUARD TE10 Distribution System controller is a Siemens S7-300 PLC based unit housed in a custom designed metal enclosure. It continuously monitors system inputs and can automatically perform purging operations by sequencing valve actuation.

  • Page 117: The Display Screen

    Branch status box, and the selection window. The screen that is displayed when the system is powered up is shown below. Figure 7.4: GASGUARD TE10 Distribution System Power Up Screen Revision – September 2009 7 - 9...
  • Page 118 It presents the menu selections. The Main Menu is shown in Figure 7.5. The Main Menu will remain displayed until the key is pressed. Figure 7.5: GASGUARD TE10 Controller Main Menu 7.4.3 Alarm and Branch Status Boxes Shutdown alarms will appear in the ACTIVE ALARM box, selected by pressing the SHUTDOWN ALARM indicator in the top left corner of the screen.
  • Page 119 Section 7: System Description Figure 7.7: Alarm and Branch Status Boxes 7.4.4 LCD Display The LCD display provides, through a lighted display, visual indication of pneumatic valve positions. On a color screen, open valves are shown in red and closed valves are shown in green. The valve condition colors conform to ISA standards.

  • Page 120: Security Code Protection

    The Menu Time-Out Feature causes the controller to drop out of the Main Menu automatically if a menu option is not selected within the configured time period. This safeguard prevents unauthorized operation if an operator leaves a cabinet before selecting a menu option. Air Products and Chemicals, Inc. 7 - 12...

  • Page 121: Distribution Mode Menu Operations

    Section 7: System Description User Entry Time-Out Feature Operator Prompts may appear on the LCD display during some operating sequences. After completing the specified task, the operator must press . The controller will go to the next step. There is an User Entry Time Out feature on Operator Prompts.
  • Page 122 Distribution System Branch and downstream process line through the vent system of the Distribution System. It does not reduce the concentration of hazardous gas to safe levels for maintenance activities. Air Products and Chemicals, Inc. 7 - 14...

  • Page 123: Active Alarms

    Section 7: System Description This sequence does not remove hazardous gases to a low enough concentration to permit operator maintenance or other activity on the process line or downstream components. The customer must develop purge and evacuation procedures for the process line and components downstream of the Distribution System to assure acceptable low concentrations of...

  • Page 124: Configuration Menu

    Manual operation should not be used for process gas flow as critical shutdown alarms may be disabled in Manual Mode. Air Products and Chemicals, Inc. 7 - 16...

  • Page 125: Section 8: Operating Procedures

    Section 8: Operating Procedures Section 8: Operating Procedures This section will describe the operating procedures. The following procedures are included. 8.1 Emergency Shutdown Procedure 8.2 Operation of the Distribution System Controller 8.3 New System Startup Procedure 8.4 Line Purge and Process Line Purging Procedures 8.5 Process Gas Flow Procedure 8.6 Manual Mode Operation 8.7 Password Security...

  • Page 126: Emergency Shutdown Procedure

    See Figure 8.1 below. This will close all valves, any process or purge program is aborted, the alarm horn will sound and the shutdown alarm light will flash. Evacuate the area. Emergency Stop Figure 8.1: Emergency Stop Pushbutton Location Air Products and Chemicals, Inc. 8 - 2...
  • Page 127 Section 8: Operating Procedures Pressing the "Emergency Stop" button does not disconnect power to the controller. The 120 VAC/240 VAC power is still active within the controller. Do not perform maintenance on the controller without disconnecting or switching off power externally and following the required Lockout or Tagout procedures.
  • Page 128 ® GASGUARD TE10 Distribution System Manual 8.2 Operation of the GASGUARD TE10 Distribution System Controller This is the screen that is displayed upon power up is shown in figure 8.2.0.1 below. Figure 8.2.0.1: Main Screen (Displayed Upon Power-Up) Once the system is powered up, a power up alarm will exist. To silence this alarm, press the button.
  • Page 129 Section 8: Operating Procedures Figure 8.2.0.2: Login Screen To login and enter a password: Press the white box, , next to the PASSWORD prompt. This will open the keyboard. Enter the password using the keyboard. Press on the keyboard once the password is entered. Press the button on the Login window.
  • Page 130 The Main Menu is shown in figure 8.2.0.3. Figure 8.2.0.3: Main Menu Note: Selections that appear red are not selectable at this point of the controller sequence. All sequences require the operator to follow an executable order. Air Products and Chemicals, Inc. 8 - 6...
  • Page 131 Section 8: Operating Procedures Selecting any of the Target Mode Menus (1-8) from the Main Menu will display the following screen (see figure 8.2.1) for the process line that is selected. Figure 8.2.1: Mode Menu This screen allows the user to purge, start process gas, rough lines, stick evac, and enter the manual mode.

  • Page 132: New System Startup Procedure

    The absence of this alarm during Z-purging indicates that the Z- purge is adequate. If a "Low Z-purge" alarm is present after power up, increase the flow rate until the alarm can be Air Products and Chemicals, Inc. 8 - 8...
  • Page 133 No alarms should be present. If alarms are present, do not continue. Follow the troubleshooting procedures found in Section 9. If needed, contact your Air Products factory representative for assistance. 7. Check that all automatic...
  • Page 134 16. Verify the process gas source is on-line and set at the desired delivery pressure, PT1 (process gas inlet maximum 90 PSIG.) 17. Ensure MV1, process gas inlet manual valve, is open. 18. Press and enter the password. Air Products and Chemicals, Inc. 8 - 10...
  • Page 135 Section 8: Operating Procedures 19. Select the same Line from the Main Menu that the purge was performed in step 12. Before proceeding further, verify that process equipment and facility piping is ready to receive process gas. 20. Press START PROCESS GAS on the MODE MENU.

  • Page 136: Line Purge And Process Line Purging Procedures

    Line downstream of the manual Line outlet valve (MV9-1, 9-1, 9-3, 9-4) so that maintenance can be performed safely on the upstream Line. 1. Press and enter the password. Air Products and Chemicals, Inc. 8 - 12...
  • Page 137 Section 8: Operating Procedures 2. On the Main Menu screen, press the Mode Menu button for the Line you want to purge. 3. From the Mode Menu, select "START ROUGH LINE". 5. Rough Line Running will appear in the appropriate status box at the top of the screen.
  • Page 138 LINE button on the Mode Menu. If the sequence is interrupted, the full procedure will be repeated when restarted. 12. Upon completion, maintenance may be performed on the Line by following the maintenance procedures in Section 5. Air Products and Chemicals, Inc. 8 - 14...

  • Page 139: Rough Line Evacuation Procedure

    Section 8: Operating Procedures 8.4.2 Rough Line Evacuation Procedure This procedure purges hazardous gas from the selected Line 1 and the process line to the tool. Its purpose is to remove the major portion of the hazardous gas in the process line through the vent system of the Distribution System.

  • Page 140: Flow Purge Procedure

    Verify that the appropriate valves at the process tool have been opened to allow flow through purging. Press and enter the password. On the Main Menu screen, press the Mode Menu button for the Line you want to purge. Air Products and Chemicals, Inc. 8 - 16...
  • Page 141 Section 8: Operating Procedures From the Mode Menu, select "START FLOW PURGE". "FLOW PURGE RUNNING" will appear in the appropriate status box at the top of the screen. Follow any prompted manual steps on the screen. The flow through purge will continue until the operator initiates "STOP FLOW PURGE".

  • Page 142: Process Gas Flow Procedure

    (valve 2-1 for Line 1) and the status box will display "PROCESS GAS RUNNING". See the screen to the right for an example of process gas flow through Line 1. Air Products and Chemicals, Inc. 8 - 18...

  • Page 143: Stop Process Gas Flow

    Section 8: Operating Procedures 8.5.2 Stop Process Gas Flow Press and enter the password. 2. On the Main Menu screen, press the Mode Menu button for the Line you want to operate. 4. From the Mode Menu, select "STOP PROCESS GAS". 6.

  • Page 144: How To Operate In Manual Mode

    1. From the Line Menu screen, highlight "MANUAL MODE". The MANUAL MODE window will display 3. Operate valves referring to Section 8.6.2 below. 4. To exit MANUAL MODE, press Air Products and Chemicals, Inc. 8 - 20...

  • Page 145: How To Open And Close Valves

    Section 8: Operating Procedures NOTE: Pressing will close all the valves unless the Secure valve feature is used. This feature will not allow anyone with a low level password access to enter the controller while this feature is active. Distribution System must not be left unattended in Manual Mode, as access to the system in Manual Mode is open to anyone.
  • Page 146 While manual mode is ‘secured’, Manual Mode will be the only selectable option on the Main Menu. Distribution System must not be left unattended in Manual Mode, as access to the system in Manual Mode is open to anyone. Air Products and Chemicals, Inc. 8 - 22...

  • Page 147: General Principles Of Manual Operation

    Section 8: Operating Procedures 8.6.4 General Principles of Manual Operation Open valves in sequence starting at the first valve downstream of the pressure source and continuing to the next valve in sequence. For vacuum operation, open the valve closest to the vacuum source and continue to open the next valve in sequence.
  • Page 148 For safety considerations, most configuration parameters may be changed only by Air Products technical personnel. The paragraphs on the following pages describe each file in the Configuration Menu. Figure 8.8: Configuration Menu Air Products and Chemicals, Inc. 8 - 24...
  • Page 149 Section 8: Operating Procedures 8.8.1 Net Product This option is not used for the TE 10 Gas Distribution System. 8.8.2 Alarm Setpoints This option allows the operator to choose an analog setpoint or exit the window. When the operator chooses an analog setpoint, a keypad will be displayed to allow the operator to enter a new analog setpoint value.
  • Page 150 This option displays a list of the digital inputs and their current state. The state may be used to determine if the digital device is operating properly. To scroll through the digital input values, use the NEXT> <PREV keys. Air Products and Chemicals, Inc. 8 - 26...
  • Page 151 Section 8: Operating Procedures 8.8.6 Digital Outputs This option displays a list of the digital outputs and their current values. Outputs may be forced "on" (energized) or "off" (de-energized) to determine if the output is operating properly. This file operates in a similar manner to manual operation as described in Section 8.6.
  • Page 152 8.8.11 Password List The Password List manages user levels and passwords. There are two security access levels with permissions as given in Table 8.2. Air Products and Chemicals, Inc. 8 - 28...
  • Page 153 Section 8: Operating Procedures 8.8.12 Historical Alarms The Historical Alarms screen shows the past 250 alarm events retained in the internal log event list. Each alarm condition is displayed with a time and date stamp indicating when the alarm occurred and when it was acknowledged. The alarm list follows the order in which the alarms came in, in chronological order.

  • Page 155: Section 9: Troubleshooting

    Section 9: Troubleshooting Section 9: Troubleshooting This section explains how you can identify malfunctions present in the system. Troubleshooting is only to be performed by trained people who understand the hazards of the system. Before attempting to service the system or branch components, all pressure in the system or branch needs to be vented.

  • Page 156: Troubleshooting The Controller

    Verify internal circuit Place in “ON” position. breaker is in the “ON” position. Verify 24 VDC power Replace faulty power supply to PLC and Display. supply, or controller equipment. Air Products and Chemicals, Inc. 9 - 2...

  • Page 157: Incorrect Analog Value On Display

    Section 9: Troubleshooting 9.1.2 Incorrect Analog Value on Display Possible Source of Problem Test Solution No signal, or incorrect Verify the field device is Connect field device to signal from field device connected to the proper the proper receptacle on input receptacle.

  • Page 158: Valve Does Not Open

    Solution Electrical power failure Check the power being Restore specified power supplied to the system. to electrical control panel. Verify Internal circuit Place in “ON” position. breaker is in the “ON” position. Air Products and Chemicals, Inc. 9 - 4...

  • Page 159: No Or Low Purge Gas Pressure

    Section 9: Troubleshooting 9.2 No or Low Purge Gas Pressure Possible Source of Problem Test Solution Closed purge gas supply Check position of supply Open supply valve. valve valve. Purge gas supply pressure Check setting on pressure Set pressure regulator to regulator set incorrectly regulator.

  • Page 160: No Or Low Process Gas Pressure

    Are any vent valves open? Check position of all vent Close any vent valves if valves. open. Are process gas Check if instrument supply Adjust to 85-95 psig pneumatic valves is adequate. (5.9-6.6 barg) if receiving sufficient necessary. pressure to open? Air Products and Chemicals, Inc. 9 - 6...

  • Page 161: Typical Alarms

    Products and Chemicals. NOTE: Contact Air Products and Chemicals if the alarm displayed on the screen does not appear in this section. NOTE: Contact Air Products and Chemicals for the procedure for calibrating pressure transducers. 9.6.1 Excess Flow Probable Cause...

  • Page 162: Low Branch Delivery Pressure Or Very Low Branch Delivery Pressure

    Branch delivery pressure regulator is Decrease the process pressure set too high. regulator. Observe regulator for proper operation. If regulator will not maintain the setpoint, it may be "creeping". Contact your Air Products Technical Representative. Air Products and Chemicals, Inc. 9 - 8...

  • Page 163: Low Process Inlet Pressure Or Very Low Process Inlet Pressure

    Section 9: Troubleshooting PT1 (Process Inlet Transducer) Alarms The following are possible process inlet transducer alarms. 9.6.5 Low Process Inlet Pressure or Very Low Process Inlet Pressure Probable Cause Corrective Action Manual process gas inlet valve in Open manual valve. distribution system or manual process isolation valve at source cabinet is closed.

  • Page 164: Low Purge Inlet Pressure Or Very Low Purge Inlet Pressure

    The following are possible vent line transducer alarms. 9.6.9 High Vent or Very High Vent Pressure Probable Cause Corrective Action Vent line pressure is above the high or Check pollution abatement equipment very high setpoints. for obstruction. Air Products and Chemicals, Inc. 9 - 10...

  • Page 165: Low Vacuum Generated

    Section 9: Troubleshooting 9.6.10 Low Vacuum Generated Probable Cause Corrective Action Vacuum Venturi supply pressure or Verify a Venturi supply of 75-95 psig flow is insufficient. (5.2-6.6 barg) at 50-60 slpm (106-127 cfh) is obtainable. Vent isolation valve, MV22, is closed Open fully.

  • Page 167: Section 10: Maintenance

    Section 10: Maintenance Section 10: Maintenance 10.1 Warranty Seller warrants the Equipment manufactured by it to be free from defects in material and workmanship at the time of shipment from Seller's factory for a period of twelve (12) months from the date of shipment, (herein referred to as the "warranty period").

  • Page 168: Routine Maintenance

    Once the maintenance is complete, helium leak test the system using a mass spectrometer. Follow the start-up procedure, in Section 8.3. Air Products and Chemicals, Inc. 10 - 2...
  • Page 169 Section 10: Maintenance Personal injury or death may result if proper personal protective equipment (PPE) is not worn when performing troubleshooting. See Section 1.8 of this manual for the proper PPE. When piping is added, proper labels must be affixed to critical components. Failure to label correctly could result in inadvertent operation of system, possible resulting in personal injury or death.
  • Page 170 Observe 1/4 turn Every six months for diaphragm valves in closed corrosive gases. position. If the needle is Yearly for noncorrosive not in the green zone, gases. follow manufacturer's adjustment or repair procedure. Air Products and Chemicals, Inc. 10 - 4...
  • Page 171 Replace or clean as required. All components and parts have been selected by Air Products to be compatible with the gas or gases to which they may be exposed. This is particularly critical for the softgoods (i.e. o-rings, valves, seats and seals, etc.) It is critical that replacement...

  • Page 172: Safety Interlock Maintenance

    PT1, Process inlet pressure Verify that process inlet Every six months pressure above the high- high setpoint sounds the alarm and shuts the system down. Air Products and Chemicals, Inc. 10 - 6...

  • Page 173: Emergency Shutdown

    Section 10: Maintenance 10.4 Emergency Shutdown The following maintenance should be performed to verify functioning of the Emergency Stop Button. Item Task Frequency E-Stop Activate E-stop switch, Yearly verify system down, verify all solenoids closed by assuring air operated valves close within two (2) seconds.

  • Page 175: Section 11: System Specific Information

    Section 11: System Specific Information Section 11: System Specific Information This section is provided as a placeholder for information specific to the system. Some information is supplied with the equipment separate from the manual or may be supplied upon request. Revision –...

  • Page 176: System Specifications

     GASGUARD TE10 Distribution System Manual 11.1 System Specifications The specifications for the system follow this page. Air Products and Chemicals, Inc. 11 - 2...
  • Page 177 Section 11: System Specific Information 11.2 TE10 Recommended Spare Parts 11.2.1 Controller Recommended Spare Parts APCI Number Description Qty per 287-606449 3 Amp Circuit Breaker 287-607196 Surge Protection Plug 809-418802 Pneumatic Logic Switch 809-609272 MP277 Display, 10.4", Multisync, Touch 809-609273 Air Filter 809-609274 Power Supply...

  • Page 178: Distribution System Recommended Mechanical Spare Parts

    Purge Gas Spool Purge Filter (if used) Contact Air Products and Chemicals, Inc. when ordering spare parts. Your equipment commodity code number will be required when placing your order. The commodity code number can be found on the distribution system enclosure door, distribution system rack frame or distribution system wall mount frame and is a 7 digit number preceded by an “801-.”...

  • Page 179: Program Logic Chart

    Section 11: System Specific Information 11.3 Program Logic Chart The program logic chart for the system follows this page. Revision – August 2009 11 - 5...
  • Page 181 Appendix A Appendix A This Appendix contains the SEMC-QAF030 "UHP Tubing and Fitting Specification". Revision – November 2004 Page A - 1...
  • Page 182 ASTM A479 - Specification for general requirements for carbon, ferritic alloy, and austenitic alloy steel bar. ASTM A632 - Specification for seamless and welded austenitic stainless steel tubing (small diameter for general service). Air Products and Chemicals, Inc. Page A - 2...
  • Page 183 Appendix A ANSI/ASME B46.1 - 1985 - Specification for surface texture-surface roughness, waviness, and lay. Procedure: General Requirements 6.1.1 All tube and bar stock shall be produced from ASTM grade TP316L raw material unless specified in the purchase order. Tubing sized smaller than 3" shall be seamless and larger than 3"...
  • Page 184 DI water until the resistivity of the effluent measures at least 17.5 Megohm-cm for diameters less than 3 inches and 17.0 megohm-cm for diameters greater than or equal to 3 inches. Air Products and Chemicals, Inc. Page A - 4...
  • Page 185 Appendix A 6.5.4 The tube shall be blown dry with heated nitrogen gas Fittings Cleaning 6.6.1 Final cleaning of fittings shall be performed under Class 100 environment. Fittings shall be flushed with heated DI water ( 60 o C) minimum. 6.6.2 6.6.3 Fittings shall be blown dry with heated nitrogen gas...
  • Page 186 Rockwell Rb 90 maximum hardness. This test shall be performed for each size after "pulling". 6.8.12 APCI reserves the right to source inspect all tubing and fittings and inspect the manufacturers facilities upon request. Air Products and Chemicals, Inc. Page A - 6...
  • Page 187 Appendix A Reports and Certifications: 6.9.1 The vendor shall supply the following reports and certifications as follows: 6.9.1.1 One set of reports shall be sent to SEMC QA prior to receipt of material at SEMC. The components will be cross referenced to the received reports for acceptable vendor traceability numbers.
  • Page 189 Appendix B Appendix B This Appendix contains the Nitrogen (N2) Material Safety Data Sheet. Revision – November 2004 Page B - 1...
  • Page 190 ® GASGUARD TE10 Distribution System Manual Air Products and Chemicals, Inc. Page B - 2...
  • Page 191 Appendix B Revision – November 2004 Page B - 3...
  • Page 192 ® GASGUARD TE10 Distribution System Manual Air Products and Chemicals, Inc. Page B - 4...
  • Page 193 Appendix B Revision – November 2004 Page B - 5...
  • Page 194 ® GASGUARD TE10 Distribution System Manual Air Products and Chemicals, Inc. Page B - 6...
  • Page 195 APPENDIX C Appendix C This Appendix contains the Gasguard Pressure Equipment Directive (PED) Assessment Certificate (the PED is applicable only to the European Community). Revision – November 2004 C - 1...
  • Page 196 This equipment has been classified as SEP in accordance with Article 3, Section 1.3 of the Pressure Equipment Directive 97/23/EC on the basis that all components contained herein are less than DN25. The equipment has been designed and manufactured following ‘Sound Engineering Practice’ and Air Products Engineering Standards.

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