Johnson Electric Nanomotion SE Series User Manual
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Johnson Electric Nanomotion SE Series User Manual

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SE Motors
User Manual
Vacuum & Non-Vacuum
Document No. SE00458000-00, Rev B
Date: December 2020
Nanomotion Ltd. POB 623, Yokneam 20692, Israel
Tel: 972-73-2498000 Fax: 972-73-2498099
Web Site:
www.nanomotion.com
E-mail: nano@nanomotion.com
Document Number: SE00458000-00
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  • Page 1 SE Motors User Manual Vacuum & Non-Vacuum Document No. SE00458000-00, Rev B Date: December 2020 Nanomotion Ltd. POB 623, Yokneam 20692, Israel Tel: 972-73-2498000 Fax: 972-73-2498099 Web Site: www.nanomotion.com E-mail: nano@nanomotion.com Document Number: SE00458000-00 Page 1...
  • Page 2 Copyright Copyright © 2018 by Nanomotion Ltd. All rights reserved worldwide. No part of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval system, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of Nanomotion Ltd., Mordot HaCarmel Industrial Park, Yokneam, 20692, Israel.
  • Page 3 Contact Information Website: www.nanomotion.com Customer Service Contact your local distributor or email Nanomotion Ltd. Technical Support Department at techsupport@nanomotion.com, with detailed problem description, additions, corrections or suggestions. Nanomotion Ltd. Worldwide Headquarters Mordot HaCarmel Industrial Park HaCarmel Street, PO Box 623 Yokneam 20692 Tel: +972-73-249-8000 Fax: +972-73-249-8099...

  • Page 4: Table Of Contents

    Table of Contents INTRODUCTION ............................6 1.1. CE COMPLIANCE ..........................6 1.2. CONVENTIONS USED IN THIS MANUAL ..................6 1.3. RELATED PRODUCTS ........................7 1.4. RELATED DOCUMENTATION......................7 OVERVIEW OF THE SE MOTORS ......................8 2.1. SE MOTOR SYSTEM .......................... 8 2.2.
  • Page 5 7.1. VACUUM MOTOR BAKING INSTRUCTIONS ..................29 7.1.1. Motors Only Procedure ......................29 7.1.2. Full Systems with Motors Mounted ..................30 7.1.3. Multiple Motors per Axis Systems ................... 31 7.2. SE4 MECHANICAL DRAWINGS ....................... 32 7.3. SE8 MECHANICAL DRAWINGS ....................... 33 Document Number: SE00458000-00 Page 5...

  • Page 6: Introduction

    INTRODUCTION This user manual provides general instructions for Nanomotion SE4 and SE8 motors. These motors can be controlled and driven by different Nanomotion Drivers as well as by user developed hardware. During planning and design of the motion system refer to both this manual and the user manual for the Nanomotion Driver being used.

  • Page 7: Related Products

    1.3. RELATED PRODUCTS The following table lists Nanomotion products covered by these instructions. Product Part Number SE4 Vacuum Motor SE4-1-V-3 SE8 Vacuum Motor SE8-1-V-3 1.4. RELATED DOCUMENTATION The following table lists related Nanomotion guides and manuals. Document Document number AB7 Driver User Manual AB07458000-00 Document Number: SE00458000-00 Page 7...

  • Page 8: Overview Of The Se Motors

    OVERVIEW OF THE SE MOTORS The SE series of motors are high precision ceramic motors. The SE motors combine unlimited stroke with high position resolution, in compact dimensions. The motors are used in applications such as microscopy, precision motion, robotics, etc. The SE motors are available in versions that are compatible with ambient air, vacuum and ultra- high vacuum operating environments.

  • Page 9: General Precautions

    Figure 1: Closed-Loop SE Motor Drive System Block Diagram 2.2. GENERAL PRECAUTIONS When handling SE motors observe the following precautions: • The motor has a high voltage inside when powered on. Do not open the motor! • Do not apply electric power unless the motor is mounted and pre-loaded against a driving strip or a driving ring.

  • Page 10: Mounting And Connecting Se Motors

    MOUNTING AND CONNECTING SE MOTORS For optimal motor performance, it is recommended to use only the Ceramic Drive Strips provided by Nanomotion. These Ceramics have been specifically designed to work with Nanomotion motors. Substituting this strip with any other material might reduce motor performance or damage the motor.

  • Page 11: Preparing The Stage Base

    3.1. PREPARING THE STAGE BASE The application's SE motor and Carriage are mounted on the Stage base. The form of the Base and the Carriage are application dependent. However, some basic rules are applicable to all designs in order to ensure optimal performance. It is critical that the stiffness of the stage along the direction perpendicular to the motion direction of carriage travel is >50N/µm.
  • Page 12 The motor has 2 mounting options: 1. 4x M5 screws that are threaded to the motor. It is recommended to add slots for motor preload adjustment. 2. 4x M4 through all screws (screws are passing through the M5 threads) to be threaded to the mounting base Location of the screws is shown in Figure 3.

  • Page 13: Stage Carriage Design Guidelines

    3.3. STAGE CARRIAGE DESIGN GUIDELINES The Carriage is the customer designed portion of the Stage that is moved by the SE motor. The interface between the Stage and the motor is the Ceramic Drive Strip. The designer must limit the Stage motion (preferably via hardstops) to prevent a loss of contact between the motor tip(s) and the Ceramic Drive Strip on the Carriage.

  • Page 14: Bonding The Driving Strip To The Carriage

    3.4. BONDING THE DRIVING STRIP TO THE CARRIAGE The Driving Strip provides the interface between the motor's tips and the Carriage. It must present a solid surface to ensure accuracy of movement as well as long operating life. 3.4.1. MOUNTING CERAMIC STRIP ON LINEAR STAGE The Driving Strip is supplied with double-sided tape along one surface for mounting to the carriage.
  • Page 15 Figure 7: Securing the Ceramic to the Stage Figure 8: Epoxy Coverage on Flat and 90 Degree Joints Ensure that the epoxy contacts the ceramic plate and the stage carriage. Ensure that it does not flow onto the Ceramic Strip’s front surface where motor tips operate.

  • Page 16: Motor Installation - Linear Stages

    3.5. MOTOR INSTALLATION – LINEAR STAGES After the Carriage is mounted on the Base the motor can be mounted. SE motors can be mounted on either of the motor’s two flat surfaces. To install SE motors using the M5 motor thread option, use the following items: ...
  • Page 17 Figure 9: Preloading of the SE4 and SE8 motors 7. Connect the motor as described in section ‎ 3 .6 and perform motor conditioning as described in section ‎ 4 . Document Number: SE00458000-00 Page 17...

  • Page 18: Electrical Connections

    3.6. ELECTRICAL CONNECTIONS The motor requires two electrical connections.  System ground (provided through the shield of the motor power cable)  Power and control cable 3.6.1. GROUNDING THE MOTOR Nanomotion motors must be grounded to maintain electrical continuity with the Driver and ensure electrical safety for the system and users.

  • Page 19: Connecting A Standard Motor Cable

    3.7. CONNECTING A STANDARD MOTOR CABLE Nanomotion guarantees proper Driver and motor performance only when a Nanomotion standard cable is used. Consult Nanomotion before making any changes to cable lengths or cable types.  The Motor-Connected interlock is available on Nanomotion standard motor connector.
  • Page 20 Function Description Motor-Connected Short pin 6 to pin 1 - enables Driver. Open on pin 6 - Safety input disables the Driver. System ground - Connected to connector hood N.C. Not connected N.C. Not connected Document Number: SE00458000-00 Page 20...

  • Page 21: Motor Conditioning

    MOTOR CONDITIONING Before conditioning the motor refer to the user manual for the Driver used in the application for the instructions on how to complete the interconnections of the motor, Driver, and servo controller. Conditioning of the motor is important to stabilize the motor’s dynamic performance and balance the motor heat dissipation.

  • Page 22: Maintenance

    When conditioning is completed, carefully clean the Ceramic with a lint free cloth and isopropyl Alcohol IPA \ Ethanol. Do not remove the motor from the base during cleaning. ! General remark: Conditioning should be repeated if the motor is removed from the stage and then reinstalled or if the preload is released.

  • Page 23: Se Motor Specifications And Dimensions

    SE MOTOR SPECIFICATIONS AND DIMENSIONS This chapter provides mechanical and electrical specifications for SE motors and mechanical drawings to provide motor dimensions. 5.1. GENERAL INFORMATION These specifications apply to the standard motor driven by the AB7 Driver Box in standard or linear mode.

  • Page 24: Se Motor Specifications

    The figure above shows a typical SE Driver/Motor Sub-system. A command voltage up to ±10V is applied to the driver. The driver then generates a sine wave whose amplitude is a function of the command voltage. The sine wave drives the SE motor. 5.2.
  • Page 25 Table 4: Environmental Specifications of SE4 and SE8 motors Specification SE4 motor SE8 motor Ambient Temperature: 0 - 50º C 0 - 50º C Storage: -10 to +50º C -10 to +50º C Humidity: 0 - 80% non-condensing 0 - 80% non-condensing Vacuum level for high- 1e-10 Torr (guaranteed only 1e-10 Torr (guaranteed only after...

  • Page 26: Thermal Envelope Of Performance

    THERMAL ENVELOPE OF PERFORMANCE Motor operating temperature is a result of the balance between heat generation and heat dissipation.  The heat generation depends on motor's work regime (Driver command level).  The heat is dissipated through the following heat transfer mechanisms: ...
  • Page 27 Figure 13 : Motor Force vs. Velocity of SE4 and SE8 motors, at the various Work Regimes at the Normal Operation Mode (a-g) Table 6: Envelope of Performance parameters for SE4 and SE8 motors driven by an AB7 Driver at the Normal operation mode Air 25°C Air 50°C...

  • Page 28: An Example For Defining The Eop For Ab7 Driver In Vacuum Environment

    6.2. AN EXAMPLE FOR DEFINING THE EOP FOR AB7 DRIVER IN VACUUM ENVIRONMENT An example for using Figure 13 and table 6 for the AB7 Driver: Figure 13 An example vacuum application requires 15N at a velocity of 100mm/sec. shows that this point of operation corresponds to the curve d for SE8 motor.

  • Page 29: Appendix

    APPENDIX This appendix provides the following information.  Vacuum motor baking instructions  Mechanical Drawings 7.1. VACUUM MOTOR BAKING INSTRUCTIONS This manual is intended to guide the user in performing the bake-out procedure on Nanomotion (NM) vacuum (V), vacuum non-magnetic (VN) and prior to their operation. The bake-out procedure should be performed in a vacuum oven, either on motors alone or, on complete systems with motors mounted, under approval of the stage manufacturer.

  • Page 30: Full Systems With Motors Mounted

    Table 7: Bake-Out Conditions Minimal Motor Recommended Temperature Duration Type Vacuum Level (°C) (hours) (Torr) V, VN 85°C 5. Gradually raise the temperature, at a maximum rate of 4°C/min to the Table 7. temperature, specified in 6. Maintain the motor for 60 hours in the oven under the specified vacuum conditions.

  • Page 31: Multiple Motors Per Axis Systems

    4. Place the system in a vacuum oven. 5. Perform bake-out. 7.1.3. MULTIPLE MOTORS PER AXIS SYSTEMS For baking-out a system, with motors mounted and connected by means of branch cables, perform the following steps: 1. Disconnect the motors from the branch cable. 2.

  • Page 32: Se4 Mechanical Drawings

    7.2. SE4 MECHANICAL DRAWINGS Document Number: SE00458000-00 Page 32...

  • Page 33: Se8 Mechanical Drawings

    7.3. SE8 MECHANICAL DRAWINGS Document Number: SE00458000-00 Page 33...

This manual is also suitable for:

Nanomotion se4Nanomotion se8

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