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Micronix ES-50 Series Reference Manual

Elevation stage
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ES-50
S e r i e s
Elevation Stage
Reference Manual
(Open and Closed Loop Versions)
USA

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Summary of Contents for Micronix ES-50 Series

  • Page 1 ES-50 S e r i e s Elevation Stage Reference Manual (Open and Closed Loop Versions)
  • Page 2 ES-50 Elevation Stage Reference Manual Rev 3.05 MICRONIX USA, LLC Tel: 949-480-0538 Fax: 949-480-0538 Email: info@micronixusa.com http://micronixusa.com...

  • Page 3: Table Of Contents

    Operating and Electrical Specifications 5.3.4 Output Signals General Technical Specifications Electrical Connections 6.1.1 Motor Pinout & Cable 6.1.2 Encoder Pinout 6.1.3 Stepper Motor Limit Switches 6.2.1 Mechanical Limit Switches 6.2.2 Limit Switch Schematic 6.2.3 Direction of Motion MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...
  • Page 4 ES-50 Elevation Stage Reference Manual Dimensions 6.3.1 ES-50 10mm Stacking Configurations Possible Configurations Supplementary Information Maintenance Units and Conventions MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

  • Page 5: Introduction

    Optional linear encoder with 50 nm resolution ▪ Payload Mounting Surface Side Cover Encoder Head Base Plate Encoder Scale ES-50 Open Loop Version ES-50 Closed Loop/Encoder Version (Shown at minimum travel) (Shown at maximum travel) MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

  • Page 6: Recommended Controllers

    ES-50 Elevation Stage Reference Manual Recommended Controllers The following controllers are available from MICRONIX USA: MMC-200 ▪ Technical Data Motor SM-001 Pitch (μrad) ±300 Speed Max. (mm/sec) 0.5 (Open Loop); 0.05 (Closed Loop); Resolution Typical (μm) 0.5 (Low Cost Closed Loop) Bi-directional Repeatability (μm)

  • Page 7: Model Configurations

    Order No. SM-001 10 mm Open Loop Analog(1Vpp), 50nm* Digital(RS-422), 50nm* Digital Low Cost(RS-422), Mechanical Limits Non-vacuum Vacuum prepared, 10 mbar * Other resolutions available upon request. Contact MICRONIX USA for custom versions and stacking configurations. MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

  • Page 8: Preparing To Install The

    Locate away from water, heat, and electrical noise ▪ Package Contents If product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: ES-50 Elevation Stage ▪...

  • Page 9: Installing The

    Additional brackets may be needed for custom applications. Requires: 2x M1.5 x 5mm Dowel Pins 4x M3 x 10mm Socket Head Cap Screws Move Carriage via controller to access mounting holes Customer supplied mounting surface MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

  • Page 10: Connecting The

    Using the ES-50 stage with an encoder requires a closed loop compatible controller that recognizes encoder feedback. Connect the stage as shown below using the supplied 15 to 9 pin cable to connect the Encoder Module to the Controller. MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

  • Page 11: Vacuum Environments

    Connecting the ES-50 in an open loop requires the use of a feed through connector at the vacuum chamber wall. Match wire colors when passing the ES- 50 motor cable through the feed through connector. Flying leads standard. Requires customer supplied feed through connector MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

  • Page 12: Closed Loop/Encoder Installation & Wiring Diagram

    Encoder Module (atmospheric side). Also, connect the shield of the Encoder Head to the shield of the Encoder Module through the feed through connector. Flying leads standard. Requires customer supplied feed through connector MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

  • Page 13: Using The Encoder Module

    LED’s indicating a power source and proper encoder alignment. A Red or Yellow LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not manually adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders.

  • Page 14: Operating And Electrical Specifications

    5VDC ±5% @ 330mA (30mA for sensor) Operating Temperature 0 to 70°C Humidity 10 - 90% RH non-condensing 5.3.4 Output Signals *Note: The index pulse may be aligned with A- or B- at some interpolation values. MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

  • Page 15: General Technical Specifications

    Not Used Not used Not Used  For vacuum prepared wiring, blue may be substituted for green/white, and black for red/white.  Limit Switch Common (pin 5) is connected to ground in MICRONIX USA controllers 6.1.2 Encoder Pinout Function Analog A+/Cos+...

  • Page 16: Limit Switches

    The limit switches are factory calibrated to ensure advertised travel length and cannot be adjusted by the customer. For custom travel lengths, please contact MICRONIX USA. 6.2.1 Mechanical Limit Switches...
  • Page 17 ES-50 Elevation Stage Reference Manual ES-50 shown in retracted position Dimensions 6.3.1 ES-50 10mm *Grey parts for closed loop version only MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...
  • Page 18 Using the ES-50 Elevation Stage and VT-50 Linear Stage X-Z 55x10 mm X-Y-Z 55x55x10 mm X-Y-Z 100x100x10 mm Using the ES-50 Elevation Stage and VT-21 Linear Stage Z-X-Y 10x10x10 mm Z-X 10x10 mm Z-X (side) 10x10 mm MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...
  • Page 19 Units and Conventions All measurements in this document are in the metric system of units. Metric Unit English Unit 1 millimeter 0.0394 inches 1 micron 0.0000394 inches 1 Newton 0.2248 lbs. 1 Newton-meter 8.85 in-lbs. MICRONIX USA,LLC Rev: 3.05 www.micronixusa.com...

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