FLOW METERS
FA Series
■ Sensor
A thermal mass flow meter sensor enables
accurate measurement even in the case of
gas temperature and pressure fluctuations.
Sensor structure
The FA Series flow meter measure flow rates using heat from the heater
and a temperature sensor. In a no flow state, the air temperature
distribution around the heater is uniform, so there is no difference in the
temperature between the upstream and downstream temperature sensor
positions. When flow is received in this state, the downstream temperature
rises while the upstream temperature falls, so a temperature difference
between the upstream and downstream sensor positions is generated.
This temperature different is measured and a flow rate is calculated.
FLOW
Upstream temperature sensor
Diaphragm
Heater
Ambient temperature
sensor
Silicon chip
Measurement principles
Temperature distribution
No flow state
■ Models
Practical measuring range of 50:1 (excluding some mounting directions) helps to provide an idea of air leaks.
Model
Port size
FAS-002
Rc1/4
FAS-005
Rc1/2
FAS-030
Rc1
FAS-060
Rc1 1/2
FAS-120
Rc2
Note: Values in parentheses are flow measurement ranges for mounting directions 2 and 3. Refer to page 1675 for information about mounting directions.
1636
Downstream temperature
sensor
Temperature distribution
FLOW
Flow received state
Flow measurement range (±3% FS accuracy guaranteed range)R/min (normal)
4 ( 10 )
200
Note
10 ( 25 )
Note
60 ( 150 )
120 ( 300 )
■ Rotary display
The display of the flow meter can be rotated 90° to the left or 180° to the right,
making it easy to read regardless of whether piping is horizontal or vertical.
90 left
180 right
Note: Do not try to rotate the display more than 90° to the left or 180° to the right.
500
3000
Note
Note
240(600)
Note
03̲2016
FL O W
Standard position
90 right
6000
12000
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