Summary of Contents for horiba SEC-E431X
- Page 1 MASS FLOW CONTROLLER MASS FLOW METER SEC/SEF-E431X/E441X (PTFE TYPE) Instruction Manual CODE: I031150800...
- Page 2 Jun, 2012 © 2007 – 2012 HORIBA STEC, Co., Ltd.
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Page 3: Table Of Contents
CONTENTS 1. INTRODUCTION 2. SPECIFICATIONS 3. PRINCIPLE OF FUNCTIONING 4. EXTERNAL DIMENSIONS 5. CONNECTOR 6. -
Page 4: Introduction
Thank you for purchasing our mass flow controller SEC(SEF) -E400X series. Prior to using it, please read this manual thoroughly to use it properly for a long period of time. 2. Specifications 2-1 Mass flow controller (SEC-E431X/SEC-E441X) Type *1 SEC-E431X... -
Page 5: Principle Of Functioning
2-2 Mass flow meter(SEF-E431X/SEF-E441X) Type *1 SEF-E431X SEF-E441X Standard flow rate range *2 50 / 100 SLM 200 SLM (Full scale flow rate equivalent to N ±1.0% F.S. Accuracy *3,*4 Operating temperature 5〜45℃ Linearity *3 Within ±0.5% of F.S. Within ±0.5% of F.S. Repeatability *3 Operating differential pressure *5 Less than 300 kPa (D) -
Page 6: External Dimensions
4. External Dimensions SEC(SEF)-E431X/E441X 【Top Connector Type】 【Side Connector Type】... -
Page 7: Connector
5. Connector Connector type : D-Subminiature 9-pin connector(M3 fitting screw type) Connector Pin Connections List PIN No. Signal Valve opening/closing input *1 Flow rate output 0 to 5 VDC (Min. load resistance 2kΩ) +15VDC Power Power COMMON *2 -15VDC Power Setting input 0.25 to 5 VDC *1 (Input impedance 1MΩ... -
Page 8: How To Use
How to use 1) Connect a gas line in the arrow direction given on the main body. 2) Make electrical connection in accordance with the Connector Pin Connections List. For the DC power, use the following capacity: +15V , 50mA and –15V , 200mA or more 3) After turning on the power, stop the gas and warm up the apparatus for about 5 minutes. -
Page 9: Connections
7. Connections If the HORIBA STEC ’s peripheral devices are not used, connect according to the figure below. ※ Open Control Close +15V Power COMMON -15V ... -
Page 10: Precautions For Handling
Each 15v power source should be turned on/off simultaneously. Partial power supply or signal input and plugging/unplugging while power is supplied may cause trouble. 14) HORIBA STEC converts a flow rate value into 25℃,1013hPa(1atm) or 0℃,1013hPa(1atm) to calibrate. Gas flow rate in the following states: CCM, LM : 25℃, 1013hPa(1atm) -
Page 11: Product Warranty
③ When the apparatus is used or stored in an inadequate environment. ④ When the apparatus is used beyond the rated specifications or remodeled. ⑤ When it is determined that the trouble is not attributable to HORIBA STEC responsibility. Examples : With highly corrosive gas used, when the facility has not been fully purged or there is a leak from the gas line. - Page 12 10. Chemical Content Information(The Six China RoHS Restricted Materials) 产品中有毒有害物质或元素的名称及含量 Name and amount of toxic/hazardous substance or element used in a product 有毒有害物质或元素 Toxic/hazardous substance or element 部件名称 六价铬 多溴联苯 多溴二苯醚 铅 汞 镉 Unit name Hexavalent Polybromo- Polybromo- Lead Mercury Cadmium chromium ...
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