Table of Contents
Advertisement
Quick Links
Advertisement
Table of Contents
Summary of Contents for BRONKHORST M+W Instruments SW-10n Series
- Page 1 Instruction Manual Vapor Delivery Module Doc. no.: 9.17.079A Date: 15-10-2014 ATTENTION Please read this Instruction Manual carefully before installing and operating the instrument. Not following the instructions could result in personal injury and/or damage to the equipment.
- Page 2 Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular persons or organizations.
- Page 3 Warranty Bronkhorst products are warranted against defects in material and workmanship for a period of three years from the date of shipment provided they are used in accordance with the ordering specifications and not subjected to abuse or physical damage.
-
Page 4: Table Of Contents
Bronkhorst® Table of contents Scope of this manual ..................................6 Introduction and intended use ..................................6 References to other applicable documents ..................................6 1.2.1 Related documents ..................................6 1.2.2 Software tooling ..................................6 Starting up ..................................7 Check properties ..................................7 Rated pressure test inspection .................................. - Page 5 Bronkhorst® 4.6.2.3 To stop the process ..................................16 4.6.2.4 How to leave system overnight ..................................16 4.6.2.5 To empty and purge the system ..................................16 Operation ..................................17 Power- and warm-up ..................................17 User interface ..................................17 5.2.1 Buttons ..................................17 5.2.2...
-
Page 6: Scope Of This Manual
These documents Contain information for basic and advanced operation, more detailed product information and instructions for troubleshooting. 1.2.2 Software tooling For RS232 or FLOW-BUS operation the following Bronkhorst software is available. Software tool to interface between digital instruments and windows software FlowDDE FlowView... -
Page 7: Starting Up
Bronkhorst® Starting up Check properties Before installing a Vapor Delivery Module it is important to read the attached labels and check: Model key Pressure rate Temperature (ambient) Power supply Power Rated pressure test inspection Each Vapor Delivery Module is pressure tested to at least 1.5 times the working pressure of the process conditions stipulated by the customer, with a minimum of 8 [bar]. -
Page 8: Technical Specification
Bronkhorst® Technical specification Physical dimensions For overall dimensions please consult supplied dimensional drawing 7.05.901. This documents is available on: http://www.bronkhorst.com/en/downloads or can be obtained by contacting our local sales & service representatives Environmental conditions • Ambient temperature : 5°C - 40°C. -
Page 9: Capacities
Bronkhorst® 3.4.3 Capacities Figure 1: Capacity SW-100 Vaporizer Figure 2: Capacity SW-200 Vaporizer 3.4.4 Pressure rating • Gas supply = max. 10 bar(g) • Liquid supply = max. 10 bar(g) • Vapor pressure = atmospheric Piping For optimal performance of the system it is recommend to have at least 10 pipe diameters distance between the angle and the equipment inlets. -
Page 10: Tracing
Bronkhorst® 3.6.2 Tracing Optionally, the Vapor Delivery Module can be provided with a trace temperature control. In this case, the VDM-Series is provide with a tracing output IEC 60320-2-2 / C13 female connector. This connector is intended for connecting tracing tape, which is not supplied. -
Page 11: Connector Specifications
Bronkhorst® Connector specifications 3.7.1 Hook-up diagram 9.17.079 Vapor Delivery Module... -
Page 12: Installation
Seals Bronkhorst® has gathered a material compatibility chart from a number of sources believed to be reliable. However, it is a general guide only. Operating conditions may substantially change the accuracy of this guide. Therefore there is no liability for damages accruing from the use of this guide. The customer’s application will demand its own specific design or test evaluation for optimum reliability. -
Page 13: Purging / Filling
Bronkhorst® Purging / filling 4.6.1 Startup without using vacuum 4.6.1.1 To fill the system Procedure: Actions: Purge all lines Close V2, V3 and V7 Open V1, V4, V5 and V6 Give setpoint 100% to MFC Give setpoint 0% to LFC Purge for a long time. -
Page 14: To Start The Process
Bronkhorst® 4.6.1.2 To start the process Procedure: Actions: Set the heater at right temperature Give set point to the heater; wait until the temperature is stabilized Start gas flow Give setpoint to MFC Make sure that the carrier gas is always flowing when the liquid flow is on. -
Page 15: Startup With Using Vacuum
Bronkhorst® 4.6.2 Startup with using vacuum 4.6.2.1 To fill the system Procedure: Actions: Evacuate the lines “Vacuum” Start pumps Evacuate all lines Close: V1, V2, V3, V4, and V6 Make sure that “waste” and “process” are vacuum Connect inert gas on carrier gas inle. -
Page 16: To Stop The Process
Bronkhorst® 4.6.2.3 To stop the process Procedure: Actions: Disconnect process Open V6, close V7 Stop liquid flow Give setpoint = 0 to LFC Optional: Stop gas flow Give setpoint = 0 to MFC Make sure that the carrier gas is always flowing when the liquid flow is on. -
Page 17: Operation
Bronkhorst® Operation Power- and warm-up Before switching on the power, be sure that: System is checked for leakage of gases and liquids All connections have been made Flow-set points are zero No liquid has been spilled into the equipment Switch on and then: Allow 30 minutes (from switching on) to warm up (common for thermal flow controllers) Wait until pre-set temperatures are reached. -
Page 18: Select Instrument
Bronkhorst® 5.2.3 Select Instrument The Vapor Delivery Modules contains liquid and gas flow controllers. Also a temperature controller for evaporation and optional trace heating is provided. These integrated instruments have unique node addresses. Factory default node addresses are: Node address... -
Page 19: Temperature And Flow Setpoint
This chapter explains the most important user interface options. For more information please check the E-8000 manual 9.17.076 at: http://www.bronkhorst.com/en/downloads Operating settings Make sure that the tracing and heating temperatures are well above the dew point of the desired vapor flow at the process conditions. -
Page 20: Operation Example
/min Air has to be moistened. Which water flow is needed for a r.h. of 50%. The vapor pressure of water at 80°C is 473.3 mbar according to FLUIDAT®. FLUIDAT® on the Net: Bronkhorst High-Tech's interactive Flow Calculations and routines generating Physical Properties. Visit www.fluidat.com Assumptions: Consider water vapor as an ideal gas, 1 mole of ideal gas at normal conditions = 22.4 l, 1 mole of water is 18 g and 1 hour is 60 min. -
Page 21: Vaporpressure Of Water
Bronkhorst® 5.3.2 Vaporpressure of water 9.17.079 Vapor Delivery Module... -
Page 22: Troubleshooting And Service
Bronkhorst® Troubleshooting and service Troubleshooting Symptom Possible cause Action No heating of heater, everything else works 1. Mains switch turned off Turn on mains switch (no ready heater LED after 10 minutes) 2. Fuse may be blown Replace fuse (check mains and heater fuse) 3. -
Page 23: Maintenance
For cleaning the exterior use a soft damp cloth. Service For current information on Bronkhorst High-Tech B.V. and service addresses please visit our website: http://www.bronkhorst.com Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. -
Page 24: Removal And Return Instructions
Contaminated instruments must be dispatched with a completely filled in 'declaration on contamination form'. Contaminated instruments without this declaration will not be accepted. Important: Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely: NL801989978B01 If applicable, otherwise contact your distributor for local arrangements.
Need help?
Do you have a question about the M+W Instruments SW-10n Series and is the answer not in the manual?
Questions and answers