Summary of Contents for Brewer Science Cee 1300CSX
- Page 1 ® Brewer Science ® 1300CSX Thermal Debonder Maintenance Manual Version 01-2014-A © 2014 Brewer Science, Inc.
- Page 2 1.1 Inspection and Service Schedule Daily • Check upper and lower platens for contamination Quarterly • Replace contaminated vacuum lines • Replace or repair damaged cables • Clean any material off of the platens • Check parallelism of upper and lower platens Yearly •...
- Page 3 1.4 Replacement of Vacuum Lines The vacuum lines from the platens to the vacuum manifolds should be visually inspected quarterly for debris in the lines. If there is excessive debris, replace the 1/8 PTFE tubing with new tubing. Vacuum Line Replacement Instructions 1.
- Page 4 1.5 Parallelism of the Lower and Upper Platen The parallelism of the lower and upper platens should be checked quarterly or when an issue in tool performance is noticed (vacuum loss, contaminated platen, etc.). For the tool to be operational the lower platen must be parallel with the linear movement of the X Axis slide and the upper platen must be parallel to the lower platen.
- Page 5 1.6 Cleaning and Lubrication of the Slide Table Cleaning of the Slide Table should be cleaned and lubricated annually or every 10,000 cycles (whichever comes first). 1.6.1 Cleaning The cleaning process is used in Step 5 of the Lubrication Procedure in Section 1.6.2. Before using a cleaning solvent on any part of the Slide Table, blow away small particles and dust with clean, dry, compressed air.
- Page 6 1.7 Cleaning and Lubrication of the WaferMax Z The WaferMax Z stage should be cleaned and lubricated annually or every 10,000 cycles (whichever comes first). 1.7.1 Cleaning The cleaning process is used in Step 5 of the Lubrication Procedure in Section 1.7.2. Before using a cleaning solvent on any part of the WaferMax Z, blow away small particles and dust with clean, dry, compressed air.
- Page 7 1.8 Replacement of Filters Replace the elements every 2 years or when the pressure drop across the filter becomes 0.1 MPa (14.5 psi), whichever comes first, to prevent damage to the element. Filter Replacement Instructions 1. Power down the 1300CSX, turn off and vent the N2 / CDA supply, and remove the back panel off of the Electronics Box by removing the two thumb nuts.
- Page 8 1.9 Measuring and Setting the Temperature Bias The bias allows the operator to compensate for any difference between the sensor temperature and the point to be measured. The process display and setpoint will be offset by the value entered in the “Offset” parameter in the controller software. Ex: Desired temperature is 150 degrees.
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