Table of Contents
Summary of Contents for Temescal FC-3800
- Page 1 0101-8604-0 ACILITY AND NSTALLATION UIDE FOR FC-3800 E VAPORATION YSTEMS Revision F, March 2011 Temescal, a division of Ferrotec (USA) Corporation 4569-C Las Positas Road, Livermore, CA 94551 Tel: 1-800-522-1215; Fax: 925-449-4096...
- Page 2 0101-8604-0 Revision Change Description Reason/ Date Approved Application First version of F & I Guide Applies to all FC-3800 Feb. 2000 systems built between 2/2000 and 6/2006 Added illustrations to Section 3 Applies to all FC-3800 July systems built after 6/2006...
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Page 3: Table Of Contents
Routing of Customer-Supplied Service Lines in 208-V Installations 3-10 Routing of Customer-Supplied Service Lines in 400-V Installations 3-11 Routing of Temescal-Supplied Helium Lines to Cryopump Compressors 3-12 Routing of Control/Data Cables on Systems with the Simba 2 Power Supply 3-13... - Page 4 This page intentionally left blank for pagination purposes. FC-3800 F & I Guide 0101-8604-0, Rev. F...
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Page 5: Safety Instructions For Operating And Service Personnel
RF energy may be radiated outside the equipment. Monitor the equipment to assure that external RF radiation is below the levels prescribed by any and all applicable safety codes. 0101-8604-0, Rev. F FC-3800 F & I Guide... - Page 6 18(d) and 28 of the 1980 Regulations, as amended; and 2. The employer’s responsibility to set up suitable systems to safeguard the health and safety of employees, according to the Health & Safety at Work etc. Act (1974). FC-3800 F & I Guide 0101-8604-0, Rev. F...
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Page 7: User Responsibility
Defective equipment shall not be used. Parts that are broken, missing, plainly worn, distorted, or contaminated, shall be replaced immediately. Should such repair or replacement become necessary, a telephone or written request for service should be made to Temescal, Livermore, CA, a division of Ferrotec (USA) Corp. -
Page 8: Health Hazard
Use isopropyl alcohol (IPA), instead. Dispose of all IPA-exposed lint-free paper/cloth into a fireproof container, while ensuring all proper safety procedures and precautions are being followed. FC-3800 F & I Guide 0101-8604-0, Rev. F... - Page 9 In an effort to provide continuous improvement and ensure technical accuracy regarding product documentation, we invite you to comment on this Facilities & Installation (F & I) Guide. Please fill out and return this form to Temescal as soon as possible. Thank You.
- Page 10 This page has been intentionally left blank for pagination purposes. viii FC-3800 F & I Guide 0101-8604-0, Rev. F...
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Page 11: Introduction And Site Preparation Checklist
Overview of F&I Guide The purpose of this Facilities and Installation (F & I) Guide is to provide facility requirements and installation guidelines for your Temescal System. This Guide gives information for preparing your site to receive and install your new equipment. Topics... -
Page 12: General Safety Information
For more specific details, please read the remainder of this Facilities & Installation (F&I) Guide. If you have any questions concerning your installation, please feel free to call Temescal Customer Support (1-800-522-1215, ext. 2891). Please complete the Site Preparation Checklist on the next page, checking off each requirement as it is completed. -
Page 13: Site Preparation Checklist
0.3 gpm (1.1 L/min.) Edwards Model iGX3/100 0.6 gpm (2.2 L/min.) For water requirements for mech. pumps other than those supplied by Temescal, consult the manufacturer of the pump in question. Optional Hot Water 90 psig (6.21 Bar) maximum inlet pressure 50 psig (3.45 Bar) minimum delta pressure... - Page 14 Section 1: Introduction and Site Prep. Checklist FC-3800 Facility and Installation Guide Compressed Gases: For additional details, see section 2.3. Vent Gas: Clean Dry Air (CDA) and/or Nitrogen (N ) (recommended) 60 to 120 psig (4.14 to 8.27 bar) Pneumatic Air: 90 to 120 psig (6.21 to 8.27 bar)
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Page 15: Facility Requirements
5 gpm (18.9 L/min) Each e-beam source 2.75 to 5 gpm (11.4 to 18.9 L/min) 5-cm ion beam source 0.5 gpm (1.9 L/min) Each crystal monitor 0.5 gpm (1.9 L/min.) 0101-8604-0, Rev. F FC-3800 F & I Guide... -
Page 16: Compressed Gases
Note: To minimize pressure fluctuations in the system, a vent gas supply pressure of 60 to 120 psig is recommended. The actual venting pressure within the system is lower. The FC-3800 system features built-in regulation to reduce this pressure as required. -
Page 17: Electrical Grounding Requirements
60 feet (18.3 meters), this strap should be 0.035 to 0.050 inches (0.9–1.3 mm) thick. For runs longer than 60 feet, consult Temescal for specifications. The strapping should be silver-soldered to one of the rods and secured to the other mechanically, so that the grounding strap can be disconnected later to allow retesting of the resistance between the rods. - Page 18 Section 2: Facility Requirements FC-3800 Facility and Installation Guide Figure 2-1 Facility and System Grounding Requirements FC-3800 F & I Guide 0101-8604-0, Rev. F...
- Page 19 FC-3800 Facility and Installation Guide Section 2: Facility Requirements 2.5.2 Low-Impedance Ground for the E-Beam Power Supply Figure 2-2 illustrates the grounding requirements for the Simba 2 power supply. A length of 3-in.-wide copper strap must connect the Simba 2 power module to the system’s central grounding point.
- Page 20 Section 2: Facility Requirements FC-3800 Facility and Installation Guide Figure 2-3 Low-Z Grounding Requirements on Systems Equipped with a CV-6SLX or CV-12SLX Power Supply 2.5.3 Electron Beam Source Ground To ensure a good ground between the electron beam source and the vacuum cubicle, the following conditions must be met: ...
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Page 21: Unpacking And Installation
The customer is responsible for unpacking and preparing the site, as outlined in sections 3.1 and 3.2. Temescal is responsible for making equipment interconnections and for energizing and testing the equipment prior to acceptance, as described in section 3.3. This section contains the following subsections:... -
Page 22: Customer's Site Preparation Responsibilities
The electrician will also establish the grounding points for the required low-impedance ground (see section 2.5) and connect the vacuum cubicle to that ground. Temescal will oversee the connection of Drop #2 to the HV power supply. - Page 23 3. Connect power Drop #1 to the input of the transformer. 4. Using the Temescal-supplied cables, connect the transformer’s output to the input for Drop #1 in the power distribution box. In nominal 400 V ac installations, connect power Drop #2 directly to the power distribution box.
- Page 24 HV power supply to that drop. The Temescal representative will oversee the connection of that power supply to Drop #2. If the system is equipped with a Simba 2 power supply, locate the Simba 2 power module approximately as shown in Figure 3-2.
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Page 25: Temescal Installation Responsibilities
Chapter 4 of that manual. 3.3.2 Making the Remaining Service Connections It is the responsibility of an authorized Temescal Field Service Technician to install the tetrode tube (Simba 2 power supply only) and to make the connections specified below. DANGER: HIGH VOLTAGE... - Page 26 Temescal service representative. Once all connections have been properly made, the Temescal service representative is responsible for energizing the system or for supervising the customer in doing so.
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Page 27: Installation Drawings
all system components are properly positioned all required service connections have been made and verified all necessary adjustments have been made. The system is then ready for inspection and startup by a Temescal service representative. Installation Drawings The following illustrations are provided to facilitate system installation: ... - Page 28 Section 3: Unpacking and Installation FC-3800 Facility and Installation Guide Figure 3-2 System Plan View, Showing Dimensions of Main System Components (System Shown with Optional Simba 2 Power Supply) FC-3800 F & I Guide 0101-8604-0, Rev. F...
- Page 29 FC-3800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-3 Utility Connection Points on Rear of Vacuum Cubicle 0101-8604-0, Rev. F FC-3800 F & I Guide...
- Page 30 Section 3: Unpacking and Installation FC-3800 Facility and Installation Guide Figure 3-4 Routing of Customer-Supplied Service Lines in 208-V Installations FC-3800 F & I Guide 3-10 0101-8604-0, Rev. F...
- Page 31 FC-3800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-5 Routing of Customer-Supplied Service Lines in 400-V Installations 0101-8604-0, Rev. F 3-11 FC-3800 F & I Guide...
- Page 32 Section 3: Unpacking and Installation FC-3800 Facility and Installation Guide Figure 3-6 Routing of Temescal-Supplied Helium Lines to Cryopump Compressors FC-3800 F & I Guide 3-12 0101-8604-0, Rev. F...
- Page 33 FC-3800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-7 Routing of Control/Data Cables on Systems with the Simba 2 Power Supply 0101-8604-0, Rev. F 3-13 FC-3800 F & I Guide...
- Page 34 Section 3: Unpacking and Installation FC-3800 Facility and Installation Guide Figure 3-8 Routing of Electrical Power Cables on Systems with the Simba 2 Power Supply FC-3800 F & I Guide 3-14 0101-8604-0, Rev. F...
- Page 35 FC-3800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-9 Routing of EMO Cables and Copper Straps on Systems with the Simba 2 Power Supply 0101-8604-0, Rev. F 3-15 FC-3800 F & I Guide...
- Page 36 Section 3: Unpacking and Installation FC-3800 Facility and Installation Guide Figure 3-10 Routing of Power and Control/Data Cables on Systems with Either the CV-6SLX or the CV-12SLX Power Supply FC-3800 F & I Guide 3-16 0101-8604-0, Rev. F...
- Page 37 FC-3800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-11 Routing of EMO Cables and Copper Grounding Straps on Systems with Either the CV-6SLX or the CV-12SLX Power Supply 0101-8604-0, Rev. F 3-17 FC-3800 F & I Guide...
- Page 38 Section 3: Unpacking and Installation FC-3800 Facility and Installation Guide FC-3800 F & I Guide 3-18 0101-8604-0, Rev. F...
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