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Kurt J. Lesker R Series Operator's Manual

Radio frequency power supply
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1925 Worthington Ave
Clairton Pa, 15025
Telephone: (800) 245-1656
Fax: (412) 384-2745
R SERIES
RADIO FREQUENCY
POWER SUPPLY
OPERATOR'S MANUAL
Revision 1.03
Standard Configuration
Document Number 6100220000
Kurt J. Lesker Company
6100220000 Rev. 1.03

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  • Page 1 1925 Worthington Ave Clairton Pa, 15025 Telephone: (800) 245-1656 Fax: (412) 384-2745 R SERIES RADIO FREQUENCY POWER SUPPLY OPERATOR’S MANUAL Revision 1.03 Standard Configuration Document Number 6100220000 Kurt J. Lesker Company 6100220000 Rev. 1.03...
  • Page 2 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Introduction Thank you for acquiring your new KJLC product. KJLC Radio Frequency Power Supplies are been designed to provide the best value, ease of operation, and reliability for plasma processing systems. This manual covers specifications, installation, and operation of the KJLC RX01 and LX01 Series RF Power Supplies.

  • Page 3: Table Of Contents

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Safety Notes …………..………………………………………………………………... RF Power Supply Model Features ..…….…..……………………………………..……. Installation ..……………………………………..…………………………………….… Mounting ………………………………………………………………...…………… Supplied Accessories .………………………………..………………………………. Ventilation .…………………………………………………………………..………. Connection to a Water Cooling System ……...………………………………………. Connecting to Water Inlet/Outlet Ports …………………………………………….
  • Page 4 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Programmable Parameter Details…………………………………………..……….. Rear Panel Controls and Connections…..…………………………………………..…… R101, R101MKII, R301, R301MKII, L301, L301MKII Rear Panel ……………… R601, L601, R1001, L1001 Rear Panel ...…………………………….……………. R1001W Rear Panel ………………………………………………………………... R2001, R2001H, R3001, L2001, L2001H, L3001 Rear Panel ….………………….
  • Page 5 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Coolant Water OUT Port …………………………………………………………….. Typical Interface Connections..………………………………………………..………... Basic Analog Interfacing……………………………………………………..………. External Feedback with Probe Inverter Option (Models R101, R101MKII, L101MKII, R301, R301MKII, L301, L301MKII only) …………………………….. Typical System Configuration ….……………………………………………….….…...

  • Page 6: Declaration Of Conformity (Ce)

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Physical Dimensions: R101, R101MKII, R301, R301MKII, L301, L301MKII …….. Physical Dimensions: R601, L601, R1001, R1001W, L1001 ……………………..… Physical Dimensions: R2001, R2001H, L2001,L2001H, R3001, L3001 ……….…… Physical Dimensions: R5001 …………………..…………………………………... Agency Compliance Information ..……………………………………………………...

  • Page 7: Safety Notes

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Safety Notes KJLC RF Power Supplies have been designed and tested to meet strict safety requirements. These include independent lab examination and approval, and compliance to established standards. Please read the following instructions carefully before operating the RF Power Supply and refer to them as needed to ensure the continued safe operation of the RF Power Supply.
  • Page 8 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Never remove covers or guards that require a tool for removal. There are no operator serviceable areas within these covers. Refer servicing to qualified service personnel. CAUTION! ELECTRICAL SHOCK HAZARD PRESENT INSIDE UNIT, AT THE RF OUTPUT CONNECTOR, AND AT THE MAINS INPUT CONNECTOR.

  • Page 9: Rf Power Supply Model Features

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Radio Frequency Power Supply Features KJLC RF Power Supplies are intended for use with radio frequency plasma processing systems and radio frequency processing applications. The RX01 and LX01-Series RF Power Supplies provide a level-controlled radio frequency power output.

  • Page 10: Installation

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Installation: Recommended mounting: KJLC RF Power Supplies are designed for placement on a tabletop or on a shelf within an equipment rack, in a clean environment. The table or equipment rack must be capable of supporting the full weight of the unit.

  • Page 11: Connection To A Water Cooling System

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Connection To A Water Cooling System: (Water-cooled RF Power Supplies only) Water-cooled RF Power Supplies requires connection to an external, user-supplied water chiller or water re-circulation system. Two (2) 3/8” N.P.T. female ports are provided on the rear panel of the unit.

  • Page 12: Coolant Water Temperature And Flow Rate

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Water Fitting Removal Method Step Action Disable coolant water flower and drain the system or system segment pertaining to the RF Power Supply. Drain the supply lines connected to the RF Power Supply.

  • Page 13: Solenoid Water Valve Installation

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Solenoid Water Valve Installation: The solenoid water valve must be connected to the unit before connecting to the water re- circulation system and enabling AC Mains power. To prevent condensation inside the RF Power Supply, the solenoid water valve disables water flow when the RF output is “off”...

  • Page 14: Connection To Ac Mains

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Connection to AC Mains: BEFORE connecting the RF Power Supply the AC mains, verify the AC Mains voltage marked on the ratings plate, located on the top or side panel of the RF Power Supply, is compatible with your AC Mains voltage.

  • Page 15: System Interfacing

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL System Interfacing: The RF Power Supply can be used “stand-alone” or can be interfaced with a processing system. There are connectors on the rear panel dedicated to system interfacing. Refer to the Rear Panel Controls and Connections section for detailed pin lists and signal descriptions.

  • Page 16: Front Panel Controls And Display

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Front Panel Controls and Display: Buttons (Model L301 Shown, functions are the same for all R/LX01 series models) Item Name Description Program/Run Toggles the RF Power Supply between the RUN mode and PROGRAM mode. In Program mode, display line 3 changes to show Programmable Menu Entry Options.
  • Page 17 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Display The front panel display shows the operational status of the RF Power Supply and provides legends for the keypad. LINE 1 SET: 0W REF: LINE 2 PANEL PANEL CONTROL LINE 3 DOWN...

  • Page 18: Operation

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Operation Front panel operation of the RF Power Supply is simple. This section describes the use and operation of the front panel controls in a “how to…” manner. Refer to the front panel illustration on the previous page for item references.
  • Page 19 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL control: To change the control source to the Serial interface connector, 1. Press the PGM button (Item 1) once. 2. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display shows the current control source (PANEL, ANALOG, or SERIAL CONTROL).
  • Page 20 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL To select a leveling mode, follow the directions below: Forward (FWD) Power Leveling mode: 1. Press the “PGM” button (item 1). 2. Press the “DOWN” button (item 2) until line three of the display is “POWER CONTROL”...
  • Page 21 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Set Output Power Level 1. Ensure the RF Power Supply is in the “RUN” mode – the legend above the Program/Run button (item 1) is “PGM”. 2. Use the Value Up button (item 5) or Value Down button (item 6) to adjust the power setpoint (SET: XXXW on the front panel display) to the desired power level.

  • Page 22: Analog Interface Operation

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Basic Analog Interface Operation Refer to the Rear Panel Controls and Connections and the Typical Interface Connections sections for detailed analog interface operation and connection information. Connect the RF Power Supply’s RF output to a 50-Ohm resistive load, Impedance Matching network, processing system or other suitable load capable of handling the unit’s full rated power output before enabling AC mains Power.
  • Page 23 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL 7. Enable the Analog Interface Connector’s RF On (RFON*) circuit. Connect Analog Interface Connector pin 3 to pin 16 or apply a TTL logic “low” signal to pin 3. Note: the RFON* signal is edge triggered. A transition from a TTL “high” to TTL “low”...

  • Page 24: Serial Interface Operation

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Basic Serial Interface Operation Refer to the Rear Panel Controls and Connections section for serial interface connection details. Serial commands are detailed in the Serial Commands Section. The serial interface communications protocol is selectable; RS-232, RS-485 4-wire, or RS-485 2- wire, MODBUS 2-Wire, MODBUS 4-Wire with 8 data bits, 1 stop bit, no parity.
  • Page 25 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL a. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display shows the current serial communications protocol - RS232, RS422, RS485-4 (4 wire), RS485-2 (2 wire), MODBUS 2W (2 wire) or MODBUS 4W (4 wire).

  • Page 26: Serial Command Reference

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Unless otherwise specified, with ECHO mode set to enabled, the RF Power Supply responds with “<command string><cr>” and a command response (where applicable) for an accepted command, or “N<cr>” for an invalid command.
  • Page 27 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE SEND DESCRIPTION/COMMENT Applies To Set the Exciter Mode to MST<cr> Selects the RF Power Supply’s internal MASTER frequency source. Response: <cr> Set the Exciter Mode to SLV<cr> Selects the rear panel CEX IN connector as SLAVE the frequency source.
  • Page 28 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE SEND DESCRIPTION/COMMENT Applies To Set the Process Pulse Low XXXX_LP<cr> XXXX is the process pulse low power R301MKII, Power Setpoint setpoint, in Watts. 1 to 4 digits. L301MKII Models only Response: <cr>...
  • Page 29 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE SEND DESCRIPTION/COMMENT Applies To Enable Variable VX<cr> Enables VFT feature. 1.7-2.1MHz Frequency Tuning (VFT) R-Series Response: <cr> Models L-Series Models Disable Variable FX<cr> Disables VFT feature. 1.7-2.1MHz Frequency Tuning (VFT) R-Series Response: <cr>...
  • Page 30 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE SEND DESCRIPTION/COMMENT Applies To Query the Control V?<cr> Returns the Control Voltage, with scaling and Voltage probe attenuation factors applied. Response: XXXX<cr> (Negative polarity is assumed) Note: R/LX01 series RF Power supplies have...
  • Page 31 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE SEND DESCRIPTION/COMMENT Applies To Query EJMC2 Phase PHS<cr> Returns the current Phase Error Voltage from Voltage EJMC2 Matching network controller. Response: XXXX<cr> XXXX is the Phase Error Voltage, in milli- Volts (mV), 1 to 4 digits.

  • Page 32: Serial Command Details

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Serial Command Details The underscore character ( _ ) indicates a space, terminators are specified as carriage return–line feed <crlf> or carriage return <cr>. Unless otherwise specified, with ECHO mode set to disabled, the RF Power Supply responds with <cr>”...
  • Page 33 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO ANALOG Assert ANALOG control Switches control of the unit to the Analog Interface Connector. All serial commands except “SERIAL<cr>” or “***<cr>” are ignored. Front panel power settings and RF ON commands are ignored.
  • Page 34 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO CSP? Query Process Start Parameters Custom OEM Configurations Command: CSP?<cr> Response: aaa_bbb_ccc_ddd_eeee<cr> Where: “aaa” is the Start Sense Voltage (Start Sense V)Parameter “bbb” is not implemented and always returns a “0”...
  • Page 35 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Related Commands: DN, UP, EU Note: RF output ramping is not available in Pulse mode or Voltage Control (external feedback) mode RF output ramping is also configurable via the front panel programming menu.
  • Page 36 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Set Variable Frequency Tuning Feature to Disabled 1.7-2.1MHz R-Series Command: FX<cr> Models Response: <cr> L-Series Models Enable the RF Output Command: G<cr> Response: <cr> Set the Process Pulse High Power Setpoint...
  • Page 37 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO LVL? Query Power Leveling Mode Returns the current power leveling mode: Command: LVL?<cr> Response: 0<cr> for Forward Power Leveling 1<cr> for Load (net) Power Leveling Query Absolute Maximum Forward Power Command: M?<cr>...
  • Page 38 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Set the EJMC2 Controller’s Load Capacitor Preset position. The “MPL” command is passed thorough the RF Power Supply to the KJLC model EJMC2 Matching Network Controller. The RF Power Supply does not use or store the information.
  • Page 39 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Query Power 1 Parameter Custom OEM Configurations Command: P1?<cr> Response: a_b_ccc_ddd_e_f<cr > (fixed length string) Where: “a” is not implemented, always returns a “0” “b” is not implemented, always returns a “0”...
  • Page 40 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Query Power 4 Parameter Custom OEM Configurations Command: P4?<cr> Response: a_b_ccc_ddd_e_f<cr > (fixed length string) Where: “a” is not implemented, always returns a “0” “b” is not implemented, always returns a “0”...
  • Page 41 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO PANEL Assert PANEL control Switches control of the unit to the front panel. Analog Interface Connector RFON* and SETPOINT signals are ignored. All serial commands except “SERIAL<cr>”...
  • Page 42 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Character #3: Setpoint Source 2 = Serial Interface, 1 = Analog Interface, 0 = Front Panel Character #4: Status Flags (bit-mapped ASCII) Bit 3: 1 = RF ON, 0 = RF OFF...
  • Page 43 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Character #5: Status Flags (bit-mapped ASCII) Bit 3: 1 = RFON&OK, 0 = Ref Power alarm threshold exceeded Bit 2: 1 = Dissipation Limit active, 0 = Dissipation Limit inactive...
  • Page 44 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Set Variable Frequency Tuning Strike Frequency 1.7-2.1MHz R-Series Command: XXX_SF<cr> Models L-Series: XXX is the desired strike (start) frequency, in KHz, 100 KHz to L-Series 460KHz, 1.7-2.1MHz R-Series: XXX is the desired strike (start) frequency,...
  • Page 45 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Set the Voltage Setpoint Command: XXXX_V<cr> Where XXXX is the desired Voltage setpoint, in 1-Volt increments, 1 to 4 digits. Response: <cr> Applicable To: All Models Set Variable Frequency Tuning Feature to Enabled 1.7-2.1MHz...
  • Page 46 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Query Forward Power Output Command: W? Response: XXXX<cr> Where XXXX is the current forward power output, in 1-Watt increments; length: 4 characters fixed. Leading zeros are replaced with the blank space character.

  • Page 47: Configuring Programmable Parameters

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Configuring Programmable Parameters Navigating the Programming Menu TO ENTER the programming mode, press the “PGM” button (Program/Run button – item 1) on the front panel. The legend above the button will change from “PGM” to “RUN”.
  • Page 48 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To Control Source PANEL CONTROL PANEL* ANALOG CONTROL ANALOG Note: Setting the control source SERIAL CONTROL SERIAL Serial Control allows scrolling and setting of serial...
  • Page 49 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To RF Output Ramp-Up Time RAMP ON TIME 1S 1S to 9999S, Variable (Default: 1S) RF Output Ramp-Down Time RAMP OFF TIME 1S...
  • Page 50 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To Power 1 Parameter POWER 1 XXXXW 0W to Rated Power Custom OEM (Default: 70W) Configurations Power 2 Parameter POWER 2 XXXXW 0W to Rated Power...
  • Page 51 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To Power Control Gain POWER CONT GAIN XXX% 0% to 100% (Default: 100%) DC Voltage Control Gain DCV CONT GAIN XXX% 0% to 100%...
  • Page 52 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To Minimum Allowable Frequency MIN VAR FREQ XXXKHZ 100 to 460KHz, L-Series for Variable Frequency Tuning Variable (Default: 230KHz) Minimum Allowable Frequency MIN VAR FREQ XXXMHZ 1.7 to 2.1MHz,...

  • Page 53: Programmable Parameter Details

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS: Note: All programmable parameters shown. Not all of the programmable parameters are applicable to all R/LX01 Series models and are notated in the “Applies To” column and in the individual parameter detail descriptions.
  • Page 54 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Control Source: Selects the interface used as the control source for the RF power supply. Factory default setting: PANEL Panel Control Selects the front panel keypad as the control source. RF ON/OFF and power setpoint commands from the analog interface are ignored.
  • Page 55 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Pulse Mode (cont.): Enables or Disables internal pulsing of the RF output. When RF OEM Pulsing output is enabled, the RF output is pulsed between the Pulse Low...
  • Page 56 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Ramp Mode Enables or disables ramping of the RF output when the RF output is enabled or disabled. Setting RAMP MODE to “ON” allows access to the ramping parameters.
  • Page 57 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Probe Inversion Enables or disables internal routing of the output of the DCP R/L101MKII, Connector probe inverter feature to the Analog Interface connector’s R/L301MKII FEEDBACK signal.
  • Page 58 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Output Power Range HIGH RANGE sets the unit’s output power range from 0% to 100% Select: of the unit’s rated power output, with standard power setpoint and power metering resolution.
  • Page 59 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Idle Power Parameter Idle Power recallable parameter. Variable, 1W to rated output power, Custom OEM in 1-Watt increments. Configurations Use the serial command “CGP?” to read the current parameter value.
  • Page 60 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Power 1 Parameter Power 1 recallable parameter. Variable, 0 Watts to rated output Custom OEM power, in 1-watt increments. Configurations Use the serial command “P1?” to read the current parameter value.
  • Page 61 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Front Panel Setpoint When this parameter is set to PANEL SET IN REM OFF, and the Active with Analog control source is set to “ANALOG” (via the front panel or through the...
  • Page 62 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO When the RF output is enabled, the plasma impedance (Z) is continuously calculated. After a short delay (XIMP Delay) to allow time for the plasma to strike and stabilize, the plasma impedance is continuously compared against the Excessive Impedance Trigger level (XIMP Trigger).
  • Page 63 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Power Control Gain Digital Control Loop Gain – Power Control Modes. Setting the gain value to less than 100% will result in a loss of power setpoint accuracy but may help to reduce plasma/process noise issues.
  • Page 64 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Load Capacitor Preset Sets the Load Capacitor preset position voltage output for an external Position: matching network. Adjustable from 0% (0.0VDC output) to 100% (+5.0VDC), in 1% (50mV) increments.
  • Page 65 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Fine Tuning Trip Level: If reflected power level is less than or equal to the Fine Tuning Trip L-Series Level, the Variable Frequency Tuning feature stops attempting to 1.7-2.1MHz...
  • Page 66 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Strike Frequency: With Variable Frequency Enabled, the unit’s output frequency 1.7-2.1MHz defaults to the Strike Frequency setting when the RF output is R-Series enabled. If reflected power is greater than the Fine Tuning Trip Level, the...
  • Page 67 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO PHASE Uses a voltage signal from an external phase detector to control L-Series TUNE Variable Frequency Tuning feature. The external phase detector’s 1.7-2.1MHz MODE + output is applied to the Analog Interface connector’s PHASE input...

  • Page 68: Rear Panel Controls And Connections

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Rear Panel Controls and Connections Models R101, R101MKII, R301, R301MKII, L301, L301MKII: RF OUT POWER Models R601, L601, R1001, L1001 RF OUT POWER ~MAINS POWER IN ANALOG INTERFACE SERIAL INTERFACE CEX IN CEX OUT Page 62 Kurt J.

  • Page 69: R1001W Rear Panel

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Model R1001W WATER OUT WATER IN RF OUT POWER ~MAINS POWER IN SERIAL 2 CEX IN CEX OUT ANALOG INTERFACE SERIAL 1 VALVE Page 63 Kurt J. Lesker Company 6100220000 Rev. 1.02...

  • Page 70: R2001, R2001H, R3001, L2001, L2001H, L3001 Rear Panel

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Models R2001, R2001H, L2001, L2001H, R3001, L3001 CEX IN CEX OUT VALVE ANALOG SERIAL WATER WATER POWER RF OUTPUT Model R5001 VALVE ANALOG SERIAL CEX IN CEX OUT WATER WATER POWER HAZARDOUS VOLTAGE...

  • Page 71: Rf Output Connector

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL 1. RF Output Connect a 50-Ohm coaxial cable from the RF Output connector to a 50-Ohm load (50-Ohm resistive load, impedance matching network, impedance matching transformer, plasma chamber, or other processing apparatus). The center pin of the connector is RF “hot”, the connector shell is RF return.

  • Page 72: Dcp Connector

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL 4. DCP Connector (Optional, Models R/L101,R/L301,R/L101MKII,R/L301MKII only) Voltage Probe Inverter Input. Analog input, 0 to –10VDC input range. Connector: Type BNC Female Input Impedance: 100K Ohm Optional. Allows the RF Power Supply to use a negative polarity voltage probe signal from a passive probe (usually located in an external matching transformer or matching network) for external RF output regulation feedback (voltage control).

  • Page 73: Analog Interface Connector

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Analog Interface Connector The analog interface connector is located on the rear panel of the Radio Frequency Power Supply. Control and status signals for the RF Power Supply are available on this connector.

  • Page 74: Analog Interface Pin List

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTEFACE CONNECTOR PIN LIST SIGNAL NAME DESCRIPTION MAINS INTLK 1 AC Mains Power Interlock. 24VAC current loop, 100 mA maximum current. R101, L101, R301, L301 only A contact closure between pin 1 and pin 14 is required to allow AC mains power to engage.
  • Page 75 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTEFACE CONNECTOR PIN LIST SIGNAL NAME DESCRIPTION SLAVE* Selects internal oscillator/exciter or external oscillator/exciter (Slave Mode) as frequency source operation. TTL – compatible input with an internal pull-up resistor. A contact closure between pin 5 and pin 17 or applying a TTL “low”...
  • Page 76 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTEFACE CONNECTOR PIN LIST SIGNAL NAME DESCRIPTION FWD MON Forward power monitor output signal. Analog output, selectable 0 to +5VDC or 0 to +10VDC range via front panel controls. Output is linearly proportional to 0 to 100% of rated forward power.
  • Page 77 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTEFACE CONNECTOR PIN LIST SIGNAL NAME DESCRIPTION MAINS INTLK 2 A contact closure between pin 1 and pin 14 is required to allow AC mains power to engage. An open circuit between pin 1 and pin 14 R101, L101, R301, disables AC mains power.
  • Page 78 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTEFACE CONNECTOR PIN LIST SIGNAL NAME DESCRIPTION PHASE External Phase Sensor Input. Analog Input, -10.0VDC to +10.0VDC range. Used in conjunction with the Variable Frequency Tuning (VFT) feature. On VFT-enabled units with VFT Feedback Mode set to “PHASE TUNE MODE +”...
  • Page 79 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTEFACE CONNECTOR PIN LIST SIGNAL NAME DESCRIPTION SETRET Setpoint Return. Analog differential input (-). Note: This pin must be connected to a ground reference or the unit’s output will behave erratically Note:...

  • Page 80: Typical Interface Circuits

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL TYPICAL INTERFACE CIRCUITS Figures 1 through 5 illustrate the typical circuits used in the RF Power Supply’s Analog Interface. Note: GND, GNDI, and SETRET signals must be referenced to system common or system ground to avoid erratic power supply operation.
  • Page 81 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL TTL-Compatible Input Circuits All TTL-Compatible logic input circuits are internally pulled up to +5VDC. Signal function and response is as described in the Analog Interface Connector pin list. 100K LM339 TTL INPUT 0.1uF 0.1uF...
  • Page 82 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL FEEDBACK Input Circuit High-impedance, high Common-Mode Rejection Ratio, analog input. Input voltage range is 0 to +10.0VDC. NOTE: The feedback return signal (GNDI, pin 16 or 17) MUST be referenced to common or ground at the feedback voltage source (Voltage Probe) or the RF output power will behave erratically.

  • Page 83: Serial Interface Connector

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL 9. Serial Interface Connector The serial interface provides remote control and monitoring of the RF Power Supply via a computer. Serial interface protocols are selectable, RS-232, RS-422, and RS-485. Baud rates and protocols are selected via the front panel.

  • Page 84: Serial Interface Wiring

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Serial Interface Wiring KJLC strongly recommends the use of shielded cable when making serial interface connections. The use of unshielded cable may result in data errors and other serial communication problems. Typical RS-232 serial interface wiring is diagrammed below. RS-422 and RS-485 wiring methods are not shown because not all hardware manufacturers implement the recommended connector pin-outs for RS-422/RS-485.

  • Page 85: 10. Equipotential Bonding Terminal

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL 10. Equipotential Bonding Terminal A metal stud is pressed directly into the rear panel, supplied with mating nuts and washers. Connect equipotential bonding straps from system equipment and/or an earth ground to this stud to control RF circulating currents. Stud type is listed by model in the table below.

  • Page 86: Valve Connector

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL 11. Valve Connector (Water Cooled Models Only) Connect the external solenoid water valve to the VALVE connector. To prevent condensation inside the R3001, the solenoid water valve disables water flow when the RF Output is “off”...

  • Page 87: Coolant Water In Port

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL 12. Coolant Water IN Port (Water Cooled Models Only) Fitting Type: 3/8” N.P.T. (tapered) dry-seal, hexagonal female pipe. Connect the output port of the solenoid water vale to the WATER IN port. Connect the coolant water supply to the input port of solenoid water valve.

  • Page 88: Typical Interface Connections

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL TYPICAL ANALOG INTERFACE CONNECTIONS Analog Control There are many possible analog interface wiring schemes. Basic analog interface connections are diagrammed below. Refer to the Analog Interface Connector pin list in the Rear Panel Controls and Connections section for signal details.

  • Page 89: External Feedback With Probe Inverter Option (Models R101, R101Mkii, L101Mkii, R301, R301Mkii, L301, L301Mkii Only)

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL External Feedback with Probe Inverter Option The RF power supply’s external feedback input (FEEDBACK, analog interface connector pin 12) only accepts a positive (+) polarity signal. The Probe Inverter feature allows the R101, R101MKII, R301, R301MKII, L031, and L301MKII RF Power Supplies to utilize a negative polarity feedback signal.
  • Page 90 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL 100 WATT / 300 WATT RF POWER SUPPLY WITH PROBE INVERTER SOFTWARE VERSION 9.0J3 OR LATER 100K PROBE SOURCE (MATCHING NETWORK OR MATCHING TRANSFORMER) ANALOG INTERFACE PROBE SIGNAL TO SYSTEM (IF DESIRED) CHASSIS...

  • Page 91: Typical System Configuration

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Typical System Configuration A basic plasma processing system configuration is diagrammed below. Other system configurations are possible. For assistance with system configuration issues, contact the KJLC customer service department or a KJLC service depot. Coaxial cables, control cables, matching networks, matching network controllers, and plasma system equipment are not supplied with the RF Power Supply.

  • Page 92: Maintenance

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Maintenance KJLC R/LX01 Series Radio Frequency Power Supplies are designed to be maintenance free. There are no user maintainable assemblies inside the unit. The R/LX01 series RF Power Supplies are designed for use in a clean environment. Periodically check the air inlets and exhaust fan vents for accumulation of dust and debris.

  • Page 93: Problem Solving

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Problem Solving The following chart lists some conditions that may occur and the recommended solutions. Follow the suggested solutions until the problem is corrected. If the problem persists, please contact KJLC customer service or a KJLC service representative.
  • Page 94 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Condition Suggested Solution The text “EXT” is shown on The Analog Interface “INTERLOCK” signal is at a TTL line 2 of the front panel display “HIGH” state – disabling the RF output. Ensure the Analog Interface Connector is fully seated Apply a TTL “low”...
  • Page 95 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Condition Suggested Solution Water-Cooled Units Only: Verify the solenoid water valve’s power connector is plugged into the rear panel “VALVE” connector. Check the solenoid water valve’s operation. The valve should emit an audible “click” when the RF Output is enabled.

  • Page 96: Technical Data

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Technical Data Specifications and other technical data are listed by model type, and where applicable, by KJLC part number. RF Power Supply Identification KJLC manufactures multiple variations of its RF Power Supplies. Variations include output power, output frequency, AC mains voltage, and OEM specific hardware and software features.

  • Page 97: Specifications: R101

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Transformer Power Supply AC Mains Voltage Taps: 98V, 115V, 208V, or 220V; Single-phase, factory configured. Input Power Specify desired AC mains voltage at time of order. Voltage taps are set to the most appropriate setting at the factory.
  • Page 98 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Transformer Power Supply Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C...
  • Page 99 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Transformer Power Supply Reflected Power Monitor Monitor output is linearly proportional to 0 to 100 Watts of reflected power. Output scaling 5.0VDC Watts (50mV/Watt) 10.0VDC Watts (100mV/Watt), depending on the analog voltage range selected.
  • Page 100 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Switching Power Supply AC Mains Voltage Ranges: 98-125V or 198-250V, Single-phase. Input Power Specify desired AC mains voltage range at time of order. Voltage range is factory configured. Frequency: 47-63 HZ...
  • Page 101 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Switching Power Supply Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C...
  • Page 102 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Switching Power Supply Analog In Power Control mode, analog setpoint sensitivity is 100 Watts at 5.0VDC Setpoint (50mV per Watt) or 100 Watts at 10.0VDC (100mV per Watt), depending on the Sensitivity: analog voltage range selected.

  • Page 103: Specifications: R101Mkii

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101MKII Specifications AC Mains 90-140VAC or 190-264VAC (universal input), Single Phase. Input Power There are no transformer taps to configure. AC mains voltage specified at time of order determines supplied power cord Frequency: 47-63 HZ...
  • Page 104 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101MKII Specifications Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative...
  • Page 105 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101MKII Specifications Reflected Power Monitor Monitor output is linearly proportional to 0 to 100 Watts of reflected power. Output scaling 5.0VDC Watts (50mV/Watt) 10.0VDC Watts (100mV/Watt), depending on the analog voltage range selected. (Default scaling) Analog In Power Control mode, analog setpoint sensitivity is 100 Watts at 5.0VDC...

  • Page 106: Specifications: R301

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301 Specifications AC Mains Voltage Taps: 98V, 115V, 208V, or 220V; Single-phase, factory configured. Input Power Specify desired AC mains voltage at time of order. Voltage taps are set to the most appropriate setting at the factory.
  • Page 107 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301 Specifications Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative...
  • Page 108 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301 Specifications Reflected Power Monitor Monitor output is linearly proportional to 0 to 100 Watts of reflected power. Output scaling 5.0VDC Watts (50mV/Watt) 10.0VDC Watts (100mV/Watt), depending on the analog voltage range selected. (Default scaling) Analog In Power Control mode, analog setpoint sensitivity is 300 Watts at 5.0VDC...

  • Page 109: Specifications: R301Mkii

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301MKII Specifications AC Mains 90-140VAC or 190-264VAC (universal input), Single Phase. Input Power There are no transformer taps to configure. AC mains voltage specified at time of order determines supplied power cord. Frequency: 47-63 HZ...
  • Page 110 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301MKII Specifications Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative...
  • Page 111 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301MKII Specifications Reflected Power Monitor Monitor output is linearly proportional to 0 to 100 Watts of reflected power. Output scaling 5.0VDC Watts (50mV/Watt) 10.0VDC Watts (100mV/Watt), depending on the analog voltage range selected. (Default scaling) Analog In Power Control mode, analog setpoint sensitivity is 300 Watts at 5.0VDC...

  • Page 112: Specifications: L301

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301 Specifications AC Mains Voltage Taps: 98V, 115V, 208V, or 220V; Single-phase, factory configured. Input Power Specify desired AC mains voltage at time of order. Voltage taps are set to the most appropriate setting at the factory.
  • Page 113 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301 Specifications Spurious Radiation: Designed to meet or exceed FCC requirements. Harmonics: Equal to or less than -40dBc at maximum output frequency Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle;...
  • Page 114 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301 Specifications Reflected Power Monitor Monitor output is linearly proportional to 0 to 100 Watts of reflected power. Output scaling 5.0VDC Watts (50mV/Watt) 10.0VDC Watts (100mV/Watt), depending on the analog voltage range selected. (Default scaling) Analog In Power Control mode, analog setpoint sensitivity is 300 Watts at 5.0VDC...

  • Page 115: Specifications: L301Mkii

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301MKII Specifications AC Mains 90-140VAC or 190-264VAC (universal input), Single Phase. Input Power There are no transformer taps to configure. AC mains voltage specified at time of order determines supplied power cord Frequency: 47-63 HZ...
  • Page 116 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301MKII Specifications Spurious Radiation: Designed to meet or exceed FCC requirements. Harmonics: Equal to or less than -40dBc at maximum output frequency Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle;...
  • Page 117 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301MKII Specifications Reflected Power Monitor Monitor output is linearly proportional to 0 to 100 Watts of reflected power. Output scaling 5.0VDC Watts (50mV/Watt) 10.0VDC Watts (100mV/Watt), depending on the analog voltage range selected. (Default scaling) Analog In Power Control mode, analog setpoint sensitivity is 300 Watts at 5.0VDC...

  • Page 118: Specifications: R601

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R601 Specifications AC Mains Voltage: 90-125V or 190-264V (universal input), Single Phase. Input Power There are no transformer voltage taps to configure. AC mains voltage specified at time of order determines supplied power cord.
  • Page 119 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R601 Specifications Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative 10% to 90%, non-condensing Humidity: Atmospheric Pressure,...
  • Page 120 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R601 Specifications Labels: Safety: Per customer requirements. Labels may include Hazardous Voltage, Heavy Object Identification: KJLC part number, serial number, and customer part number (optional) Dimensions 7.00 (133.35) High x 9.50 (241.30) Wide x 18.38 (466.85) Deep. Width includes inch (mm): ½-Rack Mounting Brackets.

  • Page 121: Specifications: L601

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L601 Specifications AC Mains Voltage: 90-125V or 190-264V (universal input), Single Phase. Input Power There are no transformer voltage taps to configure. AC mains voltage specified at time of order determines supplied power cord.
  • Page 122 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L601 Specifications Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative 10% to 90%, non-condensing...
  • Page 123 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L601 Specifications Analog In Power Control mode, analog setpoint sensitivity is 600 Watts at 5.0VDC Setpoint (8.33mV per Watt) or 600 Watts at 10.0VDC (16.6mV per Watt), depending on Sensitivity: the analog voltage range selected.

  • Page 124: Specifications: R1001

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001 Specifications AC Mains Voltage: 190-264V, Single Phase. Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: 15A Maximum. Power required: 1650VA Maximum Overcurrent Protection: Rear Panel Circuit Breaker, 2x 1.5A ¼”x1-1/4”...
  • Page 125 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001 Specifications Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative 10% to 90%, non-condensing Humidity: Atmospheric Pressure, 683 mBar minimum (approx 3000m above sea Operating: level) Atmospheric Pressure, 585 mBar minimum (approx 4000m above sea...
  • Page 126 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001 Specifications Identification: KJLC part number, serial number, and customer part number (optional) Dimensions 7.00 (133.35) High x 9.50 (241.30) Wide x 18.38 (466.85) Deep. Width includes inch (mm): ½-Rack Mounting Brackets. Width without ½-Rack Mounting Brackets: 8.00 (203.2) Weight: 37 Lbs (16.8Kg)

  • Page 127: Specifications: R1001W

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001W Specifications AC Mains Voltage: 190-264V, Single Phase. Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: 15A Maximum. Power required: 1650VA Maximum Overcurrent Protection: Rear Panel Circuit Breaker, 2x 1.5A ¼”x1-1/4”...
  • Page 128 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001W Specifications Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative 10% to 90%, non-condensing Humidity: Atmospheric Pressure, 683 mBar minimum (approx 3000m above sea Operating: level) Atmospheric Pressure, 585 mBar minimum (approx 4000m above sea...
  • Page 129 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001W Specifications Interface Analog Interface: 25 pin Female D-Sub Connector Connections: Serial Interface: 9 pin Female D-Sub Connector CEX Input: Female type BNC connector, 3 to 8V Peak-to-Peak sine wave, 13.56MHz, 50 Ohms Nominal...

  • Page 130: Specifications: L1001

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L1001 Specifications AC Mains Voltage: 190-264V Single Phase. Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: 15A Maximum. Power required: 1650VA Maximum Overcurrent Protection: Rear Panel Circuit Breaker, 2x 1.5A ¼”x1-1/4”...
  • Page 131 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L1001 Specifications Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative 10% to 90%, non-condensing Humidity: Atmospheric Pressure,...
  • Page 132 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L1001 Specifications Labels: Safety: Per customer requirements. Labels may include Hazardous Voltage, Heavy Object Identification: KJLC part number, serial number, and customer part number (optional) Dimensions 7.00 (133.35) High x 9.50 (241.30) Wide x 18.38 (466.85) Deep. Width includes inch (mm): ½-Rack Mounting Brackets.

  • Page 133: Specifications: R2001

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001 Specifications AC Mains Voltage: 190-264V, Single Phase or Three Phase (specify at time of order) Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: Single Phase: 20A Maximum...
  • Page 134 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001 Specifications Spurious Radiation: Designed to meet or exceed FCC requirements. Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse...
  • Page 135 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001 Specifications Interlocks: External: External interlock provided for disabling RF output power Valve (optional): Prevents/disables RF Power output if external water valve is missing or un plugged. (standard units ignore this interlock – consult factory if valve...
  • Page 136 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001 Specifications Dimensions 7.00 (133.35) High x 19.00 (482.60) Wide x 22.75 (577.85) Deep. inch (mm): Width includes Rack Mounting Brackets. Width without Rack Mounting Brackets: 17.00 (431.80) Depth includes Mains Power Connection Terminal Box.

  • Page 137: Specifications: R2001H

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001H Specifications AC Mains Voltage: 190-264V. Single Phase or Three Phase (specify at time of order) Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: Single Phase: 25A Maximum...
  • Page 138 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001H Specifications Spurious Radiation: Designed to meet or exceed FCC requirements. Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle; 50 micro-second minimum pulse...
  • Page 139 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001H Specifications Interlocks: External: External interlock provided for disabling RF output power Valve (optional): Prevents/disables RF Power output if external water valve is missing or un plugged. (standard units ignore this interlock – consult factory if valve...
  • Page 140 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001H Specifications Dimensions 7.00 (133.35) High x 19.00 (482.60) Wide x 22.75 (577.85) Deep. inch (mm): Width includes Rack Mounting Brackets. Width without Rack Mounting Brackets: 17.00 (431.80) Depth includes Mains Power Connection Terminal Box.

  • Page 141: Specifications: L2001

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001 Specifications AC Mains Voltage: 190-264V, Single Phase or Three Phase (specify at time of order). Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: Single Phase: 20A Maximum...
  • Page 142 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001 Specifications Harmonics: Equal to or less than -40dBc at maximum output frequency Noise, Hum, and Ripple: Equal to or less than -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle;...
  • Page 143 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001 Specifications Interlocks: External: External interlock provided for disabling RF output power Valve (optional): Prevents/disables RF Power output if external water valve is missing or un-plugged. (Standard units ignore this interlock – consult factory if valve...
  • Page 144 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001 Specifications Dimensions 7.00 (133.35) High x 19.00 (482.60) Wide x 22.75 (577.85) Deep. inch (mm): Width includes Rack Mounting Brackets. Width without Rack Mounting Brackets: 17.00 (431.80) Depth includes Mains Power Connection Terminal Box Weight: 55 Lbs (24.9Kg)

  • Page 145: Specifications: L2001H

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001H Specifications AC Mains Voltage: 190-264V, Single Phase or Three Phase (specify at time of order). Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: Single Phase: 25A Maximum...
  • Page 146 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001H Specifications Harmonics: Equal to or less than -40dBc at maximum output frequency Noise, Hum, and Ripple: Equal to or less than -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle;...
  • Page 147 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001H Specifications Interlocks: External: External interlock provided for disabling RF output power Valve (optional): Prevents/disables RF Power output if external water valve is missing or un-plugged. (Standard units ignore this interlock – consult factory if valve...
  • Page 148 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001H Specifications Dimensions 7.00 (133.35) High x 19.00 (482.60) Wide x 22.75 (577.85) Deep. inch (mm): Width includes Rack Mounting Brackets. Width without Rack Mounting Brackets: 17.00 (431.80) Depth includes Mains Power Connection Terminal Box Weight: 70 Lbs (31.74Kg)

  • Page 149: Specifications: R3001

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R3001 Specifications AC Mains Voltage: 190-264V. Single Phase or Three Phase (specify at time of order) Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: Single Phase: 25A Maximum...
  • Page 150 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R3001 Specifications Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle, 50 micro-second minimum pulse Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative...
  • Page 151 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R3001 Specifications Interlocks: External: External interlock provided for disabling RF output power Valve (optional): Prevents/disables RF Power output if external water valve is missing or un plugged. (standard units ignore this interlock – consult factory if valve...
  • Page 152 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R3001 Specifications Dimensions 7.00 (133.35) High x 19.00 (482.60) Wide x 22.75 (577.85) Deep. inch (mm): Width includes Rack Mounting Brackets. Width without Rack Mounting Brackets: 17.00 (431.80) Depth includes Mains Power Connection Terminal Box Weight: 70 Lbs (31.74Kg)

  • Page 153: Specifications: L3001

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L3001 Specifications AC Mains Voltage: 190-264V. Single Phase or Three Phase (specify at time of order) Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: Single Phase: 25A Maximum...
  • Page 154 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L3001 Specifications Harmonics: Equal to or less than -40dBc at maximum output frequency Noise, Hum, and Ripple: Equal to or less than -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100% duty cycle;...
  • Page 155 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L3001 Specifications Interlocks: External: External interlock provided for disabling RF output power Valve (optional): Prevents/disables RF Power output if external water valve is missing or un plugged. (standard units ignore this interlock – consult factory if valve...
  • Page 156 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL L3001 Specifications Dimensions 7.00 (133.35) High x 19.00 (482.60) Wide x 22.75 (577.85) Deep. inch (mm): Width includes Rack Mounting Brackets. Width without Rack Mounting Brackets: 17.00 (431.80) Depth includes Mains Power Connection Terminal Box Weight: 70 Lbs (31.74Kg)

  • Page 157: Specifications: R5001

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R5001 Specifications AC Mains Voltage: 190-264V. Three Phase Input Power There are no transformer voltage taps to configure. Frequency: 47-63 HZ Current: 25A Maximum Power required: 5700VA Maximum Overcurrent Protection: Rear Panel Circuit Breaker, 2x 1.5A ¼”x1-1/4”...
  • Page 158 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R5001 Specifications Environment: Operating Temperature 0 to +40°C Ambient: Operating Relative 10% to 90%, non-condensing Humidity: Atmospheric Pressure, 683 mBar minimum (approx 3000m above sea Operating: level) Atmospheric Pressure, 585 mBar minimum (approx 4000m above sea...
  • Page 159 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R5001 Specifications Interface Analog Interface: 25 pin Female D-Sub Connector Connections: Serial Interface: 9 pin Female D-Sub Connector CEX Input: Female type BNC connector, 3 to 8V Peak-to-Peak sine wave, 13.56MHz or 1.7-2.1MHz, 50 Ohms...
  • Page 160 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions Models R101, R101MKII, R301, R301MKII, L301, L301MKII Front View, R101, R101MKII, R301, R301MKII, L301, L301MKII RF Power Supply Model L301 shown. Dimensions in Inch [mm] 5.25 [133.35] 0.00 [0.00] Side View, R101, R101MKII, R301, R301MKII, L301, MKII RF Power Supply...
  • Page 161 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R101, R101MKII, R301, R301MKII, L301, L301MKII 5.25 [133.35] RF OUT 4.32 [109.60] POWER 2.62 [66.47] 1.86 [47.12] 0.89 [22.50] 0.00 [0.00] Rear View, R101, R101MKII, R301, R301MKII, L301, L301MKII RF Power Supply...
  • Page 162 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R601, L601, R1001, R1001W, L1001 Front View, R601, L601, R1001, R1001W, L1001, Model R1001 shown 7.00 [177.80] 6.93 [175.90] 0.08 [1.91] 0.00 [0.00] Side View, R601, L601, R1001, R1001W, L1001 Page 156 Kurt J.
  • Page 163 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R601, L601, R1001, R1001W, L1001 6.93 [175.90] 6.85 [173.99] 6.07 [154.25] RF OUT POWER 4.01 [101.88] ~MAINS POWER IN 1.27 [32.16] ANALOG INTERFACE SERIAL INTERFACE CEX IN CEX OUT 0.00 [0.00] 0.08 [1.91]...

  • Page 164: Models R2001, R2001H, L2001, L2001H, R3001, L3001

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R2001, R2001H, L2001, L2001H, R3001, L3001 Front View, R2001, R2001H, L2001, L2001H, R3001, L3001 Model R2001 shown Side View, R2001, R2001H, L2001, L2001H, R3001, L3001 Page 158 Kurt J. Lesker Company...
  • Page 165 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R2001, R2001H, L2001, L2001H, R3001, L3001 6.97 [177.04] CEX IN CEX OUT VALVE ANALOG SERIAL 6.04 [153.34] WATER WATER 5.95 [151.05] 5.12 [129.92] POWER 3.73 [94.79] RF OUTPUT 1.55 [39.45] 1.37 [34.80]...
  • Page 166 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Model R5001 Front View, R5001 Side View, R5001 Page 160 Kurt J. Lesker Company 6100220000 Rev. 1.02...
  • Page 167 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Model R5001 8.69 [220.68] VALVE ANALOG SERIAL CEX IN CEX OUT 8.66 [219.86] WATER WATER POWER 6.59 [167.28] 5.41 [137.29] HAZARDOUS VOLTAGE INSIDE RF OUTPUT 1.53 [38.81] 1.35 [34.19] 0.41 [10.29] 0.00 [0.00]...
  • Page 168 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Agency Compliance Information R101, R101MKII, L101, R301, R301MKII, L301, L301MKII, R601, L601, R1001, L1001 Declaration of Conformity (CE) In accordance with ISO/IEC Guide 22 Supplier: KJLC Address: 1925 Worthington Ave. Clairton, Pa. 15025...
  • Page 169 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001, R2001H, L2001, L2001H, R3001, L3001 Declaration of Conformity (CE) In accordance with ISO/IEC Guide 22 Supplier: KJLC Address: 1925 Worthington Ave. Clairton, Pa. 15025 Product: RF Power Supply Models R2001, L2001, R3001, L3001, R5001...
  • Page 170 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Semiconductor Equipment and Materials International (SEMI) Compliance SEMI Safety, S2, and S8 compliance testing was conducted by an independent laboratory on representative samples of the R1001 product family and the R2001 Product family. Reproducing the laboratory reports here is beyond the scope of this document.

  • Page 171: Kjlc 1 Year Limited Warranty

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL KJLC 1 Year Limited Warranty KJLC products are warranted to the original purchaser against defects in material and workmanship for a period of one year from the date of delivery. KJLC will repair or replace, at its option, all defective products returned freight prepaid during the warranty period, without charge, provided that there is no evidence the product has been mishandled, abused, or misapplied.

  • Page 172: Glossary Of Terms

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Glossary of Terms Amperes, a measurement unit of current Alternating Current ANLG Abbreviation, “Analog” Chamber Industry term for a vacuum chamber used in plasma processing equipment. Common Exciter A method of using an external frequency source to synchronize...
  • Page 173 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Glossary of Terms SEMI Industry standards organization: Semiconductor Equipment and Materials International Transistor-Transistor Logic Tuner Industry term for an impedance matching network Volts, Alternating Current Volts, Direct Current Variable Frequency Tuning. The RF power supply’s CPU monitors the reflected power and adjusts the RF output frequency to minimize the reflected power.

  • Page 174: Revision History

    R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Revision History: Revision Date Revision Description 0.01 10/19/03 Preliminary 0.02 10/27/03 Updated Table of Contents, Analog Interface, and Technical Data Sections. 0.03 12/18/03 Deleted “A” from R301 model number, Output frequency was 100- 460KHz, updated illustrations.
  • Page 175 R SERIES RF POWER SUPPLY OPERATOR’S MANUAL Notes: Page 169 Kurt J. Lesker Company 6100220000 Rev. 1.02...

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