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CTI-CRYOGENICS 8510 Installation, Operation And Service Instructions

High-voltage compressor
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TI
CRYOGENICS
HELIX TECHNOLOGY CORPORATION
8510 High-Voltage Compressor
(For Use with On-Board High-Vacuum Pumps)
Installation, Operation and Service
Instructions
8040265
Rev. P (3/97)
HELIX TECHNOLOGY CORPORATION
http://www.helixtechnology.com

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Summary of Contents for CTI-CRYOGENICS 8510

  • Page 1 CRYOGENICS HELIX TECHNOLOGY CORPORATION 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) Installation, Operation and Service Instructions 8040265 Rev. P (3/97) HELIX TECHNOLOGY CORPORATION http://www.helixtechnology.com...
  • Page 2 Mansfield Corporate Center Nine Hampshire Street Mansfield, Massachusetts 02048-9171 U.S.A. Telephone: (508) 337-5000 FAX: (508) 337-5464 The following Helix Technology Corporation trademarks and service marks may appear in this document: ® ® CTI-Cryogenics GUTS ® ® Cryo-Torr Cryodyne ® ® Cryogem Cryogenerator ®...

  • Page 3: Table Of Contents

    CRYOGENICS 8510 High-Voltage Compressor (For Use With On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Table of Contents Section 1 - Introduction General ............1-1 Installation, Operation and Service Instructions .
  • Page 4 Figure 1-1: 8510 High-Voltage Compressor: Front and Side Views ..1-2 Figure 1-2: 8510 High-Voltage Compressor ......1-5 Figure 3-1: Block Diagram for 8510 High-Voltage Compressor Installation .
  • Page 5 Table 2-1: 8510 Carton Contents ........

  • Page 6: Section 1 - Introduction

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Section 1 - Introduction General The manual provides instructions for installing, operating and servicing the 8510 High-Voltage Compressor, P/N 8031400G002 (380-460 volts). If you are installing or operating an On-Board High-Vacuum System you should...

  • Page 7: Table 1-1: Compressor Dimensions P/N 8031400G002

    CRYOGENICS Introduction HELIX TECHNOLOGY CORPORATION Figure 1-1: 8510 High-Voltage Compressor: Front and Side Views Table 1-1: Compressor Dimensions P/N 8031400G002 Compressor Dimension Inches Location (mm) 19.52 max. (496 mm) 21.50 max. (546 mm) 24.24 max. (616 mm) 2.30 (58 mm)

  • Page 8: Table 1-3: General Specification

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Table 1-3: General Specification Specification Description Weight 340 lbs (154 kg) approximate Weight 445 lbs (202 kg) approximate (shipping) Power 5.4 kw, nominal operating power, 6.2 kw maximum consumption 0.8 power factor, 7.8 kva maximum...
  • Page 9 CRYOGENICS Introduction HELIX TECHNOLOGY CORPORATION This compressor has been designed to operate with water having a pH value of 6.0 to 8.0 and a calcium carbonate concentration of less than 75 parts per million (typical municipal drinking water quality). For applications of lower pH or greater hardness, water conditioning may be necessary.

  • Page 10: Figure 1-2: 8510 High-Voltage Compressor

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION LEGEND 1. Compressor Power ON/OFF Switch (with ON lamp) 11. Elapsed time meter (ETM). 2. On-Board System Power Switch (with ON Lamp) 12. Cold head power circuit breakers (CB2 and CB3).

  • Page 11: Section 2 - Inspection

    Tool Kit and Accessories, P/N 8032040G014 The Compressor On receipt, remove the 8510 High-Voltage Compressor from its shipping carton and inspect the compressor for evidence of damage as described in this Section. 1. Unpackage and remove the compressor from its shipping carton.
  • Page 12 CRYOGENICS Inspection HELIX TECHNOLOGY CORPORATION b. Two barbed fittings for compressor cooling water connec- tions. c. Compressor remote start connector. d. Input power connector. e. Oil prime manifold, P/N 8018129. f. 8510 High-Voltage Compressor Manual P/N 8040265. P/N 8040265...

  • Page 13: Section 3 - Installation

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Section 3 - Installation Removing Compressor Pump Helium Gas Return and Shipping Supports Supply Connections (Refer to Page 3-2) Verifying Helium Static Pressure (Refer to Page 3-9)

  • Page 14: Compressor Installation

    CRYOGENICS Installation HELIX TECHNOLOGY CORPORATION Compressor Installation Installation of your compressor requires no special tools other than those supplied in the Installation and Scheduled Maintenance Tool Kit. Preparing the Compressor 1. After removing the compressor front panel, refer to Figure 3-2 and remove the front two compressor pump shipping supports.

  • Page 15: Assembling The Compressor Input-Power Cable

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Assembling the Compressor Input-Power Cable To supply input power to the compressor requires the fabrication of a 600- volt power cable that has an SO-4 conductor, 600-volt rating neoprene jacket and 10-gauge or 4 mm wire.

  • Page 16: Electrical Preparation Of Compressor Control Module

    CRYOGENICS Installation HELIX TECHNOLOGY CORPORATION CAUTION Ensure that strain relief is tightened down on the outer insulation of the input power cable and that the cable does not slide. 8. Remount the terminal enclosure cover and secure with two screws. 9.

  • Page 17: Cooling Water: General Considerations

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Cooling Water: General Considerations NOTE: Adjust your water flow to maintain an optimum discharge water temperature of 80° with a minimum input pressure of 7 psi. For detailed water requirements, see below.

  • Page 18: Figure 3-3: Preparing The 8510 High-Voltage Compressor Control Module

    7. Cold Head Circuit Breaker (CB3) 15 Voltage selector switch (S3) 8. Cold Head Circuit Breaker (CB2 16. System Control Interface Connector (J5) Figure 3-3: Preparing the 8510 High-Voltage Compressor Control Module Table 3-1: 8510 High-Voltage Compressor Power Specifications Compressor Frequency...

  • Page 19: Cooling Water: Flow And Pressure Requirements

    Find the minimum pressure: NOTE: Without consideration of back pressure. Figure 3-4: Model 8510 High-Voltage Compressor Cooling Water Flow and Pressure Requirements 1. Determine the temperature variation of the cooling water. Allow a ±10°F to the present water temperature if a variation cannot be ascertained.

  • Page 20: Cooling Water: Temperature Rise

    CRYOGENICS Installation HELIX TECHNOLOGY CORPORATION 2. Determine the optimum water flow rate by drawing a horizontal line from the upper temperature variation figure on the lower graph to the upper curve of the allowable operating range indicated by cross-hatching. Draw a line from this intersecting point straight down to the horizontal axis to find the optimal flow rate.

  • Page 21: Oil Circuit Stabilization

    The example shows a temperature increase of 14°F. NOTE: Used for clarification of example presented in text. Figure 3-5: 8510 High-Voltage Compressor Water Discharge Temperature Increase (°F) Oil Circuit Stabilization 1. Check to insure that the cover and all panels are properly installed on the compressor.

  • Page 22: Electrical Connection Of Compressor

    CRYOGENICS Installation HELIX TECHNOLOGY CORPORATION Make the connections between the cryopump and compressor. See Figure 3-6. 1. Remove dust plugs and caps from the supply fittings and return lines, compressor, and cryopump cold head. Check all fittings. 2. Connect the helium-gas return line from the gas-return connector on the rear of the compressor to the gas-return connector on the cryopump cold head.

  • Page 23: 8510 High-Voltage Compressor Electrical Phase Check And Automatic

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION 2. Connect the compressor input power cable to the AC power source. 3. Turn the system power switch (CB1) on the rear of the compressor control module to the ON position.

  • Page 24: Multipump Installation

    NOTE: Be sure that the compressor switch is off before connecting or disconnecting the remote connector. Multipump Installation Your 8510 High-Voltage Compressor can be connected to more than one high-vacuum pump at a time. For example, three On-Board 8 vacuum pumps can be connected to a single 8510 High-Voltage Compressor.

  • Page 25: Figure 3-6: 8510 High-Voltage Compressor Installation

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION User’s Vacuum Chamber On-Board Cryopump Helium Supply Line Helium Return Line On-Board Power Cable Roughing Pump Air Pressure (60-80 psi) Nitrogen (40-80 psi) Figure 3-6: 8510 High-Voltage Compressor Installation...

  • Page 26: Section 4 - Maintenance Procedures

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Section 4 - Maintenance Procedures WARNING Always disconnect the compressor from all sources of electrical power before performing any maintenance procedures. Unit must be wired by an authorized electrician in accordance with the national Electrical Code, ANSI/NFPA 70-1996, as well as the local codes.

  • Page 27: Removing The Compressor Adsorber

    CRYOGENICS Maintenance Procedures HELIX TECHNOLOGY CORPORATION Compressor Rear Panel This 1 1/8 in. wrench This 1 1/8 in. wrench This 1 3/16 in. wrench is used This 1 3/16 in. wrench is used holds the coupling in to loosen the self sealing holds the coupling in to tighten the self sealing a stationary position.

  • Page 28: Installing The Compressor Adsorber

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION WARNING Depressurize the adsorber before disposing of it. Attach the depressur- ization fitting (included in the Installation and Scheduled Maintenance Took Kit) to the coupling half at either end of the adsorber and tighten it slowly.

  • Page 29: Unscheduled Maintenance

    CRYOGENICS Maintenance Procedures HELIX TECHNOLOGY CORPORATION 6. Connect the water lines to the compressor fittings and secure with hose clamps. If hard piping is used, apply a light coating of plumb- ing thread sealant on threads and install water lines onto the com- pressor.
  • Page 30 CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION 2. If you need to add helium more than once every several months, check for leaks caused by improperly connected self-sealing con- nections or any mechanical joint within the compressor.

  • Page 31: Helium Circuit Decontamination

    CRYOGENICS Maintenance Procedures HELIX TECHNOLOGY CORPORATION a. If the compressor is running (approximately 2 hours operat- ing time) under normal operating conditions, slowly open the helium charge valve on the rear of the compressor. When the helium pressure gauge rises to 75-85 psig (517- 590 kPa) tightly close the charge valve.
  • Page 32 CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION 2. Shut down the compressor as follows: a. Close the Hi-Vac valve in your vacuum system. b. Turn off the system power ON/OFF switch. CAUTION Exposing the cryopump to atmosphere during warm-up will cause excessive water vapor adsorption by the charcoal of the 15K array.

  • Page 33: Compressor Decontamination Procedures

    CRYOGENICS Maintenance Procedures HELIX TECHNOLOGY CORPORATION b. Depressurize the cold head by slowly opening the ball valve and allowing the helium to bleed out slowly. Do not reduce the pressure to less than 30 psig or the cold head may be further contaminated.

  • Page 34: Priming The Compressor Oil System

    Cryopump Decontamination Procedures. Priming the Compressor Oil System The oil-prime manifold (P/N 8018129) supplied with the 8510 Low- Voltage Compressor is used to prime the compressor oil system when any of the following conditions exist: 1.
  • Page 35 CRYOGENICS Appendix A - Customer Support Centers HELIX TECHNOLOGY CORPORATION Appendix A - Customer Support Centers Introduction Refer to Table A-1 for the nearest Customer Support Center for technical assistance or service. North American customers may call 800-FOR- GUTS (800-367-4887) 24 hours a day, seven days a week. All other customers must call their local Customer Support Center.

  • Page 36: Table A-1: Customer Support Centers

    CRYOGENICS Appendix A - Customer Support Centers HELIX TECHNOLOGY CORPORATION Table A-1: Customer Support Centers United States and Canada United States and Canada Helix Technology Corporation Helix Technology Corporation Customer Response Center 3350 Montgomery Drive Nine Hampshire Street Santa Clara, California 95054 U.S.A. Mansfield, Massachusetts 02048 U.S.A.
  • Page 37 CRYOGENICS Appendix A - Customer Support Centers HELIX TECHNOLOGY CORPORATION Table A-1: Customer Support Centers (Continued) Germany, Italy, Denmark, Switzerland, France, Spain, Portugal, Greece Holland, Norway, The Netherlands Helix Technology Helix Technology Corporation Domaine Technologique de Saclay Haasstrasse 15 4, rue Rene Razel, Bât Apollo D-64293 Darmstadt F-91892 Orsay Cedex Germany...
  • Page 38 Table A-1: Customer Support Centers (Continued) China Australia, New Zealand, Tasmania Helix Technology Corporation Helix Technology Corporation Tritek International Company CTI-Cryogenics Products Da An Square, 9A Middle Bldg AVT Services Pte. Ltd. 829 Yan An Middle Road Unit 1, 12 Pioneer Avenue Shanghai, 200040...
  • Page 39 Appendix A - Customer Support Centers HELIX TECHNOLOGY CORPORATION Table A-1: Customer Support Centers (Continued) India India Helix Technology Corporation Helix Technology Corporation CTI-Cryogenics Products Granville-Phillips Products Goodwill Cryogenics Enterprise Ashwini Enterprises 213 Nirman, Sec. 17, Vashi C-2/13/03, Sector-16, Vashi New Bombay, 400703...
  • Page 40 CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Appendix B - Troubleshooting Procedures Troubleshooting the Compressor The compressor troubleshooting procedures are summarized in Table B-1. Technical Inquiries Please refer to Appendix A of this manual for a complete list of the CTI-CRYOGENICS’...

  • Page 41: Table B-1: Compressor Troubleshooting Procedures

    CRYOGENICS Appendix B - Troubleshooting Procedures HELIX TECHNOLOGY CORPORATION Table B-1: Compressor Troubleshooting Procedures Problem Possible Cause Corrective Action 1) System power ON/ 1) Incorrect phasing of input 1) Check phasing of input power OFF switch (CB1) power causing phase moni- from the source against its and compressor tor switch to remain open...
  • Page 42 CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Table B-1: Compressor Troubleshooting Procedures Problem Possible Cause Corrective Action 2) System power ON/ 1) Damaged On-Board power 1) Check for compressor opera- OFF switch (CB1) cable, connectors or drive...

  • Page 43: High-Voltage Compressor

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Appendix C - Electrical Schematic for 8510 High-Voltage Compressor P/N 8040265...

  • Page 44: Figure C-1: 8510 (High Voltage) Compressor Schematic

    CAGE CODE DWG NO LEDGE CTI-CRYOGENICS OWNER- 8031385P002 ORCAD V4.04 SHIP AND AGREE TO MAINTAIN PROD THIS INFORMATION AND DESIGN 31949 CAD FILENAME: /ORCAD/ 8031385/385P002.SCH NEXT ASSY IN STRICT CONFIDENCE. QA APPVL SHEET Figure C-1: 8510 (High Voltage) Compressor Schematic...

  • Page 45: High-Voltage Compressor

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Appendix D - Components in the Electrical Control Module of 8510 High-Voltage Compressor Table D-1: Legend for Figure D-1 Item Description Symbol Designation Number Printed Wire Array Assembly...
  • Page 46 CRYOGENICS Appendix D - Components in the Electrical Control Module of 8510 High-Voltage Compressor HELIX TECHNOLOGY CORPORATION Table D-1: Legend for Figure D-1 Item Description Symbol Designation Number Circuit Breaker, 5A, On-Board Power Circuit Breaker, 5A, On-Board Power Circuit Breaker, 5A, Heater Power...

  • Page 47: Figure D-1: Components In The Electrical Control Module Of 8510

    CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Figure D-1: Components in the Electrical Control Module of 8510 High-Voltage Compressor P/N 8040265...
  • Page 48 CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION Appendix E - Compressor Flow Diagram Figure E-1: 8510 High-Voltage Compressor Flow Diagram P/N 8040265...
  • Page 49 HELIX TECHNOLOGY CORPORATION Appendix F - Multiple Cryopump Installation with Single 8510 High-Voltage Compressor Your 8510 Compressor may be used to drive a number of multiple On-Board cryopump combinations. Figure F-1 depicts a typical multi-cryopump installation with an 8510 High-Voltage Compressor. As shown in this figure, a power cable is connected from the compressor to each cold head;...
  • Page 50 CRYOGENICS Appendix F - Multiple Cryopump Installation with Single 8510 High-Voltage Compressor HELIX TECHNOLOGY CORPORATION Preliminary System Requirements Installation of the 8510 Low-Voltage Compressor for use with a single cryopump is covered in Section 3 - Installation. Installation for multiple cryopump usage is similar, but requires that system charge pressure be established for a given high-vacuum pump system.
  • Page 51 CRYOGENICS 8510 High-Voltage Compressor (For Use with On-Board High-Vacuum Pumps) HELIX TECHNOLOGY CORPORATION and around the loosened flare fitting for 30 seconds to purge the charging line of air. Then tighten the flare nut at the end of the charge line.

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