Summary of Contents for APPLIED MATERIALS CoolEND 0190-13674
- Page 1 0190-13674 / 0190-13675 200 kW DI Water-to-Water Heat Exchanger for 208-Volt or 460-Volt 200mm/300mm Systems Installation Operation Basic Service Thermo Manual P/N U00840 Rev. 06/15/04...
-
Page 2: Table Of Contents
Table of Contents PREFACE Compliance .................... 3 After-sale support ................... 3 Unpacking ....................3 SECTION I Safety Warnings ....................4 Emergency Off (EMO) ................5 Lockout/Tagout ..................5 Chemicals ....................5 Labels & Locations ................. 6 SECTION II General Information Description ..................... - Page 3 Service Assistance ................. 38 SECTION VII Diagrams Flow Diagram ..................39 Unit Dimensions and Center of Gravity ............ 40 Seismic Tie Downs and Leveling Feet ............. 41 Wiring Diagram ..................42 Appendix - Applied Materials LOTO Procedure - 2 -...
-
Page 4: Compliance
Preface Compliance Products tested and found to be in compliance with the requirements defined in the EMC standards defined by 89/336/EEC can be identified by the CE label on the rear of the unit. The testing has demonstrated compliance with the following standards: EMC Directive, 89/336/EEC EN 61326-1:1987, +A1:1998, Class A Equipment... -
Page 5: Warnings
Section I Safety Warnings Make sure you read and understand all instructions and safety precautions listed in this manual before installing or operating your unit. If you have any questions concerning the operation of your unit or the information in this manual, contact our Sales Department for assistance (see Preface, After-sale Support). -
Page 6: Emergency Off (Emo)
Emergency Off (EMO) A guarded red mushroom shaped push-button switch with twist-to-reset is provided in the front of the unit to turn off the unit in case of an emergency. The button head is engraved with “EMO” in large white filled letters. Activation of the EMO button will remove power from the main contactor coil stopping operation of the unit. -
Page 7: Labels & Locations
Labels and Locations Label Quantity-Location Caution, refer to accompanying 2-rear documents for explanation. Main system ground 1-inside electrical panel Secondary Ground 4-inside electrical panel, behind cover The label indicates the use of 1-top rear panel Lockout/Tagout procedures. WARNING This label indicates 2-rear panel,controller Hazardous Voltage. - Page 8 Label Quantity-Location WARNING Heavy Object warns the 2-pump motor, heat operator about the weight exchanger of the object. These labels indicate the 8-next to facility/ direction of fluid flow with process water respect to the unit. The box connections represents the unit, the arrow the direction of flow.
-
Page 9: General Information
Section II General Information Description The CoolEND is designed to remove heat loads from liquid-cooled instru- ments. The unit uses facility cooling or tap water as the secondary cooling medium to remove heat from the primary fluid in the closed recirculation loop. The unit consists of a plate heat exchanger, recirculation pump, stainless steel reservoir, replaceable deionizing cartridge, and a microprocessor control- ler. -
Page 10: Specifications
Specifications Temperature Range +20°C to +30°C Cooling Capacity 200 Kw @ 50 gpm Pumping Capacity Flow rate (gallons per minute) Reservoir Volume Gallons 18 to 25 Unit Dimensions (H x W x D) Inches 53 9/16 x 32 x 32 1/8 Centimeters 136.0 x 81.3 x 81.6 Weight... -
Page 11: Site
Section III Installation Site The unit should be placed in a location with easy access to a facility cooling water and a drain. For proper ventilation, a minimum clearance of 6 inches (15 centimeters) at the rear of the unit is necessary. Ensure there is enough clearance on the right side of the unit to access CAUTION the power disconnect breaker. - Page 12 Estimated Cooling Capacity (kW) Facility Water Entering A = 24°C B = 22°C C = 20°C D = 18°C E = 15°C Facility Water Flow Rate GPM Nominal process side delivery of 50 GPM @ 30°C Deduct approximately 2.2 kW for 3HP pump *nominal rating point (200kW) Estimated Cooling Capacity (BTUH) 1,400,000...
-
Page 13: Electrical Requirements
Electrical Requirements and Ratings The unit construction provides protection against the risk of electric shock by grounding appropriate metal parts. The protection may not WARNING function unless the unit is properly grounded. It is the user’s responsibil- ity to assure a proper ground connection is provided to the main ground connection point of the unit marked with the green . -
Page 14: Electrical Wiring Installation
Electrical Wiring Installation The following should be performed only by a qualified technician. WARNING Remove the Lockout/Tagout (LOTO) assembly. Remove the yellow plastic cover on the circuit breaker (CB). Route the power cable through the strain relief and into the unit. Connect the primary ground to the main ground stud located near the CB. -
Page 15: Plumbing Requirements
Plumbing Requirements Facility water supply should not exceed 80 psi. Facility water supply CAUTION should not exceed 75 gpm. Flexible tubing, if used, should be of heavy wall or reinforced construction. The FACILITY WATER IN is subjected to the maximum pressure of the facility cooling water. - Page 16 - 15 -...
-
Page 17: Dei Cartridge
Tubing and insulation are available from Thermo. Contact our Sales Department for more information (see Preface, After-sale Support). Connect the reservoir and drip pan overflows to a suitable DI drain. NOTE: To remain compliant to SEMI S2-0200, the drip pan drain must be connected at all times. -
Page 18: Filling Requirements
Filling Requirements Consult Applied Materials for filling procedure. The unit is not designed to run with resistivity above 3 megohm for CAUTION extended periods of time, but higher resistivity fluid, up to 18 megohms can be added during start-up or via the auto refill. -
Page 19: Microprocessor Controller
Microprocessor Controller An alphanumeric LCD display presents numeric readings of various operating conditions within the chiller. Display function is selected by pressing the appropriate keys to move through a menu of available information. The controller has two different loops: Operator's and Setup. The controller loops allow the operator to display and/or alter different parameters of the controller. -
Page 20: Leds
LEDs The bicolor NETWORK STATUS LED indicates the status of the communica- tion link. Reference page 32 for DeviceNet LED status. The bicolor MODULE STATUS LED indicates whether or not the device has power and is operating properly. Reference page 32 for DeviceNet LED status. The yellow REPLACE DEI CART indicates the resistivity is below the setpoint. - Page 21 Operator's Loop When the controller is first powered it goes through a short self test and then enters the Operator's Loop, displaying the temperature of the fluid at the supply manifold, the operating pressure, the resistivity of coolant leaving the chiller, the facility water flow rate and any fault message.
- Page 22 Setup Loop The Setup Loop allows the operator to change the DI setpoints, the flow alarm limits, the high pressure setpoint, and select the units of measure for pressure and flow. To enter this loop you must be in the Operator's Loop and displaying the temperature.
- Page 23 - 22 -...
-
Page 24: Fault Messages
Fault Messages Fault messages are displayed in the Operators Loop and the alarm will sound. The faults are prioritized. When a fault is cleared and RESET is pressed, the next prioritized fault is displayed. The messages below are listed from highest to lowest priority. - Page 25 HIGH TEMPERATURE Displayed when the temperature is over 30°C. The message clears after the fault is cleared and the controller's RESET button is depressed. LOW FLOW Displayed when a return line flow drops below the alarm setpoint. The message clears after the fault is cleared and the RESET button is depressed. REPLACE CARTRIDGE Displayed when the resistivity drops below the low setpoint for more than one hour.
-
Page 26: Start Up
Section IV Operation Start Up Connect the unit to a power source, refer to Section III Installation. See unit serial tag for power supply requirements. This unit should not be powered from an Uninterruptable Power Supply (UPS) or other source of non-linear voltage and current. Doing so my result in nui- sance trips of the main circuit protector. -
Page 27: Flow Transducers
Pressure Control The unit is designed to automatically adjust the pump speed to maintain a selectable supply (process) output pressure. This is accomplished by means of a Variable Frequency Drive (VFD) which can vary the AC frequency in the pump motor circuit. A pressure transducer provides an electronic input signal to the main micropro- cessor-based controller. -
Page 28: Low Fluid Level Safety
Low Fluid Level Safety If the reservoir fluid level drops to 20 gallons, a fault message is displayed on the controller, the TROUBLE LED illuminates, and a remote signal alarm is generated. The alarm has to be reset once the fault is cleared. If the level drops below 14 gallons, the alarm sounds and the pump is de-energized. -
Page 29: Remote Interface
Remote Interface The temperature of the cooling fluid and the status of the low flow and low fluid detectors can be monitored by an external device using the monitor receptacle located on the control panel. Monitor receptacle Pin #1 Flow monitor output (return #1), active if flow is satisfactory sink current. Pin #2 Flow monitor output (return #2), active if flow is satisfactory sink current. -
Page 30: Resistivity Sensor
Resistivity Sensor The controller displays and maintains resistivity between adjustable setpoints. If the resistivity goes above the high setpoint, the line through the DI cartridge closes. Flow through the DI cartridge resumes when the resistivity drops to the low setpoint. If the resistivity drops below the low setpoint for more than one hour, a fault is displayed, the REPLACE DEI CART LED illuminates and a remote signal is generated. -
Page 31: Devicenet Interface
DeviceNet Interface Resistivity Scaling Unsigned binary is used to represent the 0V to +10V range. 12 bits of resolu- tion is available at the DeviceNet interface. 0 to +10V range AI Digital Value Resistivity input to controller (at the DeviceNet Interface) 0 Mohm 4095 20 Mohm... -
Page 32: Devicenet Messaging
DeviceNet Messaging Poll Command Message: Byte PUMP PUMP = Command for pump to be on or off. 1 = on, 0 = off.. Respond Message: Byte Water Temperature (LSB) Water Temperature (MSB) Water Resistivity (LSB) Water Resistivity (MSB) Flow 1 (LSB) Flow 1 (MSB) Flow 2 (LSB) Flow 2 (MSB) -
Page 33: Module Status Led
MODULE STATUS LED The bicolor (green/red) LED provides device status. It indicates whether or not the device has power and is operating properly. Status Indication No power Device not powered Device operational Green Device operating in a normal condition Device in standby Flashing Green Device needs commissioning due to configuration missing, incomplete or... - Page 34 Connection time-out Flashing Red One or more I/O connections are in the timed-out state Critical link failure Failed communication device. Device has detected an error that has ren- dered it incapable of communicating on the network (Duplicate MAC ID, or Bus-off) Communication faulted Flashing...
-
Page 35: Connectors
Connectors DeviceNet (J2) (TN # 026044) (Turck # FS4.5-0.5) Shield CAN_H CAN_L Leak Detector (P5) (TN # 083904) (Amp # 205841-1) Normally Closed Normally Closed EMO In (P3) (TN # 001545) (Amp # 206061-1) Normally Closed (to EMO Out Pin 4) to in pin 3 to in pin 2 to EMO Out pin... -
Page 36: Periodic Maintenance
Section V Periodic Maintenance For personal safety and equipment reliability, the following procedure should only be performed by a qualified technician. Contact our CAUTION Service Department for assistance (see Preface, After-sale Support). Performance maintenance and service procedures other than those WARNING described in this manual may result in a hazardous situation and may void the manufacturer’s warranty. -
Page 37: Periodic Cleaning
Periodic Cleaning The unit is designed for trouble free operation. There are no internal parts that need periodic cleaning or replacing. When cleaning the unit's exterior surfaces, Thermo recommends using a general purpose cleaner (i.e. fantastik ), and a soft, clean, lint-free cloth. ®... -
Page 38: Troubleshooting
Section VI Troubleshooting For personal safety and equipment reliability, the following procedure CAUTION should only be performed by a qualified technician. Contact our Ser- vice Department for assistance (see Preface, After-sale Support). Contact with hazardous voltage inside the chiller can cause severe injury or death. -
Page 39: Displaying Software Version
Displaying Software Version From the Operator's Loop temperature display, depress and hold the ENTER key. While holding the ENTER key enter the key sequence NO-YES-NO. Use the NEXT or LAST key to highlight 2) VERSION NUMBER. Press ENTER to display the software version. Press NEXT and then NO to return to the temperature display. -
Page 40: Flow Diagram
Section VIII Diagrams - 39 -... -
Page 41: Unit Dimensions And Center Of Gravity
2 3/4 5 5/8 2 7/8 Typ 23° 30° 53 15/16 36 13/16 4 1/8 3 3/4 5 1/2 Right Side View 36 11/16 33 3/16 Weight Distribution (pounds) Empty Right Front Left Front 32 7/8 32 1/8 Right Rear Left Rear Full Right Front... -
Page 42: Seismic Tie Downs And Leveling Feet
21° 33° 18 3/4 13 1/4 25 5/8 5 5/16 Seismic tie-down, typical (1 of 8) 3 7/16 32 11/16 Front View Seismic Tie-Downs and Leveling Feet Seismic tie-downs and leveling feet are installed on the unit. Once the leveling feet are in the desired level use the jam nut to secure it in position. -
Page 43: Wiring Diagram
Appendix - Applied Materials LOTO Procedure 1. Lockout and Tagout Prior to performing any Chiller maintenance operation, the energy sources associated with the Chiller system should be lockout and tagged out (LOTO). Hazard control features added to the system (e.g., safety interlocks) are not to be considered or used as a substitute for turning off and locking out electrical, pneumatic and fluid delivery to the Chiller system. - Page 44 2. If necessary, non-standard removal of lockout/tagout equipment can be done only in accordance with OSHA standards and the Applied Materials lockout/tagout standard. A local safety representative may remove a lock ONLY if all of the following conditions are met: a.
- Page 45 1.6.2. Fluid Energy Fluid energy exists in the form of facility water flowing into and out of the CoolEND . The release of fluid can increase the risk electrical shock, fire, environmental contamination and damage to the system. To effectively isolate the flow of fluids user-supplied isolation valves must be installed on the facility water supply and return lines.
Need help?
Do you have a question about the CoolEND 0190-13674 and is the answer not in the manual?
Questions and answers