1. Manuals
  2. Brands
  3. BOC Edwards Manuals
  4. Industrial Equipment
  5. Temescal SuperSource2 STIH-270-2PT
  6. Manual

BOC Edwards Temescal SuperSource2 STIH-270-2PT Manual

Poptop electron beam turret source
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
Temescal
SuperSource2™
PopTop Elec tron Beam
Tur ret Source
Model STIH-270-2PT
Temescal,
a di vi sion of BOC Ed wards, Inc.
4569C Las Positas Road, Livermore, CA 94551; Tel. 925-371-4170; Fax. 925-449-4096

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the Temescal SuperSource2 STIH-270-2PT and is the answer not in the manual?

Questions and answers

Related Manuals for BOC Edwards Temescal SuperSource2 STIH-270-2PT

Summary of Contents for BOC Edwards Temescal SuperSource2 STIH-270-2PT

  • Page 1 Temescal SuperSource2™ PopTop Elec tron Beam Tur ret Source Model STIH-270-2PT Temescal, a di vi sion of BOC Ed wards, Inc. 4569C Las Positas Road, Livermore, CA 94551; Tel. 925-371-4170; Fax. 925-449-4096...
  • Page 2 Sec ond re leased ver sion of man ual Cor rec tions and up dates 4/06 Temescal, A di vi sion of BOC Edwards, Inc. 4569C Las Positas Road Livermore, CA 94551 ©2002, 2006 by BOC Edwards, Inc. April, 2006...

  • Page 3: Table Of Contents

    Con tents Sec tion 1 De scrip tion and Spec i fi ca tions 1.1 Sec tion Over view ......... . 1-1 1.2 Un pack ing .
  • Page 4 Il lus tra tions Sec tion 1 5-4. Removing the screws that secure the crucible to the crucible mounting flange ... . . 5-6 1-1. STIH-270-2PT source viewed from the top ..1-3 5-5.
  • Page 5 SUM MARY OF TERMS AND CON DI TIONS OF SALE THERE ARE NO EX PRESS OR IM PLIED WAR - ME CHAN I CAL WAR RANTY: For a pe riod of twelve (12) months from the date of orig i nal ship - RANTIES THAT EX TEND BE YOND THE WAR - RANTY HEREINABOVE SET FORTH.
  • Page 6 have free ac cess to all data com piled by Pur chaser in THERE ARE NO EX PRESS OR IM PLIED WAR - con nec tion with any field test; and (c) con duct its RANTIES THAT EX TEND BE YOND THE WAR - own field test at its own ex pense dur ing any four - RANTY HEREINABOVE SET FORTH.
  • Page 7 SAFETY IN STRUC TIONS FOR OP ER ATING AND SER VICE PER SON NEL Op er a tors and ser vice per son nel should al ways wear safety glasses. Op er a tors shall not en ter ar eas in tended for ser vice ac cess only.
  • Page 8 Spe cial Amend ment for United King dom Users All Elec tri cal Power Sources: Safety Pre cau tions Only au tho rized per son nel should be per mit ted to carry out work on this sys tem. Prior to any ser vic ing, ground ing hooks should be used to short out all high-volt age parts and con duc tors in both the vac uum sys tem and the high-volt age power sup ply.
  • Page 9 USER RE SPON SI BIL ITY This equip ment will per form in ac cor dance with the in struc tions and in for ma tion con tained in the user’s man - ual and its ref er enced doc u ments when such equip ment is in stalled, op er ated, and main tained in com pli ance with such in struc tions.
  • Page 10 HEALTH HAZ ARD The con den sates de pos ited on the tank walls of a vac uum sys tem are gen er ally in the form of ex tremely fine par ti cles. The na ture, as well as the form, of the ma te ri als pose the fol low ing po ten tial health haz ards: a) In haling fine par ti cles (pow der) may cause dam age to the lungs.

  • Page 11: Section Over View

    SEC TION 1 DESCRIPTION AND SPECIFICATIONS 1.1 SECTION OVER VIEW This sec tion pro vides a gen eral de scrip tion of the STIH-270-2PT source, de tailed spec i fi ca tions for the prod uct, and in for ma tion about the avail able ac ces so ries. Sec tion 1.2 de scribes the items that should be found in the ship - ping con tainer, both for guns shipped fully as sem bled and for guns shipped as a base unit plus com po nents.

  • Page 12: Unpacking

    Description and Specifications 1.2 UNPACKING Re move the source from its ship ping con tainer. While un pack ing, check the com po nents in the con tainer against the pack ing list. Any dis crep ancy be tween the parts list and the ac tual parts re ceived should be re - ported to Temescal rep re sen ta tives.

  • Page 13: Product Description

    Description and Specifications 1.3 PRODUCT DESCRIPTION Gen eral Char ac ter is tics The STIH-270-2PT be longs to Temescal’s SuperSource2 line of tur ret sources, which of fer en hanced ver sa - til ity, con ve nience, and de pend abil ity in ap pli ca tions rang ing from op ti cal and mi cro elec tronic pro duc tion to spe cial ized R&D coat ing.

  • Page 14: Stih-270-2Pt Source Viewed From The Front

    Description and Specifications Re moving the cru ci ble cover re quires only rais ing the cover and re mov ing the cover’s three mount ing screws. It is not nec es sary to blow the cool ing wa ter out of the source be fore re mov ing the cover. Once the cover is off, cru ci ble re moval is rel a tively easy, though this op er a tion does ne ces si tate blow ing out the source’s wa ter chan nels.
  • Page 15 Description and Specifications life is at trib ut able to two causes. The first and most com mon is im proper in stal la tion of the fil a ment. The sec - ond is in cor rect use of a de po si tion-rate con trol ler. The per son set ting up the pro cess pa ram e ters must en sure that the max i mum sig nal out put by the rate con trol ler will never drive the source be yond its max i mum rat ing of 10 kW.
  • Page 16 Description and Specifications Or der ing Ad di tional Cru ci bles The ta ble be low lists the part num bers for the cru ci bles and cru ci ble cov ers cur rently avail able for the STIH-270-2PT. FOUR-POCKET CRU CI BLES DE SCRIP TION PART NO.

  • Page 17: Specifications

    Description and Specifications 1.4 SPECIFICATIONS Di men sions See draw ings Weight 40.4 lbs. (18.3 kg) Ro ta tion torque 10 in. lbs. (11.5 kg • • Max i mum bakeout tem per a ture 302° F (150° C) Max i mum power 10 kW Ac cel er a tion volt age 4-10 kV...
  • Page 18 Description and Specifications Figure 1-3.Dimensions of STIH-270-2PT source - top, side, and front views 0101-9004-0A STIH-270-2PT...

  • Page 19: Accessories

    Description and Specifications 1.5 ACCESSORIES Feedthroughs The feedthroughs de scribed be low are re quired for in stal la tion of the PopTop SuperSource2. The high-cur rent oc tal feedthrough, which pro vides the con duit from at mo sphere to vac uum for the de flec tion coil cur rent.
  • Page 20 Description and Specifications Dual Shut ter Con trol ler Con trol units de signed to con trol ei ther one or two shut ters are avail able from Temescal. For the sin - gle-shutter con trol ler, or der PN 0611-4810-0. For the dual-shutter con trol ler, or der PN 0611-4810-1. Cru ci ble Liners The op tional cru ci ble lin ers avail able from Temescal in crease evap o ra tion rates by re duc ing heat trans fer be - tween the evaporant and the wa ter-cooled cru ci ble.

  • Page 21: Sec Tion Overview

    SECTION 2 INSTALLATION 2.1 SEC TION OVERVIEW This sec tion pro vides the in for ma tion re quired for source in stal la tion. Sec tion 2.2 lists the in stal la tion re - quire ments. Sec tion 2.3 de scribes the pro ce dures for in stall ing a STIH-270-2PT alone on a source tray, and sec tion 2.4 pro vides ad di tional in struc tions to be fol lowed when the source is in stalled next to an other source on one source tray.

  • Page 22: In Stal La Tion Requirements

    Installation 2.2 IN STAL LA TION REQUIREMENTS Feedthroughs The feedthroughs listed be low are re quired for in stal la tion of the source. They are avail able from Temescal. See sec tion 1.4 for de scrip tions and or der ing num bers. •...
  • Page 23 Installation DANGER: HIGH VOLT AGE On manually driven systems, the knob or crank for rotating the source must NOT be mounted in a position that would place an operator in proximity to any high-voltage component. Injuries resulting from high-voltage shocks can be extremely severe, even lethal.
  • Page 24 Installation Elec tri cal Power To pro duce an elec tron beam, the source must be pow ered by an elec tron-beam power sup ply ca pa ble of pro - vid ing up to 35 A of fil a ment cur rent at 12 V ac and up to 1.5 A of emis sion cur rent at 4-10 kV dc (10 kW max.).

  • Page 25: In Stal La Tion Procedure

    Installation 2.3 IN STAL LA TION PROCEDURE Fol low the pro ce dures de scribed be low and re fer to Fig ure 2-1 in in stall ing the source. NOTE The source should be mounted ONLY on a source tray made of type-304 stainless steel or some other nonmagnetic material.

  • Page 26: Installation Details

    Installation Figure 2-1. Installation Details 0101-9004-0A STIH-270-2PT...
  • Page 27 Installation CAU TION It is critical to isolate the coil-current leads from the effects of the high voltage. If adequate isolation is not provided for these leads, the probable results included erratic beam position control and damage to other system components. Beam sweep controllers are particularly vulnerable to the effects of high-voltage interference and arcing.

  • Page 28: Typical Installation Of Bottom-Drive Model (Stih-270-2Pt)

    Installation The ro tary-mo tion feedthrough must be lo cated rather pre cisely with re spect to source lo ca tion. In side-drive in stal la tions, the ro tary feedthrough is ide ally mounted in a straight line with the gun’s drive shaft. Since this is dif fi cult to achieve with pre ci sion in prac tice, the cou pling and shaft ex ten sion used must pro vide enough flex i bil ity to com pen sate for what ever de gree of mis align ment ex ists be tween the feedthrough and the gun’s drive shaft.
  • Page 29 Installation Make sure that the drive cou pling is not bent and that the shafts it con nects are in line with each other. Then in stall and tighten the gun’s mount ing screws. The gun’s mount ing straps must make tight, solid con tact with the source tray, pro vid ing a se cure path to ground for the high-volt age cur rent that will pass through the gun.
  • Page 30 Installation At tach the tub ing nip ples to these tub ing ends. If the tub ing is stain less steel at the ends, use TIG weld ing to at tach the nip ples. Coat the O-ring with Apiezon L grease and re place it in the groove in the air/wa ter feedthrough. Re in stall the feedthrough-tub ing as sem blies, tight en ing the feedthrough’s fix ing nut all the way this time.
  • Page 31 Installation Using a flex i ble cou pling, con nect the ro tary feedthrough’s in put (i.e., at mo sphere-side) shaft to the out put shaft of the in dex/drive mech a nism. If you are us ing the Temescal model TRC-3460 Tur ret In dexer Con trol ler, fol low the in struc tions in the in dexer’s man ual in mak ing this con nec tion.
  • Page 32 Installation Con nect the top is down switch N.O. to pin 8, com mon to pin 7, and con nect the top is up switch N.C. to pin 6, com mon to pin 5. Find the loose ends of the wires that you ear lier con nected to the at mo sphere side of the oc tal feedthrough.
  • Page 33 Installation Route the leads to the high-volt age feedthroughs and cut them to length. Route each lead to the near - est feedthrough, with out cross ing them and with no sharp bends. The leads must NOT touch the source tray or any other grounded com po nent or struc ture. At tach the sup plied ter mi nals to the ends of the leads and con nect the ter mi nals to the HV feedthroughs.
  • Page 34 Installation PREFERRED METHOD VACUUM POWER CABINET MODULE To all other grounds OF HV POWER SYSTEM CENTRAL GROUNDING POINT. SUPPLY Bolt copper straps to clean, bare metal. Bolt copper strap to grounding 6’ COPPER STRAPS bracket on base. BUILDING FLOOR 1. As shown at left, sink two ground ing rods into the earth ap prox i mately six feet apart.

  • Page 35: In Stalling A Sec Ond Source

    Installation 2.4 IN STALLING A SEC OND SOURCE If two elec tron beam sources are to op er ate on one source tray, they must be in stalled fac ing op po site di rec - tions. In ad di tion, a mumetal-and-stain less-steel shield as sem bly must be in stalled be tween them to pre vent mag netic in ter fer ence be tween the two sources.

  • Page 36: Magnetic Shield Mounted To Debris Shield In Two-Gun Installation

    Installation De bris shield Angle bracket attached to debris shield An gle bracket at tached to mag netic shield De bris shield Figure 2-6. Magnetic shield mounted to debris shield in two-gun installation 2-16 0101-9004-0A STIH-270-2PT...

  • Page 37: Sec Tion Overview

    SECTION 3 OPERATION 3.1 SEC TION OVERVIEW This sec tion pro vides a guide to source op er a tion. Sec tion 3.2 is an over view of the elec tron beam con trols, sec tion 3.3 de scribes the ini tial op er at ing pro ce dure, and sec tion 3.4 de scribes rou tine in spec tion and clean - ing pro ce dures.

  • Page 38: Elec Tron Beam Control

    Operation 3.2 ELEC TRON BEAM CONTROL The source op er ates in con junc tion with an elec tron beam power sup ply and, op tion ally, with a beam sweep con trol ler. Var i ous fea tures of these com po nents al low con trol over the fol low ing beam pa ram e ters: •...
  • Page 39 Operation If the beam is still not in the cor rect po si tion, at tach a fourth shunt bar mag net i cally be hind the one al ready mounted on the rear of the source. CAU TION Do NOT attempt to attach a shunt bar magnetically to the front of the source.
  • Page 40 Operation Ad justing the De flec tion Cur rent A per ma nent mag net mounted at the rear of the source cre ates a pow er ful mag netic field that is the pri mary force act ing on the elec tron beam. This shape of this mag netic field is mod i fied by the pole pieces that form the sides of the source.

  • Page 41: Location Of The Internal And External Pole Piece

    Operation out ward, the beam is de flected far ther back to ward the rear of the source. Con se quently, the pole piece ex ten - sions should be ad justed in in cre ments of 1/8" at a time. To change the po si tion of the ex ter nal pole piece ex ten sions, loosen the screws that se cure the ex ten sions to the source, move them equal dis tances in the de sired di rec tion, and retighten the screws.

  • Page 42: Ini Tial Operation

    Operation 3.3 INI TIAL OPERATION Fol low the pro ce dure de scribed be low in op er at ing the source for the first time. Be fore be gin ning this pro ce - dure, make sure that the fol low ing con di tions are met: •...
  • Page 43 Operation Evac u ate the vac uum cham ber to a pres sure less than 5 × l0 torr. NOTE Continuous operation at pressures higher than 5 × l0 torr drastically reduces filament life and may result in severe arcing within the chamber.
  • Page 44 Operation NOTE If the longitudinal deflection current is controlled by either the e-beam power supply or a standard (i.e., non-bipolar) beam sweep controller, the beam spot should move toward the emitter assembly as you increase the longitudinal deflection current. If increasing the current moves the beam in the opposite direction, the leads to the longitudinal coil are reversed.

  • Page 45: Rou Tine Inspection

    Operation 3.4 ROU TINE INSPECTION In spec tion Upon Venting Per form the fol low ing checks each time the sys tem is vented to at mo sphere. Check to see that each pocket is at least half-full. Add evaporant ma te rial as re quired to main tain the de sired pool level.
  • Page 46 Operation • Se vere ox i da tion above the ar eas where the fil a ment legs con tact the fil a ment clamps. Se vere ox i - da tion in these ar eas may in di cate that a layer of in su la tion has formed be tween the fil a ment and the fil a ment clamps, re duc ing con ti nu ity and emit ter ef fi ciency.

  • Page 47: Cru Ci Ble Re Moval And Re Place Ment

    Operation 3.5 CRU CI BLE RE MOVAL AND RE PLACE MENT The PopTop SuperSource2 is de signed to pro vide easy ac cess to the cru ci ble and easy cru ci ble re moval, all with out source dis as sem bly. The re mov able cru ci ble cover is se cured by only three screw, and re mov ing the cover does not ne ces si tate blow ing the wa ter out of the source.

  • Page 48: Removing The Crucible Cover

    Operation The re mov able cru ci ble cover of the PopTop SuperSource2 pro vides quick ac cess to the cru ci ble, mak ing it easy to clean the cru ci ble cover and the up per sur faces of the cru ci ble, or re move the cru ci ble. Fol low the pro - ce dure de scribed be low when re mov ing the cover for any of these rea sons.

  • Page 49: Correct Arrangement Of Sleeve On Shaft Of Allen Driver

    Operation Re moving the Cru ci ble The PopTop SuperSource2 en ables you to re move the cru ci ble with out ex ten sive source dis as sem bly, mak - ing it easy to clean the cru ci ble thor oughly, switch cru ci bles, or check the con di tion of the O-ring in the cru ci - ble mount ing flange.

  • Page 50: Removing The Screws That Secure The Crucible To The Crucible Mounting Flange

    Operation Figure 3-5. Socket-head screw correctly retained by sleeve on end of Allen driver Re move the screws se cur ing the cru ci ble to its mount ing flange. There are eight of these screws, and six of them will be ac ces si ble if you turn the cru ci ble to the po si tion shown in Fig ure 3-6. Per form the fol low ing steps in re mov ing these screws: CAU TION It is important to follow the procedure described below in removing...

  • Page 51: Source With Crucible Cover Removed And Knurled Thumbscrew In Place In Top Of The Crucible

    Operation (a) Re move the two screws in the back of the cru ci ble. (b) Ro tate the cru ci ble 180° and loosen the six re main ing screws ½ turn, be gin ning with the two screws that are now in the rear most po si tion. (c) Re move these six screws, be gin ning with the two in the rear most po si tion.

  • Page 52: Removing The Crucible From The Source. Note Angle Of

    Operation Figure 3-8.Removing the crucible from the source. Note angle of withdrawal Cru ci ble Re place ment Per form the steps de scribed be low when in stall ing a new cru ci ble or re in stall ing the same cru ci ble. Be sure to fol low the cor rect pro ce dure when plac ing the cru ci ble into the cru ci ble well and low er ing it onto the cru ci ble mount ing flange.
  • Page 53 Operation CAU TION Be careful not to scrape the underside of the crucible against the stainless steel water baffle, as doing so may damage the O-ring-sealing surface on the bottom of the crucible. Ro tate the cru ci ble un til all six threaded holes are vis i ble through the holes in the cru ci ble’s base. In sert screws into the six ac ces si ble holes and screw them down enough to par tially com press the O-ring.
  • Page 54 Operation 3-18 0101-9004-0A STIH-270-2PT...

  • Page 55: Sec Tion Over View

    SECTION 4 MAINTENANCE OF HIGH-PERFORMANCE EMITTER ASSEMBLY 4.1 SEC TION OVER VIEW This sec tion de scribes the pro ce dures in volved in proper main te nance of the high-per for mance emit ter as - sem bly. Sec tion 5.2 de scribes how to change the fil a ment, sec tion 5.3 de tails the dis as sem bly pro ce dure for the en tire emit ter, and sec tion 5.4 cov ers emit ter re as sem bly.

  • Page 56: Fil A Ment Re Place Ment

    Maintenance of High-Performance Emitter Assembly 4.2 FIL A MENT RE PLACE MENT Fol low the pro ce dure de scribed be low in chang ing the fil a ment, re fer ring as needed to the il lus tra tions in this sec tion.
  • Page 57 Maintenance of High-Performance Emitter Assembly The spare parts kit (PN 0916-8300-0) for the high-per for mance emit ter pro vides a fil a ment align - ment rod (PN 0916-8271-0). This tool is de signed to en sure that the fil a ment is po si tioned and aligned cor rectly be fore the clamp screws are tight ened.

  • Page 58: Emit Ter Dis As Sem Bly

    Maintenance of High-Performance Emitter Assembly 4.3 EMIT TER DIS AS SEM BLY Fol low the pro ce dure de scribed be low when dis as sem bling the en tire emit ter as sem bly. Re fer to Fig ures 5-1, 5-2, and 5-3 for parts iden ti fi ca tion.

  • Page 59: Emit Ter Re As Sem Bly

    Maintenance of High-Performance Emitter Assembly 4.4 EMIT TER RE AS SEM BLY Fol low the se quence de scribed be low when re as sem bling the emit ter. Re fer to Fig ures 5-1, 5-2, and 5-3 for parts iden ti fi ca tion. It is ad vis able to use new ce ramic parts when re as sem bling the emit ter. It is ex tremely dif - fi cult to clean these parts thor oughly, and they are likely to have in vis i ble cracks that can re sult in break age upon re as sem bly and/or shorts dur ing sub se quent source op er a tion.
  • Page 60 Maintenance of High-Performance Emitter Assembly The spares kit (PN 0916-8300-0) for the high-per for mance emit ter con tains a thick ness gauge (PN 0916-8281-0) de signed to en sure that the two beam formers are po si tioned cor rectly with re spect to each other.

  • Page 61: Front View Of High-Performance Emitter Assembly

    Maintenance of High-Performance Emitter Assembly Filament legs Anode Filament clamp screws Emitter support Filament bus bars Figure 4-1. Front view of high-performance emitter assembly Anode Anode mounting bracket Emitter mounting bar Emitter mounting bracket Emitter support bar Figure 4-2. High-performance emitter viewed from rear STIH-270-2PT 0101-9004-0A...
  • Page 62 Maintenance of High-Performance Emitter Assembly Figure 4-3. Exploded view of high-performance emitter 0101-9004-0A STIH-270-2PT...

  • Page 63: Sec Tion Over View

    SECTION 5 SOURCE DISASSEMBLY 5.1 SEC TION OVER VIEW This sec tion de scribes in de tail the cor rect pro ce dure for dis as sem bling the source. The pro ce dures de scribed in this sec tion should be fol lowed when ever the source is par tially or com pletely dis as sem bled for clean ing or for re place ment of O-rings or other parts.

  • Page 64: Source Re Moval And Dis As Sem Bly

    Source Disassembly 5.2 SOURCE RE MOVAL AND DIS AS SEM BLY Gen eral Guide lines Fol low the guide lines de scribed be low when per form ing any dis as sem bly pro ce dure. The pur pose of these guide lines is to limit risks to the per son per form ing the dis as sem bly, to min i mize vac uum sys tem con tam i na - tion, and to sim plify re as sem bly wher ever pos si ble.
  • Page 65 Source Disassembly Re move the source from the source tray and place it on a suit able work bench. Do not place the source on the bench with out first turn ing it on its side or hav ing sup ports (1/4-20 screws are ad e quate) which keep the source’s weight off the spi der plate.

  • Page 66: Removing The Crucible Cover

    Source Disassembly Figure 5-1. Removing the crucible cover Step 2. With the source on its side, re move the 10-32 flat-head screw from the cen ter of the spi der plate. Note: Use a thin 7/8” open-end wrench ap plied to the ma chined hex on the bel lows to pre vent twist ing the bel lows.

  • Page 67: Socket-Head Screw Correctly Retained By The Sleeve On

    Source Disassembly in steps 3 and 4 un der the head ing “Re mov ing the Cru ci ble” in sec tion 3.5. If you are pro fi - cient in the use of this tool, pro ceed di rectly to step 10 of this pro ce dure. Shaft of Allen driver should extend about halfway into counterbored area.

  • Page 68: Removing The Screws That Secure The Crucible To The Crucible Mounting Flange

    Source Disassembly Step 10. Re move the screws that se cure the cru ci ble to its mount ing flange. There are eight of these screws, six of which will be ac ces si ble if you turn the cru ci ble to the po si tion shown in Fig - ure 5-4.
  • Page 69 Source Disassembly Step 12. Re move the cru ci ble from the source, fol low ing these steps to avoid dam ag ing the O-ring-seal ing sur face on the base of the cru ci ble: (a) Grasp the knurled thumbscrew and use it to lift the crucible straight up as far as it will go.
  • Page 70 Source Disassembly (e) Ro tate the cru ci ble so that the other two screw holes are vis i ble, in sert screws into them, and tighten them about the same amount that you have al ready tight ened the other six screws. (f) Work your way around the cru ci ble in a star-shaped pat tern, tight en ing the screws in two more stages, un til you can tell that the O-ring is com pletely com pressed.

  • Page 71: Removing The Screws That Secure The Coil Housing To The Pole Pieces

    Source Disassembly Figure 5-7. Uncoupling the water-crossover tube Step 18. Re move the screws that se cure the left-hand pole piece to the coil hous ing and loosen the screws that se cure that pole piece to the source base plate (see Fig ure 5-8). Figure 5-8.

  • Page 72: Removing The Screws That Secure The Lh Pole Piece To

    Source Disassembly Figure 5-9. Removing the coil housing Step 21. Re move the screws that se cure the pole pieces to the base plate (see Fig ure 5-10). Figure 5-10. Removing the screws that secure the LH pole piece to the base plate Step 22.

  • Page 73: Correct Technique For Detaching Pole Pieces From Magnet And Base Plate

    Source Disassembly Figure 5-11. Correct technique for detaching pole pieces from magnet and base plate DANGER As you perform this step, take care to avoid getting your fingers between the pole piece and any other part of the source. One or more of your fingers could easily be injured if the pole piece should slip from your grasp.
  • Page 74 Source Disassembly Water baffle Crucible mounting flange (PN 0412-1342-0) (PN 0412-1323-0) 5” OD x 1/8” O-ring (PN 2231-0250-0) Source base plate (PN 0626-4355-0) Figure 5-12. Removing the water baffle Hold ing the re main der of the source as shown in Fig ure 5-13, re move the four 6-32 × 3/8-in. Step 25.

  • Page 75: Detaching The Pivot Plate Shaft From The Base Plate

    Source Disassembly Figure 5-13. Detaching the pivot plate shaft from the base plate Re as sem bly Note The four holes in the base plate for mount ing the bear ing hous ing as sem bly are not ar ranged in a rect an gle but are asym met ri cal, with one hole slightly far ther off cen ter with re spect to the other four.

  • Page 76: Removing The Screws That Secure The Bearing Housing Assembly To The Crucible Mounting Flange

    Source Disassembly × Step 26. Re move the four 6-32 5/8-in. screws that se cure the bear ing hous ing to the cru ci ble mount - ing flange. To do so hold the bear ing hous ing-mount ing flange as sem bly in one hand, with the top of the mount ing flange fac ing down.

  • Page 77: Parts Layout, Stih-270-2Pt Source, With Emitter, Bearing Housing Assembly, And Drive Assembly Still Intact

    Source Disassembly Figure 5-15. Parts layout, STIH-270-2PT source, with emitter, bearing housing assembly, and drive assembly still intact STIH-270-2PT 0101-9004-0A 5-15...
  • Page 78 Source Disassembly Part Num bers List for Fig ure 5-15 Ref# Item Num ber De scrip tion Ref# Item Num ber De scrip tion 2231-0110-1 O-Ring 3/8 ID X 3/32 W VITON 0627-4833-0 Plate, Spi der, SST, PopTop 0214-9311-0 Shunt Bar STIH-270-2C 0627-4812-0 Pushrod, Solid, -2CK PT SRC 0626-7434-0...

  • Page 79: Dis As Sem Bling The Bear Ing Hous Ing As Sem Bly

    Source Disassembly 5.3 DIS AS SEM BLING THE BEAR ING HOUS ING AS SEM BLY Per form the steps de scribed be low and re fer to Fig ures 5-16 and 5-17 when dis as sem bling the bear ing hous - ing as sem bly.

  • Page 80: Allen Driver Inserted Through Hole In The Bearing Housing

    Source Disassembly Re as sem bling and In stalling the Bear ing Housing As sem bly Fol low the pro ce dures de scribed be low when re as sem bling and in stall ing the bear ing hous ing as sem bly. Per - form these pro ce dures in the or der in which they ap pear.
  • Page 81 Source Disassembly Step 5. Re move the bear ing hous ing from the cru ci ble mount ing flange. Pro ce dure 3: Re as sem bly of Bear ing Housing As sem bly Step 1. Put the pivot shaft in place in side the bear ing hous ing, mak ing sure that both parts face the cor rect di rec tion.
  • Page 82 Source Disassembly the pivot shaft. If your tech nique is cor rect, stretch ing the quad ring over the pivot shaft should re quire only a light down ward pres sure. CAU TION Do NOT force the quad ring onto the pivot shaft. Doing so may damage the quad ring, rendering it incapable of providing a water-tight seal.
  • Page 83 Source Disassembly Step 4. Ro tate the cru ci ble while di rect ing the he lium flow to ward the area where the quad ring re - sides (i.e., the area where the cru ci ble mount ing flange fits around the pivot shaft). The leak rate there should not ex ceed 5 ×...

  • Page 84: Disassembling The Drive Shaft As Sem Bly

    Source Disassembly 5.4 DISASSEMBLING THE DRIVE SHAFT AS SEM BLY Fol low the steps de scribed be low in dis as sem bling the drive shaft as sem bly. Step 1. Hold the drive shaft as sem bly in one hand, with the shaft ex tend ing to ward you, as shown in Fig ure 5-19.
  • Page 85 Source Disassembly Step 3. Holding the bear ing hous ing in the same po si tion, with draw the drive shaft from the as sem - bly. Step 4. Turn the bear ing hous ing over and drop the bear ings and the spacer into your other hand. Do NOT let the bear ings fall onto the floor or a work sur face, as they are eas ily dam aged.

  • Page 86: The Parts Of The Drive Shaft Assembly Laid Out In Order

    Source Disassembly Pinion gear (PN 0216-9192-0) Bearing housing (PN 0412-1402-0) Drive-shaft bearings (PN 9120-1271-0) Drive shaft Retaining ring for (PN 0216-9202-0) drive shaft (PN 1381-1032-5) Bearing spacer (PN 9013-2814-0) Retaining ring for bearings (PN 1384-0062-8) Figure 5-21. The parts of the drive shaft assembly laid out in order of reassembly STIH-270-2PT 0101-9004-0A 5-24...

  • Page 87: Sec Tion Overview

    SEC TION 6 TROUBLESHOOTING 6.1 SEC TION OVERVIEW This sec tion pro vides a trou ble shoot ing guide that cor re lates spe cific symp toms to prob a ble causes and sug - gested cor rec tive ac tions. To fa cil i tate your trou ble shoot ing ef forts, these symp toms are clas si fied ac cord ing to type of mal func tion and or ga nized in the fol low ing sub sec tions: 7.2 Dif fi culties in gen er at ing or main tain ing a beam 7.3 Un sat is fac tory per for mance dur ing de po si tion...

  • Page 88: Dif Fi Culties In Gen Er Ating Or Main Taining A Beam

    Troubleshooting 6.2 DIF FI CULTIES IN GEN ER ATING OR MAIN TAINING A BEAM SYMP TOM PROB A BLE CAUSE COR REC TION High volt age is nom i nal, but there is no (a) Fil a ment is bro ken or loose. (a) Using ohm me ter, check con ti nu ity be - emis sion cur rent and no fil a ment cur rent.

  • Page 89: Un Sat Is Fac Tory Per For Mance Dur Ing Deposition

    Troubleshooting 6.3 UN SAT IS FAC TORY PER FOR MANCE DUR ING DEPOSITION SYMP TOM PROB A BLE CAUSE COR REC TION High volt age and emis sion cur rent val ues (a) In su lating ca pa bil ity of one or both HV (a) Ex am ine the HV in su la tors.
  • Page 90 Troubleshooting SYMP TOM PROB A BLE CAUSE COR REC TION (d) Bad con nec tions to HV leads, which (d) Check for loose con nec tions or ox i - may in volve the con nec tions to the fil a - dized sur faces at all HV ter mi nals.

  • Page 91: Correct And Incorrect Beam-Spot Positions With 0 A Longitudinal Deflection Current Applied

    Troubleshooting Cor rect beam-spot po si tion; beam strikes edge of pocket that is far thest from emit ter. Beam strikes source too far away from emit ter. Per ma nent Beam strikes pocket or top mag net is too weak. Lower of source too near the ac cel er a tion volt age or have emit ter.

  • Page 92: Beam-Position Problems

    Troubleshooting 6.4 BEAM-POSITION PROBLEMS SYMP TOM PROB A BLE CAUSE COR REC TION High volt age, emis sion cur rent, and fil a - (a) Weak per ma nent mag net. (a) Check beam-spot po si tion with 0 A lon - ment cur rent are all nom i nal, but ex ces - gi tu di nal de flec tion cur rent ap plied.
  • Page 93 Troubleshooting SYMP TOM PROB A BLE CAUSE COR REC TION Com plete loss of lat eral and lon gi tu di nal (a) No volt age at coil ter mi nals, or in cor - (a) Check leads to coils. If the leads are beam con trol.

  • Page 94: Other Malfunctions

    Troubleshooting 6.5 OTHER MALFUNCTIONS SYMP TOM PROB A BLE CAUSE COR REC TION Cooling wa ter is boil ing, as in di cated by a (a) Al loying of melted ma te rial is caus ing a (a) Ap ply beam sweep, if pos si ble, or ad - me dium-frequency whine com ing from the ther mal short be cause sta tion ary beam is just de flec tion cur rent(s) so that the beam...
  • Page 95 Troubleshooting SYMP TOM PROB A BLE CAUSE COR REC TION (c) Mis aligned parts in bear ing hous ing as - (c) Re move the cru ci ble mount ing flange sem bly. and the bear ing hous ing as sem bly from the gun and dis as sem ble the bear ing hous ing as sem bly.

  • Page 96: Pop Top Fea Ture Not Func Tioning Cor Rectly

    Troubleshooting 6.6 POP TOP FEA TURE NOT FUNC TIONING COR RECTLY SYMP TOM PROB A BLE CAUSE COR REC TION Cru ci ble cover (Top) does not go up. (a)Air pres sure is too low. (a) Check and ad just air pres sure. (b) Elec tri cal sig nal not get ting to air so le - (b) Check and cor rect sig nal problem.
  • Page 97 SEC TION 7 ENGINEERING DRAWING AND PARTS LISTS In cluded in this sec tion pro vides are the fol low ing en gi neer ing draw ings and parts lists: • 626-4365 Drive base unit (i.e., source with out cover, emit ter, cru ci ble) •...
  • Page 98 REVISION HISTORY REVISION HISTORY BOC COATING TECHNOLOGY CONFIDENTIAL DESCRIPTION OF CHANGE DESCRIPTION OF CHANGE DATE DATE APPROVED APPROVED THIS DOCUMENT CONTAINS CONFIDENTIAL OR PROPRIETARY INFORMATION INITIAL RELEASE INITIAL RELEASE 10/31/2000 10/31/2000 OF BOC COATING TECHNOLOGY. NEITHER THE DOCUMENT NOR THE INFORMATION THEREIN IS TO BE REPRODUCED, DISTRIBUTED, USED OR DISCLOSED, EITHER IN WHOLE ADDED POP TOP CONTROL LINE LABEL TABLE PER ECN# 10916 ADDED POP TOP CONTROL LINE LABEL TABLE PER ECN# 10916...
  • Page 99 BOC COATING TECHNOLOGY CONFIDENTIAL THIS DOCUMENT CONTAINS CONFIDENTIAL OR PROPRIETARY INFORMATION OF BOC COATING TECHNOLOGY. NEITHER THE DOCUMENT NOR THE INFORMATION THEREIN IS TO BE REPRODUCED, DISTRIBUTED, USED OR DISCLOSED, EITHER IN WHOLE OR IN PART , EXEPT AS SPECIFICALLY AUTHORIZED BY BOCCAOTING TECHNOLOGY. 2X .50 2X 7.25 "PAINT"...
  • Page 100 Engineering Drawing and Parts Lists Parts List for Item Num ber 0626-4365-0 Sin gle Level Bill : By Ref#, [1 Line Desc, No Cost] Date & Time: 04/03/06 10:15AM Temescal, Mapics ck Par ent Item Num ber: 0626-4365-0 SRC ASY,STIH-270-2CKB E,PT Draw ing Num ber/Rev: 626-4365B EN HANCED, BOT DR (BASE UNIT)
  • Page 101 Engineering Drawing and Parts Lists REF# ITEM NUM BER DE SCRIP TION DRAW ING/REV 0715-8272-0 SLEEVE,SCRW HLDNG,7/64" HX WR 1.00 715-8272A 0626-4022-1 CRA DLE,IN SERT,MAG SHLD,-2/-3CK 1.00 626-4022A@ 0626-4022-2 COR NER,IN SERT,MAG SHLD,-2/-3CK 4.00 626-4022A@ 0626-4022-3 TP,IN SERT,MAG SHLD,-2/-3CK 1.00 626-4022A@ 0626-4022-4 SD CRNR,INSRT,MAG SHLD,-2/-3CK...
  • Page 102 Engineering Drawing and Parts Lists REF# ITEM NUM BER DE SCRIP TION DRAW ING/REV 0627-2702-0 BLOCK,GUIDE, VESPEL 1.00 627-2702B 0627-2742-0 BRACKET,LIMIT SW,RH,POPTOP 1.00 627-2742C 0627-2752-0 BRACKET,LIMIT SW,LH,POPTOP 1.00 627-2752B 0627-2722-0 BLOCK,CLAMP,VCR BASE,POPTOP 1.00 627-2722B 0627-2732-0 BLOCK,CLAMP,VCR CAP, POPTOP 1.00 627-2732B@ 0627-2782-0 PIS TON, PNEU MATIC 1.490 OD 1.00...

Table of Contents