Summary of Contents for Ideal Vacuum MKS Baratron 622B
- Page 1 1034356-001 Rev. A, 06/09 ® MKS Baratron Type 622B/623B/626B Absolute Pressure Transducers idealvac.com (505)872-0037 idealvac.com...
- Page 2 Copyright © 2009 by MKS Instruments, Inc. All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Page 3: Table Of Contents
Table of Contents Table of Contents Pressure Transducer Safety Information..................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ....................2 Safety Procedures and Precautions .................3 Sicherheitshinweise für den Druckmeßumformer ...............5 In dieser Betriebsanleitung vorkommende Symbole ............5 Erklärung der am Gerät angebrachten Symbole .............6 Sicherheitsvorschriften und Vorsichtsmaßnahmen............7 Informations relatives à... - Page 4 Table of Contents Coarse Zero Adjustment ..................26 Dimensions ......................28 Electrical Information .....................30 Connectors ......................31 Chapter Three: Overview......................35 General..........................35 Sensor..........................35 Signal Conditioner/Electronics ..................35 Chapter Four: Operation ......................36 General..........................36 Lowest Suggested Pressure Available for Reading ...........36 Lowest Suggested Pressure to Use for Control..........36 Type 623B End Cap......................37 Hysteresis of Type 623B Trip Relays................37 How To Set the Trip Points on Type 623B..............39...
- Page 5 List of Figures and Tables List of Figures and Tables Figures Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable ....22 Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable ....22 Figure 3: Metal Single and Double Ferrule Compression-type Vacuum Fittings.......24 Figure 4: Location of the Zero Pot on Transducer Endcaps ............26 Figure 5: Location of the COARSE ZERO Adjustment Control..........27 Figure 6: Dimensions of the Types 622B, 623B, and 626B Transducers........29...
- Page 6 List of Figures and Tables Table 14: Shorting Jumper Positions for Hysteresis ..............44 Table 15: Troubleshooting Chart ....................47...
- Page 7 List of Figures and Tables...
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Page 9: Pressure Transducer Safety Information
Pressure Transducer Safety Information USymbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Page 10: Symbols Found On The Unit
U Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017... -
Page 11: Safety Procedures And Precautions
Pressure Transducer Safety Information U Safety Procedures and Precautions Safety Procedures and Precautions Observe the following general safety precautions during all phases of operation of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. - Page 12 U Safety Procedures and Precautions Pressure Transducer Safety Information OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise.
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Page 13: Sicherheitshinweise Für Den Druckmeßumformer
Sicherheitshinweise für den Druckmeßumformer UIn dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. -
Page 14: Erklärung Der Am Gerät Angebrachten Symbole
U Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß... -
Page 15: Sicherheitsvorschriften Und Vorsichtsmaßnahmen
Sicherheitshinweise für den Druckmeßumformer U Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitsvorschriften und Vorsichtsmaßnahmen Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu befolgen. Eine Mißachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards, und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. - Page 16 U Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Druckmeßumformer Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
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Page 17: Informations Relatives À La Sécurité Pour Le Transducteur De Pression
Informations relatives à la sécurité pour le USymboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. -
Page 18: Symboles Apparaissant Sur L'unité
U Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.5007... -
Page 19: Mesures De Sécurité Et Précautions
Informations relatives à la sécurité pour le U Mesures de sécurité et précautions Mesures de sécurité et précautions Prendre les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation de cet appareil. Le non respect des ces précautions ou des avertissements contenus dans ce manuel constitue une violation des normes de sécurité... - Page 20 U Mesures de sécurité et précautions Informations relatives à la sécurité pour le VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...
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Page 21: Medidas De Seguridad Del Transductor De Presión
Medidas de seguridad del transductor de presión USímbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. -
Page 22: Símbolos Hallados En La Unidad
U Símbolos hallados en la unidad Medidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra... -
Page 23: Procedimientos Y Precauciones De Seguridad
Medidas de seguridad del transductor de presión U Procedimientos y precauciones de seguridad Procedimientos y precauciones de seguridad Las precauciones generales de seguridad descritas a continuación deben observarse durante todas las etapas de funcionamiento del instrumento. La falta de cumplimiento de dichas precauciones o de las advertencias específicas a las que se hace referencia en el manual, constituye una violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular la protección proporcionada por el equipo. - Page 24 U Procedimientos y precauciones de seguridad Medidas de seguridad del transductor de presión USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
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Page 25: Chapter One: General Information
Chapter One: General Information UIntroduction Chapter One: General Information Introduction ® The MKS Baratron Types 622B, 623B, and 626B Absolute Pressure Transducers are part of the MKS family of general purpose pressure transducers designed to provide accurate, reliable, and repeatable pressure measurements in the range from 1000 Torr to as low as 0.10 Torr F.S. (626B only). -
Page 26: How This Manual Is Organized
U How This Manual is Organized Chapter One: General Information How This Manual is Organized This manual is designed to provide information and instructions in the proper installation, operation, and maintenance of the MKS Types 622B, 623B, and 626B Absolute Pressure Transducers. -
Page 27: Chapter Two: Installation
Chapter Two: Installation UHow To Unpack Chapter Two: Installation How To Unpack MKS has carefully packed the Type 622B/623B/626B unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment. -
Page 28: Interface Cables
U Interface Cables Chapter Two: Installation Interface Cables As of July 20, 2009, most products shipped to the European Community must comply with the EMC Directive 2004/108/EEC, which covers radio frequency emissions and immunity tests. In addition, as of July 20, 2009, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. -
Page 29: Generic Shielded Cable Guidelines
Chapter Two: Installation U Interface Cables Generic Shielded Cable Guidelines Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2. -
Page 30: Figure 1: Preferred Method To Connect An Overall Metal Braided Shielded Cable
U Interface Cables Chapter Two: Installation Example 1: Preferred Method To Connect Cable (shown on a transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary) -
Page 31: Product Location And Requirements
Chapter Two: Installation UProduct Location and Requirements Product Location and Requirements Types 622B and 626B: • Ambient operating temperature should remain between 0° C and 50° C (32° F and 122° F). • For 626B with 0.25 or 0.10 Torr ranges, the ambient operating temperature should remain between 15°C and 40°C (59°F and 104°F). -
Page 32: Fittings
U Fittings Chapter Two: Installation Fittings The transducer port will easily carry the weight of the transducer. The following is a list of available fittings: • ½” diameter (12.7 mm) tubulation • NW16-KF • ® ® Swagelok 8-VCR (female) • ®... -
Page 33: Setup
Chapter Two: Installation U Setup Setup Mount the transducer with the inlet port pointing (vertically) downward. Although the unit can be mounted in any orientation, mounting it as suggested allows any foreign matter entering the pressure port to fall away from the diaphragm. Isolate the unit from vibration as much as possible. -
Page 34: Coarse Zero Adjustment
U Setup Chapter Two: Installation Figure 4: Location of the Zero Pot on Transducer Endcaps To properly zero a transducer, follow this procedure: 1. Install the transducer a system with a power supply/readout. 2. Power the transducer and allow it to warm up. Warm up time is 15 minutes. 3. -
Page 35: Figure 5: Location Of The Coarse Zero Adjustment Control
Chapter Two: Installation U Setup Note Use the coarse zero adjustment only if the zero potentiometer fails to provide sufficient adjustment. The COARSE ZERO control is accessible through the side of the instrument, as shown in Figure 5. ZERO COARSE ZERO Potentiometer Adjustment ZERO... -
Page 36: Dimensions
U Setup Chapter Two: Installation Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. -
Page 37: Figure 6: Dimensions Of The Types 622B, 623B, And 626B Transducers
Chapter Two: Installation U Setup Figure 6: Dimensions of the Types 622B, 623B, and 626B Transducers... -
Page 38: Electrical Information
UElectrical Information Chapter Two: Installation Electrical Information The Types 622B, 623B, and 626B transducers require an external power source capable of supplying the voltages stated in Table 7. Noise and ripple should be less than 20 mV p-p. You may use any readout device which has input capabilities of less than 0 to greater than 10 VDC, and impedance greater than 10K ohms. -
Page 39: Connectors
Chapter Two: Installation UElectrical Information Connectors The 622B unit has a 5-pin terminal block connector, whose post assignments are listed in Table 8. The 626B uses a 15-pin Type “D” connector; its pinouts are shown in Table 9. The 623B transducer uses two (2) terminal blocks: a 5-post block known as TB1, and an 8-post block designated as TB2. -
Page 40: Table 9: Pinout Of Type 626B Transducer
UElectrical Information Chapter Two: Installation Pinout of Type 626B Transducer Pin Number Assignment No connection Signal Output No connection No connection Power Common - 15 VDC + 15 VDC No connection No connection No connection No connection Signal Common No connection No connection Chassis Ground Table 9: Pinout of Type 626B Transducer... -
Page 41: Table 10: Post Assignments Of Type 623B Transducer, Tb1
Chapter Two: Installation UElectrical Information Terminal Block 1 (TB1) Pinout (Type 623B only) Pin Number Signal Power Common Signal Common Signal Output - 15 VDC + 15 VDC Chassis Ground is made by using the screw labeled CHASSIS Table 10: Post Assignments of Type 623B Transducer, TB1 Terminal Block 2 (TB2) Pinout (Type 623B only) Pin Number Signal... -
Page 43: Chapter Three: Overview
Chapter Three: Overview UGeneral Chapter Three: Overview General A complete pressure transducer system requires three components to convert pressure to a linear DC voltage output: a sensor, signal conditioner, and power supply. An analog or digital meter is required to display the DC output in pressure units. MKS Types 622B, 623B, and 626B transducers contain two of the above components: the sensor and signal conditioner. -
Page 44: Chapter Four: Operation
UGeneral Chapter Four: Operation Chapter Four: Operation General After installation and during periodic maintenance, check the transducer zero to verify proper output. If the output is incorrect, set the output by adjusting the zero potentiometer (refer to Checking the Transducer Zero, page 25, for zeroing instructions). The transducer should be powered and allowed to warm up before use. -
Page 45: Type 623B End Cap
Chapter Four: Operation U Type 623B End Cap Type 623B End Cap Figure 8 shows the endcap of a Type 623B instrument. Trip Point A Indicator LED Trip Point B Indicator LED Zero Potentiometer Zero G<<R G<<R Trip pt. A Trip pt. -
Page 46: Figure 9: How Hysteresis Affects Accuracy And Relay Chatter
U How To Set the Trip Points on Type 623B Chapter Four: Operation Relay State The noise in a system can cause the Noise pressure signal to vary back and forth Energized across an alarm trip point, causing the relay to repeatedly change state. This De-energized condition is known as relay chatter. -
Page 47: How To Set The Trip Points On Type 623B
Chapter Four: Operation U How To Set the Trip Points on Type 623B How To Set the Trip Points on Type 623B There are two trip points, labeled as Trip Point A and Trip Point B, on the 623B transducer, each with its own trip point adjustment. -
Page 48: How To Adjust The Trip Point Direction
U How To Adjust the Trip Point Direction Chapter Four: Operation How To Adjust the Trip Point Direction The trip point direction defines the direction of pressure change that will energize the trip point. The trip point direction for the Type 623B transducer is initially set “low”; the trip points are energized as the pressure falls below the specified trip point level. -
Page 49: Figure 11: The Relay Board
Chapter Four: Operation U How To Adjust the Trip Point Direction J12, J13, J14, and J16 have pins numbered as shown here. Trip Point A Trip Point B J10 Trip Point B hysteresis J11 Trip Point A hysteresis J10 and J11 have pins numbered as shown here. -
Page 50: Figure 12: The Alternate Relay Board
U How To Adjust the Trip Point Direction Chapter Four: Operation J12, J13, J14, and J16 have pins numbered as shown here. Trip Point A Trip Point B J10 and J11 have pins numbered as shown here. J10 Trip Point B hysteresis J11 Trip Point A hysteresis Figure 12: The Alternate Relay Board... -
Page 51: Table 13: Factory-Set Positions Of The Shorting Jumpers
Chapter Four: Operation U How To Adjust the Trip Point Hysteresis on Type 5. Move the shorting jumpers on jumpers J13 and J16 to change the configuration of Trip Point A, and move the shorting jumpers on jumpers J12 and J15 to change the configuration of Trip Point B. -
Page 52: How To Adjust The Trip Point Hysteresis On Type 623B
U How To Adjust the Trip Point Hysteresis on Type Chapter Four: Operation How To Adjust the Trip Point Hysteresis on Type 623B Hysteresis is built into the operation of the two alarm relays on the Type 623B to help compensate for the noise inherent in all systems. - Page 53 Chapter Four: Operation U How To Adjust the Trip Point Hysteresis on Type 6. Replace the graphics panel. 7. Replace the two screws on each side of TB1. 8. Replace the ring on the endcap and push down while turning it about ¼ turn clockwise. 9.
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Page 54: Chapter Five: Maintenance And Troubleshooting
UGeneral Chapter Five: Maintenance and Troubleshooting Chapter Five: Maintenance and Troubleshooting General In general, no maintenance is required other than proper installation and operation, and an occasional zero adjustment. If a transducer fails to operate properly upon receipt, check for shipping damage, and check the power/signal cable for correct continuity. -
Page 55: Troubleshooting Chart
Chapter Five: Maintenance and Troubleshooting U Troubleshooting Chart Troubleshooting Chart Symptom Possible Cause Solution Overrange positive or A shorted transducer or a Measure supply voltages at negative signal damaged interconnect cable the terminal block. (transducer to electronics Inspect cable and transducer. module). -
Page 57: Appendix A: Product Specifications
Appendix A: Product Specifications MKS Types 622B and 626B Units Appendix A: Product Specifications MKS Types 622B and 626B Units Accuracy (includes non-linearity, 0.25% of Reading standard for ranges of 1 to 1000 Torr, hysteresis and non-repeatability) with option for 0.15% of reading . -
Page 58: Type 623B Transducer
Type 623B Transducer Appendix A: Product Specifications Due to continuing research and development activities, these specifications are subject to change without notice. Type 623B Transducer Accuracy (including non-linearity, ± 0.25% of Reading hysteresis, and non-repeatability) Optional: 0.15% of Reading Ambient operating temperature range 0°... - Page 59 Appendix A: Product Specifications Type 623B Transducer Volume (Px side) 6.3 cc Due to continuing research and development activities, these specifications are subject to change without notice.
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Page 61: Appendix B: Model Code Explanation
Appendix B: Model Code Explanation UModel Code Appendix B: Model Code Explanation Model Code The options of your unit are identified in the model code. The model code is identified as follows: 62XBXXXYYZ where: Type 62XB Type Number Full Scale Range Fittings Accuracy Type Number (62XB) - Page 62 UModel Code Appendix B: Model Code Explanation Full Scale Range (XXX) The full scale range is indicated by a three character code. Full Scale Range Ordering Code 0.1* 0.25* 1000 *Available on 626B models only **Available on 622B and 626B models only Fittings (Y) The choice of fittings is designated by a single letter code.
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Page 63: Index
Index Accuracy, 17, 52 lowest for control, 34 Cabling, 20–22 lowest for reading, 34 CE compliance, 20, 47 Returning the product, 18, 19, 44 Coarse Zero adjustment, 26–27 RoHS (Restriction of Hazardous Substances), 17, 47, 48 Companion products, 19 Safety information, 1–16 Connectors, 30 Sensor, 33 Customer support, 18...
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