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Sierra 954 Instruction Manual

4-channel mfc power supply/controller
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Model 954 4-Channel MFC Power Supply/Controller
INSTRUCTION MANUAL
954
October
Sierra Instruments, Inc., Headquarters
Sierra Europe, European Headquarters
Sierra Asia, Asia-Pacific Headquarters

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Summary of Contents for Sierra 954

  • Page 1 Model 954 4-Channel MFC Power Supply/Controller INSTRUCTION MANUAL October Sierra Instruments, Inc., Headquarters Sierra Europe, European Headquarters Sierra Asia, Asia-Pacific Headquarters...

  • Page 2: Table Of Contents

    Transducer Connector (J1, J2, J3, J4) --------------------------------------------------- Analog Output (J5) ---------------------------------------------------------------------------- Alarms (J8) -------------------------------------------------------------------------------------- RS232 (J6) -------------------------------------------------------------------------------------- RS485 (J7, J9) --------------------------------------------------------------------------------- Model 954 Configuration ------------------------------------------------------------------ STARTUP ---------------------------------------------------------------------------------------------------- MANUAL SETUP Selecting Display (Flow or Total) ---------------------------------------------------------- Selecting Valve Override (Open, Close or Run) ---------------------------------------...

  • Page 3: Product Description

    All pertinent data, required by the microprocessor at power-up to re-initialize the system, is also stored in the same RAM. The Model 954 utilizes a 4-line by 20 character back lighted LCD display. A built in Totalizer, for each channel automatically recognizes the units of measure selected and adjusts the time base for the integrator accordingly.

  • Page 4: Specifications

    SPECIFICATIONS Signal Input Number of Channels ------------------------ 0-5Vdc, 0-10Vdc, 4-20mA , user selectable Signal Type ------------------------------------ Input Resistance >10 Megohm Voltage --------------------------------- 120 ohms Current --------------------------------- Setpoint Output (Control Signal) 0-5Vdc, 0-10Vdc, 4-20mA (user selectable) Signal Type ------------------------------------- +/-0.05% FS (Voltage), +/-0.1% FS (Current) Accuracy (typ) --------------------------------- Analog-to-Digital Converter Inputs --------------------------------------------...

  • Page 5: Front Panel

    FRONT PANEL MENU SELECT PURGE CLOSE ENTER ANNUNCIATORS: Displays OVERRIDE signal status of each channel. If annunciators are not illuminated, the Setpoint (Control) voltage is active. DISPLAY AREA Column 1: Reserved for displaying (*) Active Channel, (M) Master Channel, (S) Slave Channel or (T) totalizer. Column 2: Reserved for polarity indicator (minus sign for negative signal, none for positive).

  • Page 6: Rear Panel

    REAR PANEL ANALOG OUT RS485 ALARMS T250 1A CHANNEL 2 RS485 CHANNEL 1 CHANNEL 3 CHANNEL 4 RS232 POWER INLET WITH FUSE (1 amp TIME DELAY or SLO BLO) POWER SELECTOR SWITCH RS232 SERIAL PORT (J6) TRANSDUCER CONNECTORS (J1, J2, J3, J4) ANALOG OUTPUT (J5) ALARMS (J8) RS-485 SERIAL PORT (J7, J9)
  • Page 7 CONNECTOR PIN DESIGNATIONS TRANSDUCER CONNECTORS (J1, J2, J3, J4) SIGNAL COMMON SIGNAL INPUT GROUND VALVE OPEN GROUND -15Vdc SETPOINT SIGNAL GROUND Transducer Connector (Female) GROUND Rear Panel View VALVE OFF +15Vdc CHASSIS GROUND ANALOG OUTPUT (J5) SIGNAL CH 1 SIGNAL COMMON CH 1 SIGNAL CH2 SIGNAL COMMON CH2 Analog Output Connector (Female)

  • Page 8: Alarms (J8)

    CONNECTOR PIN DESIGNATIONS ALARMS (J8) CH1 HIGH ALARM CH 1 LOW ALARM CH1 ALARM COMMON CH2 HIGH ALARM CH2 LOW ALARM CH2 ALARM COMMON Alarm Connector (Female) Rear Panel View CH3 HIGH ALARM CH3 LOW ALARM CH3 ALARM COMMON CH4 HIGH ALARM CH4 LOW ALARM CH4 ALARM COMMON RS232 (J6)

  • Page 9: Model 954 Configuration

    (one per channel) on the Model 954 PCA (inside the housing). Please refer to the PCA schematic in Appendix A for the location of these jumpers. All Model 954 units come factory set for 15 Vdc valve circuit operation (unless ordered new with a 30 Vdc instrument).

  • Page 10: Startup

    START-UP The Model 954 has a 100 Vac, 115 Vac or 230 Vac, 50/60 Hz power selector switch located at the rear of the instrument. Please refer to page 4 to locate this switch. Verify the power selector switch is in the proper position prior to connecting the power cable to the unit.
  • Page 11 MANUAL SETUP, Selecting Valve Override (Open, Close or Run) on page 9. The default at power-up is Valve Close. 16. If the Units of Measure are in flow units, The Model 954 automatically calculates TOTAL flow using a Riemann Sum Integration method. To display TOTAL or to reset the TOTAL display, refer to MANUAL/SETUP, Selecting Display (Flow or Total) on page 9.

  • Page 12: Manual Setup

    MFC Setpoint control is activated. If the valve override does not appear to function correctly, you may need to re-configure The Model 954 using the 15/30 VDC jumpers on the PCA. Refer to page 6B to verify valve circuit configuration of The 954 is correct for your MFM or MFC.

  • Page 13: Selecting Setpoint (Control Voltage)

    MANUAL SETUP Selecting Setpoint (Control Voltage) * 575.0 SCCM Ar CH SEL CH SEL 500.0 SCCM Ar 500.0 SCCM Ar 1000 SCCM H2 *1250.0 SCCM H2 *1575.0 SCCM H2 50.00 SCCM CF4 50.00 SCCM CF4 50.00 SCCM CF4 950.0 SCCM CH4 950.0 SCCM CH4 950.0 SCCM CH4 The example above shows how the setpoint for Channel 2 is changed.

  • Page 14: Selecting Filter

    MANUAL SETUP Selecting Filter (-3db A/D Converter Filter Frequency) MENU -- MENU: 1=DISPLAY -- SETUP: -- FILTER: -- FILTER: 1=Chnl 1 1=4Hz 500.0 SCCM N2 1=BRIGHTNESS 2=SETUP 2=Chnl 2 2=15Hz 1000 SCCM H2 2=UNITS/GASID 3=Chnl 3 CHANNEL 1 3=30Hz 3=CAL/RANGE 50.00 SCCM CF4 3=FILTER 4=Chnl 4...

  • Page 15: Selecting Alarms (High And Low With Hysteresis)

    MANUAL SETUP Selecting Alarms (High and Low with Hysteresis) -- SETUP: -- ALARM: ------- MENU MENU: 1=DISPLAY 1=Chnl 1 2=SETUP 1=BRIGHTNESS 2=Chnl 2 2=UNITS/GASID 3=Chnl 3 3=CAL/RANGE 3=FILTER 4=Chnl 4 4=COMM 4=INPUT 5=ALARM 6=RATIO ---------------------------------------------------------------------------------------------------- -------------------- ----- ---- ALARMS: 1=HIGH LIMIT ALARM: ---- --------------...

  • Page 16: Selecting Ratio (Master/Slave Operation)

    MANUAL SETUP Selecting Ratio (Master/Slave Operation) -- SETUP: -- RATIO: ------ ------- MENU MENU: 1=DISPLAY 500.0 SCCM C3H60 2=SETUP 1=BRIGHTNESS 1=DISABLE MASTER 1000 SCCM H2 ----- 2=UNITS/GASID 2=ENABLE MASTER 50.00 SCCM CF4 3=CAL/RANGE 3=FILTER 3=EXIT 950.0 SCCM CH4 4=COMM 4=INPUT 5=ALARM 6=RATIO --------------------------------------------------------------------------------------------------------...

  • Page 17: Manual Cal/Range

    MANUAL CAL/RANGE Calibrate (Zero only) SCREEN 1 SCREEN 2 SCREEN 3 -- CAL/RANGE -- CALIBRATE: 1=Chnl1 MENU MENU: 1=DISPLAY 2=SETUP 1=CALIBRATE 2=Chnl2 2=RANGE 3=Chnl3 3=CAL/RANGE 4=Chnl4 4=COMM ------------------------------------------------------------------------------------------------------- SCREEN 5 SCREEN 6 SCREEN 4 ---- -- ZERO: SCCM C3H60 ---- CALIBRATE: 1000 SCCM H2 CHANNEL 1...

  • Page 18: Calibrate (Zero & Range)

    MANUAL CAL/RANGE Calibrate (Zero & Range) SCREEN 2 SCREEN 3 SCREEN 1 -- CAL/RANGE -- CALIBRATE: 1=Chnl1 MENU MENU: 1=DISPLAY 1=CALIBRATE 2=Chnl2 2=SETUP 2=RANGE 3=CAL/RANGE 3=Chnl3 4=COMM 4=Chnl4 ------------------------------------------------------------------------------------------------------- SCREEN 4 SCREEN 5 SCREEN 6 -- 2 -- ZERO: ---- CALIBRATE: RANGE VALUE: 1=ZERO ONLY...

  • Page 19: Calibrate (Multiplier)

    MANUAL CAL/RANGE Calibrate (Multiplier) SCREEN 2 SCREEN 3 SCREEN 1 -- CAL/RANGE -- CALIBRATE: 1=Chnl1 MENU MENU: 1=DISPLAY 1=CALIBRATE 2=Chnl2 2=SETUP 2=RANGE 3=CAL/RANGE 3=Chnl3 4=COMM 4=Chnl4 ------------------------------------------------------------------------------------------------------- SCREEN 4 SCREEN 5 SCREEN 6 -- MULTIPLIER ---- CALIBRATE: 105.00 SCCM C3H60 1=ZERO ONLY CHANNEL 1 1000...

  • Page 20: Rs232/485 Hookup

    RS232/485 HOOKUP BI-DIRECTIONAL RS-232 CONNECTION MULTIDROP/4-WIRE FULL DUPLEX RS-485 CONNECTION KDT-4000 #01 KDT-4000 COM1/COM2 COM1/COM2 J6-3 J7-7 RXD(+) TXD(+) ----------------------------- TXD ----------------------------- TXD(-) ----------------------------- RXD(-) RXD ---------------------------- TXD(+) RXD(+) ----------------------------- GND ----------------------------- DIGITAL GND RXD(-) ----------------------------- TXD(-) IC-485 IC-232 IC-232 J9-7 --------------------- RXD(+) ------------------ RXD(-)

  • Page 21: Rs232/485 Commands

    Response: "MULTIDROP ADDRESS: 01" *00x<aa> Set 954 Address to aa Note: All Model 954's will respond to * 0 0 X. To prevent bus Example: Send * 0 0 x 2 2 contention, connect only 1 Model 954 to the RS485 Model 954 will respond with a "spade"...
  • Page 22 *aaUM4<dd> Set CH2 Unit of Measure at Address 02 to selection dd Example: Send *03UM366 Model 954 with Address 02 will have CH3 Unit of Measure set to PSI Setting Gas Idenfifier Reading Gas Identifier RS232 Command: RS232 Query: GS1<ddd>...
  • Page 23 Set CH4 Signal Input at Address aa to selection d *aaIN4 Response: IN4<>d<>zzzzz Example: Send *01IN31 Example: Send *10IN2 Response: IN2 1 0-5V Model 954 with Address 01 will have CH3 Signal Input set for 0-5V. Setting Filter Reading Filter RS232 Command: RS232 Query: FL1<d>...

  • Page 24: Setting/Reading Multiplier

    Set CH3 Display at Address aa to selection d *aaD4d Set CH4 Display at Address aa to selection d *aaD2 Response: D2d Example: Send *03D12 *aaD3 Response: D3d Model 954 with Address 03 will display FLOW on *aaD4 Response: D4d PAGE 21...

  • Page 25: Resetting Total

    Reset CH3 Total at Address aa to zero *aaIT4R Reset CH4 Total at Address aa to zero Example: Send *01T1R Model 954 with Address 01 CH1 Total reset to zero Reading Range Value Setting Range Value RS232 Query: RS232 Command: Response: SN1d.dddd...

  • Page 26: Units Of Measure Table

    UNITS OF MEASURE TABLE Description Abbrev Total Standard Cubic Centimeters per Minute SCCM Standard Liters per Minute Percent Volts Millivolts Counts Normal Liters per Minute Standard Liters per Second Normal Liters per Second Standard Liters per Hour Normal Liters per Hour Standard Milliliters per Minute SMLM Normal Milliliters per Minute...

  • Page 27: Gas Identification Table

    GAS IDENTIFICATION TABLE GAS ID DISPLAY Acetic Acid C2H4F2 Acetic Acid, Anhydride C4H603 Acetone C3H60 C3H60 Acetonitryl C2H3N C2H3N Acetylene C2H2 C2H2 Allene C3H4 C3H4 Ammonia Argon Arsine AsH3 AsH3 Benzene C6H6 C6H6 Boron Trichloride BCl3 BCl3 Boron Triflouride Bromine Bromochlorodifluoromethane CBrClF2 Bromodifluoromethane...
  • Page 28 GAS IDENTIFICATION TABLE GAS ID DISPLAY Ethyleneimine C2H4N C2H4N Ethylidene Dichloride C2H4Cl2 Ethyl Mercaptan C2H6S C2H6S Fluorine Formaldehyde CH2O CH2O Freon 11 CCl3F CCl3F Freon 12 CCl2F2 Freon 13 CClF3 CClF3 Freon 14 Freon 22 CHClF2 Freon 23 CHF3 CHF3 Freon 114 C2Cl2F4 Furan...
  • Page 29 GAS IDENTIFICATION TABLE GAS ID DISPLAY Octane C8H18 C8H18 Oxygen Oxygen Difluoride Ozone Pentaborane B5H9 B5H9 Pentane C5H12 C5H12 Perchloryl Fluoride ClFO3 CLFO3 Perfluorocyclobutane C4F8 C4F8 R116 C2F6 C2F6 Perfluoropropane C3F8 C3F8 Phenol C6H6O C6H6O Phosgene COCl2 COCl2 Phosphine Phosphorus Trifluoride Propane C3H8 C3H8...
  • Page 30 Appendix A Model 954 Internal Circuit Assembly Board per channel...
  • Page 31 Appendix A Model 954 Display Assembly FRONT Zero Adj Zero Adj Zero Adj Zero Adj 10V Range 10V Range 10V Range 10V Range (CH4) (CH3) (CH1) (CH2) FS Adj FS Adj FS Adj FS Adj 10V Range 10V Range 10V Range...

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