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PI Q-Motion Q-632 User Manual

Miniature rotation stage
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MP129E
Q-632 Miniature Rotation Stage
User Manual
Version: 1.1.2
PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email info@pimicos.com, www.pi.ws
Date: 16.05.2019
This document describes the following product:
Q-632.930
Q-Motion® rotation stage, piezoelectric inertia
drive, >360° rotation range, incremental
encoder, 0.75 µrad resolution, 6 mNm drive
torque, 30 mm diameter, vacuum compatible
-6
to 10
hPa

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Summary of Contents for PI Q-Motion Q-632

  • Page 1 >360° rotation range, incremental encoder, 0.75 µrad resolution, 6 mNm drive torque, 30 mm diameter, vacuum compatible to 10 PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email info@pimicos.com, www.pi.ws...
  • Page 2 The patents held by PI are found in our patent list: http://www.physikinstrumente.com/en/about-pi/patents © 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.

  • Page 3: Table Of Contents

    Contents About this Document Objective and Target Audience of this User Manual..........1 Symbols and Typographic Conventions..............1 Definition of Terms ..................... 2 Figures ........................2 Other Applicable Documents ..................3 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions ..................
  • Page 4 Startup and Operation General Notes on Startup and Operation ..............25 Starting and Operating the Q-632 ................28 Maintenance General Notes on Maintenance ................31 Performing a Maintenance Run ................31 Cleaning the Q-632 ....................31 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................

  • Page 5: About This Document

    1 About this Document About this Document In this Chapter Objective and Target Audience of this User Manual ..............1 Symbols and Typographic Conventions ..................1 Definition of Terms ........................2 Figures ............................2 Other Applicable Documents ......................3 Downloading Manuals ........................3 Objective and Target Audience of this User Manual This manual contains information necessary for the intended use of the Q-632.

  • Page 6: Definition Of Terms

    1 About this Document Symbol/ Meaning Label Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose  sequential order is irrelevant  List item p. 5 Cross-reference to page 5 RS-232 Labeling of an operating element on the product (example: socket of the RS-232 interface)

  • Page 7: Other Applicable Documents

    1 About this Document Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in their own manuals. Description Document E-873.1AT Q-Motion® controller, 1 channel, PZ274E User Manual USB interface E-873.3QTU Q-Motion® controller for...
  • Page 8  Click the links in the browser window to change to the content for your product and log in using the access data that you received. General procedure: 1. Open the website www.pi.ws. 2. If access to the manuals is protected by a password: a) Click Login.

  • Page 9: Safety

    2 Safety Safety In this Chapter Intended Use ..........................5 General Safety Instructions......................5 Organizational Measures ....................... 6 Measures for Handling Vacuum-Compatible Products ..............6 Intended Use The Q-632 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and use in an environment that is free of dirt, oil, and lubricants.

  • Page 10: Organizational Measures

    Measures for Handling Vacuum-Compatible Products Attention must be paid to appropriate cleanliness when the rotation stage is to be used in a vacuum. All parts are cleaned at PI before assembly. Powder-free gloves are worn during assembly and measuring.  Touch the rotation stage only with powder-free gloves.

  • Page 11: Product Description

    3 Product Description Product Description In this Chapter Product View ..........................7 Product Labeling ..........................8 Scope of Delivery ........................... 9 Accessories ........................... 10 Suitable Electronics ........................10 Technical Features ........................11 Product View Figure 1: Q-632.930 rotation stage ESD protection cap Type plate p.

  • Page 12: Product Labeling

    3 Product Description Figure 2: Direction of motion of the Q-632's platform The arrow in the figure above shows the direction of motion on positive commanding. Product Labeling Figure 3: Product labeling and type plate of the rotation stage Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage...

  • Page 13: Scope Of Delivery

    3 Product Description Position Labeling Description 113064246 Serial number (example), individual for each Q-632 Meaning of each position (from the left): 1 = internal information, 2 and 3 = year of manufacture, 4 to 9 = consecutive number Q-632.930 Product name A, C Warning sign "Pay attention to the manual!"...

  • Page 14: Accessories

    3 Product Description Accessories Order Description number Air-side extension cable from the vacuum feedthrough or Q-632 to the E-873.UHV1 electronics, D-sub 15 (f) to D-sub 15 (m), 1 m Air-side extension cable from the vacuum feedthrough or Q-632 to the E-873.UHV2 electronics, D-sub 15 (f) to D-sub 15 (m), 2 m Air-side extension cable from the vacuum feedthrough or Q-632 to the...

  • Page 15: Technical Features

    Settings for the sensor: Interpolation rate, corrections to hysteresis, phase and offset,  gain values When switched on or rebooted, controllers from PI read the data from the ID chip. For more information on ID chip detection, see the manual for the controller. Q-632 Miniature Rotation Stage MP129E Version: 1.1.2...

  • Page 17: Unpacking

    INFORMATION Attention must be paid to appropriate cleanliness when the rotation stage is to be used in a vacuum. All parts are cleaned at PI before assembly. Powder-free gloves are worn during assembly and measuring.  Touch the rotation stage only with powder-free gloves.

  • Page 19: Installation

    5 Installation Installation In this Chapter General Notes on Installation ...................... 15 Mounting the Q-632 onto an Underlying Surface and Connecting it to a Protective Earth Conductor ............................ 16 Fixing the Load to the Q-632 ....................... 19 Connecting the Q-632 to the Electronics ..................20 General Notes on Installation NOTICE Heating up of the Q-632 during operation!

  • Page 20: Mounting The Q-632 Onto An Underlying Surface And Connecting It To A Protective Earth Conductor

    5 Installation NOTICE Damage from unsuitable cables! Unsuitable cables can damage the electronics.  Use cables provided by PI only for connecting the Q-632 to the electronics. INFORMATION The positive direction of motion is a counterclockwise rotation. INFORMATION The Q-632 can be mounted on an optical stage with the Q-101.AP1 adapter plate. The adapter plate is available (p.
  • Page 21 5 Installation INFORMATION The contact of the Q-632 with the protective earth conductor is made as follows:  Holes that are used for attaching the Q-632: − Four countersunk holes with ∅ 2.2 mm / ∅ 4.2 mm in the base body of the Q-632 ...
  • Page 22 5 Installation − For applications with large temperature changes: The surface should have the same thermal expansion properties as the Q-632 (e.g., underlying surface made of aluminum). − The surface flatness is ≤2 µm.  You have accounted for the space required to route cables according to regulations and without bending them.

  • Page 23: Fixing The Load To The Q-632

    5 Installation Fixing the Load to the Q-632 NOTICE Impermissibly high forces and torques! Impermissibly high forces and torques that are applied to the motion platform can damage the Q-632.  For fixing type and mass of the load, pay attention to the maximum permissible forces according to the specifications (p.

  • Page 24: Connecting The Q-632 To The Electronics

    5 Installation − If you use locating pins for aligning the load: You made two to four locating holes of Ø 1.5 mm H7 in the load for accommodating locating pins. Tools and accessories 4 M2 screws of suitable length (p. 40) ...

  • Page 25: Overview: Connecting For Atmospheric Operation

    5 Installation 5.4.1 Overview: Connecting for Atmospheric Operation Figure 7: Options for connecting the Q-632 to suitable electronics for atmospheric operation Controller Extension cable Mechanics 5.4.2 Overview: Connecting for Operating in a Vacuum Figure 8: Connecting the Q-632 to suitable electronics for operating in a vacuum Controller Extension cable Vacuum feedthrough for pressure to 10...

  • Page 26: Connecting The Q-632 To The Electronics

    5 Installation Figure 9: Example for installing the C-815.VF vacuum feedthrough. Left: Vacuum side, right: Air side Q-632's connector on the vacuum side Example of a vacuum feedthrough, part of a vacuum chamber Sealing ring C-815.VF vacuum feedthrough Connector on the air side of the extension cable for connecting to the electronics. Tools and accessories Four M3 stainless steel countersunk screws of suitable length (ISO 7046) ...
  • Page 27 5 Installation Tools and accessories If the Q-632 is to be operated in a vacuum:  − E-873.UHVx extension cable, available as optional accessory (p. 10) − Suitable vacuum feedthrough, available as an optional accessory (p. 10): C-815.VF (suitable for use in a vacuum to 10 hPa) −...

  • Page 29: Startup And Operation

    6 Startup and Operation Startup and Operation In this Chapter General Notes on Startup and Operation ..................25 Starting and Operating the Q-632 ....................28 General Notes on Startup and Operation CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the Q-632 in the case of malfunction or failure of the system.
  • Page 30 Operating voltages that are too high or incorrectly connected can cause damage to the Q-632.  Operate the Q-632 only with controllers/drivers and original accessories from PI.  Do not exceed the operating voltage range (p. 38) for which the Q-632 is specified.
  • Page 31 6 Startup and Operation NOTICE Damage due to collisions! Collisions can damage the rotation stage, the load to be moved, and the surroundings.  Make sure that no collisions are possible between the rotation stage, the load to be moved, and the surroundings in the motion range of the rotation stage. ...

  • Page 32: Starting And Operating The Q-632

    PIMicosStages3.dat. The records in the positioner database are updated regularly.  Install the PI Update Finder from the product CD for the electronics onto your PC and update PIMicosStages3.dat on your PC. Further information can be found in the user manual for the electronics.
  • Page 33 6 Startup and Operation 2. If necessary: Adapt the parameters for the operating frequency in step mode or the velocity (see the user manual for the electronics) to your application (see also "General Notes on Startup and Operation" (p. 25) and "Operating Time" (p. 39)). PIMikroMove is used in the user manual for the electronics to describe startup and operation.

  • Page 35: Maintenance

    7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................31 Performing a Maintenance Run ....................31 Cleaning the Q-632 ........................31 General Notes on Maintenance NOTICE Damage due to improper maintenance! Improper maintenance can lead to misalignment and failure of the Q-632. ...

  • Page 37: Troubleshooting

    8 Troubleshooting Troubleshooting Problem Possible causes Solution Function impairment  The electronics  Load the Q-632's parameter set from the after system positioner database. were replaced modification  If necessary: Set the parameters for the  The rotation electronics in PIMikroMove so that they stage has been correspond to the application (load, replaced...
  • Page 38 8 Troubleshooting Problem Possible causes Solution Unsuitable ambient  Operate the Q-632 in a clean environment conditions only and under permissible ambient conditions (p. 39). Drive wear  Replace the Q-632 and make sure that the operating parameters of the electronics are adapted to the rotation stage.

  • Page 39: Customer Service

    9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de).  If you have any questions concerning your system, provide the following information: − Product and serial numbers of all products in the system −...

  • Page 41: Technical Data

    10 Technical Data Technical Data In this Chapter Specifications ..........................37 Operating Time ..........................39 Dimensions ..........................40 Pin Assignment ..........................44 10.1 Specifications 10.1.1 Data Table Motion and positioning Q-632.930 Unit Tolerance Rotation stage with position sensor for closed-loop operation Active axis θ...

  • Page 42: Maximum Ratings

    10 Technical Data Drive properties Q-632.930 Unit Tolerance Motor type Piezoelectric inertia drive Miscellaneous Q-632.930 Unit Tolerance Operating temperature range 0 to 40 °C Material Aluminum, steel Mass without cable ±10 % Cable length Connector D-sub 15 Recommended electronics E-873.1AT, E-873.3QTU, E-873.10C885 For operation in a vacuum, we recommend a reduced duty cycle of 20% and a reduced rotation...

  • Page 43: Ambient Conditions And Classifications

    10 Technical Data 10.1.3 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classifications for the Q-632: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 10 Relative humidity Highest relative humidity 80 % for temperatures up to 31 °C Decreasing linearly to 50 % relative humidity at 40 °C Operating temperature...

  • Page 44: Dimensions

    10 Technical Data 10.3 Dimensions Dimensions in mm. Note that a comma is used instead of a decimal point in the drawings. Figure 10: Q-632.930 Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage...

  • Page 45: Q-101.Ap1 Adapter Plate

    10 Technical Data 10.3.1 Q-101.AP1 Adapter Plate Dimensions in mm. Figure 11: Q-101.AP1 adapter plate Q-632 Miniature Rotation Stage MP129E Version: 1.1.2...

  • Page 46: C-815.Vf Vacuum Feedthrough For 10 Hpa

    10 Technical Data 10.3.2 C-815.VF Vacuum Feedthrough for 10 Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Figure 12: C-815.VF vacuum feedthrough D-sub 15 (m/f) Version: 1.1.2 MP129E Q-632 Miniature Rotation Stage...
  • Page 47 10 Technical Data Recommended vacuum chamber opening for the C-815.VF vacuum feedthrough for Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Figure 13: Top: View of the opening on the air side; middle: Section of the vacuum chamber as specified by the customer;...

  • Page 48: Pin Assignment

    10 Technical Data 10.4 Pin Assignment 10.4.1 Q-632.930 (Vacuum Compatible to 10 hPa) Connector: D-sub 15 (m) The D-sub 15 connector (m) transmits the signals from the drive, the sensor, and the ID chip. Figure 14: D-sub 15 (m) connector Signal* Function Direction...

  • Page 49: C-815.Vf Vacuum Feedthrough

    10 Technical Data 10.4.2 C-815.VF Vacuum Feedthrough D-sub 15 (m/f) Figure 15: Vacuum side: D-sub 15 (f) Figure 16: Air side: D-sub 15 (m) panel plug Vacuum side (f) Air side (m) Signal Function REF - Reference signal differential (-) Motor (-) Motor signal differential (-) Motor (+)

  • Page 51: Old Equipment Disposal

    PI miCos equipment made available on the market after 13 August 2005 without charge. Any old PI miCos equipment can be sent free of charge to the following address: PI miCos GmbH Freiburger Strasse 30...

  • Page 53: Eu Declaration Of Conformity

    12 EU Declaration of Conformity EU Declaration of Conformity For the Q-632, an EU Declaration of Conformity has been issued in accordance with the following European directives: Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN 50581...

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